CN201855640U - Vacuum filtering tank - Google Patents
Vacuum filtering tank Download PDFInfo
- Publication number
- CN201855640U CN201855640U CN2010205766565U CN201020576656U CN201855640U CN 201855640 U CN201855640 U CN 201855640U CN 2010205766565 U CN2010205766565 U CN 2010205766565U CN 201020576656 U CN201020576656 U CN 201020576656U CN 201855640 U CN201855640 U CN 201855640U
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- CN
- China
- Prior art keywords
- air inlet
- baffle plate
- ventilating
- tank
- jar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The utility model relates to a vacuum filtering tank. The vacuum filtering tank is internally provided with an air inlet channel, an air inlet is arranged on a tank body, and the air inlet channel and the air inlet are communicated with each other; the tank is internally and transversely provided with an upper ventilating baffle plate and a lower ventilating baffle plate, and ventilating holes are arranged in the ventilating baffle plates; the tank is internally provided with a central air outlet channel which is communicated with an air outlet, and the upper ventilating baffle plate and the lower ventilating baffle plate are communicated with the air inlet channel and the central air outlet channel by the ventilating holes; and a horn-shaped filter screen with small upper part and large lower part is sheathed between the upper ventilating baffle plate and the lower ventilating baffle plate, and the circumference of the upper part of the filter screen is closely attached to the outer wall of the central air outlet channel. For the vacuum filtering tank, as the horn-shaped filter screen with small upper part and large lower part is adopted, the filtering area is increased, and the filtering effect is improved; and simultaneously, dust, high-temperature volatilization substances and the like can be filtered and fall off after passing through the inclined filter screen without forming a large quantity of attaching joints, so that the absorption force of a vacuum pump can not be affected, and the vacuum extraction effect in a single crystal furnace can be ensured, therefore, the finished product ratio of single crystal is guaranteed to a certain degree.
Description
Technical field
The utility model relates to a kind of vacuum filtration jar, is used for the production of monocrystalline silicon.
Background technology
In the production of pulling of crystals, the fusion of monocrystalline, one-tenth crystalline substance need carry out under the high-temperature vacuum state, can produce many vaporization at high temperature things in the single crystal growing furnace, these vaporization at high temperature things are accompanied by dust in air, if directly let alone to enter in the vavuum pump, can pollute pumping fluid significantly, influence the safe operation of vavuum pump, therefore, between single crystal growing furnace and vavuum pump, need vacuum filtration jar of configuration.Usually, the inside of this vacuum filtration jar is provided with the center gas off-take, and the center gas off-take links to each other with the gas outlet; Bottom at tank body is provided with air inlet, is provided with horizontal upper and lower vent baffle in jar, all has passage on the upper and lower vent baffle,, and upper and lower vent baffle communicates with the center gas off-take by passage; Between upper and lower vent baffle, be set with one up and down equal diameters and with the perpendicular straight tube screen pack of upper and lower ventilation plate washer.This vacuum filtration jar, the one, filter effect is undesirable, still has more dust, vaporization at high temperature thing pollution pumping fluid, and general every pulling of crystals 5~6 stoves just need to change pumping fluid.The 2nd, dust, vaporization at high temperature thing etc. are understood attached knot on screen pack, thereby influence the suction and the suction effect of vavuum pump greatly, even influence the monocrystalline yield rate.
Summary of the invention
The purpose of this utility model provides has good filter effect, and dust, vaporization at high temperature thing etc. can a kind of vacuum filtration jar of attached knot on screen pack.
The technical scheme that the utility model is taked is: a kind of vacuum filtration jar, and in jar, be provided with air intake duct and on tank body, be provided with air inlet, air intake duct and air inlet interlink; In jar, laterally be provided with upper and lower vent baffle, have passage on the vent baffle; Be provided with the center gas off-take in jar, center gas off-take and gas outlet interlink, and upper and lower vent baffle communicates with air intake duct, center gas off-take by passage; It is characterized in that between upper and lower vent baffle, being set with the screen pack of a up-small and down-big horn shape.
The top circumference of described screen pack is pressed close to mutually with the outer wall of center gas off-take.
Described air intake duct is arranged on jar interior side and is provided with air inlet in the middle and upper part of tank body.
Described air intake duct is arranged on jar interior bottom and is provided with air inlet in the bottom of tank body.
Adopt the utility model, owing to adopt the screen pack of up-small and down-big horn shape, filter area increases, can increase filter effect, simultaneously, dust, vaporization at high temperature thing etc. can filter and fall after through the screen pack that tilts, and can not form a large amount of attached knots, just can not influence the suction of vavuum pump, guarantee vacuum draw effect in the single crystal growing furnace, guarantee the monocrystalline yield rate to a certain extent.
Description of drawings
Fig. 1 is a schematic diagram of the present utility model.
Sequence number is represented among the figure: on ventilate plate washer 1, tank body 2, air inlet 3, air intake duct 4, ventilate plate washer 5, screen pack 6, center gas off-take 7, passage 8, gas outlet 9 down.
The specific embodiment
The utility model is described in further detail below in conjunction with specific embodiment.
With reference to Fig. 1, this vacuum filtration jar comprises ventilation plate washer 1, tank body 2, air inlet 3, air intake duct 4, ventilate plate washer 5, screen pack 6, center gas off-take 7, passage 8 and gas outlet 9 down; Side in tank body 2 is provided with air intake duct 4, is provided with air inlet 3 in the middle and upper part of tank body 2, and air intake duct 4 interlinks with air inlet 3; The vent baffle 1 and the plate washer 5 of ventilating down on laterally being provided with in tank body 2 all have passage 8 on last vent baffle 1 and the following ventilation plate washer 5; Center in the tank body 2 is provided with center gas off-take 7, and center gas off-take 7 is between last vent baffle 1 and following ventilation plate washer 5, and center gas off-take 7 interlinks with gas outlet 9; The last vent baffle 1 and the plate washer 5 of ventilating down communicate with center gas off-take 7, air intake duct 4 by passage 8; The screen pack 6 of up-small and down-big horn shape is sleeved on vent baffle 1 and ventilates between the plate washer 5 down, and the top circumference of screen pack 6 is pressed close to mutually with the outer wall of center gas off-take 7.
During use, the dust that comes out from single crystal growing furnace, vaporization at high temperature thing enter by air inlet 3 and air intake duct 4, produce the small part precipitation with air intake duct 4 collision backs; Afterwards, through following ventilation plate washer 5, by under ventilate plate washer 5 and passage 8 tentatively filter again, the big particle of a part precipitates again; Then; by screen pack 6 with horn shape; further filter; tiny particle can be adsorbed on the screen pack 6; precipitate along with the increasing and forming big particle of adsorbance, like this, clean gas is through the passage 8 on the last vent baffle 1; enter center gas off-take 7,3 enter vavuum pump from the gas outlet.
Owing to adopt the screen pack 6 of up-small and down-big horn shape, filter area increases, can increase filter effect, simultaneously, dust, vaporization at high temperature thing etc. after through the screen pack 6 that tilts, can be along with adsorbance increase and form big particle, under self-gravity action and precipitate, be difficult for attached knot on the screen pack 6 that tilts, guaranteed vacuum draw effect in the single crystal growing furnace, guaranteed the monocrystalline yield rate to a certain extent.Trample proof factually, adopt this vacuum filtration jar, can extend to original 2 times the service life of pumping fluid, can use just needs behind 11~12 stoves to change.
In addition, in above-mentioned, if air inlet 3 is arranged on the bottom of tank body 2, and be positioned under the plate washer 5 of ventilating down, zone under then air intake duct 4 can be considered between the bottom of ventilation plate washer 5 and tank body 2, effect is basic identical among the air inlet effect that reaches and Fig. 1, is not explaining separately at this.
Claims (4)
1. a vacuum filtration jar is provided with air intake duct and is provided with air inlet on tank body in jar, and air intake duct and air inlet interlink; In jar, laterally be provided with upper and lower vent baffle, have passage on the vent baffle; Be provided with the center gas off-take in jar, center gas off-take and gas outlet interlink, and upper and lower vent baffle communicates with air intake duct, center gas off-take by passage; It is characterized in that between upper and lower vent baffle, being set with the screen pack of a up-small and down-big horn shape.
2. a kind of vacuum filtration jar according to claim 1 is characterized in that the top circumference of screen pack presses close to mutually with the outer wall of center gas off-take.
3. a kind of vacuum filtration jar according to claim 1 is characterized in that described air intake duct is arranged on jar interior side and is provided with air inlet in the middle and upper part of tank body.
4. a kind of vacuum filtration jar according to claim 1 is characterized in that described air intake duct is arranged on jar interior bottom and is provided with air inlet in the bottom of tank body.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010205766565U CN201855640U (en) | 2010-10-23 | 2010-10-23 | Vacuum filtering tank |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010205766565U CN201855640U (en) | 2010-10-23 | 2010-10-23 | Vacuum filtering tank |
Publications (1)
Publication Number | Publication Date |
---|---|
CN201855640U true CN201855640U (en) | 2011-06-08 |
Family
ID=44101459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010205766565U Expired - Fee Related CN201855640U (en) | 2010-10-23 | 2010-10-23 | Vacuum filtering tank |
Country Status (1)
Country | Link |
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CN (1) | CN201855640U (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102160951A (en) * | 2010-10-23 | 2011-08-24 | 浙江硅宏电子科技有限公司 | Vacuum filter tank |
CN103212255A (en) * | 2013-04-12 | 2013-07-24 | 安徽华龙环保技术工程有限公司 | Pressure relief type dust storage device |
CN104357915A (en) * | 2014-10-19 | 2015-02-18 | 镇江大成新能源有限公司 | Single crystal storage tank |
CN105442036A (en) * | 2015-12-02 | 2016-03-30 | 上海汉虹精密机械有限公司 | Monocrystalline silicon growth furnace vacuum supporting system |
-
2010
- 2010-10-23 CN CN2010205766565U patent/CN201855640U/en not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102160951A (en) * | 2010-10-23 | 2011-08-24 | 浙江硅宏电子科技有限公司 | Vacuum filter tank |
CN103212255A (en) * | 2013-04-12 | 2013-07-24 | 安徽华龙环保技术工程有限公司 | Pressure relief type dust storage device |
CN104357915A (en) * | 2014-10-19 | 2015-02-18 | 镇江大成新能源有限公司 | Single crystal storage tank |
CN105442036A (en) * | 2015-12-02 | 2016-03-30 | 上海汉虹精密机械有限公司 | Monocrystalline silicon growth furnace vacuum supporting system |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110608 Termination date: 20141023 |
|
EXPY | Termination of patent right or utility model |