CN201883142U - Powder membrane-coating device - Google Patents
Powder membrane-coating device Download PDFInfo
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- CN201883142U CN201883142U CN2010206451562U CN201020645156U CN201883142U CN 201883142 U CN201883142 U CN 201883142U CN 2010206451562 U CN2010206451562 U CN 2010206451562U CN 201020645156 U CN201020645156 U CN 201020645156U CN 201883142 U CN201883142 U CN 201883142U
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Abstract
The utility model relates to a powder membrane-coating device which belongs to the technical field of membrane-coating equipment, and comprises a vacuum chamber, a hot filament electrode, a magnetic control target, a multi-station rotary target, an ion gun and a rebounding vibration device, wherein the hot filament electrode, the magnetic control target, the multi-station rotary target and the ion gun are arranged above a sample disc of the rebounding vibration device in the vacuum chamber; ion beams of the ion gun are reflected to the sample disc by the target surface of the multi-station rotary target, and the center line of the magnetic control target is intercrossed with the sample disc. The powder membrane coating device can extend the distance between adjacent particles of powder, so as to reduce the frication among the particles, avoid from being abraded by a coated layer, and enable each surface of each powder particle to have the chance of facing the target surface or the hot filament electrode, so that coating of each surface of the powder particle is realized.
Description
Technical field
The utility model belongs to the filming equipment technical field, particularly relates to a kind of powder coatings equipment that carries out comprehensive plating on the powder base material.
Background technology
In existing sputter coating technology, all be by the plating sample be planar or the sample of wire on carry out plated film, can't on powdered sample, carry out plated film.
Summary of the invention
At the technical problem of above-mentioned existence, the utility model provide a kind of can be on powdered sample the powder coatings equipment of plated film.
The technical scheme that its technical problem that solves the utility model adopts is:
A kind of powder coatings equipment, comprise that vacuum chamber, heated filament electrode, magnetic controlling target, multi-work-station change target, ion gun and bounce-back vibrating device, the sample disc top of bounce-back vibrating device is provided with heated filament electrode, magnetic controlling target, multi-work-station commentaries on classics target and ion gun in the described vacuum chamber, the ionic fluid of ion gun reflexes to sample disc by the target surface that multi-work-station changes target, and the medullary ray of magnetic controlling target meets at sample disc.
Described bounce-back vibrating device comprises vibrator, take-up device, the swing frame, first drive unit, second drive unit, the 3rd drive unit, the pan carriage and the frame that swings, described swing frame is connected in a end on the frame that swings by second bearing pin and the second slide block axle, the frame that swings is connected on the pan carriage by first bearing pin and the first slide block axle, first drive unit is connected with first slide block on the pan carriage, second drive unit is connected with second slide block on the frame that swings, the 3rd drive unit is connected with pan carriage, and vibrator is connected on the swing frame by take-up device.
Described first drive unit, second drive unit and the 3rd drive unit include motor, crank and connecting rod, and crank one end is connected with motor output shaft, and the other end is connected with connecting rod.
The beneficial effects of the utility model are: draw back distance between adjacent particle, make it to reduce the friction between the particle, avoid being worn away, make each face of each powder particle can both produce chance, thereby be implemented on the powder particle plated film on each face towards target surface or heated filament electrode by coating.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Fig. 2 is the structural representation of bounce-back mechanism among Fig. 1.
Among the figure: 1, vacuum chamber, 2, the heated filament electrode, 3, magnetic controlling target, 4, multi-work-station changes target, 5, ion gun, 6, the bounce-back vibrating device, 7, sample disc, 8, spring tensioning means, 9, the swing frame, 10, the electromagnetism oscillator, 11, second motor, 12, first motor, 13, second crank, 14, second connecting rod, 15, pan carriage, 16, second slide block, 17, the frame that swings, 18, first crank, 19, first connecting rod, 20, first slide block, 21, third connecting rod, 22, the 3rd crank, 23, the 3rd motor, 24, first rotating shaft, 25, second rotating shaft, 26, the first slide block axle, 27. second slide block axles.
Embodiment
Below in conjunction with drawings and Examples the utility model is further specified
Embodiment: as shown in Figure 1 and Figure 2, the utility model comprises that vacuum chamber 1, heated filament electrode 2, magnetic controlling target 3, four stations change target 4, ion gun 5 and bounce-back vibrating device 6, sample disc 7 tops of bounce-back vibrating device 6 are provided with heated filament electrode 2, magnetic controlling target 3, four stations commentaries on classics target 4 and ion gun 5 in the described vacuum chamber 1, the ionic fluid of ion gun 5 reflexes to sample disc 7 by the target surface that four stations change target 4, and the medullary ray of magnetic controlling target 3 meets at sample disc 7.
This routine described bounce-back vibrating device 6 comprises hertz oscilltor 10, spring tensioning means 8, swing frame 9, first drive unit, second drive unit, the 3rd drive unit, pan carriage 15 and the frame 17 that swings, described first drive unit of this example, second drive unit and the 3rd drive unit include motor, crank and connecting rod, crank one end is connected with motor output shaft, and the other end is connected with connecting rod; Described swing frame 9 is connected in a end on the frame 17 that swings by the second slide block axle 27 and two ends second rotating shaft 25 thereof, the frame 17 that swings is connected on the pan carriage 15 by the first slide block axle 26 and two ends first rotating shaft 24 thereof respectively, first motor 12 places on the pan carriage 15, first crank 13 that is connected with its output shaft is connected with first slide block 16 on the pan carriage 15 by first connecting rod 14, second motor 12 places on the frame 17 that swings, second crank 18 that is connected with its output shaft is connected with second slide block 20 on the frame 17 that swings by second connecting rod 19, the 3rd crank 22 is installed on the 3rd motor 23 output shafts, be connected with pan carriage 15 by third connecting rod 21, electromagnetic vibrator 10 is connected with swing frame 9 by spring tensioning means 8.
This routine described spring tensioning means 8 is four springs, evenly is provided with around electromagnetic vibrator 10.
Working process of the present invention:
Under the present invention in working order, the ionic fluid that ion gun 5 sends comes out the target as sputter that four stations change on the target 4.The sample disc 7 that is placed with powder is put on the hertz oscilltor 10 of bounce-back vibrating device 6, effect is to make powder produce spring up and down to rise and fall and draw back distance between powder particle, spring tensioning means 8 makes sample disc 7 be adjacent to hertz oscilltor 10, the rotation of second motor, 11 output shafts, drive second crank 18, second connecting rod 19,20 motions of second slide block, make swing frame 9 produce swing around second rotating shaft 25, make powder produce the rolling of front and back, the rotation of first motor, 12 output shafts, drive first crank 13, first connecting rod 14,16 motions of first slide block, the frame 6 that swings is produced around first rotating shaft 24 to swing, about being produced, powder rolls, the rotation of the 3rd motor 23 output shafts, drive the 3rd crank 22, third connecting rod 21, thereby drive pan carriage 15 and produce translational movement back and forth, make powder translation one segment distance that has not been shaken of bottom after, avoid top powder and can vibrate.The material that sputters out on the target is splashed on the powder particle of motion, thereby finishes the powder coatings process.
Claims (3)
1. powder coatings equipment, it is characterized in that: comprise that vacuum chamber, heated filament electrode, magnetic controlling target, multi-work-station change target, ion gun and bounce-back vibrating device, the sample disc top of bounce-back vibrating device is provided with heated filament electrode, magnetic controlling target, multi-work-station commentaries on classics target and ion gun in the described vacuum chamber, the ionic fluid of ion gun reflexes to sample disc by the target surface that multi-work-station changes target, and the medullary ray of magnetic controlling target meets at sample disc.
2. powder coatings equipment according to claim 1, it is characterized in that: described bounce-back vibrating device comprises vibrator, take-up device, the swing frame, first drive unit, second drive unit, the 3rd drive unit, the pan carriage and the frame that swings, described swing frame is connected in a end on the frame that swings by second bearing pin and the second slide block axle, the frame that swings is connected on the pan carriage by first bearing pin and the first slide block axle, first drive unit is connected with first slide block on the pan carriage, second drive unit is connected with second slide block on the frame that swings, the 3rd drive unit is connected with pan carriage, and vibrator is connected on the swing frame by take-up device.
3. powder coatings equipment according to claim 2 is characterized in that: described first drive unit, second drive unit and the 3rd drive unit include motor, crank and connecting rod, and crank one end is connected with motor output shaft, and the other end is connected with connecting rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206451562U CN201883142U (en) | 2010-12-07 | 2010-12-07 | Powder membrane-coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206451562U CN201883142U (en) | 2010-12-07 | 2010-12-07 | Powder membrane-coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201883142U true CN201883142U (en) | 2011-06-29 |
Family
ID=44180680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206451562U Expired - Fee Related CN201883142U (en) | 2010-12-07 | 2010-12-07 | Powder membrane-coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201883142U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102534520A (en) * | 2010-12-07 | 2012-07-04 | 中国科学院沈阳科学仪器研制中心有限公司 | Powder coating device |
| CN103361615A (en) * | 2013-06-24 | 2013-10-23 | 南京航空航天大学 | Equipment for depositing nano coating of double-cathode plasma on surface of diamond and process |
| CN107022743A (en) * | 2016-02-01 | 2017-08-08 | 上海朗亿功能材料有限公司 | A kind of magnetic-control sputtering continuous plating equipment for micro-nano powder |
| WO2021008998A1 (en) | 2019-07-12 | 2021-01-21 | VON ARDENNE Asset GmbH & Co. KG | Coating assembly and method |
-
2010
- 2010-12-07 CN CN2010206451562U patent/CN201883142U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102534520A (en) * | 2010-12-07 | 2012-07-04 | 中国科学院沈阳科学仪器研制中心有限公司 | Powder coating device |
| CN103361615A (en) * | 2013-06-24 | 2013-10-23 | 南京航空航天大学 | Equipment for depositing nano coating of double-cathode plasma on surface of diamond and process |
| CN103361615B (en) * | 2013-06-24 | 2015-09-09 | 南京航空航天大学 | The equipment of diamond surface double cathode plasma deposition nano coating and technique |
| CN107022743A (en) * | 2016-02-01 | 2017-08-08 | 上海朗亿功能材料有限公司 | A kind of magnetic-control sputtering continuous plating equipment for micro-nano powder |
| CN107022743B (en) * | 2016-02-01 | 2019-04-02 | 上海朗亿功能材料有限公司 | A kind of magnetic-control sputtering continuous plating equipment for micro-nano powder |
| WO2021008998A1 (en) | 2019-07-12 | 2021-01-21 | VON ARDENNE Asset GmbH & Co. KG | Coating assembly and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110629 Termination date: 20161207 |