CN201955309U - Grain appearance inspection machine - Google Patents
Grain appearance inspection machine Download PDFInfo
- Publication number
- CN201955309U CN201955309U CN2011200378290U CN201120037829U CN201955309U CN 201955309 U CN201955309 U CN 201955309U CN 2011200378290 U CN2011200378290 U CN 2011200378290U CN 201120037829 U CN201120037829 U CN 201120037829U CN 201955309 U CN201955309 U CN 201955309U
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- crystal grain
- appearance inspection
- inspection machine
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Abstract
The utility model discloses a grain appearance inspection machine suitable for inspecting a plurality of grains adhered to an adhesive film. The grain appearance inspection machine comprises a machine stand unit, a workbench unit arranged on the machine stand unit and used for placing and positioning the adhesive film adhered with the grains, a shooting unit arranged on the machine stand unit and used for shooting images of the grains, a central processing unit electrically connected with the shooting unit, and an inspection unit electrically connected with the central processing unit, wherein the central processing unit defines a coordinate position for the grains according to the images of the grains respectively, and the inspection unit is provided with a touch screen for displaying the images of the grains.
Description
Technical field
The utility model relates to a kind of inspection machine, particularly relates to a kind of crystal grain appearance inspection machine.
Background technology
As shown in Figure 1, cut the back in order to check whether crystal grain is bad at wafer in the past, operator need utilize a microscope 1 to check several crystal grain that adheres to a glued membrane 2 201, so that bad crystal grain 201 is made marks, or utilize one to inhale pen device 3 with 201 absorptions of bad crystal grain, though, the accuracy of being differentiated bad crystal grain 201 by operator is very high, but the speed that operator is done artificial inspection by this microscope 1 is very slow, and the situation of rechecking same die 201 may take place, in addition, because human eye is tired easily, therefore, the mistake mark removes good crystal grain 201 to good crystal grain 201 or mistake problem often can take place after inspection also.
As shown in Figure 2, be the existing a kind of crystal grain appearance inspection machine that can differentiate the crystal grain outward appearance automatically, comprise a worktable that can move and can rotate around Z-direction along X-direction and Y direction 4, taking unit 5, one have a suction nozzle 601 remove unit 6, and this worktable 4 of may command, this taking unit 5 remove the CPU (central processing unit) 7 of unit 6 with this, the glued membrane 2 that will be stained with described crystal grain 201 when operator is put behind this worktable 4, and this CPU (central processing unit) 7 can be carried out crystal grain earlier and be aligned program and the program of proofreading and correct the machine origin automatically; Then, this CPU (central processing unit) 7 can remove to scan the image of taking described crystal grain 201 by this taking unit 5 of control; Whether then, this CPU (central processing unit) 7 can be oriented the coordinate position of each crystal grain 201, and by image comparison software the image of described crystal grain 201 and built-in sample image is compared, bad with the described crystal grain of automatic differentiation 201; At last, this CPU (central processing unit) 7 can control this remove unit 6 bad crystal grain 201 removed.
Though, whether this kind crystal grain appearance inspection machine can utilize image comparison software to differentiate described crystal grain 201 automatically bad, yet, the accuracy of differentiating owing to software on practice also can't reach 100% of hand inspection, therefore, be still general as shown in Figure 1 at last, recheck by 1 pair of remaining crystal grain 201 of this microscope by operator again, and manually to choose the bad crystal grain 201 that removes wherein, in addition, this crystal grain appearance inspection machine all need carry out the setting operation or the teaching program of an image comparison software, quite time-consuming and trouble again when the crystal grain of different batches of inspection or different size.
Summary of the invention
The purpose of this utility model is to provide the good and operation of a kind of discriminant accuracy crystal grain appearance inspection machine easily.
The utility model crystal grain appearance inspection machine is applicable to and checks that several adhere to the crystal grain of a glued membrane, comprise a board unit, a countertop unit, a taking unit, a CPU (central processing unit), and one is inspected the unit.This countertop unit is arranged at this board unit, and this countertop unit has the glued membrane of described crystal grain to put the location for sticking.This taking unit is arranged at this board unit, and this taking unit is taken the image of described crystal grain.This CPU (central processing unit) is electrically connected with this taking unit, and this CPU (central processing unit) defines a coordinate position according to the image of described crystal grain respectively to described crystal grain.This is inspected the unit and is electrically connected with this CPU (central processing unit), and this is inspected the unit and has a Touch Screen that shows the image of described crystal grain.
Preferably, in the described crystal grain appearance inspection machine, this is inspected the unit and also has a mouse.
Preferably, in the described crystal grain appearance inspection machine, this crystal grain appearance inspection machine also comprises a mobile unit that is arranged between this board unit and this countertop unit, this mobile unit has one first mobile device, and one second mobile device, this first mobile device is arranged at this board unit, and has first moving part that moves along a first direction, this second mobile device is arranged at this first moving part, and having second moving part that moves along a second direction perpendicular to described first direction, this countertop unit is arranged at this second moving part.
Preferably, in the described crystal grain appearance inspection machine, this crystal grain appearance inspection machine also comprise one be electrically connected with this CPU (central processing unit) remove the unit, this removes the unit and has a transfer mechanism that is arranged at this rack unit, and a suction means that is arranged at this transfer mechanism.
Preferably, in the described crystal grain appearance inspection machine, this transfer mechanism has one the 3rd mobile device, and one the 4th mobile device, the 3rd mobile device is arranged at this board unit, and has the 3rd moving part that moves along this first direction, and the 4th mobile device is arranged at the 3rd moving part, and having the 4th moving part that moves along a third direction perpendicular to described first direction, second direction, this suction means is arranged at the 4th moving part.
Preferably, in the described crystal grain appearance inspection machine, be electrically connected on this inspects the unit to this CPU (central processing unit) with the image subarea of described crystal grain can being shown in this Touch Screen.
The beneficial effects of the utility model are: utilize this taking unit to go to scan the image of taking described crystal grain, and the image of described crystal grain is shown in this Touch Screen, check exactly for operator.
Description of drawings
Fig. 1 is that existing operator utilizes a microscope to check the floor map of crystal grain;
The floor map of the existing a kind of crystal grain appearance inspection machine of Fig. 2;
Fig. 3 is the floor map of crystal grain appearance inspection machine one preferred embodiment of the present utility model;
Fig. 4 is that operator is checked crystal grain and directly put the operation synoptic diagram of selecting bad crystal grain on this Touch Screen by a Touch Screen of this preferred embodiment;
Fig. 5 is that operator is checked crystal grain by this Touch Screen and utilized a mouse of this preferred embodiment to put the operation synoptic diagram of selecting bad crystal grain on this Touch Screen.
Embodiment
Below in conjunction with drawings and Examples the utility model is elaborated.
About aforementioned and other technology contents, characteristics and effect of the present utility model, in the detailed description of a following cooperation preferred embodiment with reference to the accompanying drawings, can clearly understand.
Consult Fig. 3, preferred embodiment for the utility model crystal grain appearance inspection machine, this crystal grain appearance inspection machine is applicable to checks that several adhere to the crystal grain 200 of a glued membrane 100, and comprise: board unit 10, mobile unit 20, countertop unit 30, taking unit 40, CPU (central processing unit) 50, one inspect unit 60, and one removes unit 70.
This mobile unit 20 is arranged between this board unit 10 and this countertop unit 30, this mobile unit 20 has one first mobile device 21, and one second mobile device 22, this first mobile device 21 is arranged at this board unit 10, and has first moving part 211 that can move along a first direction X, this second mobile device 22 is arranged at this first moving part 211, and has second moving part 221 that can move along a second direction Y perpendicular to first direction X.
This countertop unit 30 is arranged at this second moving part 221 rotationally, and is positioned on this board unit 10, and this countertop unit 30 can be put the location for sticking the glued membrane 100 that described crystal grain 200 is arranged.In the present embodiment, this countertop unit 30 can be rotated around a third direction Z perpendicular to first direction X, second direction Y.
This taking unit 40 is arranged at this board unit 10, and this taking unit 40 can be taken the image of described crystal grain 200.In the present embodiment, this taking unit 40 is a kind of video cameras.
This CPU (central processing unit) 50 and this mobile unit 20, this countertop unit 30, this taking unit 40, this inspects unit 60 and removes unit 70 with this and be electrically connected, and this CPU (central processing unit) 50 can define a coordinate position respectively to described crystal grain 200 according to the image of described crystal grain 200.
This is inspected unit 60 and is electrically connected with this CPU (central processing unit) 50, and this is inspected unit 60 and has a Touch Screen 61 that shows the image of described crystal grain 200, and a mouse 62.In the present embodiment, this CPU (central processing unit) 50 can be shown in the image subarea of described crystal grain 200 this Touch Screen 61.
This removes unit 70 and is electrically connected with this CPU (central processing unit) 50, and this removes unit 70 and has a transfer mechanism 71 that is arranged at this rack unit 10, and a suction means 72 that is arranged at this transfer mechanism 71.
This transfer mechanism 71 has one the 3rd mobile device 73, and one the 4th mobile device 74, the 3rd mobile device 73 is arranged at this board unit 10, and has the 3rd moving part 731 that can move along first direction X, the 4th mobile device 74 is arranged at the 3rd moving part 731, and has the 4th moving part 741 that can move along third direction Z.
This suction means 72 is arranged at the 4th moving part 741, and has a suction nozzle 721.
Whereby, shown in Fig. 4,5, in the time will checking the outward appearance of described crystal grain 200, this CPU (central processing unit) 50 can be carried out crystal grain earlier and be aligned program and the program of proofreading and correct the machine origin automatically; Then, these central authorities handle single 50 can control this mobile unit 20 and this taking unit 40, allows this taking unit 40 remove to scan the image of taking described crystal grain 200; Then, this CPU (central processing unit) 50 can define this coordinate position to each crystal grain 200 according to the image of described crystal grain 200; Then, this CPU (central processing unit) 50 can be amplified the image subarea of described crystal grain 200 be shown in this Touch Screen 61, checks for operator whether described crystal grain 200 is bad; Then, operator can directly be put on this Touch Screen 61 and select bad crystal grain 200 or utilize 62 of this mouses to select bad crystal grain 200, and in this process, this CPU (central processing unit) 50 can write down the coordinate position of bad crystal grain 200; At last, this CPU (central processing unit) 50 can be controlled this mobile unit 20 and remove unit 70 with this according to the coordinate position of bad crystal grain 200, allows this remove unit 70 bad crystal grain 200 is removed exactly.
Be noted that, the utility model also can be cancelled the setting that this removes unit 70, and behind the coordinate position of these CPU (central processing unit) 50 record bad crystal grains 200, coordinate position data output with bad crystal grain 200, remove machine according to these coordinate position datas for the user at another, carry out the operation that removes of bad crystal grain 200.
Via above explanation, can again advantage of the present utility model be summarized as follows:
One, the utility model is to utilize this taking unit 40 to remove to scan the image of taking described crystal grain 200, and can finish the capture operation of described crystal grain 200 apace, and the image of described crystal grain 200 can be shown in this Touch Screen 61, for the operator inspection, utilize the mode of microexamination compared to existing operator, not only operator is difficult for taking place the situation of eye fatigue, and, because being auto-partition amplifications, the image of described crystal grain 200 is shown in this Touch Screen 61, therefore, operator can be checked each crystal grain 200 fast and correctly, and the problem of rechecking or mistake mark can not take place.
Two, in addition, whether bad because the utility model is the image that allows operator watch this Touch Screen 61 to show if differentiating described crystal grain 200, therefore, the accuracy that the accuracy that the utility model is differentiated can utilize image comparison software to differentiate far above prior art, and when the crystal grain of different batches of inspection or different size, the utility model does not need to have now again the setting operation of comparison software fully yet, quite saves time in operation and convenience.
In sum, crystal grain appearance inspection machine of the present utility model, not only good the and operation of discriminant accuracy fast, convenient, so can reach the purpose of this utility model really.
Claims (6)
1. crystal grain appearance inspection machine, be applicable to and check that several adhere to the crystal grain of a glued membrane, it is characterized in that: this crystal grain appearance inspection machine comprises a board unit, confession and sticks the glued membrane that described crystal grain is arranged and put taking unit, one that the countertop unit of location, one be used to take the image of described crystal grain and according to the image of described crystal grain described crystal grain is defined the CPU (central processing unit) of a coordinate position respectively, and one is inspected the unit;
This countertop unit is arranged at this board unit;
This taking unit is arranged at this board unit;
This CPU (central processing unit) is electrically connected with this taking unit;
This inspects the unit, is electrically connected with this CPU (central processing unit), and this is inspected the unit and has a Touch Screen that shows the image of described crystal grain.
2. crystal grain appearance inspection machine according to claim 1 is characterized in that: this is inspected the unit and also has a mouse.
3. crystal grain appearance inspection machine according to claim 1, it is characterized in that: this crystal grain appearance inspection machine also comprises a mobile unit that is arranged between this board unit and this countertop unit, this mobile unit has one first mobile device, and one second mobile device, this first mobile device is arranged at this board unit, and has first moving part that moves along a first direction, this second mobile device is arranged at this first moving part, and having second moving part that moves along a second direction perpendicular to described first direction, this countertop unit is arranged at this second moving part.
4. crystal grain appearance inspection machine according to claim 3, it is characterized in that: this crystal grain appearance inspection machine also comprise one be electrically connected with this CPU (central processing unit) remove the unit, this removes the unit and has a transfer mechanism that is arranged at this rack unit, and a suction means that is arranged at this transfer mechanism.
5. crystal grain appearance inspection machine according to claim 4, it is characterized in that: this transfer mechanism has one the 3rd mobile device, and one the 4th mobile device, the 3rd mobile device is arranged at this board unit, and has the 3rd moving part that moves along this first direction, the 4th mobile device is arranged at the 3rd moving part, and having the 4th moving part that moves along a third direction perpendicular to described first direction, second direction, this suction means is arranged at the 4th moving part.
6. crystal grain appearance inspection machine according to claim 1 is characterized in that: be electrically connected on this inspects the unit to this CPU (central processing unit) with the image subarea of described crystal grain can being shown in this Touch Screen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200378290U CN201955309U (en) | 2011-02-14 | 2011-02-14 | Grain appearance inspection machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200378290U CN201955309U (en) | 2011-02-14 | 2011-02-14 | Grain appearance inspection machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201955309U true CN201955309U (en) | 2011-08-31 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200378290U Expired - Fee Related CN201955309U (en) | 2011-02-14 | 2011-02-14 | Grain appearance inspection machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201955309U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103117207A (en) * | 2011-11-16 | 2013-05-22 | 蔡宜兴 | Automatic positioning method of first grain |
| CN109959611A (en) * | 2017-12-25 | 2019-07-02 | 由田新技股份有限公司 | Optical detection apparatus and its workpiece jacking system |
-
2011
- 2011-02-14 CN CN2011200378290U patent/CN201955309U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103117207A (en) * | 2011-11-16 | 2013-05-22 | 蔡宜兴 | Automatic positioning method of first grain |
| CN103117207B (en) * | 2011-11-16 | 2015-08-19 | 蔡宜兴 | The automatic positioning method of first crystal grain |
| CN109959611A (en) * | 2017-12-25 | 2019-07-02 | 由田新技股份有限公司 | Optical detection apparatus and its workpiece jacking system |
| CN109959611B (en) * | 2017-12-25 | 2022-03-29 | 由田新技股份有限公司 | Optical detection equipment and workpiece jacking device thereof |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110831 Termination date: 20160214 |
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| CF01 | Termination of patent right due to non-payment of annual fee |