CN201792208U - Precision movement platform based on decoupling mechanism - Google Patents
Precision movement platform based on decoupling mechanism Download PDFInfo
- Publication number
- CN201792208U CN201792208U CN201020126600XU CN201020126600U CN201792208U CN 201792208 U CN201792208 U CN 201792208U CN 201020126600X U CN201020126600X U CN 201020126600XU CN 201020126600 U CN201020126600 U CN 201020126600U CN 201792208 U CN201792208 U CN 201792208U
- Authority
- CN
- China
- Prior art keywords
- axis
- movement
- precision
- rearmounted
- guide rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Transmission Devices (AREA)
Abstract
The utility model relates to a precision movement platform based on a decoupling mechanism, which is used for the fields of semiconductor packaging, precision processing, biomedical processing, optical and image alignment and the like. The precision movement platform comprises an X-axis linear motor, a Y-axis servo motor, Y-axis front movement guide rails, a lifting slide plate, a Y-axis vehicle platform, a Y-axis movement transmission component, Y-axis rear movement guide rails, a Y-axis rear movement slide plate and driven rollers. Movement in the X direction is driven by the linear motor without a transmission device of any intermediate switching mechanism, repeated positioning precision is better without backlash and friction force in a traditional roller and screw transmission, and system rigidity and effective loading are larger than those in traditional packing type design as decoupling design is adopted for X-axis movement and Y-axis movement.
Description
One, technical field
The utility model relates to a kind of precision movement platform based on decoupling mechanism, is suitable for the requirement of the required high speed in precision positioning engineering fields such as semiconductor packages, Precision Machining, biological medicine processing, optics and image aligning field, high acceleration and hi-Fix.
Two, background technology
At present, the advanced equipment industry of making has demand widely to the high speed and the high acceleration motion platform that can reach the micron order repetitive positioning accuracy.Especially in the semiconductor packages industry, for satisfying light, thin, little development trend of IC encapsulation and the market demand to high production rate equipment, positioning accuracy, speed and the acceleration of semiconductor manufacturing equipment require more and more higher.Yet along with the raising of movement velocity and acceleration, the inertia force of load and change frequency also can strengthen thereupon, and system is easy to vibrate, and then have influence on positioning accuracy and reliability.Above contradiction is the problem that precision movement platform must solve.
The formula two degree-of-freedom motion platform of piling up shown in Figure 3 has obtained extensive use in semiconductor packaging device, its major function is to drive load to do the precision positioning campaign along X-axis, and the object (as chip) that vertical direction is done by y-axis motor driving executing agency picks up and place action.This motion platform has two shortcomings at least:
1) directions X adopts motor-ball-screw-nut body form.Middle transmission link can't be avoided the frictional force, backlass, tracking error between kinematic pair etc., is difficult to assurance equipment at a high speed and the repetitive positioning accuracy under the high acceleration.
2) y-axis motor 20 also becomes the load of X-axis motor 30 when driving load.This packing structure has strengthened the load of X-axis motor, has accelerated the wearing and tearing of moving component, and has weakened system rigidity, makes the easier generation vibration under high speed and high acceleration of whole motion platform can't obtain high resetting performance.
3) power line of y-axis motor 20 and holding wire move along X-axis with load, cause unnecessary wearing and tearing easily, and then reduce system reliability.
Three, utility model content
The utility model relates to a kind of precision movement platform based on decoupling mechanism in fields such as being used for semiconductor packages, Precision Machining, biological medicine processing, optics and image aligning, includes X-axis linear electric motors, Y-axis servomotor, the preposition motion guide rail of Y-axis, lifter slide, Y-axis carrier platform, Y-axis motion transmission parts, the rearmounted motion guide rail of Y-axis, the rearmounted skateboarding of Y-axis and return idler.Decoupling design is adopted in the utility model X-axis and Y-axis motion: X-axis linear electric motors and Y-axis servomotor are fixed on the pedestal; X-axis linear electric motors actuation movement load is moved along X-axis.Y-axis driven by servomotor lifter slide, lifter slide drives the X-axis movement load by two return idlers and moves up and down along the Y-axis motion guide rail.
By said structure, the utlity model has following advantage:
1) directions X motion adopts linear electric motors to drive, and does not need the transmission device of any intermediate conversion mechanism, does not therefore have the backlass and the frictional force that exist in traditional ball-screw transmission.Utilize linear drive apparatus can reach speed up to 5m/s.In the application that needs higher accelerations, less linear electric motors can provide the acceleration greater than 10g easily, and the general acceleration that produces of conventional motors is in the 1g scope.Structure of the linear motion actuator is simple, and what need is lubricated less.The service life that this means it is cleaner than length and operating ratio, can reach higher repetitive positioning accuracy.
2) Decoupling design is adopted in the motion of X-axis and Y-axis, has reduced unnecessary load on the directions X kinematic axis, so system rigidity is piled up formula with the payload ratio tradition and designed bigger.
3) power line of Y-axis servomotor and holding wire needn't move along X-axis, have avoided unnecessary wearing and tearing.
Four, description of drawings
In conjunction with the embodiments the utility model is further described with reference to the accompanying drawings.
Fig. 1 is the structure chart of the utility model integral body
Fig. 2 is the side view of the utility model integral body
Fig. 3 is the structure chart of conventional motion scheme
Five, the specific embodiment
As depicted in figs. 1 and 2, the utility model is made up of X-axis linear electric motors, Y-axis servomotor 3, the preposition motion guide rail 4 of Y-axis, lifter slide 7, Y-axis carrier platform 8, Y-axis motion transmission parts 9 (comprising shaft coupling, ball-screw and angular contact bearing), the rearmounted motion guide rail 10 of Y-axis, the rearmounted skateboarding 11 of Y-axis and return idler 12.Wherein the X-axis linear electric motors are made up of base 1, iron core 5, magnet array 6 and X-axis motion guide rail 2; Be installed in the Y-axis servomotor 3 on the base 1, drive the rearmounted skateboarding 11 of Y-axis, do vertical direction along the rearmounted motion guide rail 10 of Y-axis and move by Y-axis motion transmission parts 9.Simultaneously, be fixed on the lifter slide 7 on the rearmounted skateboarding 11 of Y-axis, drive the Y-axis carrier platform 8 that return idler 12 is housed, do vertical direction and move along being fixed on the preposition motion guide rail 4 of Y-axis on the iron core 5.
Being preferred embodiment of the present utility model only in sum, is not to be used for limiting practical range of the present utility model.Be that all equivalences of doing according to the content in the utility model claim change and modification, all should be technology category of the present utility model.
Claims (3)
1. the precision movement platform based on decoupling mechanism comprises X-axis linear electric motors module and Y-axis servomotor module, and it is characterized in that: X-axis linear electric motors module is made up of base, iron core, magnet array and X-axis motion guide rail; Y-axis servomotor module is made up of Y-axis servomotor, the preposition motion guide rail of Y-axis, lifter slide, Y-axis carrier platform, shaft coupling, ball-screw, angular contact bearing, the rearmounted motion guide rail of Y-axis, the rearmounted skateboarding of Y-axis and return idler.
2. precision movement platform as claimed in claim 1 is characterized in that: be installed in the Y-axis servomotor on the base, drive the rearmounted skateboarding of Y-axis by Y-axis motion transmission parts, do vertical direction along the rearmounted motion guide rail of Y-axis and move.
3. precision movement platform as claimed in claim 1 is characterized in that: be fixed on the lifter slide on the rearmounted skateboarding of Y-axis, drive the Y-axis carrier platform that return idler is housed, do vertical direction and move along being fixed on the preposition motion guide rail of Y-axis on the iron core.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201020126600XU CN201792208U (en) | 2010-03-06 | 2010-03-06 | Precision movement platform based on decoupling mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201020126600XU CN201792208U (en) | 2010-03-06 | 2010-03-06 | Precision movement platform based on decoupling mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201792208U true CN201792208U (en) | 2011-04-13 |
Family
ID=43847131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201020126600XU Expired - Lifetime CN201792208U (en) | 2010-03-06 | 2010-03-06 | Precision movement platform based on decoupling mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201792208U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103921136A (en) * | 2014-04-29 | 2014-07-16 | 浙江博雷重型机床制造有限公司 | Separated type tool platform structure |
-
2010
- 2010-03-06 CN CN201020126600XU patent/CN201792208U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103921136A (en) * | 2014-04-29 | 2014-07-16 | 浙江博雷重型机床制造有限公司 | Separated type tool platform structure |
| CN103921136B (en) * | 2014-04-29 | 2016-04-06 | 浙江博雷重型机床制造有限公司 | A kind of separate type tooling platform structure |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101642907B (en) | Two-degrees-of-freedom translation parallel robot mechanism | |
| CN201134045Y (en) | Double-shaft moving platform | |
| CN102501224B (en) | A kind of planar maglev linear-motion platform | |
| CN107246870A (en) | A kind of difference structure stabilized platform being driven based on flexible cable | |
| CN214771874U (en) | Motion platform based on T type air supporting guide rail | |
| CN106594070B (en) | Secondary nanophase precision actuation workbench based on flexible structure | |
| CN2863382Y (en) | Mobile positioning device and three-dimensional rectangular coordinate mobile positioning device comprised of the same | |
| CN201792208U (en) | Precision movement platform based on decoupling mechanism | |
| CN2536348Y (en) | Unitary platform with movements in two dimensions | |
| CN104985592A (en) | Five-axis linkage robot | |
| CN104464837B (en) | High-precision based on DC motor Driver and three-dimensional motion system | |
| CN1887686A (en) | Two-freedom air-floated precisely locating platform for IC packaging | |
| CN1963374A (en) | Large range motion, high speed and precision orientation apparatus of two coordinate axes | |
| CN111628624A (en) | KK linear motor module | |
| CN102723303B (en) | Air flotation locating platform with X coordinate and Y coordinate | |
| CN208739004U (en) | A kind of embedded sliding rail mould group of high-precision four-row | |
| CN215316991U (en) | XYZ-axis high-speed operation platform | |
| CN212413024U (en) | Linear motor driving platform and machining device | |
| CN212785116U (en) | Six-degree-of-freedom direct-drive motor module | |
| CN202712146U (en) | XY double-coordinate air floatation positioning platform | |
| CN206321258U (en) | High-precision electric scan table | |
| CN207939388U (en) | A kind of four axis linear motor platforms | |
| CN208648037U (en) | Transmit alignment device and increasing material manufacturing equipment | |
| CN103681408A (en) | Horizontal axis drive mechanism, two-axis drive mechanism, and die bonder | |
| CN212518752U (en) | High-precision double-cross straight line module |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| DD01 | Delivery of document by public notice |
Addressee: Wang Chi Document name: Notification of Passing Examination on Formalities |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20170401 Address after: Jiangsu province Suzhou City Branch Park 215513 Changshu economic and Technological Development Zone, Room 102 Patentee after: JIANGSU ACCURACY ASSEMBLY AUTOMATION EQUIPMENT CO., LTD. Address before: Block 32B No. 1001 Hong Kong villa D Futian District Jintian road Shenzhen City, Guangdong province 518033 Patentee before: Wang Chi |
|
| TR01 | Transfer of patent right | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110413 |
|
| CX01 | Expiry of patent term |