CN201819795U - Double-shaft rotary scanning mechanism for laser testing and far-field laser testing device - Google Patents
Double-shaft rotary scanning mechanism for laser testing and far-field laser testing device Download PDFInfo
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- CN201819795U CN201819795U CN201020192872XU CN201020192872U CN201819795U CN 201819795 U CN201819795 U CN 201819795U CN 201020192872X U CN201020192872X U CN 201020192872XU CN 201020192872 U CN201020192872 U CN 201020192872U CN 201819795 U CN201819795 U CN 201819795U
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Abstract
The utility model discloses a double-shaft rotary scanning mechanism for laser testing and a far-field laser testing device. The double-shaft rotary scanning mechanism comprises a shell, a laser detector, a first motor, a second motor and a horizontal/vertical guide frame. The horizontal/vertical guide frame comprises a horizontal mounting arm and a vertical mounting arm, the end of the horizontal mounting arm is provided with the first motor, the first motor is connected with a scanning rotary arm, the scanning rotary arm is provided with the laser detector, the vertical mounting arm is connected with the second motor, and the second motor is fixed on the shell. Based on the double-shaft rotary scanning mechanism, the far-field testing device adopts a mode of synchronization of optical power signal acquisition and processing and can immediately provide testing results after far-field scanning, such as FWHM (the full wave at half maximum) of a fast shaft and a slow shaft, a scope of 1/e2 energy, 95-percent energy and other parameters. Moreover, the far-field testing device can automatically provide data reports after testing. Due to the modular design, the far-field testing device has good compatibility with equipment.
Description
Technical field
The utility model belongs to the laser instrument field tests, relates to a kind of semiconductor laser remote field proving installation, especially a kind of laser instrument biaxial rotary scanning mechanism for testing and laser remote field proving installation.
Background technology
Semiconductor laser claims laser diode (LD) again.It is little to have volume, and the efficient height such as can directly modulate at characteristics.Along with improving constantly of its manufacturing technology, semiconductor laser is just towards increasing power, improving reliability, reduce spectral width, improve brightness and do not have the indium direction and develop.The development of semiconductor laser manufacturing technology has also promoted its thermometrically continuous advancement in technology.For many years, how tame unit all does a lot of work at semiconductor laser parameter test both at home and abroad.Wherein, there are the Keithley company, ILxlightwave company, Newport company of the U.S. and Canadian Telops company all to develop the LD parameter measurement system abroad.Its system adopts the modular design mode, can realize the automatic or semi-automatic test of laser parameter.A large amount of research work have also been done to laser parameter test by units such as domestic University of Science ﹠ Technology, Beijing, and it develops the comprehensive laser instrument test macro of a cover, and output power that can the Laser Measurement device is analyzed the spectral component of laser instrument, and calculates LIV parameter etc.
Yet in the substantive test parameter of semiconductor laser, the far field test is a difficult point wherein always.Because the semiconductor laser beam angle of divergence big (the fast axle angle of divergence is generally greater than 40 degree, and the slow axis angle of divergence is generally greater than 8 degree), general method of testing is difficult to its far-field characteristic is described comprehensively.And the semiconductor laser remote field parameter provides important evidence for the later stage optical shaping, and therefore, the exploitation of far field testing apparatus is more and more paid attention to by people.The universal measurement method is to use stepper motor to drive detector at present, moves to laser instrument light emitting region zone with the vertical plane perpendicular to the luminous axis of laser instrument, measures the laser optical power at diverse location place, reaches the purpose of far field test.Yet there is following obvious defects in this method: when 1) the laser detector tangential movement was to the laser instrument light-emitting zone, each reference position was with respect to the absolute position difference of laser instrument, and the test light power error diminishes with its relative position and sharply increases.
2) this mode generally can only realize the luminous power test of single direction, and is difficult to the whole far-field characteristic of laser instrument is described.
3) this mode data acquisition is more single, and the usage data record instrument carries out data analysis, and automaticity is on the low side.
The utility model content
The purpose of this utility model is to overcome the defective of above-mentioned prior art, provide a kind of laser instrument biaxial rotary scanning mechanism for testing and based on the laser remote field proving installation of this mechanism, full-automatic control mode is adopted in its design, the controlled motion rotating mechanism, tested semiconductor laser luminous zone fast and slow axis is carried out autoscan, thereby realize calculating and measurement the laser remote field parameters.This device adopts modular design, can realize the convenient compatibility with other semiconductor laser test equipments.
The utility model is achieved through the following technical solutions: this laser instrument biaxial rotary scanning mechanism for testing comprises shell, laser instrument detector, first motor and second motor.Also comprise a horizontal vertical guide frame in addition, it is vertical to hold-down arm with one to hold-down arm that the horizontal vertical guide frame includes a level, level is equipped with the axially first vertical motor to the end of hold-down arm, the output shaft of first motor is connected with the scanning pivot arm by shaft coupling, the lower end of scanning pivot arm is equipped with the laser instrument detector, vertically fixedly connected with the output axle head of second motor to the end of hold-down arm, the output shaft of described second motor is horizontally disposed with and second motor is fixed on the shell.
Above-mentioned level to hold-down arm with vertical mutually vertical and be integral the formula structure to hold-down arm.
Above-mentioned first motor and second motor are stepper motor or servomotor.
Above-mentioned scanning pivot arm is made up of with the waling stripe that is connected two vertical links the vertical links at two ends about being arranged at, and the vertical links of upper end is connected with the output shaft of first motor, and the vertical links end of lower end is fixed with the laser instrument detector.
The waling stripe of above-mentioned scanning pivot arm is an expansion link, makes the brachium of laser detector to carry out the length adjustment according to the difference of laser parameter.
The utility model also provides a kind of semiconductor laser remote field proving installation based on above-mentioned biaxial rotary scanning mechanism, comprises computing machine, data collecting card and motor movement control module.Described computing machine is by the signal of data collecting card reception from the laser instrument detector, and described motor movement control module is connected with computing machine, first motor and second motor respectively, and computing machine is controlled first motor and second motor by the motor movement control module; Second motor is fixed in the top in the shell, and the below of described laser instrument detector is provided with bracing frame, the bottom of bracing frame vertical fixing in shell.
Above-mentioned motor movement control module comprises motion control card, motor subdivision driver, motor encoder and DC power supplier, described motion control card is connected with motor encoder with the motor subdivision driver respectively, and the motor subdivision driver is connected with DC power supplier; Described motor subdivision driver, motion control card and motor encoder all are connected with first and second motor, and motion control card also is connected with described computing machine.
Be provided with the signal condition unit between above-mentioned laser instrument detector and the data collecting card.
Bottom and side in the above-mentioned shell respectively are provided with a position indicator, and two position indicators point to the center of shell; Described position indicator can be the ruddiness indicator, also can adopt other optical indicators.
The utility model can noise spectra of semiconductor lasers the far field parameter accurately measure, it mainly has the following advantages: (1) laser instrument biaxial rotary scanning mechanism for testing of the present utility model adopts twin shaft interlocking mechanism structure, pivot arm only drives single laser instrument detector can finish fast axle of semiconductor laser remote field and slow axis parametric description, simple in structure, be easy to realize.
(2) semiconductor laser remote field proving installation of the present utility model adopts close-loop control mode, and the position of rotation of first and second motor-driven two rotary parts is accurately controlled, and has guaranteed the reliability of its measurement parameter.
Description of drawings
Fig. 1 is the utility model far field hardware capability theory diagram; Fig. 2 is a far-field test device one-piece construction synoptic diagram of the present utility model; Fig. 3 is the structural representation of biaxial rotary scanning mechanism of the present utility model; Fig. 4 is a semiconductor laser remote field parameter testing data plot of the present utility model.
Wherein: 1 is laser instrument; 2 is position indicator; 3 is bracing frame; 4 is shell; 5 is first motor; 6 is the horizontal vertical guide frame; 7 is laser detector; 8 are the scanning pivot arm; 9 is shaft coupling; 10 is second motor; 11 is the optical power attenuation sheet.
Specific embodiments
Below in conjunction with accompanying drawing the utility model is described in further detail: the utility model has at first proposed a kind of laser instrument biaxial rotary scanning mechanism for testing, as shown in Figures 2 and 3, it comprises shell 4, laser instrument detector 7, first motor 5, second motor 10 and a horizontal vertical guide frame 6.Wherein to include a level vertical to hold-down arm with one to hold-down arm for horizontal vertical guide frame 6, level of the present utility model to hold-down arm with vertical vertical mutually and be integral the formula structure to hold-down arm.Level is equipped with the axially first vertical motor 5 to the end of hold-down arm, the output shaft of first motor 5 is connected with scanning pivot arm 8 by shaft coupling 9, scanning pivot arm 8 is made up of with the waling stripe that is connected two vertical links the vertical links at two ends about being arranged at, the vertical links of upper end is connected by the output shaft of shaft coupling with first motor 5, the vertical links end of lower end is fixed with laser instrument detector 7, when first motor, 5 driven sweep pivot arms 8 rotated, the lower end band of scanning pivot arm 8 laser instrument detector 7 and is moved in a circle together.The waling stripe of scanning pivot arm 8 can be designed as an expansion link, makes the brachium of laser detector to carry out the length adjustment according to the difference of laser parameter.
The vertical of horizontal vertical guide frame 6 fixedlyed connected with the output axle head of second motor 10 to the end of hold-down arm, and the output shaft of second motor 10 is horizontally disposed with and second motor 10 is fixed on the shell 4.First motor 5 and second motor 10 that the utility model is carried all adopt stepper motor, also can adopt servomotor.
Based on above-mentioned biaxial rotary scanning mechanism, the utility model is designed a kind of semiconductor laser remote field proving installation, and referring to the connection block diagram of Fig. 1 and in conjunction with Fig. 2 and Fig. 3, this device comprises computing machine, data collecting card and motor movement control module.Wherein computing machine is by the signal of data collecting card reception from laser instrument detector 7, the motor movement control module is connected with computing machine, first motor 5 and second motor 10 respectively, and computing machine is controlled first motor 5 and second motor 10 by the motor movement control module; Second motor 10 is fixed in the top in the shell 4, and the below of laser instrument detector 7 is provided with bracing frame 3, the bottom of bracing frame 3 vertical fixing in shell 4 in, and be provided with in the upper end of bracing frame 3 and press from both sides the anchor clamps of establishing laser instrument 1.The motor movement control module comprises motion control card, motor subdivision driver, motor encoder and DC power supplier, and described motion control card is connected with motor encoder with the motor subdivision driver respectively, and the motor subdivision driver is connected with DC power supplier; Described motor subdivision driver, motion control card and motor encoder all are connected with second motor 10 with first motor 5, and motion control card also is connected with described computing machine.The utility model also is provided with a signal condition unit between laser instrument detector 7 and data collecting card.Bottom in shell 4 and side respectively are provided with a position indicator 2, and position indicator of the present utility model can adopt ruddiness indicator or other indicators, and two position indicators 2 point to the center of shell 4.
Semiconductor laser remote field proving installation of the present utility model can be selected the single detector twin shaft rotary machine structure shown in 3 for use, also can adopt the physical construction of two detector both arms two-dimensional scan.
In semiconductor laser remote field proving installation of the present utility model, data collecting card is mainly used in the voltage signal that collection transmits from laser detector 7, and then sends in the computing machine and handle.
Biaxial rotary scanning mechanism of the present utility model is when laser instrument is tested, comprise the motion of level and vertical both direction, first motor 5 is realized the 180 degree rotations of laser detector 7 relative laser instrument 1 luminous point horizontal directions, second motor 10 realize entire scan framves (being horizontal vertical guide frame 6 and connected each parts) revolve turn 90 degrees to laser instrument 1 luminous point upright position, realize that by first motor 5 laser detectors 7 are perpendicular to the 180 degree rotations of laser instrument 1 luminous point direction again.Whole laser scans kinetic control system adopts closed-loop control, send the far field motion control instruction by motion control card, by the motor subdivision driver control information is transferred to far field motion control motor (first motor 5 or second motor 10), realization is to the motion control of biaxial rotary scanning mechanism, motor encoder can be gathered the movement position information feedback of far field motion control motor and give motion control card, thereby realizes the accurate control to far field motion control motor.The related data information of computer receiving data capture card and motion control card is carried out Accurate Position Control to biaxial rotary scanning mechanism on the one hand, realizes simultaneously each far field CALCULATION OF PARAMETERS to be measured.
As shown in Figure 2, the laser instrument 1 of the utility model use places on the laser instrument test bracket 3.Position indicator 2 be installed in the shell 4 level and perpendicular to the center of biaxial rotary scanning mechanism 5, it is concentric with the center maintenance of biaxial rotary scanning mechanism to be used for indication laser 1 luminous position.
As shown in Figure 3, an optical power attenuation sheet 11 is set before laser instrument detector 7, be positioned at the front portion of laser instrument detector 7, can regulate according to the optical power density of testing laser device, avoid laser detector 7 because the luminous power of the laser instrument of surveying is excessive and saturated, can regulate the decay multiplying power according to the luminous power of laser instrument, adopt the attenuator of 1/100 multiplying power-1/1000 multiplying power in the utility model example.
Fig. 4 is that laser remote field is tested automatic form.Wherein the fast axle of laser instrument all adopts power normalization to handle with the slow axis test curve.
The course of work of proving installation of the present utility model is as follows: after laser instrument is luminous, determined the position of laser instrument luminous point from level and vertical both direction by position indicator shown in Fig. 22.Mobile far-field test device makes the center of scanning pivot arm 8 among Fig. 3 and laser instrument luminous point keep concentric.Utilize among Fig. 3 first motor, 5 gated sweep pivot arms 8 to keeping same surface level to directional null definable to be directional null over against laser instrument luminous point right side with the laser instrument luminous point, also other coordinate systems of definable, rotate to 180 degree in the uniform motion mode from 0 degree, cooperate the sampling of capture card and computer real-time simultaneously, thereby obtain laser remote field slow axis family curve, according to curve calculation slow axis correlation parameter.After finishing the scanning of laser instrument slow axis, first motor 5 returns gated sweep pivot arm 8 to zero point automatically.Again by the 10 controlling level vertically-guided framves 6 of second motor shown in Fig. 3 from vertical and laser instrument luminous position steering horizontal.Repeat and the identical motion of slow axis scanning, can obtain laser remote field fast axle family curve and according to the fast correlation parameter of curve calculation.According to the software processes result on the computing machine, can obtain the test curve of semiconductor laser remote field.
This kind semiconductor laser remote field proving installation of the present utility model adopts the optical power signals collection and handles synchronous mode, provides fast axle and slow axis FWHM, 1/e after finishing the far-field scanning end immediately
2Energy range, parameter testing results such as 95% energy possess good real time performance and rapidity.And this device can provide data sheet automatically after the end of test (EOT) of far field, for from now on semiconductor far field data analysis provides foundation.This device adopts modular development scheme, can combine with other laser parameter test equipment easily, possesses good equipment compatibility.
In sum, this device not only well solves the shortcoming of traditional far field testing apparatus, and simple in structure, and the far field parametric description is comprehensive, possesses good prospects for application.
Claims (9)
1. laser instrument biaxial rotary scanning mechanism for testing, comprise shell (4), laser instrument detector (7), first motor (5) and second motor (10), it is characterized in that: also comprise horizontal vertical guide frame (6), described horizontal vertical guide frame (6) include level to hold-down arm with vertical to hold-down arm, level is equipped with axially vertical first motor (5) to the end of hold-down arm, the output shaft of first motor (5) is connected with scanning pivot arm (8) by shaft coupling (9), the lower end of scanning pivot arm (8) is equipped with laser instrument detector (7), vertically fixedly connected with the output axle head of second motor (10) to the end of hold-down arm, the output shaft of described second motor (10) is horizontally disposed with and second motor (10) is fixed on the shell (4).
2. laser instrument biaxial rotary scanning mechanism for testing according to claim 1 is characterized in that: described level to hold-down arm with vertical mutually vertical and be integral the formula structure to hold-down arm.
3. laser instrument biaxial rotary scanning mechanism for testing according to claim 1 is characterized in that: described first motor (5) and second motor (10) are stepper motor or servomotor.
4. laser instrument biaxial rotary scanning mechanism for testing according to claim 1, it is characterized in that: described scanning pivot arm (8) is made up of with the waling stripe that is connected two vertical links the vertical links at two ends about being located at, the vertical links of upper end is connected with the output shaft of first motor (5), and the vertical links end of lower end is fixed with laser instrument detector (7).
5. laser instrument biaxial rotary scanning mechanism for testing according to claim 4 is characterized in that: the waling stripe of described scanning pivot arm (8) is an expansion link.
6. semiconductor laser remote field proving installation based on the described biaxial rotary scanning mechanism of claim 1, comprise computing machine, data collecting card and motor movement control module, it is characterized in that: described computing machine is by the signal of data collecting card reception from laser instrument detector (7), described motor movement control module is connected with computing machine, first motor (5) and second motor (10) respectively, and computing machine is controlled first motor (5) and second motor (10) by the motor movement control module; Second motor (10) is fixed in the top in the shell (4), and the below of described laser instrument detector (7) is provided with laser instrument bracing frame (3), the bottom of laser instrument bracing frame (3) vertical fixing in shell (4).
7. semiconductor laser remote field proving installation according to claim 6, it is characterized in that: described motor movement control module comprises motion control card, motor subdivision driver, motor encoder and DC power supplier, described motion control card is connected with motor encoder with the motor subdivision driver respectively, and the motor subdivision driver is connected with DC power supplier; Described motor subdivision driver, motion control card and motor encoder all are connected with first and second motor (5,10), and motion control card also is connected with computing machine.
8. semiconductor laser remote field proving installation according to claim 6 is characterized in that: be provided with the signal condition unit between described laser instrument detector (7) and the data collecting card.
9. semiconductor laser remote field proving installation according to claim 6 is characterized in that: bottom and side in the described shell (4) respectively are provided with a position indicator (2), and two position indicators (2) point to the center of shell (4); Described position indicator is the ruddiness indicator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201020192872XU CN201819795U (en) | 2010-05-17 | 2010-05-17 | Double-shaft rotary scanning mechanism for laser testing and far-field laser testing device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201020192872XU CN201819795U (en) | 2010-05-17 | 2010-05-17 | Double-shaft rotary scanning mechanism for laser testing and far-field laser testing device |
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| CN201819795U true CN201819795U (en) | 2011-05-04 |
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| CN201020192872XU Expired - Fee Related CN201819795U (en) | 2010-05-17 | 2010-05-17 | Double-shaft rotary scanning mechanism for laser testing and far-field laser testing device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101825517A (en) * | 2010-05-17 | 2010-09-08 | 西安炬光科技有限公司 | Biaxial rotary scanning mechanism for testing laser and laser far-field test device |
| CN103699139A (en) * | 2013-08-14 | 2014-04-02 | 上海海事大学 | High-resolution scanning control system and subdivision driving control method for same |
| CN105843175A (en) * | 2016-03-24 | 2016-08-10 | 河北科技师范学院 | Parallel module structure based on distributed structure and parallel processing method |
-
2010
- 2010-05-17 CN CN201020192872XU patent/CN201819795U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101825517A (en) * | 2010-05-17 | 2010-09-08 | 西安炬光科技有限公司 | Biaxial rotary scanning mechanism for testing laser and laser far-field test device |
| CN103699139A (en) * | 2013-08-14 | 2014-04-02 | 上海海事大学 | High-resolution scanning control system and subdivision driving control method for same |
| CN103699139B (en) * | 2013-08-14 | 2017-04-12 | 上海海事大学 | High-resolution scanning control system and subdivision driving control method for same |
| CN105843175A (en) * | 2016-03-24 | 2016-08-10 | 河北科技师范学院 | Parallel module structure based on distributed structure and parallel processing method |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110504 Termination date: 20180517 |