CN201859843U - Gasflow flushing device for silicon wafer - Google Patents
Gasflow flushing device for silicon wafer Download PDFInfo
- Publication number
- CN201859843U CN201859843U CN2010205811664U CN201020581166U CN201859843U CN 201859843 U CN201859843 U CN 201859843U CN 2010205811664 U CN2010205811664 U CN 2010205811664U CN 201020581166 U CN201020581166 U CN 201020581166U CN 201859843 U CN201859843 U CN 201859843U
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- CN
- China
- Prior art keywords
- gasflow
- flushing device
- air
- box body
- silicon chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model provides a gasflow flushing device for a silicon wafer, The gasflow flushing device comprises a box body, a sealed cavity, a gasflow channel and a gas source; the box body and the gasflow channel are oppositely arranged on the sealed cavity; an opening end of the box body is opposite to a gas outlet of the gasflow channel, wherein a gas regulating device is arranged on the gasflow channel; as the gas regulating device is arranged on the gasflow channel, the gasflow can be controlled, so that the use and the collecting of the silicon wafer are convenient; and the gasflow flushing device is only additionally provided with the gas regulating device, so that the gasflow flushing device has simple structure and low cost.
Description
Technical field
The utility model relates to a kind of flusher, and particularly a kind of silicon chip air-flow flushing device belongs to the silicon chip processing technique field.
Background technology
Because the silicon chip volume is little, therefore thin thickness, very easily produces static between the silicon chip.When silicon chip is poured out,, cause the waste of silicon chip because electrostatic interaction usually has silicon chip to stick in the box in box.Traditional method is to adopt hair-dryer that the silicon chip that these are attached in the box is blown out, though this method can be taken out silicon chip, and inconvenient operation, and silicon chip flies around after blowing out easily.Easily collecting not.
In order to solve the problems of the technologies described above, recently, a kind of silicon chip air-flow flushing device has appearred, comprise box body, enclosed cavity, gas channel and source of the gas, what box body was relative with gas channel is arranged on the enclosed cavity, the openend of described box body is relative with the gas outlet of described gas channel, and the air inlet of described gas channel and source of the gas are logical.This device can spray gas by gas channel, silicon chip in the box body is dashed fall the empty people of sealing, can remove the static between the silicon chip on the one hand, can make things convenient for the collection of silicon chip on the other hand, but the air-flow of structure is difficult to control, usually excessive because of air-flow, and silicon chip is flown around, be difficult to control air-flow.
The utility model content
Technical problem to be solved in the utility model provides a kind of may command air-flow, silicon chip air-flow flushing device simple in structure and with low cost.
In order to solve the problems of the technologies described above, a kind of silicon chip air-flow flushing device of the utility model, comprise box body, enclosed cavity, gas channel and source of the gas, what box body was relative with gas channel is arranged on the enclosed cavity, the openend of described box body is relative with the gas outlet of described gas channel, wherein, described gas channel is provided with air regulating device.
Above-mentioned a kind of silicon chip air-flow flushing device, wherein, described air regulating device is an adjuster valve.
Because described gas channel is provided with air regulating device, can control the size of air-flow to air-flow, thereby make things convenient for use, and the collection of silicon chip, and the utility model only increased air regulating device, simple in structure and with low cost; In addition, because air regulating device is an adjuster valve, thereby made things convenient for replacing.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Embodiment
The utility model is described in further detail below in conjunction with accompanying drawing.
As shown in the figure, in order to solve the problems of the technologies described above, a kind of silicon chip air-flow flushing device of the utility model, comprise box body 1, enclosed cavity 2, gas channel 3 and source of the gas 4, box body 1 and gas channel 3 relative being arranged on the enclosed cavity 1, the openend of described box body 1 is relative with the gas outlet of described gas channel 3, described gas channel 3 is provided with air regulating device 5, enclosed cavity 2 is the cuboid cavity, enclosed cavity 2 is provided with the through hole that communicates with the box opening end, and the pore that communicates with gas channel, because described gas channel is provided with air regulating device, can control the size of air-flow to air-flow, thereby made things convenient for use, and the collection of silicon chip, and the utility model only increased air regulating device, and simple in structure and with low cost.This air regulating device is unrestricted, and in order to buy conveniently, in the present embodiment, preferred adjuster valve uses as air regulating device.
In sum, the utlity model has advantage simple in structure, with low cost, easy to use and that air-flow is controlled.
Here description of the present utility model and application are illustrative; be not to want in the above-described embodiments with scope restriction of the present utility model; therefore, the utility model is not subjected to the restriction of present embodiment, and the technical scheme that any employing equivalence replacement obtains is all in the scope of the utility model protection.
Claims (2)
1. silicon chip air-flow flushing device, comprise box body, enclosed cavity, gas channel and source of the gas, what box body was relative with gas channel is arranged on the enclosed cavity, the openend of described box body is relative with the gas outlet of described gas channel, it is characterized in that described gas channel is provided with air regulating device.
2. a kind of according to claim 1 silicon chip air-flow flushing device is characterized in that described air regulating device is an adjuster valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205811664U CN201859843U (en) | 2010-10-27 | 2010-10-27 | Gasflow flushing device for silicon wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205811664U CN201859843U (en) | 2010-10-27 | 2010-10-27 | Gasflow flushing device for silicon wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201859843U true CN201859843U (en) | 2011-06-08 |
Family
ID=44105644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205811664U Expired - Fee Related CN201859843U (en) | 2010-10-27 | 2010-10-27 | Gasflow flushing device for silicon wafer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201859843U (en) |
-
2010
- 2010-10-27 CN CN2010205811664U patent/CN201859843U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110608 Termination date: 20121027 |