CN201955303U - Device for detecting cleanness of material surface - Google Patents
Device for detecting cleanness of material surface Download PDFInfo
- Publication number
- CN201955303U CN201955303U CN2011200052718U CN201120005271U CN201955303U CN 201955303 U CN201955303 U CN 201955303U CN 2011200052718 U CN2011200052718 U CN 2011200052718U CN 201120005271 U CN201120005271 U CN 201120005271U CN 201955303 U CN201955303 U CN 201955303U
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- laser
- gas composition
- sampling thief
- material surface
- composition analysis
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Abstract
A device for detecting cleanness of a material surface comprises a sampler (1) with a laser window (2), a sealing mechanism (3), a laser (4), a vacuum gauge (5), a gas composition analyzer (6) and a vacuum system (7). An analyzed sample (8) is connected with the sampler through the sealing mechanism (3), the whole detection device is vacuumized by the vacuum system (7) to the condition at which the gas composition analyzer can work; the pressure in the detection device can be recorded by the vacuum gauge (5); the laser light generated by the laser (4) is irradiated to the surface of the detected sample (8) through the laser window (2); the material on the surface of the sample is evaporated to the space of the sampler and is detected by the gas composition analyzer (6); and the gas composition means the composition adsorbed from the material surface or the composition of pollutants. Different material can be analyzed by adjusting the power, action time and beam spot of the laser, and the pressure magnitude of the vacuum gauge reflects the quantity of evaporants and also means the cleanness degree of the material surface.
Description
Technical field
The utility model relates to a kind of method and apparatus to material surface adsorbate and pollutant detection, belongs to the material analysis technical field.
Background technology
In high power light laser and application system; the transmission of light laser and the optical system of convergence; generally be placed on vacuum system or fill in the vacuum system of blanket gas; the light laser that scatters out in the optic path also can affact the various parts of light path with exterior domain; on the material; cause the desorption of the adsorbent of material surface material; and the effects such as volatilization of surperficial unclean material; form steam; polluter such as gasoloid or particle; these materials are to form the key factor that optical system is polluted; the transmitance and the beam quality of optical element will be influenced; and, optical element is produced harmful effect because the reduction of transmitance produces thermal effect.
Therefore, control material surface clearness how, reduce pollution to optical element and be one very important.For other vacuum industries, food hygiene industry, semicon industry etc. the material cleanliness are required also to need control material surface clearness effectively in the very high system simultaneously.Therefore in the manufacture process of related system to the material surface cleaning degree easily and fast detection method extraordinary application prospect is arranged.
Have in the prior art and utilize laser, beam bombardment material surface to carry out the large-sized analytic instrument that surface composition is analyzed, but be to carry out constituent analysis or the secondary electron energy spectrum distribution of material under electron bombard etc. by reflection, the spectrum that shines that laser produces to analyze basically, system complex, environmental baseline requires high, is not suitable for the field quick detection demand.
Summary of the invention
Technical matters: the purpose of this utility model provides a kind of device that adopts laser evaporation or electron beam evaporation method test material surface clearness.This device possesses the detection of carrying out material surface adsorbate, residual contaminants fast, and system architecture is simple to operation.
Technical scheme: the device that the material surface cleaning degree is detected of the present utility model comprises that one has sampling thief, sealing mechanism, laser instrument, vacuum meter, gas composition analysis device and the vacuum system of laser optical window; Lower periphery at sampling thief is provided with sealing mechanism, is provided with the laser optical window on the top of sampling thief, is provided with laser instrument outside window in laser light, and vacuum meter, gas composition analysis device and vacuum system are positioned at the side of sampling thief.
The gas composition analysis device is the gas composition analyzer device of mass spectrometer, chromatograph, chromatograph-mass spectrometer or spectrometer.
Described laser instrument directly produces ion and enters the ionogenic gas composition analysis device of needs as laser ionization source, and gas composition analysis device at this moment is not with ion gun.
Beneficial effect: compared with prior art, the utlity model has following advantage: possess the detection of carrying out material surface adsorbate, residual contaminants fast, system architecture is simple to operation.
Description of drawings
Fig. 1 is the surface clearness pick-up unit synoptic diagram that adopts laser,
Fig. 2 is the synoptic diagram of a kind of right-angled surface material and sampling thief sealing,
Fig. 3 adopts electron gun to carry out the device synoptic diagram that surface clearness detects,
Sample was placed on the device synoptic diagram in the sampling thief when a kind of sample of Fig. 4 was less,
The device synoptic diagram of place mat substrate below when a kind of sample of Fig. 5 is thin,
Wherein have: sampling thief 1, laser optical window 2, sealing mechanism 3, laser instrument 4, vacuum meter 5, gas composition analysis device 6, vacuum system 7, analyzed sample 8, electron gun 9, assisting base plate 10.
Embodiment
The utility model adopts the laser action material surface or adopts electron beam to affact the method for metal material surface, make material surface absorption gas, clean insufficient pollutant that is retained in the surface etc. and be evaporated in the sampling thief, and enter into the gas composition analysis device, carry out gas composition analysis.The gas composition analysis device can be gas composition analyzer devices such as mass spectrometers such as four-electrode spectrum, flight time mass spectrum, gas chromatograph, chromatograph-mass spectrometer.With the pressure change in the vacuum meter record testing process, the height of the height reaction surface cleanliness of pressure.
Laser and electron beam can also play the effect of photoionization and electron ionization, as the ion gun use of gas composition analyzer devices such as mass spectrum.
The device that the material surface cleaning degree is detected of the present utility model comprises that one has sampling thief 1, sealing mechanism 3, laser instrument 4, vacuum meter 5, gas composition analysis device 6 and the vacuum system 7 of laser optical window 2; Lower periphery at sampling thief 1 is provided with sealing mechanism 3, is provided with laser optical window 2 on the top of sampling thief 1, is provided with laser instrument 4 outside laser optical window 2, and vacuum meter 5, gas composition analysis device 6 and vacuum system 7 are positioned at the side of sampling thief 1.
Gas composition analysis device 6 is gas composition analyzer devices of mass spectrometer, chromatograph, chromatograph-mass spectrometer or spectrometer.Described laser instrument 4 is as laser ionization source, directly produces ion and enters and need ionogenic gas composition analysis device, and gas composition analysis device at this moment is not with ion gun.
The Device Testing method that the material surface cleaning degree is detected links together analyzed sample 8 by sealing mechanism 3 and sampling thief, adopt 7 pairs of whole detection device of vacuum system to be evacuated down to the state that the gas composition analysis device can be worked, with the pressure in vacuum meter 5 device for recording and detecting; The laser that laser instrument 4 is produced shines the surface of detected sample 8 by laser optical window 2, makes the material of sample surfaces be evaporated to the sampling thief space, and is detected by gas composition analysis device 6, and gas componant is represented the composition of material surface absorption or pollutant; By adjusting power, action time and the bundle spot size of laser instrument, can be to the analyzing of different materials, true
The pressure height of empty meter represents evaporant many, represents the material surface cleaning degree low; The pressure of vacuum meter is low, represents evaporant few, represents material surface cleaning degree height.
Described sealing mechanism 3 is resilient seal, optical flat sealing or edge seal mechanism, sampling thief 1 is connected together with analyzed sample 8, the difference of shape is per sample made the sampling thief interface that matches with sample surfaces, make sampling thief and sample can between keep vacuum seal.
When described analyzed sample 8 is metal material, at the sampling thief 1 inner electron gun 9 of placing, and on analyzed sample 8, applying the current potential higher than electron gun, the electron bombard material surface that electron gun is produced forms the evaporation of material, and is analyzed by the gas composition analysis device.
The sectional area of described analyzed sample 8 is during less than the bore of sampling thief, with analyzed sample 8 be placed on sampling thief 1 inner and sealing mechanism 3 usefulness assisting base plates 10 are sealed after, analyze.
Described analyzed sample 8 is thinned in the time of can not bearing atmospheric pressure, with 8 times place mat assisting base plates 10 of analyzed sample, and will apply certain pressure between assisting base plate 10 and the sampling thief 1, to guarantee the sealing between sampling thief 1 and the analyzed sample 8.
When gas pressure intensity is higher than gas composition analysis device operate as normal pressure in the described sampling thief 1, between sampling thief 1 and gas composition analysis device 6, add a fenestra sheet, adopt gas tester one end pressure than the low differential air-exhaust method of sampling thief one end pressure on the fenestra both sides, make gas composition analysis device 6 reach the requirement of operate as normal pressure.
For guaranteeing the sealing between sample and the sampling thief, by resilient seal sampling thief is connected together with sample, the difference of shape can be made the sampling thief interface that matches with sample surfaces per sample, makes sampling thief and sample that good vacuum seal can be arranged.
Example 1
Adopt stainless steel material to make sampling thief 1, and link together by metal flange and optical window 2, have on the sampling thief with vacuum meter be connected, the interface of gas composition analysis device and vacuum pump can be connected sampling thief with associated components, vacuum meter can be used ion gauge, the gas composition analysis device adopts mass spectrometer, and vacuum pump adopts molecular pump, mechanical pump unit.With the sealing of fluororubber vaccum seal ring, adopt 266nmYAG laser of quadruple device between sampling thief and metal or the glass analysis sample as LASER Light Source 4.With vacuum pump sampling thief is bled, when vacuum tightness reaches 10
-3During handkerchief, open laser instrument, make laser affact the analytic sample surface by optical window 2, make material surface absorption gas, clean insufficient pollutant that is retained in the surface etc. and be evaporated in the sampling thief, and enter into the gas composition analysis device, carry out gas composition analysis.With the pressure change in the vacuum meter record testing process, the height of the height reaction surface cleanliness of pressure.The pressure height of vacuum meter represents evaporant many, represents the material surface cleaning degree low; The pressure of vacuum meter is low, represents evaporant few, represents material surface cleaning degree height.
Example 2
Adopt stainless steel material to make sampling thief 1, and link together by metal flange and optical window 2, have on the sampling thief with vacuum meter be connected, the interface of gas composition analysis device and vacuum pump can be connected sampling thief with associated components, vacuum meter can be used ion gauge, the gas composition analysis device adopts mass spectrometer, and vacuum pump adopts molecular pump, mechanical pump unit.If sample surfaces is highly polished, the sampling thief sealed end also adopts optical surface, makes sampling thief and sample surfaces adopt optical surface vacuum seal, adopts 266nmYAG laser of quadruple device as LASER Light Source 4.With vacuum pump sampling thief is bled, when vacuum tightness reaches 10
-3During handkerchief, open laser instrument, make laser affact the analytic sample surface by optical window 2, make material surface absorption gas, clean insufficient pollutant that is retained in the surface etc. and be evaporated in the sampling thief, and enter into the gas composition analysis device, carry out gas composition analysis.With the pressure change in the vacuum meter record testing process, the height of the height reaction surface cleanliness of pressure.The pressure height of vacuum meter represents evaporant many, represents the material surface cleaning degree low; The pressure of vacuum meter is low, represents evaporant few, represents material surface cleaning degree height.
Example 3
Adopt stainless steel material to make sampling thief 1, and link together by metal flange and optical window 2, have on the sampling thief with vacuum meter be connected, the interface of gas composition analysis device and vacuum pump can be connected sampling thief with associated components, vacuum meter can be used ion gauge, the gas composition analysis device adopts mass spectrometer, and vacuum pump adopts molecular pump, mechanical pump unit.Because of sample volume is little, sample is placed in the sampling thief, with cover plate 10 sampling thiefs and atmospheric vacuum sealing, adopt 266nmYAG laser of quadruple device as LASER Light Source 4.With vacuum pump sampling thief is bled, when vacuum tightness reaches 10
-3During handkerchief, open laser instrument, make laser affact analytic sample 8 surfaces by optical window 2, make material surface absorption gas, clean insufficient pollutant that is retained in the surface etc. and be evaporated in the sampling thief, and enter into the gas composition analysis device, carry out gas composition analysis.With the pressure change in the vacuum meter record testing process, the height of the height reaction surface cleanliness of pressure.The pressure height of vacuum meter represents evaporant many, represents the material surface cleaning degree low; The pressure of vacuum meter is low, represents evaporant few, represents material surface cleaning degree height.
Example 4
Adopting quartz glass material sampling thief 1, and link together by glass sealing with optical window 2, have on the sampling thief with vacuum meter and be connected, use with the sealed glass tube of gas componant and the interface of vacuum pump sampling thief can be connected with associated components, vacuum meter can be used ion gauge, gas composition analysis device Raman spectrometer, vacuum pump adopts molecular pump, mechanical pump unit.With the sealing of fluororubber vaccum seal ring, adopt 266nmYAG laser of quadruple device between sampling thief and metal or the glass analysis sample as LASER Light Source 4.With vacuum pump sampling thief is bled, when vacuum tightness reaches 10
-3During handkerchief, open laser instrument, make laser affact the analytic sample surface by optical window 2, make material surface absorption gas, clean insufficient pollutant that is retained in the surface etc. and be evaporated in the sampling thief, use Raman spectrometer and the gas componant in the sampling thief analyzed by the quartz glass of printing opacity.With the pressure change in the vacuum meter record testing process, the height of the height reaction surface cleanliness of pressure.The pressure height of vacuum meter represents evaporant many, represents the material surface cleaning degree low; The pressure of vacuum meter is low, represents evaporant few, represents material surface cleaning degree height.
Claims (3)
1. the device that the material surface cleaning degree is detected is characterized in that this device comprises that one has sampling thief (1), sealing mechanism (3), laser instrument (4), vacuum meter (5), gas composition analysis device (6) and the vacuum system (7) of laser optical window (2); Lower periphery at sampling thief (1) is provided with sealing mechanism (3), be provided with laser optical window (2) on the top of sampling thief (1), be provided with laser instrument (4) outside laser optical window (2), vacuum meter (5), gas composition analysis device (6) and vacuum system (7) are positioned at the side of sampling thief (1).
2. the device that the material surface cleaning degree is detected according to claim 1 is characterized in that gas composition analysis device (6), is the gas composition analyzer device of mass spectrometer, chromatograph, chromatograph-mass spectrometer or spectrometer.
3. the described device that the material surface cleaning degree is detected of claim 1, it is characterized in that described laser instrument (4) is as laser ionization source, directly the generation ion enters and needs ionogenic gas composition analysis device, and gas composition analysis device at this moment is not with ion gun.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200052718U CN201955303U (en) | 2011-01-10 | 2011-01-10 | Device for detecting cleanness of material surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200052718U CN201955303U (en) | 2011-01-10 | 2011-01-10 | Device for detecting cleanness of material surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201955303U true CN201955303U (en) | 2011-08-31 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200052718U Expired - Fee Related CN201955303U (en) | 2011-01-10 | 2011-01-10 | Device for detecting cleanness of material surface |
Country Status (1)
| Country | Link |
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| CN (1) | CN201955303U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102147363A (en) * | 2011-01-10 | 2011-08-10 | 东南大学 | Device and method for detecting surface cleanness of material |
| CN104316496A (en) * | 2014-11-05 | 2015-01-28 | 中国工程物理研究院激光聚变研究中心 | Grease pollutant monitoring device in high-power laser and monitoring method of grease pollutant monitoring device |
| CN104884943A (en) * | 2012-12-21 | 2015-09-02 | 3M创新有限公司 | Systems and methods for determining the cleanliness of a surface |
| CN109564164A (en) * | 2016-09-02 | 2019-04-02 | 冶金研究Asbl中心 | Increase the method and apparatus of the sensitivity of the on-line measurement of steel strip surface cleannes |
-
2011
- 2011-01-10 CN CN2011200052718U patent/CN201955303U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102147363A (en) * | 2011-01-10 | 2011-08-10 | 东南大学 | Device and method for detecting surface cleanness of material |
| CN102147363B (en) * | 2011-01-10 | 2013-02-13 | 东南大学 | Device and method for detecting surface cleanness of material |
| CN104884943A (en) * | 2012-12-21 | 2015-09-02 | 3M创新有限公司 | Systems and methods for determining the cleanliness of a surface |
| CN104884943B (en) * | 2012-12-21 | 2019-02-12 | 3M创新有限公司 | System and method for determining the cleannes on surface |
| CN104316496A (en) * | 2014-11-05 | 2015-01-28 | 中国工程物理研究院激光聚变研究中心 | Grease pollutant monitoring device in high-power laser and monitoring method of grease pollutant monitoring device |
| CN104316496B (en) * | 2014-11-05 | 2017-05-10 | 中国工程物理研究院激光聚变研究中心 | Grease pollutant monitoring device in high-power laser |
| CN109564164A (en) * | 2016-09-02 | 2019-04-02 | 冶金研究Asbl中心 | Increase the method and apparatus of the sensitivity of the on-line measurement of steel strip surface cleannes |
| CN109564164B (en) * | 2016-09-02 | 2021-12-28 | 冶金研究Asbl中心 | Method and device for increasing sensitivity of online measurement of surface cleanliness of steel strip |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110831 Termination date: 20150110 |
|
| EXPY | Termination of patent right or utility model |