CN201809470U - Guiding and shielding device for substrate of plating bath - Google Patents
Guiding and shielding device for substrate of plating bath Download PDFInfo
- Publication number
- CN201809470U CN201809470U CN2010202656421U CN201020265642U CN201809470U CN 201809470 U CN201809470 U CN 201809470U CN 2010202656421 U CN2010202656421 U CN 2010202656421U CN 201020265642 U CN201020265642 U CN 201020265642U CN 201809470 U CN201809470 U CN 201809470U
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- guiding
- plate
- transmission
- shading unit
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Abstract
A guiding and shielding device for a substrate of a plating bath comprises a guiding and shielding mechanism including a support frame, guiding bars and shielding plates, wherein the support frame consists of transversely arranged horizontal support plates and vertically arranged vertical support plates; the vertical support plates and the horizontal support plates are fixedly connected with one another; the horizontal support plates are a pair of plates; the vertical support plates are a plurality of pairs of plates; a mounting splint used for mounting the guiding bar is arranged on each pair of vertical support plates of the plurality of pairs of vertical support plates; strip-shaped openings allowing the substrate to pass through are formed in the middles of the guiding bars in a feed-through manner; the shielding plates are a pair of plates; and the pair of shielding plates are parallelly arranged at the peripheries of the pair of horizontal support plates and fixedly connected with the horizontal support plates. In the utility model, the guiding mechanism arranged on the substrate of the copper plating bath prevents the substrate from swinging in the moving process, and the shielding mechanism arranged on the substrate of the copper plating bath prevents the phenomenon of point discharge, so as to improve the uniformity of copper plating.
Description
Technical field
The utility model relates to a kind of guiding shading unit that full-automatic vertical continuous is electroplated the bath trough substrate of circuit that is used for.
Background technology
Full-automatic vertical continuous plating line is present domestic state-of-the-art electroplating device, for the substrate-guided shading unit of copper plating groove aspect, guide arrangement is for preventing that substrate 101 from departing from the sprinkling mid-way and designing in the prior art, it adopts copper frame hanger 102 as shown in Figure 1, all be fixed around the substrate 101, so guide arrangement is the guiding groove 103,104th of guiding copper frame hanger, goes into the water management ball valve; For masking system, prior art adopts " anode barrier film " mode, as shown in Figure 2, put copper ball in the titanium basket 201, connect with anodic current, through ionization and liquid medicine reaction meeting copper ion releasing, substrate is after hanger and negative electrode making current, and in the effect of voltage, cupric ion moves to substrate, non-cupric ion moves to the anode direction of dress titanium basket in the soup, the mobile of soup intermediate ion can produce electric current, and the edge around substrate is because of " point discharge " phenomenon, substrate edge electric current can strengthen, thereby causes the copper facing of substrate edge thicker.In continuous electroplating equipment, substrate is constantly motion, in the continuous conversion in the position of direction of motion substrate, the copper facing non-uniform phenomenon that this kind " point discharge " phenomenon causes is still not obvious, but lower edge at substrate, upper-lower position does not also change in the movement continuously process, thereby the increasing of copper facing amount herein phenomenon is comparatively obvious.Wherein 202 is anode barrier films, the 203rd, and copper plating groove, the 204th, go into the water management ball valve, also have other manufacturer to adopt anode barrier film mode, but do not play the good point discharge phenomenon herein that weakens, the copper facing homogeneity can be lowered.
Summary of the invention
The purpose of this utility model is to provide a kind of copper plating groove substrate-guided shading unit, and this device can prevent that substrate from playing pendulum in the process that moves, also can avoid " point discharge " phenomenon, increases copper-plated homogeneity.
The purpose of this utility model realizes by the measure of following technology: a kind of guiding shading unit of bath trough substrate, this guiding shading unit comprises the guiding means for screening, described guiding means for screening comprises support frame, guide ribs and masking shield, described support frame is made up of the horizontal support plate and the vertical perpendicular back up pad that is provided with of arranged transversely, described perpendicular back up pad is fixedlyed connected with horizontal support plate, described horizontal support plate is a pair of plate, described perpendicular back up pad is many to plate, described many each in the perpendicular back up pad are to being equipped with the installation supporting plate that is used to install guide ribs on the perpendicular back up pad, connect in the middle of the described guide ribs and have the strip shape gob that substrate passes, described masking shield is a pair of plate, described a pair of masking shield is set in parallel in the periphery of described a pair of horizontal support plate, and fixedlys connected with described horizontal support plate.
As a kind of improvement of the present utility model: the installation supporting plate that is provided with on described every pair of perpendicular back up pad is three pairs of supporting plates, be respectively superposed mounting plate, be arranged in the supporting plate at middle part and be positioned at the bolster of bottom, described many height to the supporting plate that is positioned at the corresponding position in the perpendicular back up pad from left to right/there is height difference H in right-to-left, makes the guide ribs that is installed on the supporting plate be skewed.
Above-mentioned height difference H is between 10-20mm.
The width of the strip shape gob of offering in the middle of the above-mentioned guide ribs is between 2-6mm.
As a kind of improvement of the present utility model: this guiding shading unit also comprises the hoisting appliance that can make the lifting of described guiding means for screening, described hoisting appliance comprises motor and transmission rig, the output terminal of motor links to each other with transmission shaft, transmission shaft links to each other with transmission rig, transmission rig links to each other with the masking shield of guiding in the means for screening, can drive and guide the means for screening lifting.
Above-mentioned motor is a clockwise and anticlockwise motor.
Above-mentioned transmission rig comprises transmission belt, transmission rod and the vertical a plurality of transmission frames that are provided with, described transmission belt links to each other with synchronizing shaft with transmission shaft respectively, synchronizing shaft is installed on the bearing support, bearing support is rack-mount, the middle part and the transmission rod of described transmission belt are fixedly linked, described transmission rod is fixedly linked with a plurality of transmission frames respectively, described transmission frame is fixedlyed connected with the vertical a pair of union lever that is provided with by the quarter butt of arranged transversely, the bottom of described vertical union lever is welded with T type piece, described T type piece has bar portion and head, bar portion and union lever welding, head is fixedlyed connected with horizontal support plate, and described union lever is fixedlyed connected with masking shield by U type piece.
As further improvement of the utility model: the contacted medial shaft of described masking shield and union lever is attached to rectangular on the union lever to being fixedly welded with, described rectangular top also has vertical bar hole, the middle part of described union lever has screw, screw is connected with union lever rectangular after passing bar hole and screw, can finely tune the elemental height position of masking shield by the relative position of regulating bar hole and screw.
Further improve as of the present utility model: this guiding shading unit also comprises can make the positioning guiding plate that leads in the described guiding means for screening lifting process, described positioning guiding plate is for vertically being fixedly mounted on a plurality of stripe board of bath trough bottom, a plurality of stripe board are all between horizontal support plate and masking shield, the inboard of described masking shield is installed with the runner block that has chute, described stripe board is passed chute, and the time spent of doing that described guiding means for screening is subjected to external force can move up and down along stripe board.
The utlity model has following advantage: on the copper plating groove substrate, be provided with guide, can prevent that substrate from playing pendulum in the process that moves, on the copper plating groove substrate, be provided with means for screening, can avoid " point discharge " phenomenon, increase copper-plated homogeneity.
Description of drawings
Below in conjunction with the drawings and specific embodiments the utility model is described in further details.
Fig. 1 is a guide synoptic diagram of the prior art;
Fig. 2 is a means for screening synoptic diagram in the prior art;
Fig. 3 is the substrate-guided shading unit one-piece construction of a utility model copper plating groove synoptic diagram;
Fig. 4 is the substrate-guided mechanism structure figure of copper plating groove of the present utility model;
Fig. 5 is the structural representation of the perpendicular back up pad of the utility model;
Fig. 6 is the structural representation of lateral brace plate in the utility model;
Fig. 7 is the structural representation of the utility model guide ribs;
Fig. 8 is a means for screening synoptic diagram in the utility model;
Fig. 9 is a hoisting appliance structure iron of the present utility model;
Figure 10 is the structural representation of the utility model union lever;
Figure 11 is the structural representation of the utility model positioning guiding plate and runner block.
Description of reference numerals: 101, substrate; 102, hanger; 103, guiding groove; 104, go into the water management ball valve; 201, titanium basket; 202, anode barrier film; 203, copper plating groove; 204, go into the water management ball valve; 1, horizontal support plate; 2, perpendicular back up pad; 3, supporting plate is installed; 31, mounting plate; 32, middle supporting plate; 33, bolster; 4, guide ribs; 41, strip shape gob; 5, masking shield; 6, motor; 7, transmission shaft; 8, transmission belt; 9, transmission rod; 10, synchronizing shaft; 11, bearing support; 12, support; 13, quarter butt; 14, union lever; 15, T type piece; 151, bar portion; 152, head; 16, U type piece; 161, U type piece fixed bolt hole; 17, rectangular; 18, bar hole; 19, screw; 20, positioning guiding plate; 21, runner block.
Embodiment
The guiding shading unit of a kind of bath trough substrate shown in Fig. 3-11, it comprises the guiding means for screening, the effect of guide is in order to prevent that substrate from playing pendulum in moving process, this guiding means for screening comprises support frame, guide ribs and masking shield, support frame is made up of the horizontal support plate 1 and the vertical perpendicular back up pad 2 that is provided with of arranged transversely, perpendicular back up pad 2 is fixedlyed connected with horizontal support plate 1, horizontal support plate 1 is a pair of plate, perpendicular back up pad 2 is many to plate, many each in the perpendicular back up pad 2 are to being equipped with the installation supporting plate 3 that is used to install guide ribs on the perpendicular back up pad, the installation supporting plate that is provided with on the every pair of perpendicular back up pad is three pairs of supporting plates, be respectively superposed mounting plate 31, be arranged in the supporting plate 32 and the bolster 33 that is positioned at the bottom at middle part, these many height to the supporting plate that is positioned at the corresponding position in the perpendicular back up pad 2 from left to right/there is height difference H in right-to-left, height difference H is preferably between the 10-20mm, makes the guide ribs that is installed on the supporting plate be skewed.
It can be the PP piece that supporting plate is installed, and having height difference H mainly is in order to eliminate the problem of the lack of uniformity that substrate causes because of stopping of guide ribs in the process of plating bath continuously.
As shown in Figure 7, connect in the middle of the guide ribs 4 and have the strip shape gob 41 that substrate passes, the width of the strip shape gob of offering in the middle of this guide ribs 4 41 is between 2-6mm.
Guide ribs can be made by two PVC plate assemblings that process, and in guiding plating bath base board end surface is that the Teflon flexible pipe is installed to prevent the scratch substrate by the strip shape gob place, the main effect of guide ribs is that the guiding substrate moves forward, two rows before and after dividing, the ingress is V-shape, is convenient to substrate and enters guide.
As shown in Figure 8, wherein, masking shield 5 is a pair of plate, this is set in parallel in the periphery of a pair of horizontal support plate 1 to masking shield, and fixedly connected with horizontal support plate 1, the main effect of masking shield is the weak current that interrupts the substrate lower edge, avoids point discharge phenomenon to increase galvanized homogeneity.
As shown in Figure 9, this guiding shading unit also comprises the hoisting appliance that can make the lifting of described guiding means for screening, and this hoisting appliance comprises motor 6 and transmission rig, and wherein motor can be a clockwise and anticlockwise motor.The output terminal of motor links to each other with transmission shaft 7, and transmission shaft 7 links to each other with transmission rig, and transmission rig links to each other with the masking shield 5 of guiding in the means for screening, can drive and guide the means for screening lifting.This transmission rig comprises transmission belt 8, transmission rod 9 and the vertical a plurality of transmission frames that are provided with, transmission belt 8 links to each other with synchronizing shaft 10 with transmission shaft 7 respectively, synchronizing shaft 10 is installed on the bearing support 11, bearing support 11 is installed on the support 12, support 12 can be fixedly square tube or other fixture of effect same greatly, the middle part of transmission belt 8 and transmission rod 9 are fixedly linked, transmission rod 9 is fixedly linked with a plurality of transmission frames respectively, the transmission frame is fixedlyed connected with the vertical a pair of union lever 14 that is provided with by the quarter butt 13 of arranged transversely, the bottom of vertical union lever 14 is welded with T type piece 15, described T type piece has bar portion 151 and head 152, bar portion 151 and union lever 14 welding, head 152 is fixedlyed connected with horizontal support plate 1, and union lever 14 is fixedlyed connected by bolt hole 161 with masking shield 5 by U type piece 16.
When producing littler plate, starting motor can be with the lifting that hoist of guiding shading unit, when producing big plate, this hoisting appliance descends, and drives whole means for screening and descends, and can continue the guiding substrate to keep guide, means for screening can keep the bottom of substrate, avoid " point discharge " phenomenon,, improve copper-plated homogeneity to reach the purpose that interrupts weak current.
As shown in Figure 10, masking shield 5 is attached to rectangular 17 on the union lever 14 with union lever 14 contacted medial shafts to being fixedly welded with, rectangular 17 top also has vertical bar hole 18, the middle part of union lever 14 has screw 19, screw is connected with union lever 14 rectangular 17 after passing bar hole 18 and screw, can finely tune the elemental height position of masking shield 5 by regulating bar hole 18 and the relative position of screw.
As shown in Figure 11, this guiding shading unit also comprises can make the positioning guiding plate 20 that leads in the described guiding means for screening lifting process, positioning guiding plate 20 is for vertically being fixedly mounted on a plurality of stripe board of bath trough bottom, a plurality of stripe board are all between horizontal support plate 1 and masking shield 5, the inboard of masking shield 5 is installed with the runner block 21 that has chute, stripe board is passed chute, and the time spent of doing that the guiding means for screening is subjected to external force can move up and down along stripe board.
When the guiding means for screening moves up and down, when driven by motor guiding shading unit slides positioning guiding plate in having the runner block of chute, can guarantee to guide the means for screening invariant position.
The foregoing description of the present utility model is not the qualification to the utility model protection domain; embodiment of the present utility model is not limited thereto; therefore; according to foregoing of the present utility model; ordinary skill knowledge and customary means according to this area; do not breaking away under the following basic fundamental thought of the utility model prerequisite, modification, replacement or the change of other various ways that the utility model said structure is made all drop within the protection domain of the present utility model.
Claims (9)
1. the guiding shading unit of a bath trough substrate, it is characterized in that: this guiding shading unit comprises the guiding means for screening, described guiding means for screening comprises support frame, guide ribs and masking shield, described support frame is made up of the horizontal support plate and the vertical perpendicular back up pad that is provided with of arranged transversely, described perpendicular back up pad is fixedlyed connected with horizontal support plate, described horizontal support plate is a pair of plate, described perpendicular back up pad is many to plate, described many each in the perpendicular back up pad are to being equipped with the installation supporting plate that is used to install guide ribs on the perpendicular back up pad, connect in the middle of the described guide ribs and have the strip shape gob that substrate passes, described masking shield is a pair of plate, described a pair of masking shield is set in parallel in the periphery of described a pair of horizontal support plate, and fixedlys connected with described horizontal support plate.
2. guiding shading unit according to claim 1, it is characterized in that: the installation supporting plate that is provided with on described every pair of perpendicular back up pad is three pairs of supporting plates, be respectively superposed mounting plate, be arranged in the supporting plate at middle part and be positioned at the bolster of bottom, described many height to the supporting plate that is positioned at the corresponding position in the perpendicular back up pad from left to right/there is height difference H in right-to-left, makes the guide ribs that is installed on the supporting plate be skewed.
3. guiding shading unit according to claim 2 is characterized in that: described height difference H is between 10-20mm.
4. guiding shading unit according to claim 1 is characterized in that: the width of the strip shape gob of offering in the middle of the described guide ribs is between 2-6mm.
5. according to each described guiding shading unit of claim 1 to 4, it is characterized in that: this guiding shading unit also comprises the hoisting appliance that can make the lifting of described guiding means for screening, described hoisting appliance comprises motor and transmission rig, the output terminal of motor links to each other with transmission shaft, transmission shaft links to each other with transmission rig, transmission rig links to each other with the masking shield of guiding in the means for screening, can drive and guide the means for screening lifting.
6. guiding shading unit according to claim 5 is characterized in that: described motor is a clockwise and anticlockwise motor.
7. guiding shading unit according to claim 5, it is characterized in that: described transmission rig comprises transmission belt, transmission rod and the vertical a plurality of transmission frames that are provided with, described transmission belt links to each other with synchronizing shaft with transmission shaft respectively, synchronizing shaft is installed on the bearing support, bearing support is rack-mount, the middle part and the transmission rod of described transmission belt are fixedly linked, described transmission rod is fixedly linked with a plurality of transmission frames respectively, described transmission frame is fixedlyed connected with the vertical a pair of union lever that is provided with by the quarter butt of arranged transversely, the bottom of described vertical union lever is welded with T type piece, described T type piece has bar portion and head, bar portion and union lever welding, head is fixedlyed connected with horizontal support plate, and described union lever is fixedlyed connected with masking shield by U type piece.
8. guiding shading unit according to claim 7, it is characterized in that: the contacted medial shaft of described masking shield and union lever is attached to rectangular on the union lever to being fixedly welded with, described rectangular top also has vertical bar hole, the middle part of described union lever has screw, screw is connected with union lever rectangular after passing bar hole and screw, can finely tune the elemental height position of masking shield by the relative position of regulating bar hole and screw.
9. guiding shading unit according to claim 8, it is characterized in that: this guiding shading unit also comprises can make the positioning guiding plate that leads in the described guiding means for screening lifting process, described positioning guiding plate is for vertically being fixedly mounted on a plurality of stripe board of bath trough bottom, a plurality of stripe board are all between horizontal support plate and masking shield, the inboard of described masking shield is installed with the runner block that has chute, described stripe board is passed chute, and the time spent of doing that described guiding means for screening is subjected to external force can move up and down along stripe board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202656421U CN201809470U (en) | 2010-07-20 | 2010-07-20 | Guiding and shielding device for substrate of plating bath |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202656421U CN201809470U (en) | 2010-07-20 | 2010-07-20 | Guiding and shielding device for substrate of plating bath |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201809470U true CN201809470U (en) | 2011-04-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010202656421U Expired - Lifetime CN201809470U (en) | 2010-07-20 | 2010-07-20 | Guiding and shielding device for substrate of plating bath |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201809470U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103966649A (en) * | 2014-05-16 | 2014-08-06 | 昆山东威电镀设备技术有限公司 | Electroplating guide device and system |
-
2010
- 2010-07-20 CN CN2010202656421U patent/CN201809470U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103966649A (en) * | 2014-05-16 | 2014-08-06 | 昆山东威电镀设备技术有限公司 | Electroplating guide device and system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110427 |
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| CX01 | Expiry of patent term |