CN201966189U - Conveying device in wet processing equipment - Google Patents
Conveying device in wet processing equipment Download PDFInfo
- Publication number
- CN201966189U CN201966189U CN2010202003069U CN201020200306U CN201966189U CN 201966189 U CN201966189 U CN 201966189U CN 2010202003069 U CN2010202003069 U CN 2010202003069U CN 201020200306 U CN201020200306 U CN 201020200306U CN 201966189 U CN201966189 U CN 201966189U
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- Prior art keywords
- conveying device
- roller
- positioner
- roller bearing
- upper rolling
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model relates to a conveying device in wet processing equipment. The conveying device comprises an upper conveying device and a lower conveying device, wherein the upper conveying device comprises an upper rolling shaft, a plurality of upper rolling wheels and a plurality of locating devices, wherein the upper rolling wheels are sleeved on the upper rolling shaft and can freely move along a direction vertical to the core wire of the upper rolling shaft; the locating devices are fixed on the upper rolling shaft and are used for locating the upper rolling wheels; the locating devices are arranged at two end parts of each upper rolling wheel in pairs; and the upper rolling wheels are fixed on the locating devices in a clearance fit way. In the process of horizontally or approximately horizontally driving a workpiece, a conveyed workpiece can bear a certain pressure generated by the gravity of the upper rolling wheels, thereby clinging to the lower conveying device to realize stable conveyance. Thus, the problem that the workpiece stops forwarding or skews cannot happen under the condition of being driven at single side by lower rolling wheels or being driven at double sides by the upper rolling wheels and the lower rolling wheels.
Description
Technical field
Put it briefly, the utility model relates to a kind of conveying device that is used for wet process equipment in the solar cell manufacturing field; Specifically, the utility model relates to a kind of action roller formula conveying device that is used for wet process equipment.
Background technology
As everyone knows, wet process (Wet Process) is the important procedure in the substrate manufacture.In this operation, treatment fluid (for example various chemical liquids or water) is applied on the substrate surface, thereby realizes technological processes such as plated-through-hole, plating, development, etching, protective film coating, surface modification or cleaning.Present usually usage level or near the wet process equipment and the technology of level, its wet process equipment applies treatment fluid to level or near substrate, silicon chip or other sheet shaped piece, the plate-like piece surface of level process, thereby the wet process of finishing these workpiece (for example plate) is handled.
As shown in fig. 1, the horizontal wet process equipment 1 that is used to make solar cell in the prior art comprises liquid-jet device 2, treatment trough 3 and treatment fluid input unit 4.When the roller of solar cell piece 5 on roller shaft was sent to wet process equipment 1, treatment fluid input unit 4 was imported treatment fluids to treatment trough 3, and is discharged treatment fluid and sprayed to surface of the work by liquid-jet device 2 from treatment trough 3 by pumping equipment (not shown).In addition, have some horizontal wet process equipments to have a plurality of treatment troughs, and these treatment troughs are connected with each other logical.
Conveying device in the conventional solar cell wet process equipment has horizontal many last roller bearings and following roller bearing, roller is housed on the roller bearing, and the relatively rotating of upper and lower roller bearing roller drives the solar cell piece be clipped between the upper and lower roller and carries between upper and lower roller.Driving mechanism then can be monolateral driving or bilateral driving.Monolateral transmission is meant that main roller bearing drives driven roller bearing by gears engaged, thereby realizes relatively rotating of two roller bearings with a motor-driven master roller bearing.Bilateral transmission then is to use two roller bearings of two motor-driven to realize relatively rotating of two roller bearings respectively.
On horizontal solar cell wet process equipment, solar cell piece need pass in and out liquid tank along level or level of approximation direction, and moves forward in liquid.Because solar cell piece is more frivolous, when only having the lower floor roller to drive, when running into destabilizing factor such as liquid or air-flow, stop easily moving or departing from original direction of advance, cause clamp or fragment.
The utility model content
The purpose of this utility model provides and a kind ofly can steadily transmit the conveying device that is used for wet process equipment for the treatment of conveying member reliably, guarantees to treat that conveying member floating, skew do not occur and damages phenomenon in course of conveying.
An aspect of the present utility model provides a kind of conveying device that is used for wet process equipment, described conveying device comprises upper conveyor and following conveying device, described upper conveyor comprises roller bearing, be set in described go up on the roller bearing and can be along a plurality of upper rollers that move freely perpendicular to last roller bearing shaft core line direction, be fixed on the described a plurality of positioners that are used to locate a plurality of upper rollers on the roller bearing of going up, thereby also running together of described positioner when roller bearing turns round on described, and drive described upper roller running.In this conveying device, described positioner is arranged in pairs in the both ends of each upper roller, and described upper roller matched in clearance is fixed on the described positioner.By the conveying device of such setting, the position of action roller is positioned by positioner, makes it possible to realize bilateral driving; And wherein, under nature the roller of single-unit activity within the specific limits freedom shake up and down, when equipment operation, action roller rolls under positioner and following conveying device or the workpiece effect of being carried.
Because positioner is arranged on the upper roller both ends, described upper roller has been realized loose fit with the described roller bearing of going up, and makes workpiece such as solar cell piece reduce shake in course of conveying and moves more steady.And in the process of workpiece level (or near level) transmission, workpiece can be subjected to the pressure that certain gravity by upper roller produces, thereby is close to down on the conveying device.Like this, the monolateral driving of bottom roller or under the situation of the bilateral driving of bottom roller, all can guarantee the problem that workpiece halts or is offset can not occur.
Alternatively, the both ends of described upper roller have breach, and described positioner end has the projection with described breach matched in clearance, and the width of described breach is greater than the width of projection.Cooperate by this interference clearance, make that upper roller can be within the specific limits along the shaft core line direction easy on and off shake perpendicular to last roller bearing.
Alternatively, in aforesaid conveying device, described positioner passes described axle center of going up roller bearing and is fixed on the roller bearing.By the conveying device of such setting, the location of described positioner is highly stable, and carry-over moment drives upper roller and rolls effectively.
Alternatively, in aforesaid conveying device, described positioner is an alignment pin.By the conveying device of such setting, the design of alignment pin and manufacturing are easier, have reduced design and manufacturing cost effectively.Simple in structure, reliability is high and it is more convenient to install.
Alternatively, in aforesaid conveying device, described positioner fixed cover is located on the outer wall of described upward roller bearing.By the conveying device of such setting, can in carry-over moment effectively, make things convenient for the installation of upper roller and positioner, need not to pass roller bearing axle core and destroy an axle cored structure.
Alternatively, in aforesaid conveying device, described upper roller is cylindrical.Perhaps alternatively, in aforesaid conveying device, described upper roller is the taper shape that cuts two ends.By the conveying device of such setting, can simplify the design and the manufacturing of described upper roller, reduced design and manufacturing cost effectively.
Description of drawings
With reference to accompanying drawing, disclosure of the present utility model will be more obvious.Should understand, these accompanying drawings only are used for illustrative purposes, and are not intended to limit the utility model.Among the figure:
Fig. 1 schematically shows level of the prior art (or near level) wet process equipment;
Fig. 2 schematically shows the upper conveyor according to the conveying device of the utility model first execution mode;
Fig. 3 schematically shows according to the upper roller in the upper conveyor of the conveying device of the utility model first execution mode;
Fig. 4 schematically shows according to the positioner in the upper conveyor of the conveying device of the utility model first execution mode;
Fig. 5 schematically shows the upper conveyor according to the conveying device of the utility model second execution mode;
Fig. 6 schematically shows according to the positioner in the upper conveyor of the conveying device of the utility model second execution mode.
Embodiment
Explain embodiment of the present utility model with reference to the accompanying drawings.Identical Reference numeral is used for mark function similar techniques feature in the accompanying drawing.Should understand, following explanation only is an illustrative, exemplary.Only be illustrated according to plurality of embodiments of the present utility model below, should understand, some other equivalent of these execution modes also will fall within the protection range of the present utility model.
Fig. 1 schematically shows level of the prior art (or near level) wet process equipment 1.As can be seen from Figure 1, the conveying device in the prior art wet process equipment comprises upper conveyor 6 and following conveying device 7, and upper conveyor 6 comprises roller bearing, and upper roller is housed on the last roller bearing further.Through driving mechanism (not shown) conveying device 6,7 is up and down carried out monolateral or bilateral driving, can realize the conveying action of workpiece 5.
The utility model improves the conveying device of the wet process equipment of above-mentioned prior art.The person of ordinary skill in the field can understand, and some parts in the utility model can have 26S Proteasome Structure and Function same as the prior art, thereby it are not given unnecessary details in this context again.Fig. 2 schematically shows the upper conveyor 6 according to the conveying device of the utility model first execution mode.As can be seen from Figure 2, the upper conveyor 6 in this execution mode is made up of last roller bearing 8, upper roller 9 (see figure 3)s and positioner 10 (see figure 4)s.
Fig. 3 schematically shows according to the upper roller in the upper conveyor of the conveying device of the utility model first execution mode.Wherein, Fig. 3 a is the front view of upper roller 9, and Fig. 3 b is the forward sight partial sectional view of upper roller 9, and Fig. 3 c is the end view of upper roller 9.As can be seen, upper roller 9 is cylindrical rollers of hollow, and has on the upper roller 9 and positioner 10 feature of matched in clearance mutually.Specifically, the both ends of upper roller 9 have breach 11, positioner 10 ends have the projection 12 with described breach matched in clearance, and the width of breach to realize loose fit, makes that upper roller can be within the specific limits along the shaft core line direction easy on and off shake perpendicular to last roller bearing greater than the width of projection.
Fig. 4 schematically shows according to the positioner 10 in the upper conveyor of the conveying device of the utility model first execution mode.Wherein, Fig. 4 a is the front view of positioner, and Fig. 4 b is the end view of positioner.As can be seen, positioner 10 passes described axle center of going up roller bearing 8 and is fixed on the roller bearing 8.In this simple configuration, positioner 10 can be an alignment pin, and is simple in structure, easy for installation and reliability is high.Positioner 10 must not be this shape in fact, for example, its can also be prism-shaped, tubular, clip the cone shape etc. of two ends.
As can be seen, upper roller 9 is enclosed within on the roller bearing 8 from these figure, and the interior diameter of upper roller 9 can be greater than the described overall diameter of going up roller bearing 8.Like this be arranged so that the installation on the upper roller 9 supreme roller bearings 8 is very convenient, and upper roller 9 under nature can with respect on roller bearing 8 easy on and off rock.Positioner 10 can pass roller bearing 8 and be provided with, and like this, when last roller bearing 8 rotated, positioner 10 drove upper rollers 9 rotations, thereby drives workpiece 5 with following conveying device 7.Positioner 10 can be an alignment pin, and its structure is simpler like this, has reduced design and manufacturing cost.
Be provided with the upper roller 9 and the alignment pin 10 of a plurality of couplings on the last roller bearing 8 shown in Fig. 2, thereby formed a plurality of delivery tracks, can drive a plurality of pending workpiece 5 simultaneously.The those skilled in the art should understand, and this diagram only is schematically, has only the scheme of one group of upper roller 9 and positioner 10 on this does not get rid of on the roller bearing 8.Also can be arranged to have only one group of upper roller 9 and positioner 10 on the roller bearing 8 in other embodiments, thereby form single workpiece delivery track.
In order to realize the steady conveying of workpiece, described positioner is arranged in pairs in the both ends of each upper roller, and described upper roller matched in clearance is fixed on the described positioner.By such setting, in the process of workpiece 5 levels (or near level) transmission, can be subjected to the pressure that certain gravity by upper roller produces, thereby be close to down on the conveying device 7.Like this, the monolateral driving of bottom roller or under the situation of the bilateral driving of bottom roller, all can guarantee the problem that workpiece halts or is offset can not occur.With respect to the positioner that is positioned in the middle of the upper roller, positioner is arranged on the upper roller both ends, makes solar cell piece etc. reduce shake and friction in course of conveying, moves more steady.The those skilled in the art can understand, and the weight of upper roller can not overweightly reach the degree of the workpiece to be carried of can crushing.
The upper roller 9 among Fig. 2 and Fig. 3 and the structure of positioner 10 only are schematic.In the execution mode of remodeling, the structure of upper roller 9 and positioner 10 can be simplified to simple cylindrical shape, oblique cylindrical shape etc. further, as long as it can realize being installed on the roller bearing versatilely, and dependence gravity is attached to down on the conveying device 7 workpiece of being carried to get final product.
Fig. 5 schematically shows the upper conveyor 6 according to the conveying device of the utility model second execution mode.As can be seen from Figure 5, the upper conveyor 6 in this execution mode also is made up of last roller bearing 8, upper roller 9 and positioner 10.Upper roller wherein for example can be identical with the upper roller in first execution mode, no longer carries out the detailed description of repetition at this.Different with first execution mode is, positioner 10 fixed covers are located on the described outer wall of going up roller bearing 8, need not to pass roller bearing axle core and destroys a cored structure, can make things convenient for the installation of upper roller 9 and positioner 10 in carry-over moment effectively.
Fig. 6 schematically shows according to the positioner in the upper conveyor of the conveying device of the utility model second execution mode.Fig. 6 a is the front view of positioner, and Fig. 6 b is the side view cutaway drawing of positioner, and Fig. 6 c is the vertical view cutaway drawing of positioner.As can be seen, positioner 10 in the present embodiment also is a hollow, and can be along the circumferential direction to be sleeved on regularly on the roller bearing 8 with respect to last roller bearing 8.Have respectively on upper roller 9 and the positioner 10 and the feature that mates with each other.Like this, when upper roller 8 rotations, positioner 10 drives upper roller 9 rotations, thereby drives workpiece 5 with conveying device 7 down.Should understand, in other execution mode, the structure of the structure of upper roller and positioner, shape or its mating feature, shape can be other form, as long as it can realize above-mentioned functions.
Be provided with the upper roller 9 and the positioner 10 of a plurality of mutual couplings on the upper roller 8 shown in Fig. 5, thereby formed a plurality of delivery tracks, can drive a plurality of pending workpiece 5 simultaneously.The those skilled in the art should understand, and this diagram only is schematically, has only the scheme of one group of upper roller 9 and positioner 10 on this does not get rid of on the roller bearing 8.Also can be arranged to have only one group of upper roller 9 and positioner 10 on the roller bearing 8 in other embodiments, thereby form single workpiece delivery track.
In order to realize the steady conveying of workpiece, same positioner 10 is arranged in pairs in the both ends of each upper roller 9, and upper roller 9 matched in clearance are fixed on the described positioner 10.By such setting, in the process of workpiece 5 levels (or near level) transmission, can be subjected to the pressure that certain gravity by upper roller produces, thereby be close to down on the conveying device 7.Like this, the monolateral driving of bottom roller or under the situation of the bilateral driving of bottom roller, all can guarantee the problem that workpiece halts or is offset can not occur.With respect to the positioner that is positioned in the middle of the upper roller, positioner is arranged on the upper roller both ends, makes solar cell piece etc. reduce shake and friction in course of conveying, moves more steady.The those skilled in the art can understand, and the weight of upper roller can not overweightly reach the degree of the workpiece to be carried of can crushing.
The upper roller 9 among Fig. 5 and Fig. 6 and the structure of positioner 10 only are schematic.In the execution mode of remodeling, the structure of upper roller 9 and positioner 10 can be simplified to simple cylindrical shape, oblique cylindrical shape etc. further, as long as it can realize being installed on the roller bearing versatilely, and dependence gravity is attached to down on the conveying device 7 workpiece of being carried to get final product.
As mentioned above, embodiment of the present utility model is had been described in detail with reference to accompanying drawing at this.But should understand, under situation about not deviating from, can change these structures according to spirit and scope of the present utility model.The application is intended to detail in the operation instructions to constitute restriction to protection range of the present utility model; for example; be described with the example of solar battery sheet in the preamble, but the utility model is used to carry the conveying device of the workpiece with similar or identical functions also will drop in the claimed scope of the utility model as workpiece.
Claims (7)
1. conveying device that is used for wet process equipment, described conveying device comprises upper conveyor and following conveying device, described upper conveyor comprises roller bearing, be set in described go up on the roller bearing and can be along a plurality of upper rollers that move freely perpendicular to last roller bearing shaft core line direction, be fixed on the described a plurality of positioners that are used to locate a plurality of upper rollers on the roller bearing of going up, it is characterized in that, described positioner is arranged in pairs in the both ends of each upper roller, and described upper roller matched in clearance is fixed on the described positioner.
2. conveying device as claimed in claim 1 is characterized in that the both ends of described upper roller have breach, and described positioner end has the projection with described breach matched in clearance, and the width of described breach is greater than the width of projection.
3. conveying device as claimed in claim 2 is characterized in that, described positioner passes described axle center of going up roller bearing and is fixed on the roller bearing.
4. conveying device as claimed in claim 3 is characterized in that described positioner is an alignment pin.
5. conveying device as claimed in claim 2 is characterized in that, described positioner fixed cover is located on the outer wall of described upward roller bearing.
6. as each described conveying device in the claim 1 to 5, it is characterized in that described upper roller is cylindrical.
7. as each described conveying device in the claim 1 to 5, it is characterized in that described upper roller is the taper shape that cuts two ends.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202003069U CN201966189U (en) | 2010-05-24 | 2010-05-24 | Conveying device in wet processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202003069U CN201966189U (en) | 2010-05-24 | 2010-05-24 | Conveying device in wet processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201966189U true CN201966189U (en) | 2011-09-07 |
Family
ID=44528743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010202003069U Expired - Fee Related CN201966189U (en) | 2010-05-24 | 2010-05-24 | Conveying device in wet processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201966189U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111908010A (en) * | 2020-04-10 | 2020-11-10 | 河南工业职业技术学院 | Mobile supply structure and electronic integrated board etching device |
-
2010
- 2010-05-24 CN CN2010202003069U patent/CN201966189U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111908010A (en) * | 2020-04-10 | 2020-11-10 | 河南工业职业技术学院 | Mobile supply structure and electronic integrated board etching device |
| CN111908010B (en) * | 2020-04-10 | 2022-02-08 | 河南工业职业技术学院 | Mobile supply structure and electronic integrated board etching device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110907 Termination date: 20150524 |
|
| EXPY | Termination of patent right or utility model |