CN201836501U - Flap valve component of crystal growing furnace - Google Patents
Flap valve component of crystal growing furnace Download PDFInfo
- Publication number
- CN201836501U CN201836501U CN2010205412819U CN201020541281U CN201836501U CN 201836501 U CN201836501 U CN 201836501U CN 2010205412819 U CN2010205412819 U CN 2010205412819U CN 201020541281 U CN201020541281 U CN 201020541281U CN 201836501 U CN201836501 U CN 201836501U
- Authority
- CN
- China
- Prior art keywords
- flap valve
- crystal growing
- growing furnace
- gearwheel
- main gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
A flap valve component of a crystal growing furnace adopts a stepping motor to drive a pinion to rotate through a worm gear reducer, and the pinion drives a main gear to rotate, so that a valve spool is driven to turn over. Since the main gear is provided with a stroke block, the stepping motor is stopped when the stroke block is close to approach switches at the left end and the right end during rotation of the main gear, so that rotating stroke of a valve flap is limited. By means of rocking a hand wheel at the input end of the worm gear reducer with hands, the pinion can drive the main gear to rotate in the same way, so that the valve spool can be turned over manually. The flap valve component of the crystal growing furnace has the advantages of low processing cost, simple structure, flexible in operation and reliable in use.
Description
Affiliated technical field
The utility model relates to a kind of automatic crystal growth furnace parts of semicon industry, adopts this parts can realize the automatic upset of Flap valve.
Background technique
At present, the Flap valve of known crystal growing furnace to be adopted manually or the upset of pneumatic mode drive spool, manually upset can only be satisfied the usage requirement of semi-automatic crystal growing furnace, the automatic crystal growth furnace requires Flap valve to overturn automatically, and the part that the automatic panel-turnover valve that adopts pneumatic form relates to is many, complex structure, the cost height, and stroke is not easy to regulate.
Summary of the invention
In order to overcome the shortcoming that exists in the existing Flap valve component technology, the utility model provides a kind of Flap valve parts of crystal growing furnace, and these parts not only can be realized the automatic upset of Flap valve, can also adjustment stroke, have manual turn over function simultaneously.This component processing cost is low, simple in structure, uses reliable.
The technical solution adopted in the utility model is:
The output shaft of stepper motor links to each other with the worm speed reducer input shaft by shaft joint, the output shaft of worm speed reducer connects a small gear, the gearwheel engagement of small gear and below, the axle of gearwheel links to each other with the Flap valve spool, stepper motor drives a pinion rotation through worm speed reducer like this, small gear drives gearwheel and rotates, and gearwheel drives the spool upset, can realize the automatic upset of Flap valve by the rotation of motor.Another input end at worm speed reducer is installed a handwheel, can realize the manual upset of spool by rotating handwheel.The stroke piece is installed on gearwheel, is equipped with near switch and screw on the small rack of gearwheel both sides, after gearwheel turns an angle, on it with the stroke piece will touch near switch, cause the motor stall, play spacing effect.The screw that is fixed on the small rack can prevent that the too quickly bump of stroke piece is near switch.Stretching out the length of small rack can adjust near switch and screw, and two limit positions that are equivalent to the spool upset can be adjusted according to the difformity of each Flap valve.
The beneficial effects of the utility model are: Flap valve has electric turnover concurrently and the two kinds of functions of manually overturning, and also have limit function when realizing electric turnover, and whole component processing cost is low, simple in structure, uses reliable.
Description of drawings
Fig. 1 is a plan view of the present utility model.
Fig. 2 is a plan view of the present utility model.
Fig. 3 is a left view of the present utility model.
1. stepper motors among the figure, 2. coupling, 3. worm speed reducer, 4 small gears, 5. gearwheel, 6. spool, and 7. stroke piece, 8. bolt, 9. near switch, 10 small racks, 11. handles (wheel).
Embodiment
In Fig. 1, when stepper motor 1 rotates, the output shaft of stepper motor 1 rotates by the input shaft that shaft joint 2 drives worm speed reducer 3, and then the small gear 4 that drive is connected with the output shaft of worm speed reducer 3 rotates, small gear 4 meshes with the gearwheel 5 of below, make the axle at gearwheel 5 places 6 rotate, axle 6 links to each other with the Flap valve spool, and the drive spool overturns automatically.Another input end at worm speed reducer 3 is installed a handwheel 11, starts to take turns 11 o'clock with hand, can rotate the manual upset of realization spool by the axle 6 that the small gear on the reducer of turbodrill 34 drives gearwheel 5 places of its below equally.Stroke piece 7 is installed on gearwheel 5, on the small rack 10 of gearwheel 5 left and right sides, install near switch, after gearwheel 5 turns an angle, on it with stroke piece 7 will touch on the small rack 10 near switch 9, cause motor 1 stall, Flap valve stops upset, and spacing effect is played in this upset to Flap valve.Mounting screw 8 on small rack 10, the length of screw 8 is than short slightly near the length of switch 9, screw 8 guaranteed stroke piece 7 bump against can be not too quickly when making motor 1 stall near switch 9 bump near switch 9, protected near switch.
Claims (4)
1. the Flap valve parts of a crystal growing furnace is characterized in that: adopt stepper motor to drive a pinion rotation through worm speed reducer, small gear drives gearwheel and rotates, and gearwheel drives the spool upset.
2. the Flap valve parts of a kind of crystal growing furnace according to claim 1 is characterized in that: a stroke piece is arranged on the gearwheel, be equipped with near switch and screw on the small rack of gearwheel both sides.
3. the Flap valve parts of a kind of crystal growing furnace according to claim 2 is characterized in that the length of stretching out small rack near switch and screw can adjust.
4. the Flap valve parts of a kind of crystal growing furnace according to claim 1 is characterized in that at an input end of reducer of turbodrill a handwheel being installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205412819U CN201836501U (en) | 2010-09-26 | 2010-09-26 | Flap valve component of crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205412819U CN201836501U (en) | 2010-09-26 | 2010-09-26 | Flap valve component of crystal growing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201836501U true CN201836501U (en) | 2011-05-18 |
Family
ID=44006605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205412819U Expired - Fee Related CN201836501U (en) | 2010-09-26 | 2010-09-26 | Flap valve component of crystal growing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201836501U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102517628A (en) * | 2011-12-21 | 2012-06-27 | 西安创联新能源设备有限公司 | Turning plate limiting mechanism of mono-crystal furnace |
| CN102627158A (en) * | 2011-06-16 | 2012-08-08 | 兰州理工大学 | Station signal detection device for copper plate automatic packaging production line |
| CN112390190A (en) * | 2020-11-13 | 2021-02-23 | 徐超 | Fire hydrant with safeguard function |
-
2010
- 2010-09-26 CN CN2010205412819U patent/CN201836501U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102627158A (en) * | 2011-06-16 | 2012-08-08 | 兰州理工大学 | Station signal detection device for copper plate automatic packaging production line |
| CN102517628A (en) * | 2011-12-21 | 2012-06-27 | 西安创联新能源设备有限公司 | Turning plate limiting mechanism of mono-crystal furnace |
| CN102517628B (en) * | 2011-12-21 | 2014-12-17 | 西安创联新能源设备有限公司 | Turning plate limiting mechanism of mono-crystal furnace |
| CN112390190A (en) * | 2020-11-13 | 2021-02-23 | 徐超 | Fire hydrant with safeguard function |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110518 Termination date: 20150926 |
|
| EXPY | Termination of patent right or utility model |