CN201848388U - Wafer recleaner screen - Google Patents
Wafer recleaner screen Download PDFInfo
- Publication number
- CN201848388U CN201848388U CN2010205785138U CN201020578513U CN201848388U CN 201848388 U CN201848388 U CN 201848388U CN 2010205785138 U CN2010205785138 U CN 2010205785138U CN 201020578513 U CN201020578513 U CN 201020578513U CN 201848388 U CN201848388 U CN 201848388U
- Authority
- CN
- China
- Prior art keywords
- screen
- wafer
- recleaner
- recleaner screen
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004744 fabric Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 abstract 4
- 238000004140 cleaning Methods 0.000 abstract 1
- 238000012216 screening Methods 0.000 abstract 1
- 101700004678 SLIT3 Proteins 0.000 description 1
- 102100027339 Slit homolog 3 protein Human genes 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 235000013312 flour Nutrition 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Images
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- Combined Means For Separation Of Solids (AREA)
Abstract
The utility model relates to the technical field of tools used for producing semiconductors, in particular to a recleaner screen used for screening wafers. The wafer recleaner screen comprises a screen body; the screen body is endowed with a frame-shaped structure formed through side frames in an enclosure manner, and a screen stencil is arranged at the lower part of the screen body. The wafer recleaner screen is characterized in that the screen stencil is a flat plate provided with a plurality of gaps which are arranged at intervals and parallel to one another. The wafer recleaner screen has the advantages of being convenient to use, hard to block and easy for cleaning.
Description
Technical field
The utility model relates to the instrument in semiconductor fabrication techniques field, particularly a kind of recleaner screen that screens wafer.
Background technology
Wafer forms with the cutting of crystal bar line, and after making, wafer and crystalline flour mix, need to separate, used separating tool is a sieve, in the prior art, used sieve is the network structure with warp and parallel intersection, and such sieve stops up easily, influences operating efficiency.
Summary of the invention
The purpose of this utility model is exactly at above-mentioned shortcoming, and a kind of wafer recleaner screen easy to use, not susceptible to plugging is provided.
The novel technical scheme of taking of this use is: the wafer recleaner screen, comprise the sieve body, the sieve body is the shaped as frame structure that is surrounded by frame, and bottom has screen cloth, it is characterized in that: described screen cloth is a flat board, has slit a plurality of intervals, that be parallel to each other on the flat board.
The beneficial effects of the utility model are: such wafer recleaner screen has advantage easy to use, that be difficult for obstruction, clear up easily.
Description of drawings
Fig. 1 is the structural representation of the utility model wafer recleaner screen.
Wherein: 1, frame 2, screen cloth 3, slit
Specific embodiments:
Below in conjunction with accompanying drawing the utility model is further described.
As shown in Figure 1, the wafer recleaner screen comprises the sieve body, and the sieve body is the shaped as frame structure that is surrounded by frame 1, and bottom has screen cloth 2, it is characterized in that: described screen cloth 2 is flat boards, has slit 3 a plurality of intervals, that be parallel to each other on the flat board.
Claims (1)
1. the wafer recleaner screen comprises the sieve body, and the sieve body is the shaped as frame structure that is surrounded by frame, and bottom has screen cloth, it is characterized in that: described screen cloth is a flat board, has slit a plurality of intervals, that be parallel to each other on the flat board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205785138U CN201848388U (en) | 2010-10-27 | 2010-10-27 | Wafer recleaner screen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205785138U CN201848388U (en) | 2010-10-27 | 2010-10-27 | Wafer recleaner screen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201848388U true CN201848388U (en) | 2011-06-01 |
Family
ID=44090802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205785138U Expired - Fee Related CN201848388U (en) | 2010-10-27 | 2010-10-27 | Wafer recleaner screen |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201848388U (en) |
-
2010
- 2010-10-27 CN CN2010205785138U patent/CN201848388U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110601 Termination date: 20111027 |