CN201909767U - Energy dispersive X-ray fluorescence spectrometer for analyzing irregular samples directly - Google Patents
Energy dispersive X-ray fluorescence spectrometer for analyzing irregular samples directly Download PDFInfo
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- CN201909767U CN201909767U CN2010206713940U CN201020671394U CN201909767U CN 201909767 U CN201909767 U CN 201909767U CN 2010206713940 U CN2010206713940 U CN 2010206713940U CN 201020671394 U CN201020671394 U CN 201020671394U CN 201909767 U CN201909767 U CN 201909767U
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Abstract
The utility model relates to an energy dispersive X-ray fluorescence spectrometer for analyzing and measuring irregular samples directly, which comprises an X-ray tube, a collimator, an optical filter, a carrier stage, a detector and an analyzing system. The carrier stage is arranged horizontally, samples are placed on the carrier stage, the X-ray tube is mounted below the carrier stage, X-rays emitted from the X-ray tube penetrates through the collimator and the optical filter to be perpendicular to the samples, the detector is mounted on the lower portion of the carrier stage by a set angle, and a cylindrical head of the detector is close to the samples and capable of receiving characteristic X-fluorescent light excited when the samples are irradiated by the X-rays. The energy dispersive X-ray fluorescence spectrometer can be widely applied to meeting environmental protection directive such as RoHS (restriction of hazardous substances) and the like and directly analyzing and measuring irregular complicated samples (such as circuit boards, components of electric devices and the like), and sample splitting is omitted.
Description
Technical field:
The utility model belongs to field of analytic instrument, relate to the special-purpose energy-dispersion X-ray fluorescence spectrometers of environmental protection instruction such as a kind of RoHS of adaptation, be meant a kind ofly especially, can make things convenient for the energy-dispersion X-ray fluorescence spectrometer that accurately measured zone is positioned with vertical irradiation light path at the irregular complex sample.
Background technology:
The RoHS instruction is the environmental protection instruction of a compulsory execution, and on July 1st, 2006, beginning was implemented in European Union member countries, and carry out in succession countries in the world such as the U.S., Japan, Korea S subsequently, and China came into effect on July 1st, 2007; Its main contents are for causing lead, cadmium, mercury, chromium VI, the PBBs of significant damage, the use of PBDE to environment and human body in the restriction electric equipment products, and the limit value standard is cadmium: 100ppm, and other material is 1000ppm.
Along with the enforcement in succession of RoHS instruction, the various environmental protection instructions of countries in the world are also constantly released, for example: automobile ELV instruction, the instruction of EN71 toy, Halogen instruction etc.
In order to guarantee that electric equipment products meets the requirement of environmental protection instructions such as RoHS, each production links such as the material at electronic product advances in factory, the production run, product export, all need electronic product is carried out large batch of sampling Detection, reach the limit value standard of environmental protection command request to guarantee product.
As element analysis technology means commonly used, energy-dispersion X-ray fluorescence spectrometer is obtaining using widely aspect environmental protection such as RoHS instruction screening detection, the management and control of electronic product environment-friendly quality owing to the technical characterstic that has fast, can't harm, the sample analysis cost is extremely low.Because at the X fluorescence spectrophotometer of environmental protection application of instruction such as RoHS, the concern constituent content in the measuring object is the trace of the ppm order of magnitude, therefore, can measurement result be most important accurately for obtaining for the concrete structure characteristics of light path.
Classical theory according to the energy-dispersive X-ray fluorescence (EDXRF) analytical technology, the source class X ray is 45 ° to the incident angle of sample, the reflection angle that sample X fluorescent x ray arrives detector also is 45 °, that is to say, when the angle of the X ray of source class incident and detector axis is 90 ° (as shown in Figure 1 and Figure 2), Compton scattering minimum in the X fluorescence spectrum helps the analysis of the constituent content of measured sample most; Therefore, the instruction of institute's environmental protection such as the RoHS that is useful on has at present all been adopted this kind light channel structure to the X-ray fluorescence spectra analyser of objectionable impurities screening detection.But because the technical characterstic of xrf analysis technology, it must be homogeneous material that x-ray fluorescence analysis requires the measured sample that hot spot shone, and can guarantee the accuracy of measuring; Therefore, adopt the X-ray fluorescence spectra analyser of this kind light channel structure to carry out accurate in locating to the facula position of the irregular sample of profile; Form the accuracy that comparatively complicated and electronic component in irregular shape, electronic unit, electronic structure spare, circuit board etc. are measured in order to guarantee material, need carry out destructiveness to above-mentioned parts splits, and split to homogeneous material always, just can use the Xray fluorescence spectrometer of this kind light channel structure to analyze.Like this, caused the analysis cost of Xray fluorescence spectrometer significantly to improve, significantly increase analysis time.
The utility model content:
At the problems referred to above, fundamental purpose of the present utility model is to provide a kind of novel pin to environmental protection such as RoHS instruction special-purpose, can make things convenient for the novel energy-dispersive X-ray fluorescence (EDXRF) spectroanalysis instrument that the irregular complex sample is directly carried out analysis to measure that accurately measured zone is positioned, under the prerequisite that guarantees accuracy of analysis, avoid measured sample is split and directly positions and measure, thereby can save significantly owing to the destructive machinery of measured sample being split the analysis cost expenditure that causes.
For achieving the above object, the utility model by the following technical solutions:
A kind of energy-dispersion X-ray fluorescence spectrometer that the irregular complex sample is directly carried out analysis to measure, comprise X-ray pipe, collimating apparatus, optical filter, article carrying platform, detector and analytic system, described article carrying platform horizontal positioned, sample is put on the article carrying platform, the X-ray pipe is installed in article carrying platform below, and its X ray that sends passes collimating apparatus and optical filter perpendicular to sample; Detector is installed in the article carrying platform bottom with a set angle, and the detector socket cap also can receive the feature X fluorescence of x-ray bombardment sample excitation near sample.
Wherein, the setting angle of detector and article carrying platform is an acute angle, can be 45 °.
Wherein, X-ray Guan Weiduan window pipe or side window pipe.Detector is a semiconductor detector, as Si-PIN detector or SDD detector.
Described energy-dispersion X-ray fluorescence spectrometer also is provided with camera head, comprise camera and catoptron, camera is installed in the side that the article carrying platform below is positioned at sample, and the X ray direction sent over against the X-ray pipe of level, catoptron and camera are 45 and are fixed on the article carrying platform below and are arranged in the X ray light path.
Adopt above design, the utility model has designed a kind of vertical irradiation light path, the axis of the X ray wire harness that the X-ray pipe produces and article carrying platform (measured sample surface) are in vertical state, even the measured sample shape is irregular like this, can't make the planes overlapping of measured sample surface and article carrying platform, also can accurately locate the x-ray irradiation area of measured sample accurately and conveniently, therefore need not measured sample is carried out complicated destructiveness fractionation and directly carries out analysis to measure, can avoid destruction to tested sample, compare with existing energy-dispersion X-ray fluorescence spectrometer, can reduce analysis cost significantly, shorten analysis time, simplify analysis process.The utility model is widely used in environmental protection such as RoHS instruction squadron's irregular complex sample (for example circuit board, electrical structure parts etc.) and directly carries out analysis to measure, and need not to carry out the fractionation of sample.
Description of drawings
Fig. 1 is the light path arrangement of prior art, can accurately locate the X-ray beam facula position for regular sample;
Fig. 2 is the light path arrangement of prior art, then can't accurately determine the irradiation position of X-ray beam hot spot for irregular sample (as circuit board, electronic package etc.);
Fig. 3 is the utility model parts assembly structure synoptic diagram;
Fig. 4 is the utility model light path arrangement, can accurately determine the irradiation position of X-ray beam hot spot for irregular sample (as circuit board, electronic package etc.).
Fig. 5 adds the camera head structural representation in the utility model.
Embodiment
The utility model provides a kind of and has used at environmental protection such as RoHS instructions, avoid sample is carried out the destructive energy-dispersion X-ray fluorescence spectrometer that splits, has similar composition with existing energy-dispersion X-ray fluorescence spectrometer, difference is to have designed a kind of vertical irradiation light path, the axis of the X ray wire harness that the X-ray pipe produces and article carrying platform (measured sample surface) are in vertical state, even the measured sample shape is irregular like this, can't make the planes overlapping of measured sample surface and article carrying platform, also can accurately locate the x-ray irradiation area of measured sample accurately and conveniently.Below in conjunction with accompanying drawing the utility model is described in further detail.
Fig. 3 has shown the assembling synoptic diagram of a basic embodiment of the present utility model, wherein, article carrying platform 1 horizontal positioned, the detection faces of sample S under place (referring to Fig. 4) on the article carrying platform 1, X-ray pipe 2 is installed in article carrying platform 1 below by a fixture 4, and after making the X ray that sends pass collimating apparatus and optical filter (not shown) vertical irradiation to sample S; Detector 3 is installed in the article carrying platform bottom with a set angle by a connection piece 5, the close sample S of the socket cap of detector 3 is to receive the feature X fluorescence of x-ray bombardment sample excitation as much as possible, the setting angle of detector 3 and article carrying platform 1 can be selected the optional position of 0-90 ° (not containing end value), for making things convenient for putting of parts, generally select 45 ° to be advisable.Thus, and in conjunction with referring to light path shown in Figure 4, the X ray vertical irradiation sample S that X-ray pipe 2 sends, irregular sample S by vertical excitation of X-rays produce feature X fluorescence (sending), detector 3 to all directions a certain angle receive this feature X fluorescence and enter again follow-up system finish measured sample in the analysis of constituent content.The geometric arrangement of Fig. 4 light path also shows, when measuring irregular sample (as complex samples such as circuit board, electronic packages), and facula position that can the accurate in locating X-ray beam.
In the utility model, the X-ray pipe is an x-ray source, can adopt existing end window pipe or side window pipe, directly with article carrying platform is fixed or fix with other tower structure of instrument, the energy vertical irradiation is to sample after satisfying X ray that the X-ray pipe sends during installation and passing collimating apparatus and optical filter; Detector can adopt semiconductor detector (as Si-PIN detector, SDD detector etc.), directly and article carrying platform is fixed or fix with other tower structure of instrument, satisfies it during installation can receive the feature X fluorescence that sample sends; Other parts all can adopt the existing parts in the existing energy-dispersion X-ray fluorescence spectrometer.
In the utility model, camera head can be established so that the real time monitoring sample state, as shown in Figure 5, camera 6 is installed in the side (right-hand at X-ray beam shown in the figure) that article carrying platform 1 below is positioned at sample, and the X ray direction sent over against X-ray pipe 2 of level, one catoptron 7 and camera 6 are 45 and are fixed on article carrying platform 1 below and are arranged in the X-ray beam light path, so can take a picture to the tested position of sample and export display terminal to, so that the real time monitoring sample state by the reflected light of camera 6 and catoptron 7.
Vertical irradiation light path device of the present utility model, xrf analysis device structure with respect to environmental protection such as existing RoHS instruction, have simple in structure, X-ray beam spot location accurately and reliably, thereby can need not to split, directly erose sample is carried out the advantage of xrf analysis; Can save sample significantly and split the analysis cost that causes, shorten analysis time, flow process simplifies the operation.
Claims (9)
1. energy-dispersion X-ray fluorescence spectrometer that the irregular complex sample is directly carried out analysis to measure, comprise X-ray pipe, collimating apparatus, optical filter, article carrying platform, detector and analytic system, it is characterized in that: described article carrying platform horizontal positioned, sample is put on the article carrying platform, the X-ray pipe is installed in article carrying platform below, and its X ray that sends passes collimating apparatus and optical filter perpendicular to sample; Detector is installed in the article carrying platform bottom with a set angle, and the detector socket cap also can receive the feature X fluorescence of x-ray bombardment sample excitation near sample.
2. according to the described energy-dispersion X-ray fluorescence spectrometer of claim 1, it is characterized in that: the setting angle of detector and article carrying platform is an acute angle.
3. according to the described energy-dispersion X-ray fluorescence spectrometer of claim 2, it is characterized in that: the setting angle of detector and article carrying platform is 45 °.
4. according to claim 1 or 2 or 3 described energy-dispersion X-ray fluorescence spectrometers, it is characterized in that: X-ray Guan Weiduan window pipe or side window pipe.
5. according to claim 1 or 2 or 3 described energy-dispersion X-ray fluorescence spectrometers, it is characterized in that: detector is a semiconductor detector.
6. according to the described energy-dispersion X-ray fluorescence spectrometer of claim 5, it is characterized in that: detector is Si-PIN detector or SDD detector.
7. according to claim 1 or 2 or 3 described energy-dispersion X-ray fluorescence spectrometers, it is characterized in that: also be provided with camera head, comprise camera and catoptron, camera is installed in the side that the article carrying platform below is positioned at sample, and the X ray direction sent over against the X-ray pipe of level, catoptron and camera are 45 and are fixed on the article carrying platform below and are arranged in the X ray light path.
8. according to the described energy-dispersion X-ray fluorescence spectrometer of claim 4, it is characterized in that: also be provided with camera head, comprise camera and catoptron, camera is installed in the side that the article carrying platform below is positioned at sample, and the X ray direction sent over against the X-ray pipe of level, catoptron and camera are 45 and are fixed on the article carrying platform below and are arranged in the X ray light path.
9. according to the described energy-dispersion X-ray fluorescence spectrometer of claim 5, it is characterized in that: also be provided with camera head, comprise camera and catoptron, camera is installed in the side that the article carrying platform below is positioned at sample, and the X ray direction sent over against the X-ray pipe of level, catoptron and camera are 45 and are fixed on the article carrying platform below and are arranged in the X ray light path.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010206713940U CN201909767U (en) | 2010-12-21 | 2010-12-21 | Energy dispersive X-ray fluorescence spectrometer for analyzing irregular samples directly |
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| CN2010206713940U CN201909767U (en) | 2010-12-21 | 2010-12-21 | Energy dispersive X-ray fluorescence spectrometer for analyzing irregular samples directly |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102967530A (en) * | 2012-11-20 | 2013-03-13 | 中国原子能科学研究院 | L absorption edge density meter |
| CN103185903A (en) * | 2011-12-27 | 2013-07-03 | 上海世鹏实验室科技发展有限公司 | Shoe detecting device |
| CN103293174A (en) * | 2012-03-01 | 2013-09-11 | 纳优科技（北京）有限公司 | X ray fluorescence spectrophotometer for multi-detectors and multi-light pipes and X ray fluorescence spectrum detection method for large-volume sample |
| CN103852480A (en) * | 2012-12-05 | 2014-06-11 | 江西纳优科技有限公司 | X-fluorescence spectrophotometer for detecting harmful substances in edible hollow capsules and detection method for harmful substances in edible hollow capsules |
| CN104833688A (en) * | 2015-04-20 | 2015-08-12 | 绍兴文理学院 | Underwater in-suit X-ray fluorescence spectrum analysis unevenness effect weakening device |
| CN107167486A (en) * | 2017-06-29 | 2017-09-15 | 苏州浪声科学仪器有限公司 | A kind of X-ray fluorescence spectrometer with display function |
| CN107228875A (en) * | 2017-06-29 | 2017-10-03 | 苏州浪声科学仪器有限公司 | A kind of X-ray fluorescence spectrometer |
| CN107328801A (en) * | 2017-06-29 | 2017-11-07 | 苏州浪声科学仪器有限公司 | A kind of XRF sample detection means |
| CN107328800A (en) * | 2017-06-29 | 2017-11-07 | 苏州浪声科学仪器有限公司 | A kind of X-ray fluorescence spectra analysis method |
| CN107389715A (en) * | 2017-06-29 | 2017-11-24 | 苏州浪声科学仪器有限公司 | A kind of XRF collimating components |
| CN107389713A (en) * | 2017-06-28 | 2017-11-24 | 苏州浪声科学仪器有限公司 | A kind of x-ray detection system of switching light filter |
| CN108844985A (en) * | 2018-06-25 | 2018-11-20 | 上海新漫传感技术研究发展有限公司 | The interior arrangement of Xray fluorescence spectrometer protects structure |
| CN111595883A (en) * | 2020-06-30 | 2020-08-28 | 中国科学院南京地质古生物研究所 | Nondestructive analysis method for surface element distribution of irregular solid material in atmospheric environment |
| CN114428093A (en) * | 2020-09-29 | 2022-05-03 | 中国石油化工股份有限公司 | Measuring point positioning device based on energy spectrometer, energy spectrum testing system and testing method |
-
2010
- 2010-12-21 CN CN2010206713940U patent/CN201909767U/en not_active Expired - Lifetime
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103185903A (en) * | 2011-12-27 | 2013-07-03 | 上海世鹏实验室科技发展有限公司 | Shoe detecting device |
| CN103293174A (en) * | 2012-03-01 | 2013-09-11 | 纳优科技（北京）有限公司 | X ray fluorescence spectrophotometer for multi-detectors and multi-light pipes and X ray fluorescence spectrum detection method for large-volume sample |
| CN102967530A (en) * | 2012-11-20 | 2013-03-13 | 中国原子能科学研究院 | L absorption edge density meter |
| CN103852480A (en) * | 2012-12-05 | 2014-06-11 | 江西纳优科技有限公司 | X-fluorescence spectrophotometer for detecting harmful substances in edible hollow capsules and detection method for harmful substances in edible hollow capsules |
| CN103852480B (en) * | 2012-12-05 | 2016-03-30 | 江西纳优科技有限公司 | A kind of edibility Capsules objectionable constituent detection X fluorescence spectrometer and detection method thereof |
| CN104833688A (en) * | 2015-04-20 | 2015-08-12 | 绍兴文理学院 | Underwater in-suit X-ray fluorescence spectrum analysis unevenness effect weakening device |
| CN107389713A (en) * | 2017-06-28 | 2017-11-24 | 苏州浪声科学仪器有限公司 | A kind of x-ray detection system of switching light filter |
| CN107328801A (en) * | 2017-06-29 | 2017-11-07 | 苏州浪声科学仪器有限公司 | A kind of XRF sample detection means |
| CN107228875A (en) * | 2017-06-29 | 2017-10-03 | 苏州浪声科学仪器有限公司 | A kind of X-ray fluorescence spectrometer |
| CN107328800A (en) * | 2017-06-29 | 2017-11-07 | 苏州浪声科学仪器有限公司 | A kind of X-ray fluorescence spectra analysis method |
| CN107389715A (en) * | 2017-06-29 | 2017-11-24 | 苏州浪声科学仪器有限公司 | A kind of XRF collimating components |
| CN107167486A (en) * | 2017-06-29 | 2017-09-15 | 苏州浪声科学仪器有限公司 | A kind of X-ray fluorescence spectrometer with display function |
| CN108844985A (en) * | 2018-06-25 | 2018-11-20 | 上海新漫传感技术研究发展有限公司 | The interior arrangement of Xray fluorescence spectrometer protects structure |
| CN111595883A (en) * | 2020-06-30 | 2020-08-28 | 中国科学院南京地质古生物研究所 | Nondestructive analysis method for surface element distribution of irregular solid material in atmospheric environment |
| CN111595883B (en) * | 2020-06-30 | 2023-02-17 | 中国科学院南京地质古生物研究所 | Nondestructive analysis method for surface element distribution of irregular solid material in atmospheric environment |
| CN114428093A (en) * | 2020-09-29 | 2022-05-03 | 中国石油化工股份有限公司 | Measuring point positioning device based on energy spectrometer, energy spectrum testing system and testing method |
| CN114428093B (en) * | 2020-09-29 | 2024-05-28 | 中国石油化工股份有限公司 | Measuring point positioning device based on energy spectrometer, energy spectrum testing system and testing method |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
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| CX01 | Expiry of patent term |
Granted publication date: 20110727 |