CN201945692U - Regulator for monochromator of neutron reflection spectrometer - Google Patents

Regulator for monochromator of neutron reflection spectrometer Download PDF

Info

Publication number
CN201945692U
CN201945692U CN2011200710055U CN201120071005U CN201945692U CN 201945692 U CN201945692 U CN 201945692U CN 2011200710055 U CN2011200710055 U CN 2011200710055U CN 201120071005 U CN201120071005 U CN 201120071005U CN 201945692 U CN201945692 U CN 201945692U
Authority
CN
China
Prior art keywords
table top
accurate
displacement platform
monochromator
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2011200710055U
Other languages
Chinese (zh)
Inventor
袁光萃
张红霞
程贺
韩志超
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institute of Chemistry CAS
Original Assignee
Institute of Chemistry CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institute of Chemistry CAS filed Critical Institute of Chemistry CAS
Priority to CN2011200710055U priority Critical patent/CN201945692U/en
Application granted granted Critical
Publication of CN201945692U publication Critical patent/CN201945692U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

The utility model provides a regulator for a monochromator of a neutron reflection spectrometer, which has the horizontal sample geometry. The regulator comprises the monochromator, a support block, a base, a precise angle displacement table, a precise rotation table, a precise horizontal displacement table and a precise height displacement table which are sequentially and fixedly connected from top to bottom. The regulator can be used for clearly carrying out wavelength selection and unicolor neutron beam angle change, the position precision is high, and high-intensity neutron beams are easy to obtain.

Description

A kind of regulating device of neutron reflection spectrometer monochromator
Technical field
The utility model relates to a kind of regulating device with neutron reflection spectrometer monochromator of horizontal sample geometry, belongs to the neutron reflection technical field.
Background technology
The neutron reflection technology is a branch of the neutron scattering technology that grows up in the beginning of the eighties, mid-term, has become a kind of strong means of surveying 0.1nm-100nm scope inside surface and interfacial structure.Neutron reflection Technology Need wavelength is λ, and bandwidth is the monochromatic neutron beam of Δ λ.The neutron that reactor provides all has continuous power spectrum usually, and this neutron source is called white light neutron source.The crystal that obtains monochromatic neutron beam with the Bragg reflection from white light neutron source is called crystal monochromator.When the white light neutron source of drawing when reactor intersects with the crystal face (hkl) of θ M angle and crystal, according to the Bragg law, the wavelength X of reflecting bundle and interplanar distance d Hkl, scattering angle 2 θ MBetween the pass be: λ=2d HklSin θ MSelect different interplanar distance d HklOr incident angle θ MCan obtain the monochromatic neutron beam of different wave length.In the neutron reflection experiment, the most frequently used crystal monochromator is the highly oriented pyrolytic graphite monochromator of crystal face (002) orientation.Therefore, satisfy the neutron beam that required wavelength X is tested in neutron reflection, need to regulate the angle theta between white light neutron source and the monochromator in order from white light neutron source, to obtain M
The neutron reflection technology is by Scattering of Vector Q (the Scattering of Vector Q=4 π sin θ/λ of measuring samples reflectivity with vertical sample direction, wherein λ is the wavelength of neutron beam, θ is that the incident angle of neutron beam is the angle of neutron beam and sample surfaces) variation relation, reflection scattering length density is along the distribution of vertical sample direction, by analyzing the information such as roughness that reflectance curve obtains thickness of sample, scattering length density, surface and interface.Ji He difference per sample, neutron reflection spectrometer can be divided into the neutron reflection spectrometer with how much of horizontal samples usually and have two kinds of the neutron reflection spectrometers of vertical sample geometry.Neutron reflection spectrometer with how much in vertical sample is applicable to the measurement of solid sample, the variation that can keep the motionless realization incident angle of monochromator by the rotation solid sample, thereby the regulating device of its monochromator is fairly simple.Neutron reflection spectrometer with horizontal sample geometry is not only applicable to the measurement of solid sample, is applicable to the measurement of fluid sample yet.Because the surface of liquid can only keep surface level under action of gravity, therefore can not realize the variation of incident angle by rotation or inclination sample.Therefore, for neutron reflection spectrometer, be to obtain Scattering of Vector variation delta Q with horizontal sample geometry, the incident angle of neutron beam need change Δ θ, needs the inclination crystal monochromator to depart from its plane of reflection Δ θ/2 jiaos of neutron beams that neutron reflection experiment usefulness is provided.
In addition, the scattering length density of liquid is lower, cause the neutron reflection critical angle less, and reflectivity is lower, needs high-intensity neutron beam.For improving the used neutron beam intensity of neutron reflection experiment, improve testing efficiency, under the certain situation of white light neutron source flux, need the intercepting white light neutron source of maximum magnitude, therefore need accurately to adjust the geometric center of crystal monochromator and the relative position of white light neutron source.
At present domestic not about the report of the monochromator regulating device of neutron reflection spectrometer with how much of horizontal samples.State-of-the-art in the world is how much neutron reflection spectrometers of horizontal sample in USA National Institute of Standard and Technology (National Institute of Standards andTechnology) neutron research centre, but does not retrieve the monochromator regulating device of this spectrometer use and the open report of method.
Summary of the invention
The purpose of this utility model provides a kind of regulating device with neutron reflection spectrometer monochromator of horizontal sample geometry.
The regulating device of the neutron reflection spectrometer monochromator with horizontal sample geometry that the utility model provides comprises back-up block, pedestal, accurate angle displacement platform, accurate universal stage, precision level displacement platform and the precise height displacement platform that supports monochromator; Described accurate angle displacement platform by holder a and with can forming that described holder a flexibly connects along the accurate angle displacement arc table top that the arc track of described holder a is swung; Described accurate universal stage is made up of with the rotatable accurate rotary table top that is arranged on the described holder b holder b; Described precision level displacement platform is made up of with the precision level displacement table top that moves horizontally that is arranged on the described holder c holder c; Described precise height displacement platform is made up of with the liftable precise height displacement table top that is arranged on the described holder d holder d; Described back-up block is located on the described pedestal; Described pedestal is located on the described accurate angle displacement arc table top, and described holder a is located on the described accurate rotary table top, and described holder b is located on the described precision level displacement table top, and described holder c is located on the described precise height displacement table top.
In the above-mentioned regulating device, the plane of incidence of described monochromator and surface level are at an angle of 90; The geometric center of described monochromator equals the height of the pivot center of described accurate angle displacement platform to described accurate angle displacement arc table top to the height of the bottom surface of described pedestal; The axis of rotation of described accurate rotary table top is by the geometric center of described monochromator; The axis of described precision level displacement platform and the axis of rotation of described accurate rotary table top intersect vertically; The median vertical line of described precise height displacement platform overlaps with the axis of rotation of described accurate rotary table top, and the axis of the median vertical line of described precise height displacement platform and described precision level displacement platform intersects vertically.
In the above-mentioned regulating device, the accurate angle displacement arc table top of described accurate angle displacement platform links to each other with the stepper motor that can drive this precision angle displacement arc table top rotation by rotating mechanism; Described rotating mechanism can be existing any mechanism that can realize rotating function.
In the above-mentioned regulating device, the accurate rotary table top of described accurate universal stage links to each other with the stepper motor that can drive this precision rotary table top rotation by rotating mechanism; Described rotating mechanism can be existing any mechanism that can realize spinfunction.
In the above-mentioned regulating device, the precision level displacement table top of described precision level displacement platform links to each other with the stepper motor that can drive this precision level displacement table-surface level displacement by travel mechanism; Described travel mechanism can be existing any mechanism that can realize locomotive function.
In the above-mentioned regulating device, the precise height displacement table top of described precise height displacement platform links to each other with the stepper motor that can drive this precise height displacement table top lifting by elevating mechanism; Described elevating mechanism can be existing any mechanism that can realize elevating function.
In the above-mentioned regulating device, the angle precision of described accurate angle displacement platform can be ± and 0.0015 °.
In the above-mentioned regulating device, the angle precision of described accurate universal stage can be ± and 0.005 °.
In the above-mentioned regulating device, the bearing accuracy of described precision level displacement platform can be ± 3 μ m.
In the above-mentioned regulating device, the bearing accuracy of described precise height displacement platform can be ± 3 μ m.
In the above-mentioned regulating device, described monochromator can be the highly oriented pyrolytic graphite monochromator, as the highly oriented pyrolytic graphite monochromator of crystal face (002) orientation.
In the above-mentioned regulating device, can test the needs of neutron beam intensity and white light neutron source line area that reactor is drawn, can be made as a plurality of described monochromator or many groups according to neutron reflection.
Utilize above-mentioned regulating device to adjust the method for monochromator, comprise the steps:
(1) regulates described precise height displacement table top and precision level displacement table top, the geometric center of described monochromator is overlapped with the center of white light neutron source;
(2) the accurate rotary table top with described accurate universal stage rotates around described axis of rotation, and keeps the geometric center invariant position of described monochromator;
(3) the accurate angle displacement arc table top with described accurate angle displacement platform rotates around described pivot center, and keeps the geometric center invariant position of described monochromator, then obtains the monochromatic neutron beam of different angles.
The regulating device that the utility model provides has the structure of simple and reliable space geometry relation, can clearly carry out the selection of wavelength and the change of monochromatic neutron beam angle, and the bearing accuracy height is easy to obtain high-intensity neutron beam.
Description of drawings
Fig. 1 is the structural representation of regulating device of the present utility model.
Fig. 2 is the structural representation of the user mode of regulating device of the present utility model.
Each mark is as follows among the figure: 1 highly oriented pyrolytic graphite monochromator, 2 back-up blocks, 3 pedestals, 4 accurate angle displacement arc table tops, 5 holder a, 6 accurate rotary table tops, 7 holder b, 8 precision level displacement table tops, 9 holder c, 10 precise height displacement table tops, 11 holder d.
Embodiment
Below in conjunction with embodiment the utility model is described further, but the utility model is not limited to following examples.
As shown in Figure 1, the regulating device of present embodiment comprises back-up block 2, pedestal 3, accurate angle displacement platform (angle precision is for ± 0.0015 °), accurate universal stage (angle precision is for ± 0.005 °), precision level displacement platform (bearing accuracy is ± 3 μ m) and the precise height displacement platform (bearing accuracy is ± 3 μ m) of the highly oriented pyrolytic graphite monochromator 1 of vertical support crystal face (002) orientation; Accurate angle displacement platform by holder a5 and with can forming of flexibly connecting along this holder a5 along the accurate angle displacement arc table top 4 that the arc track of holder a5 is swung, accurate angle displacement arc table top 4 is connected with the stepper motor (not shown) of crossing that can drive its rotation by rotating mechanism, is used to regulate rotational angle; Accurate universal stage is made up of with the rotatable accurate rotary table top 6 that is arranged on this holder b7 holder b7, accurate rotary table top 6 is connected with the stepper motor (not shown) that can drive its rotation by rotating mechanism, is used to regulate the anglec of rotation; Precision level displacement platform is made up of with the precision level displacement table top 8 that moves horizontally that is arranged on this holder c9 holder c9, precision level displacement table top 8 by displacement mechanism with can drive its stepper motor (not shown) that moves horizontally and be connected, be used to regulate horizontal shift; Precise height displacement platform is made up of with the liftable precise height displacement table top 10 that is arranged on this holder d11 holder d11, precise height displacement table top 10 is connected with the stepper motor (not shown) that can drive its lifting by elevating mechanism, is used to regulate height; Back-up block 2 is located on 3 pedestals; Pedestal 3 is rigidly secured on the accurate angle displacement arc table top 4, the geometric center O ' of monochromator 1 equals the height of the pivot center of accurate angle displacement platform to accurate angle displacement arc table top 4 to the height of the bottom surface of pedestal 3, guarantees the horizontal central line AA ' of the pivot center CC ' of accurate angle displacement platform by highly oriented pyrolytic graphite monochromator 1; Holder a5 is rigidly secured on the accurate rotary table top 6, and the axis of rotation DD ' of accurate rotary table top 6 is by the geometric center O ' of monochromator 1; Holder b7 is fixed on the precision level displacement table top 8, and the axis EE ' of precision level displacement platform and the axis of rotation DD ' of accurate rotary table top 6 intersect vertically; Holder c9 is fixed on the precise height displacement table top 10, the z direction median vertical line FF ' of precise height displacement platform overlaps with the axis of rotation DD ' of accurate rotary table top 4, and the z direction median vertical line FF ' of precise height displacement platform and the axis EE ' of precision level displacement platform intersect vertically; Holder d11 is installed on the how much neutron reflection spectrometer (not shown)s, makes the axis EE ' of precision level displacement platform along the x direction of principal axis.
In the above-mentioned regulating device, monochromator can also be germanium single crystal neutron monochromator or beryllium single crystal neutron monochromator; The angle precision of accurate angle displacement platform 4 and accurate universal stage 5 can be regulated as required; The bearing accuracy of precision level displacement platform 6 and precise height displacement platform 7 can be regulated as required; Rotating mechanism, rotating mechanism, displacement mechanism and elevating mechanism can be respectively and existingly can realize rotating, rotate, move horizontally any mechanism with elevating function.
When using above-mentioned regulating device, as shown in Figure 2, at first move precise height displacement platform 7 and precision level displacement platform 6, the geometric center O ' that regulates monochromator 1 overlaps with the center O of white light neutron source;
Give the stepper motor energising of precise height displacement platform 7, the accurate closely-pitched lead screw that drives precise height displacement platform 7 rotate and with accurate closely-pitched lead screw nut engaged and down wedge move, thereby drive with following wedge with the last wedge of inclined-plane precision-fit and highly the mobile working table top move up and down.The scrambler that is installed in the stepper motor afterbody of precise height displacement platform 7 is directly measured rotational angle, obtain the actual displacement amount of precise height displacement platform 7 by the geometric relationship of calculating accurate closely-pitched leading screw pitch dimension and inclined-plane, bearing accuracy is ± 3 μ m;
Give the stepper motor energising of precision level displacement platform 6 simultaneously, the ball-screw that drives precision level displacement platform 6 rotates and moves horizontally with ball-screw nut engaged and horizontal shift work top.The grating chi that is installed in the side of precision level displacement platform 6 is directly measured horizontal displacement, and bearing accuracy is ± 3 μ m;
Next moves accurate universal stage 5;
Obtain white light neutron source and the angle theta of highly oriented pyrolytic graphite monochromator 1 in surface level according to the Bragg law M=45 °, i.e. the monochromatic neutron beam wavelength that after monochromator 1 reflection, takes off
Figure BDA0000050720220000051
With the angle of white light neutron source be 2 θ M=90 °;
Give the stepper motor energising of accurate universal stage 5, drive the over-type worm gear of accurate universal stage 5, cause the axis of rotation DD ' rotation of the rotary work table top of accurate universal stage 5 and the accurate angle displacement platform 4 that is installed on it, pedestal 3, back-up block 2, monochromator 1 around the rotary work table top.The scrambler that is installed in the stepper motor afterbody of accurate universal stage 5 is directly measured corner, through worm and wormwheel 1: 180 reduction gear ratio, obtains the actual rotational angle of rotary work table top, and angle precision can reach ± and 0.005 °;
Move accurate angle displacement platform 4 at last, the angle that offers the monochromatic neutron beam of neutron reflection experiment usefulness changes in θ=-10 °~10 ° of scopes, and concrete adjustment process is as follows:
The tilting table face of accurate angle displacement platform 4 keeps level, and the axis of rotation DD ' of the rotary work table top of accurate universal stage 5 as shown in Figure 1, knows according to direct reflection by the vertical center line BB ' of monochromator, the wavelength after monochromator 1 reflection
Figure BDA0000050720220000052
The flight of the parallel x axle of monochromatic neutron beam, i.e. θ=0 °; Monochromator 1 is around the pivot center CC ' rotation Δ θ of accurate angle displacement platform 4=-5 °, and the monochromatic neutron beam angle after monochromator 1 reflection changes 2 Δ θ=-10 °; When monochromator 1 around the pivot center CC ' rotation Δ θ of accurate angle displacement platform 4=5 °, the monochromatic neutron beam angle after monochromator 1 reflection changes 2 Δ θ=10 °.Monochromator 1 is around the pivot center CC ' rotation Δ θ angle of accurate angle displacement platform 4, and the monochromatic neutron beam angle after the monochromator reflection changes 2 Δ θ, for wavelength at any angle Monochromatic neutron beam all be positioned at the xOz plane;
Give the stepper motor energising of accurate angle displacement platform 4, drive the over-type worm gear in the accurate angle displacement platform 4, make of the pivot center CC ' rotation of the tilting table face of accurate angle displacement platform 4, thereby drive the rotation axis CC ' rotation of pedestal 3, back-up block 2, monochromator 1 around accurate angle displacement platform 4 along worm gear.The scrambler that is installed in the worm shaft end in the accurate angle displacement platform 4 is read the corner of worm screw, obtains the anglec of rotation of tilting table face according to 1: 304 reduction gear ratio of worm and wormwheel, angle precision ± 0.0015 °.

Claims (9)

1. the regulating device of neutron reflection spectrometer monochromator, it is characterized in that: described device comprises back-up block, pedestal, accurate angle displacement platform, accurate universal stage, precision level displacement platform and the precise height displacement platform that supports monochromator; Described accurate angle displacement platform by holder a and with can forming that described holder a flexibly connects along the accurate angle displacement arc table top that the arc track of described holder a is swung; Described accurate universal stage is made up of with the rotatable accurate rotary table top that is arranged on the described holder b holder b; Described precision level displacement platform is made up of with the precision level displacement table top that moves horizontally that is arranged on the described holder c holder c; Described precise height displacement platform is made up of with the liftable precise height displacement table top that is arranged on the described holder d holder d; Described back-up block is located on the described pedestal; Described pedestal is located on the described accurate angle displacement arc table top, and described holder a is located on the described accurate rotary table top, and described holder b is located on the described precision level displacement table top, and described holder c is located on the described precise height displacement table top.
2. regulating device according to claim 1 is characterized in that: the plane of incidence of described monochromator and surface level are at an angle of 90; The geometric center of described monochromator equals the height of the pivot center of described accurate angle displacement platform to described accurate angle displacement arc table top to the height of the bottom surface of described pedestal; The axis of rotation of described accurate rotary table top is by the geometric center of described monochromator; The axis of described precision level displacement platform and the axis of rotation of described accurate rotary table top intersect vertically; The median vertical line of described precise height displacement platform overlaps with the axis of rotation of described accurate rotary table top, and the axis of the median vertical line of described precise height displacement platform and described precision level displacement platform intersects vertically.
3. regulating device according to claim 1 and 2 is characterized in that: the accurate angle displacement arc table top of described accurate angle displacement platform links to each other with the stepper motor that can drive this precision angle displacement arc table top rotation by rotating mechanism.
4. regulating device according to claim 1 and 2 is characterized in that: the accurate rotary table top of described accurate universal stage links to each other with the stepper motor that can drive this precision rotary table top rotation by rotating mechanism.
5. regulating device according to claim 1 and 2 is characterized in that: the precision level displacement table top of described precision level displacement platform links to each other with the stepper motor that can drive this precision level displacement table-surface level displacement by travel mechanism.
6. regulating device according to claim 1 and 2 is characterized in that: the precise height displacement table top of described precise height displacement platform links to each other with the stepper motor that can drive this precise height displacement table top lifting by elevating mechanism.
7. regulating device according to claim 1 and 2 is characterized in that: the angle precision of described accurate universal stage is ± 0.005 °; The angle precision of described accurate angle displacement platform is ± 0.0015 °.
8. regulating device according to claim 1 and 2 is characterized in that: the bearing accuracy of described precision level displacement platform is ± 3 μ m; The bearing accuracy of described precise height displacement platform is ± 3 μ m.
9. regulating device according to claim 1 and 2 is characterized in that: described monochromator is the highly oriented pyrolytic graphite monochromator.
CN2011200710055U 2011-03-17 2011-03-17 Regulator for monochromator of neutron reflection spectrometer Expired - Fee Related CN201945692U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011200710055U CN201945692U (en) 2011-03-17 2011-03-17 Regulator for monochromator of neutron reflection spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011200710055U CN201945692U (en) 2011-03-17 2011-03-17 Regulator for monochromator of neutron reflection spectrometer

Publications (1)

Publication Number Publication Date
CN201945692U true CN201945692U (en) 2011-08-24

Family

ID=44473032

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011200710055U Expired - Fee Related CN201945692U (en) 2011-03-17 2011-03-17 Regulator for monochromator of neutron reflection spectrometer

Country Status (1)

Country Link
CN (1) CN201945692U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102221516A (en) * 2011-03-17 2011-10-19 中国科学院化学研究所 Adjusting device for monochromator of neutron reflecting spectrometer and method for adjusting monochromator by using same
CN104778986A (en) * 2015-04-03 2015-07-15 中国人民大学 Monochromator-shielding device for cold neutron spectrometers
CN105388169A (en) * 2015-11-10 2016-03-09 中国原子能科学研究院 Measurement device and method of filtering performance of neutron beam filter
CN112093520A (en) * 2020-09-24 2020-12-18 中国工程物理研究院核物理与化学研究所 Neutron spin turning device based on soft magnetic film and application thereof

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102221516A (en) * 2011-03-17 2011-10-19 中国科学院化学研究所 Adjusting device for monochromator of neutron reflecting spectrometer and method for adjusting monochromator by using same
CN102221516B (en) * 2011-03-17 2013-09-04 中国科学院化学研究所 Adjusting device for monochromator of neutron reflecting spectrometer and method for adjusting monochromator by using same
CN104778986A (en) * 2015-04-03 2015-07-15 中国人民大学 Monochromator-shielding device for cold neutron spectrometers
CN104778986B (en) * 2015-04-03 2017-03-01 中国人民大学 A kind of monochromator shielding device of cold neutrons spectrometer
CN105388169A (en) * 2015-11-10 2016-03-09 中国原子能科学研究院 Measurement device and method of filtering performance of neutron beam filter
CN105388169B (en) * 2015-11-10 2018-11-30 中国原子能科学研究院 Neutron beam filter strainability measuring device and method
CN112093520A (en) * 2020-09-24 2020-12-18 中国工程物理研究院核物理与化学研究所 Neutron spin turning device based on soft magnetic film and application thereof

Similar Documents

Publication Publication Date Title
CN102221516B (en) Adjusting device for monochromator of neutron reflecting spectrometer and method for adjusting monochromator by using same
CN201945692U (en) Regulator for monochromator of neutron reflection spectrometer
CN101344495B (en) Measuring apparatus for reflection index of wave suction material
CN103257150A (en) Crystal direction finder for directly measuring deflecting angle in crystal orientation and measurement method thereof
CN204649645U (en) Synchronous radiation microfocus sample parametric controller
CN103884490B (en) The method and apparatus measuring refraction of biprism rate based on optical lever
CN201266180Y (en) Measuring apparatus for reflection index of wave suction material
CN102175650A (en) Measuring device of continuous spectrum bidirectional reflectance distribution function
CN104777180B (en) Device and method for adjusting sample scattered plane of cold neutron triple-axis spectrometer
CN101995327A (en) Optical path structure for concave grating diffraction efficiency tester
CN202199931U (en) Laser scanning device for processing micro round hole on the basis of acoustooptic effect
CN101957257B (en) Measurement method of diffraction efficiency of concave grating
CN102288626A (en) Neutron texture testing equipment
CN110411377A (en) A kind of right angle detection regulating system and method
CN102735698B (en) Adjusting mechanism for neutron optical paths of neutron reflectometer-horizontal sample geometry
CN202066805U (en) Adjusting mechanism of neutron optical path of horizontal sample geometric neutron reflection spectrum instrument
CN106338840A (en) Surface wave field enhancement tunable total internal reflection optical excitation device
CN2758762Y (en) Automation X-ray director
US11761756B2 (en) Method and device for simultaneously detecting surface shapes and thickness distribution of inner and outer walls of thin-wall rotating body
CN109974587B (en) Geometric error compensation method for laser tracker
CN109211950B (en) Monochromatic neutron focusing device
CN202199930U (en) Laser scanning device for processing micro-circular aperture based on electro-optical effect
CN212569146U (en) Accurate range unit based on array mirror is markd
CN2898767Y (en) Angle measuring equipment of multifunctional boiler burner
CN108613641B (en) Two-dimentional orientation error precision measurement method for thin plate crystals

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110824

Termination date: 20150317

EXPY Termination of patent right or utility model