CN201864790U - Thermal field loading and unloading vehicle for a silicone single crystal furnace - Google Patents
Thermal field loading and unloading vehicle for a silicone single crystal furnace Download PDFInfo
- Publication number
- CN201864790U CN201864790U CN2010206102824U CN201020610282U CN201864790U CN 201864790 U CN201864790 U CN 201864790U CN 2010206102824 U CN2010206102824 U CN 2010206102824U CN 201020610282 U CN201020610282 U CN 201020610282U CN 201864790 U CN201864790 U CN 201864790U
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- unloading vehicle
- arm
- lifting device
- thermal field
- loading
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Abstract
The utility model discloses a thermal field loading and unloading vehicle for a silicone single crystal furnace. The loading and unloading vehicle comprises a bracket, a lead screw and a lifting device, wherein a power source is arranged on the bracket; the bracket comprises a baseplate and a vertical rack arranged on the baseplate; a universal wheel is arranged at the bottom of the baseplate; the lead screw is in rotatable connection with the vertical rack and is connected with a lifting motor arranged on the bracket; the lifting device is in threaded connection with the lead screw; a suspension arm is connected to the lifting device; and a lifting hook is arranged on the suspension arm. As the lead screw is arranged, the lifting device is in threaded fit with the lead screw, and the suspension arm with the lifting hook is connected to the lifting device, the loading and unloading vehicle has the advantages that the lifting device can move up and down in the axial direction of the lead screw according to different rotation directions of the lead screw; and when the lifting device moves to a proper position, the lifting hook is hung into a lifting ring of a tooling appliance to lift an object. As the universal wheel is arranged at the bottom of the bracket, the loading and unloading vehicle can integrally move to a position near a material convey vehicle, and the tooling appliance can be transported to the material convey vehicle or a tooling table.
Description
Technical field
The utility model relates to the water charging system technical field, particularly a kind of silicon monocrystalline furnace thermal field loading-unloading vehicle.
Background technology
Single crystal growing furnace is a kind of in inert gas environment, with the fusing of polycrystalline materials such as polysilicon, uses the equipment of Grown by CZ Method dislocation-free monocrystalline with graphite heater.
Crystal draws and finishes after crystal is taken out in overcooling, also have the remaining material (pot bottom material) that remains to need the artificial prepurging that takes out in the stove in the quartz crucible, owing to temperature too high (300 ℃-400 ℃), operation process easily produces personnel safety and material security incident, so need to prolong cooling time, row is taken out of again.
Usually after prepurging finished, the reduction thermal field was installed and is put into quartz crucible, the operating personnel at the scene in the furnace chamber the silicon material quartz crucible of little by little packing into, affected by environment, high temperature is easily suffered heatstroke, unholiness bodies such as workshop dust, thermal field pollution enter the silicon material and cause quality to descend.
The utility model content
In view of this, the utility model provides a kind of silicon monocrystalline furnace thermal field loading-unloading vehicle, to avoid high temperature the operating personnel is injured, and reduces prepurging and charge time, increases work efficiency.
For achieving the above object, the utility model provides following technical scheme:
A kind of silicon monocrystalline furnace thermal field loading-unloading vehicle comprises:
Support, this vehicle frame is provided with power supply, and this support comprises base plate and the stand that is arranged on this base plate, and described base plate bottom is provided with universal wheel;
The rotating leading screw that is connected in the described stand, described leading screw links to each other with lift motor on being arranged on described support;
With the lifting device that described threads of lead screw is connected, be connected with arm on this lifting device, described arm is provided with suspension hook.
Preferably, in above-mentioned silicon monocrystalline furnace thermal field loading-unloading vehicle, also comprise being arranged on the registration arm that links to each other with the furnace chamber flange of single crystal growing furnace in the described stand.
Preferably, in above-mentioned silicon monocrystalline furnace thermal field loading-unloading vehicle, described stand is provided with chute, described registration arm is provided with the projection adaptive with described chute, described registration arm is assemblied on the chute of described stand by this projection, and fastening by screw, and described registration arm and described projection are rotatably connected.
Preferably, in above-mentioned silicon monocrystalline furnace thermal field loading-unloading vehicle, also comprise the guide rail that is arranged on described leading screw both sides, described lifting device is provided with guide plate, and this guide plate is provided with respectively the pilot hole that the guide rail with both sides is slidingly matched.
Preferably, in above-mentioned silicon monocrystalline furnace thermal field loading-unloading vehicle, described arm is connected by first bearing pin that vertically is provided with described lifting device.
Preferably, in above-mentioned silicon monocrystalline furnace thermal field loading-unloading vehicle, also comprise intermediate connector, described intermediate connector is connected by first bearing pin that vertically is provided with described lifting device, and described intermediate connector is connected by horizontally disposed second bearing pin with described arm.
Preferably, in above-mentioned silicon monocrystalline furnace thermal field loading-unloading vehicle, also comprise dismountable bracing frame that is supported between described arm and the described lifting device.
Preferably, in above-mentioned silicon monocrystalline furnace thermal field loading-unloading vehicle, described arm is axially arranged with chute along it, and described suspension hook is provided with the projection adaptive with described chute, and described suspension hook is assemblied on the chute of described arm by this projection, and fastening by screw.
Preferably, in above-mentioned silicon monocrystalline furnace thermal field loading-unloading vehicle, described lifting device is provided with the limiting section of the described arm angle of rotation of restriction.
Preferably, in above-mentioned silicon monocrystalline furnace thermal field loading-unloading vehicle, described universal wheel is provided with brake facing, and the pilot lever of this silicon monocrystalline furnace thermal field loading-unloading vehicle links to each other with described brake facing by brake cable.
From above-mentioned technical scheme as can be seen, the utility model is being by being provided with leading screw, and this leading screw is linked to each other with lift motor, and thread fit has lifting device on this leading screw, and is connected with arm on this lifting device, and arm is provided with suspension hook.Startup by lift motor, can drive leading screw along its axis rotation, direction difference by the leading screw rotation, can make lifting device axially moving up and down along this leading screw, when reaching correct position, suspension hook is hung in the suspension ring of machine equipment into, the object of slinging then looks underbody is without hindrance promptly to be ended.Because the bottom of support is provided with universal wheel, therefore can wholely move this silicon monocrystalline furnace thermal field loading-unloading vehicle near the mass transport car, machine equipment is allocated and transported to mass transport car or tooling platform.Also can finish pre-charging operation by the loading-unloading vehicle that the utility model provides, soon install the transport trolley of silicon material in advance, move to this loading-unloading vehicle one side, after the lifting utensil is installed, suspension hook is hung in the suspension ring and rises, extremely accessible stopping to rise, and when moving to the corresponding position, the decline object is put into stove and promptly finished pre-charging operation.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below, apparently, accompanying drawing in describing below only is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
The structural representation of the silicon monocrystalline furnace thermal field loading-unloading vehicle that Fig. 1 provides for the utility model embodiment;
Fig. 2 is the left view of Fig. 1;
Fig. 3 is the partial enlarged drawing of A among Fig. 1.
Embodiment
The utility model discloses a kind of silicon monocrystalline furnace thermal field loading-unloading vehicle, the operating personnel is injured, reduce prepurging and charge time, increase work efficiency to avoid high temperature.
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
See also Fig. 1-Fig. 3, the structural representation of the silicon monocrystalline furnace thermal field loading-unloading vehicle that Fig. 1 provides for the utility model embodiment, Fig. 2 is the left view of Fig. 1, Fig. 3 is the partial enlarged drawing of A among Fig. 1.
The silicon monocrystalline furnace thermal field loading-unloading vehicle that the utility model provides comprises: support, leading screw 8, lift motor 9 and lifting device 5.Wherein, vehicle frame is the support frame of whole loading-unloading vehicle, for miscellaneous part provides the basis is installed.Support is provided with electric box 2, is provided with in the electric box 2 to be the power supply of lift motor 9 power supplies and the controlling elements of control action.This support specifically comprises base plate and the stand 1 that is arranged on this base plate, and described base plate bottom is provided with universal wheel 4, and the silicon monocrystalline furnace thermal field loading-unloading vehicle is realized walking by universal wheel 4.
Leading screw 8 rotating being connected in the described stand 1, and link to each other with lift motor 9 on being arranged on described support.The two ends up and down of leading screw 8 can be assemblied in the stand 1 by bearing, therefore can limit moving axially of leading screw, keep the degree of freedom that it rotates around axis.Lifting device 5 is threaded with leading screw 8, and is concrete, can be provided with and leading screw 8 nut engaged at lifting device 5, is connected with arm 10 on this lifting device 5, and described arm 10 is provided with suspension hook 11.
The utility model is being by being provided with leading screw 8, and this leading screw 8 is linked to each other with lift motor 9, and thread fit has lifting device 5 on this leading screw 8, and is connected with arm 10 on this lifting device 5, and arm 10 is provided with suspension hook 11.Startup by lift motor 9, can drive leading screw 8 around its axis rotation, direction difference by leading screw 8 rotations, can make lifting device 5 axially moving up and down along this leading screw 8, when reaching correct position, suspension hook 11 is hung in the suspension ring of machine equipment, start lift motor 9 then, make lifting device 5 object of slinging that rises, promptly end to underbody is without hindrance.Because the bottom of support is provided with universal wheel 4, therefore can wholely move this silicon monocrystalline furnace thermal field loading-unloading vehicle near the mass transport car, machine equipment is allocated and transported to mass transport car or tooling platform.Also can finish pre-charging operation by the loading-unloading vehicle that the utility model provides, soon install the transport trolley of silicon material in advance, move to this loading-unloading vehicle one side, after the lifting utensil is installed, suspension hook 11 is hung in the suspension ring and rises, extremely accessible stopping to rise, and when moving to the corresponding position by universal wheel 4, the decline object is put into stove and promptly finished pre-charging operation.
Further in order to optimize technique scheme, the utility model can also comprise being arranged on and is used for the registration arm 13 that links to each other with the furnace chamber flange of single crystal growing furnace in the described stand 1.Before the loading-unloading vehicle that the utility model is provided places single crystal growing furnace, after reaching suitable distance, registration arm 13 is locked on the furnace chamber flange, thereby can improve the stability of loading-unloading vehicle, avoid in loading and unloading during material, loading-unloading vehicle moves the drawback of bringing that can't be accurately the suspension ring on the material and the suspension hook on the loading-unloading vehicle 11 be buckled.After material is sling, registration arm 13 can be unclamped, mobile then loading-unloading vehicle is to the corresponding position.
In order to adapt to the furnace chamber flange of different heights, the utility model is provided with chute in stand 1, and registration arm 13 is provided with the projection adaptive with described chute, and described registration arm 13 is assemblied on the chute of described stand 1 by this projection, and fastening by screw.Projection can slide in chute, thus the vertical height of adjustable whole registration arm 13, to adapt to the furnace chamber flange height of various single crystal growing furnaces.After being adjusted to proper height, projection is locked in the chute with stationary positioned arm 13 by screw.Registration arm 13 is rotatably connected with projection, and promptly when not needing registration arm 13 location, registration arm 13 can be sagging collapsed state automatically by the effect of gravity, to save the space.
In order to improve the stability that lifting device 5 moves up and down, the utility model can also comprise the guide rail 14 that is arranged on described leading screw 8 both sides, and described lifting device 5 is provided with guide plate, and this guide plate is provided with respectively the pilot hole that the guide rail 14 with both sides is slidingly matched.By cooperating of guide rail 14 and pilot hole, guide rail 14 can be lifting device 5 guide effect is provided, and has improved the stability that lifting device 5 moves up and down, and has avoided the insufficient rigidity in lifting device 5 moving process and the drawback of poor stability.
Further in order to optimize technique scheme, arm 10 is connected by first bearing pin 61 that vertically is provided with described lifting device 5, so arm 10 can be right its left-right rotation of turning axle with first bearing pin 61.Behind the object of slinging, after move loading-unloading vehicle to hoisting object and shift out furnace chamber, swinging boom 10 is to the top of transport trolley then, the decline arm can directly be placed on object on the transport trolley.
Further in order to optimize technique scheme, the utility model can also comprise intermediate connector 62, described intermediate connector 62 is connected by first bearing pin 61 that vertically is provided with described lifting device 5, and described intermediate connector 62 is connected by horizontally disposed second bearing pin 15 with described arm 10.Be connected by horizontally disposed second bearing pin 15 with intermediate connector 62 by arm 10, so arm 10 can be the turning axle rotation with this second bearing pin 15.Because second bearing pin 15 is horizontally disposed with, so arm 10 can be rotated down.After material handling finished, the arm 10 that can hang down was to save the space and to avoid when the mobile loading-unloading vehicle interference to other equipment.
For rigidity and the intensity that improves arm 10, the utility model can also comprise dismountable bracing frame 7 that is supported between described arm 10 and the described lifting device 5.When needs lift, then bracing frame 7 is supported between arm 10 and the described lifting device 5, to improve the rigidity of arm 10, in the time need not lifting, then dismantle this bracing frame 7, and the arm 10 that hangs down, to save the space and to avoid when the mobile loading-unloading vehicle interference to other equipment.
Further in order to optimize technique scheme, it is axially arranged with chute to the utility model in arm 10 upper edges, described suspension hook 11 is provided with the projection adaptive with described chute, and described suspension hook 11 is assemblied on the chute of described arm 10 by this projection, and fastening by screw.Suspension hook 11 can move forward and backward on arm 10 and can pass through screw lock, to be fit to different width between centers.But the distance of heel distance material in furnace chamber adjusted the position of suspension hook 11 on arm 10, to adapt to the position of material.
Universal wheel 4 is provided with brake facing, and the pilot lever 3 of this silicon monocrystalline furnace thermal field loading-unloading vehicle links to each other with described brake facing by brake cable.So that universal wheel 4 have brake function, universal wheel 4 is specially four, lays respectively on four angles of base plate, can stop universal wheel 4 by operating control handle 3, to stablize loading-unloading vehicle.
The working process of the silicon monocrystalline furnace thermal field loading-unloading vehicle that the utility model once provides is simply described below.
1, loading-unloading vehicle places the stokehold, estimates suitable distance, and lift registration arm 13 and be locked on the furnace chamber flange, and locking universal wheel 4, this moment, arm 10 was positioned at the furnace chamber central position;
2, press decline button on the pilot lever 3, lifting structure 5 moves downwards, and to correct position, suspension hook 11 is hung in the suspension ring of machine equipment, presses the rising button, and the object of slinging looks underbody is without hindrance promptly to be ended;
3, rotating object to the right, rotating mechanism 6 has mechanical stop limiter, and arm 10 is a zero position perpendicular to frame 1, rotation to the right, maximum angle of rotation is 120 °, goes to correct position and gets final product;
4, press the decline button of pilot lever 3, contained object is positioned on the mass transport car, or on the tooling platform, finished the effect of once dismantling material.
Dress material and dismounting material working process are similar, at first will install the transport trolley of silicon material in advance, move to loading-unloading vehicle one side, after the lifting utensil is installed, suspension hook 11 is hung in the suspension ring and rises, and extremely accessible stopping to rise, and is moved to the left object, rotating mechanism 6 arrives spacing getting final product, and the decline object is put into and promptly finished pre-charging operation.
Finish above operation, lift the brake that registration arm 13 is removed universal wheels 4, mobile loading-unloading vehicle lifts arm 10 and puts down the bracing frame 7 that is used to increase support strength to the appropriate location, when the arm 10 that just can hang down is saved spaces and moving vehicle to the interference of other equipment.
Rechargeable cell and relay in the electric box 2, be connected to pilot lever 3 by cable, pilot lever 3 is provided with knob down and abnormal conditions terminated emergency stop switch immediately occurs, internal control relay power output cable is connected to lift motor 9, make lift motor 9 rotatings drive screw mandrel 8, hoisting appliance 5 moves up and down along guide rail 14, realizes the lifting and the decline of 10 pairs of objects of arm.
Loading and unloading operation is finished, and series of cells is charged, and the installation of electric appliance box 2 series of cells according to the skew of arm 10 right-hand rotation tailheaviness, should be installed in the left side, according to circumstances can add balancing weight after the load test, realizes balance.
The utility model has been realized the mechanized handling thermal field, can increase work efficiency, and shortens production cycle and security.Operation is convenient, and loading-unloading vehicle places single crystal growing furnace one side lifting arm high temp objects can be taken out in stove.Reduced the generation of personal injury accident, because hand-held high temp objects, easily scald or heat-resisting deficiency cause thermal field component to drop damage.Utilize this device can be with the material that installs in advance (install material in the clean room, and cover upper protective film), one-step installation be in place, reduce the charging link pollution may, save charge time.The operating personnel avoids the stokehold high-temperature service.Utilize this device can save cooling and charging 1-2 hour, shorten the production cycle, reduce waste heat loss in the stove simultaneously, reduce energy loss accordingly and the influence of envrionment temperature.
Each embodiment adopts the mode of going forward one by one to describe in this specification sheets, and what each embodiment stressed all is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment will be conspicuous concerning those skilled in the art, and defined herein General Principle can realize under the situation that does not break away from spirit or scope of the present utility model in other embodiments.Therefore, the utility model will can not be restricted to these embodiment shown in this article, but will meet and principle disclosed herein and features of novelty the wideest corresponding to scope.
Claims (10)
1. a silicon monocrystalline furnace thermal field loading-unloading vehicle is characterized in that, comprising:
Support, this vehicle frame is provided with power supply, and this support comprises base plate and the stand (1) that is arranged on this base plate, and described base plate bottom is provided with universal wheel (4);
The rotating leading screw (8) that is connected in the described stand (1), described leading screw (8) links to each other with lift motor (9) on being arranged on described support;
The lifting device (5) that is threaded with described leading screw (8) is connected with arm (10) on this lifting device (5), described arm (10) is provided with suspension hook (11).
2. silicon monocrystalline furnace thermal field loading-unloading vehicle as claimed in claim 1 is characterized in that, comprises that also being arranged on described stand (1) goes up the registration arm (13) that links to each other with the furnace chamber flange of single crystal growing furnace.
3. silicon monocrystalline furnace thermal field loading-unloading vehicle as claimed in claim 2, it is characterized in that, described stand (1) is provided with chute, described registration arm (13) is provided with the projection adaptive with described chute, described registration arm (13) is assemblied on the chute of described stand (1) by this projection, and fastening by screw, and described registration arm (13) is rotatably connected with described projection.
4. silicon monocrystalline furnace thermal field loading-unloading vehicle as claimed in claim 1, it is characterized in that, also comprise the guide rail (14) that is arranged on described leading screw (8) both sides, described lifting device (5) is provided with guide plate, and this guide plate is provided with respectively the pilot hole that the guide rail (14) with both sides is slidingly matched.
5. silicon monocrystalline furnace thermal field loading-unloading vehicle as claimed in claim 1 is characterized in that, described arm (10) is connected by first bearing pin (61) that vertically is provided with described lifting device (5).
6. silicon monocrystalline furnace thermal field loading-unloading vehicle as claimed in claim 1, it is characterized in that, also comprise intermediate connector (62), described intermediate connector (62) is connected by first bearing pin (61) that vertically is provided with described lifting device (5), and described intermediate connector (62) is connected by horizontally disposed second bearing pin (15) with described arm (10).
7. silicon monocrystalline furnace thermal field loading-unloading vehicle as claimed in claim 6 is characterized in that, also comprises dismountable bracing frame (7) that is supported between described arm (10) and the described lifting device (5).
8. silicon monocrystalline furnace thermal field loading-unloading vehicle as claimed in claim 1, it is characterized in that, described arm (10) is axially arranged with chute along it, described suspension hook (11) is provided with the projection adaptive with described chute, described suspension hook (11) is assemblied on the chute of described arm (10) by this projection, and fastening by screw.
9. as claim 5 or 6 described silicon monocrystalline furnace thermal field loading-unloading vehicles, it is characterized in that described lifting device (5) is provided with the limiting section of restriction described arm (10) angle of rotation.
10. silicon monocrystalline furnace thermal field loading-unloading vehicle as claimed in claim 1 is characterized in that, described universal wheel (4) is provided with brake facing, and the pilot lever of this silicon monocrystalline furnace thermal field loading-unloading vehicle (3) links to each other with described brake facing by brake cable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206102824U CN201864790U (en) | 2010-11-16 | 2010-11-16 | Thermal field loading and unloading vehicle for a silicone single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206102824U CN201864790U (en) | 2010-11-16 | 2010-11-16 | Thermal field loading and unloading vehicle for a silicone single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201864790U true CN201864790U (en) | 2011-06-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206102824U Expired - Lifetime CN201864790U (en) | 2010-11-16 | 2010-11-16 | Thermal field loading and unloading vehicle for a silicone single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201864790U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102653882A (en) * | 2012-05-11 | 2012-09-05 | 天通控股股份有限公司 | Charging method and device of straight-pull silicon single crystals |
| CN103603035A (en) * | 2013-03-15 | 2014-02-26 | 北京志光伯元科技有限公司 | Crystal growth lifting device and crystal growth furnace using same |
| CN104911704A (en) * | 2015-07-06 | 2015-09-16 | 晶科能源有限公司 | Feeding and discharging device for ingot furnace |
| CN114032617A (en) * | 2021-11-09 | 2022-02-11 | 上海汉虹精密机械有限公司 | Action system for charging and taking crystals of silicon carbide crystal growing furnace |
-
2010
- 2010-11-16 CN CN2010206102824U patent/CN201864790U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102653882A (en) * | 2012-05-11 | 2012-09-05 | 天通控股股份有限公司 | Charging method and device of straight-pull silicon single crystals |
| CN103603035A (en) * | 2013-03-15 | 2014-02-26 | 北京志光伯元科技有限公司 | Crystal growth lifting device and crystal growth furnace using same |
| CN104911704A (en) * | 2015-07-06 | 2015-09-16 | 晶科能源有限公司 | Feeding and discharging device for ingot furnace |
| CN114032617A (en) * | 2021-11-09 | 2022-02-11 | 上海汉虹精密机械有限公司 | Action system for charging and taking crystals of silicon carbide crystal growing furnace |
| CN114032617B (en) * | 2021-11-09 | 2023-12-26 | 上海汉虹精密机械有限公司 | Action system for charging and taking crystals of silicon carbide crystal growth furnace |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
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Granted publication date: 20110615 |
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| CX01 | Expiry of patent term |