CN201796222U - Device for preventing wafer from dropping off microscope table and microscope table - Google Patents
Device for preventing wafer from dropping off microscope table and microscope table Download PDFInfo
- Publication number
- CN201796222U CN201796222U CN2010205397791U CN201020539779U CN201796222U CN 201796222 U CN201796222 U CN 201796222U CN 2010205397791 U CN2010205397791 U CN 2010205397791U CN 201020539779 U CN201020539779 U CN 201020539779U CN 201796222 U CN201796222 U CN 201796222U
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- CN
- China
- Prior art keywords
- wafer
- arm
- microscope
- shaped cover
- board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a device for preventing a wafer from dropping off a microscope table and the microscope table. The device for preventing the wafer from dropping off the microscope table is arranged on the microscope table at a position where the wafer is easily collided with the arm of an operator during switching and is an L-shaped cover; and the L-shaped cover is integrally formed or formed by hinging one arm with another arm. When the device is used, the device for preventing the wafer from dropping off the microscope table is arranged on the microscope table; because the device for preventing the wafer from dropping off the microscope table is arranged on the microscope table at the position where the wafer is easily collided with the arm of the operator during switching, the arm of the operator can be prevented from being placed at the position; therefore, the wafer is prevented from colliding the arm of the operator when the operating buttons of the microscope table are operated to effectively protect the safety of the operator and products.
Description
Technical field
The utility model relates to semiconductor technology, relates in particular to a kind of microscope board the drop device and microscope board of wafer of preventing.
Background technology
In the wafer process process, often need observe wafer, to watch the quality of wafer process with microscope.At present when using microscope, because the relation of microscope work button position, with the platform of wafer below the A arm exchanges to microscope the time, thereby because the arm that the carelessness of operation or operating habit cause when exchange wafer to bump against the operator causes wafer to drop.As shown in Figure 1, wherein, 1 is the microscope board, 2 is action button, and 3 is the A arm, and 4 is wafer, 5 is the operator arm position, and the arrow direction is the direction that wafer moves, and position shown in the frame of broken lines 6 is wafer and the time is easy to the place that bumps with operator's arm in exchange.
In the aforesaid operations process, because wafer can bump against operator's arm, may cause injury of human, and dropping of wafer can damage to wafer, influence the product yield, even can cause product rejection.
The utility model content
The purpose of this utility model provide a kind of prevent the microscope board drop wafer device and have the microscope board of this device.
For achieving the above object, the utility model adopts following technical scheme:
A kind of drop device of wafer of microscope board that prevents, be used to be installed in wafer on the microscope board and when exchange, be easy to the place that bumps with operator's arm, wherein, this prevents that the drop device of wafer of microscope board from being L shaped cover cap, and described L shaped cover cap is formed as one or is hinged on another arm by an arm and forms.
Further, the end of described L shaped cover cap arm is provided with unfilled corner.
Further, described L shaped cover cap is provided with screw, and described screw is positioned on one or two arm of described L shaped cover cap.
Further, this prevents that the drop material of device of wafer of microscope board from being acryl.
A kind of microscope board, it is provided with and prevents the drop device of wafer of microscope board, this prevents that the drop device of wafer of microscope board is installed in wafer on this microscope board is easy to the place that bumps with operator's arm when exchange, and this prevents that the drop device of wafer of microscope board from being L shaped cover cap, and described L shaped cover cap is formed as one or is hinged on another arm by an arm and forms.
Further, the end of an arm of described L shaped cover cap is provided with unfilled corner, and the position of this unfilled corner is corresponding to the action button of this microscope board.
Further, described L shaped cover cap is bonded on the described microscope board; Perhaps, described L shaped cover cap is provided with screw, and described screw is positioned on one or two arm of described L shaped cover cap.
Further, describedly prevent that the drop material of device of wafer of microscope board from being acryl.
When the utility model uses, be to be equipped with to prevent the drop device of wafer of microscope board on the microscope board, this prevents that the drop device of wafer of microscope board from being L shaped cover structure.Because this prevents that the drop device of wafer of microscope board is installed in wafer on the microscope board is easy to the place that bumps with operator's arm when exchange; therefore it can prevent that the operator is placed on this position with arm; thereby avoid that wafer and operator's arm bump when the action button of operation microscope board, and then effectively protect the safety of operator and product.
Description of drawings
Fig. 1 is the position view when operating the microscope board in the prior art;
Fig. 2 is the drop structural representation of device of wafer of microscope board that prevents of the present utility model;
Position view when Fig. 3 operates the microscope board for the utility model.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer,, the utility model is further elaborated below in conjunction with drawings and Examples.Should be appreciated that specific embodiment described herein only in order to explanation the utility model, and be not used in qualification the utility model.
As shown in Figure 2, the utility model provides a kind of drop device of wafer of microscope board that prevents, it is used to be installed in wafer on the microscope board and is easy to the place that bumps with operator's arm when exchange, and this prevents that the drop device of wafer of microscope board from being L shaped cover cap, and this L shaped cover cap is formed as one or is hinged on another arm 73 by an arm 71 and forms (72 are the articulated section among the figure).
During application; this is prevented that the drop device 7 of wafer of microscope board is installed in wafer on the microscope board and is easy to the place (referring to Fig. 3) that bumps with operator's arm when the exchange; it can prevent that the operator is placed on this position with arm like this; thereby avoid that wafer and operator's arm bump when the action button of operation microscope board, and then effectively protect the safety of operator and product.
Preferably, the end of an arm 71 of described L shaped cover cap is provided with unfilled corner 74, and with after preventing this to prevent the microscope board to drop the device of wafer installing, the action button 2 of the board 1 that adjusts the telescope to one's eyes impacts.
The drop device of wafer of microscope board that prevents of the present utility model both can be bonded on the microscope board, the mode that also can adopt bolt to install, when adopting bolt to install, preferably, described L shaped cover cap is provided with screw 75, and described screw 75 is positioned on one or two arm of described L shaped cover cap.Certainly, it should be appreciated by those skilled in the art that when all being provided with screw on two arms of L shaped cover cap, install and fix best results (embodiment shown in Fig. 2 and Fig. 3 has adopted this mode).
And the drop material of device of wafer of microscope board that prevents of the present utility model can be the plastic material that various hardness are good, transparency is high, wherein preferably adopts the acryl material.
Prevent that with above-mentioned the drop device of wafer of microscope board is corresponding, the utility model also provides a kind of microscope board, as shown in Figure 3, it is provided with and prevents the drop device 7 of wafer of microscope board, this prevents that the drop device 7 of wafer of microscope board is installed in wafer on this microscope board is easy to the place that bumps with operator's arm when exchange, and this prevents that the drop device 7 of wafer of microscope board from being L shaped cover cap, and this L shaped cover cap is formed as one or is hinged on another arm 73 by an arm 71 and forms.
Because this prevents that the drop device of wafer of microscope board is installed in wafer on the microscope board is easy to the place that bumps with operator's arm when exchange; therefore it can prevent that the operator is placed on this position with arm; thereby avoid that wafer and operator's arm bump when the action button of operation microscope board, and then effectively protect the safety of operator and product.
Preferably, the end of an arm 71 of L shaped cover cap is provided with unfilled corner 74, and the position of this unfilled corner 74 is corresponding to the action button 2 of this microscope board 1, to avoid influencing the action button 2 of operation microscope board 1.
The drop device of wafer of microscope board that prevents in the utility model both can be bonded on the microscope board, the mode that also can adopt bolt to install is when adopting bolt to install, preferably, L shaped cover cap is provided with screw 75, and screw 75 is positioned on one or two arm of L shaped cover cap.
The above is preferred embodiment of the present utility model only, is not to be used for limiting practical range of the present utility model; If do not break away from spirit and scope of the present utility model, the utility model is made amendment or is equal to replacement, all should be encompassed in the middle of the protection domain of the utility model claim.
Claims (8)
1. one kind prevents the drop device of wafer of microscope board, be used to be installed in wafer on the microscope board and when exchange, be easy to the place that bumps with operator's arm, it is characterized in that, this prevents that the drop device of wafer of microscope board from being L shaped cover cap, and described L shaped cover cap is formed as one or is hinged on another arm by an arm and forms.
2. the drop device of wafer of microscope board that prevents according to claim 1 is characterized in that the end of an arm of described L shaped cover cap is provided with unfilled corner.
3. the drop device of wafer of microscope board that prevents according to claim 2 is characterized in that described L shaped cover cap is provided with screw, and described screw is positioned on one or two arm of described L shaped cover cap.
4. according to each described drop device of wafer of microscope board that prevents in the claim 1 to 3, it is characterized in that this prevents that the drop material of device of wafer of microscope board from being acryl.
5. microscope board, it is characterized in that, it is provided with and prevents the drop device of wafer of microscope board, this prevents that the drop device of wafer of microscope board is installed in wafer on this microscope board is easy to the place that bumps with operator's arm when exchange, and this prevents that the drop device of wafer of microscope board from being L shaped cover cap, and described L shaped cover cap is formed as one or is hinged on another arm by an arm and forms.
6. microscope board according to claim 5 is characterized in that, the end of an arm of described L shaped cover cap is provided with unfilled corner, and the position of this unfilled corner is corresponding to the action button of this microscope board.
7. microscope board according to claim 6 is characterized in that,
Described L shaped cover cap is bonded on the described microscope board;
Perhaps, described L shaped cover cap is provided with screw, and described screw is positioned on one or two arm of described L shaped cover cap.
8. according to each described microscope board in the claim 5 to 7, it is characterized in that, describedly prevent that the drop material of device of wafer of microscope board from being acryl.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205397791U CN201796222U (en) | 2010-09-21 | 2010-09-21 | Device for preventing wafer from dropping off microscope table and microscope table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205397791U CN201796222U (en) | 2010-09-21 | 2010-09-21 | Device for preventing wafer from dropping off microscope table and microscope table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201796222U true CN201796222U (en) | 2011-04-13 |
Family
ID=43851127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205397791U Expired - Fee Related CN201796222U (en) | 2010-09-21 | 2010-09-21 | Device for preventing wafer from dropping off microscope table and microscope table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201796222U (en) |
-
2010
- 2010-09-21 CN CN2010205397791U patent/CN201796222U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110413 Termination date: 20140921 |
|
| EXPY | Termination of patent right or utility model |