CN201785481U - Columnar electrode - Google Patents
Columnar electrode Download PDFInfo
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- CN201785481U CN201785481U CN2010201949209U CN201020194920U CN201785481U CN 201785481 U CN201785481 U CN 201785481U CN 2010201949209 U CN2010201949209 U CN 2010201949209U CN 201020194920 U CN201020194920 U CN 201020194920U CN 201785481 U CN201785481 U CN 201785481U
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- hollow
- columnar electrode
- hollow inner
- inner housing
- shell body
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Abstract
A columnar electrode comprises a hollow outer casing, a hollow inner casing, magnets, a bracket, a first liquid delivery tube and a second liquid delivery tube, wherein the hollow inner casing is arranged inside the hollow outer casing. Besides, a cooling cavity is formed between the hollow inner casing and the hollow outer casing; a hollow inner cavity is arranged inside the hollow inner casing; the magnets are distributed inside the hollow inner cavity of the hollow inner casing; the hollow outer casing and the hollow inner casing are assembled on the bracket; the first liquid delivery tube and the second liquid delivery tube are communicated with the cooling cavity. The columnar electrode divides the space inside the hollow outer casing by the aid of the hollow inner casing to form the independent cooling cavity and the hollow inner cavity, leads cooling water to flow only inside the cooling cavity close to the surface of the hollow outer casing, and accordingly can improve cooling efficiency and simultaneously enhance the performance of the electrode.
Description
Technical field
The utility model is about a kind of columnar electrode, especially refers to a kind of columnar electrode with cooling structure.
Background technology
The application of sputter technology in semiconductor industry is very extensive, the main system plating of using at metallic film, or be used for revising or produce electrical specification on the disk unicircuit.Magnetic control sputtering plating be a kind of in system the jet-plating method that increase magnetic field more, electronics is because the influence of magnetic line of force, and the advancing of spirality.Can significantly increase the ion density and the collision opportunity of gas like this.In a single day ion density increases, and sputtering yield can also significantly improve.
Columnar electrode is a kind of electrode with cylindrical-shaped structure, and it is applied in the magnetic control sputtering plating system, can be to generally flexible or bendable substrate do not carry out sputter, and the application of carrying out other.
As shown in Figure 1, it is a known sputtering device 1, this sputtering apparatus 1 includes a vacuum cavity 10 and a columnar electrode 11, and its columnar electrode 11 includes: a columned hollow housing 12, a liquid-in pipe 13, a drain pipe 14 and a plurality of magnetite 15.Columned hollow housing 12 has a hollow cavity 16, and liquid-in pipe 13 is communicated in the hollow cavity 16, in order to import water coolant to hollow cavity 16; Drain pipe 14 also is communicated with hollow cavity 16, with water coolant by discharging in the hollow cavity 16.
Because general columnar electrode 11 can produce heat in use, and influences sputtering yield, therefore needs to be provided with the temperature that reduces columnar electrode 11 as refrigerating units such as liquid-in pipe 13 and drain pipes 14.Yet in the known technology, this kind is not good with the accessible cooling performance of method that water is full of whole columnar electrode internal cavity, and its supposition is to cause flow rate of water flow low excessively owing to cavity is excessive, so water coolant can't effectively be discharged heat.In addition, needing a large amount of water coolants in this kind design, for the pricing on using, will be a very big problem.Moreover this known columnar electrode 11 is in use, and magnetite 15 is to be soaked in fully in the water coolant, and assembly life-span is lowered.
Therefore, in order to solve the shortcoming that above-mentioned known columnar electrode has, this area is needed a kind of columnar electrode of novelty badly, makes the characteristic that can have high radiating effect, and can effectively reduce cooling water amount, and can improve simultaneously assembly work-ing life.
The utility model content
The purpose of this utility model is to provide a kind of columnar electrode, to overcome the defective that exists in the known technology.
For achieving the above object, the columnar electrode that the utility model provides comprises:
One hollow shell body;
One hollow inner housing is disposed in this hollow shell body, wherein, forms a cooling chamber between this hollow inner housing and this hollow shell body, has a hollow cavity body in this hollow inner housing;
At least one magnetite is laid in the hollow cavity body of this hollow inner housing;
One bracket, wherein, this hollow shell body and this hollow inner housing are mounted on this bracket;
One first tubing is communicated to this cooling chamber; And
One second tubing is communicated to this cooling chamber.
Described columnar electrode, wherein this first tubing runs through this hollow cavity body, and one first mouth of pipe of this first tubing is disposed at the top of this hollow inner housing.
Described columnar electrode is comprising a power supply source of supply, with this bracket electric property coupling.
Described columnar electrode comprising a gasket, is disposed between this hollow shell body and hollow inner housing and this bracket.
Described columnar electrode is comprising most magnetites.
Described columnar electrode, wherein the outside diameter difference of the interior diameter of this hollow shell body and this hollow inner housing is 2mm to 20mm.
Described columnar electrode, wherein the outside diameter difference of the interior diameter of this hollow shell body and this hollow inner housing is 5mm to 15mm.
Described columnar electrode, wherein the outside diameter of this hollow shell body is 80mm to 200mm.
Described columnar electrode, wherein the outside diameter of this hollow shell body is 100mm to 180mm.
Described columnar electrode, wherein this magnetite is a permanent magnet.
The columnar electrode of the tool cooling structure that the utility model provides, be to utilize a hollow inner housing and with the intravital separated by spaces of hollow shell, and form independently a cooling chamber and a hollow cavity body, and make water coolant only can near the cooling chamber of hollow shell surface, flow (making the hollow cavity body need not be full of water), therefore the usage quantity that can significantly save water coolant reduces use cost.
In addition, via experiment confirm, since in the columnar electrode of the present utility model cooling-water flowing through space (being cooling chamber) cooling-water flowing in traditional columnar electrode come through the space little, so the flow velocity of water coolant in cooling chamber can be increased effectively, and then promote cool effect.Therefore, the cooling structure of the more known columnar electrode of the accessible cooling efficiency of the cooling structure of columnar electrode of the present utility model is better.
Moreover, owing to have a hollow cavity body in the columnar electrode of the present utility model, magnetite can be placed in this hollow cavity body and contact, so can promote the assembly work-ing life of magnetite with water.
Description of drawings
Fig. 1 is a known sputtering schematic representation of apparatus.
Fig. 2 is the synoptic diagram of the sputtering apparatus of the utility model one preferred embodiment.
Fig. 3 is the synoptic diagram of the columnar electrode of another preferred embodiment of the utility model.
Primary clustering nomenclature in the accompanying drawing:
1 sputtering apparatus, 24 cooling chambers, 11 columnar electrodes, 25 brackets, 12 hollow housings, 26 first tubings, 13 liquid-in pipes, 261 first mouths of pipe, 14 drain pipes, 27 second tubings, 15 magnetites, 271 second mouths of pipe, 16 hollow cavities, 28 hollow cavity bodies, 21 columnar electrodes, 29 magnetites, 22 hollow shell bodies, 30 gaskets, 23 hollow inner housings, 31 power supply sources of supply.
Embodiment
The columnar electrode that the utility model provides comprises: a hollow shell body; One hollow inner housing is disposed in the hollow shell body, wherein, forms a cooling chamber between hollow inner housing and the hollow shell body, has a hollow cavity body in the hollow inner housing; At least one magnetite is laid in the hollow cavity body of hollow inner housing; One bracket, wherein hollow shell body and hollow inner housing are mounted on the bracket; One first tubing is communicated to cooling chamber; And one second tubing, be communicated to cooling chamber.
In the columnar electrode of the present utility model, first tubing is preferable to run through the hollow cavity body, and one first mouth of pipe of first tubing is preferable configurable in the top of hollow inner housing.So, when water coolant enters to cooling chamber by first mouth of pipe, be easier to reach and make water coolant everywhere average effect of flow velocity in cooling chamber.
In the columnar electrode of the present utility model, preferablely can also comprise a power supply source of supply, and the power supply source of supply is and the bracket electric property coupling, and is electrically coupled to the hollow shell body via bracket.In addition, a preferable direct current, pulse wave or radio frequency (RF) the power supply source of supply that can be of power supply source of supply is in order to provide columnar electrode one radio-frequency power supply
In the columnar electrode of the present utility model, preferablely can also comprise a gasket, gasket is to be disposed between hollow shell body and hollow inner housing and the bracket, enters in the hollow cavity body to prevent the liquid in the cooling chamber, and reaches sealing effectiveness.
In the columnar electrode of the present utility model, preferablely most magnetites can be also comprised, for example, two, three, four or above magnetite can be included in the columnar electrode.
In the columnar electrode of the present utility model, the outside diameter of the interior diameter of hollow shell body and hollow inner housing poor (be with cooling chamber in the thickness that can flow through of water relevant) the preferable 2mm to 20mm of can be, the better 5mm to 15mm that can be.
In the columnar electrode of the present utility model, the preferable 80mm to 200mm that can be of the outside diameter of hollow shell body, the better 100mm to 180mm that can be.
In the columnar electrode of the present utility model, the better permanent magnet that can be of magnetite.
Elaborate below in conjunction with drawings and Examples.
Embodiment 1
As shown in Figure 2, be the columnar electrode 21 of present embodiment, it includes: a hollow shell body 22, a hollow inner housing 23, a plurality of magnetite 29, a bracket 25, a gasket 30, a power supply source of supply 31, one first tubing 26 and one second tubing 27.Hollow inner housing 23 is disposed in the hollow shell body 22, and wherein, hollow shell body 22 and hollow inner housing 23 are mounted on the bracket 25, power supply source of supply 31 and bracket 25 electric property couplings, and be electrically coupled to hollow shell body 22 via bracket 25.And in the present embodiment, power supply source of supply 31 is a radio frequency (RF) power supply source of supply (but be not limited to the radio-frequency power supply source of supply, also can be direct current or pulse wave), can be in order to provide columnar electrode 21 1 radio-frequency power supplies.Form a cooling chamber 24 between hollow inner housing 23 and the hollow shell body 22, and have a hollow cavity body 28 in the hollow inner housing 23, and be laid with many group magnetites 29 in the hollow cavity body 28.Gasket 30 is disposed between hollow shell body 22 and hollow inner housing 23 and the bracket 25, enters in the hollow cavity body 28 to prevent the liquid in the cooling chamber 24, and reaches sealing effectiveness.In the present embodiment, a plurality of magnetites 29 are all magnet.
The columnar electrode of the tool cooling structure of present embodiment, utilize a hollow inner housing and with the intravital separated by spaces of hollow shell, and form independently a cooling chamber and a hollow cavity body, and make water coolant only can near the cooling chamber of hollow shell surface, flow (making the hollow cavity body need not be full of water), therefore the usage quantity that can significantly save water coolant reduces use cost.
In addition, via experiment confirm, since in the columnar electrode of the present utility model cooling-water flowing through space (being cooling chamber) cooling-water flowing in traditional columnar electrode come through the space little, so the flow velocity of water coolant in cooling chamber can be increased effectively, and then promote cool effect.Therefore, the cooling structure of the more known columnar electrode of the accessible cooling efficiency of the cooling structure of columnar electrode of the present utility model is better.
Moreover, owing to have a hollow cavity body in the columnar electrode of the present utility model, magnetite can be placed in this hollow cavity body and contact, so can promote the assembly work-ing life of magnetite with water.
Embodiment 2
As shown in Figure 3, be the columnar electrode 21 of present embodiment.Columnar electrode 21 includes: a hollow shell body 22, a hollow inner housing 23, a plurality of magnetite 29, a bracket 25, a gasket 30, a power supply source of supply 31, one first tubing 26, one second tubing 27 and dividing plate 33.Hollow inner housing 23 is disposed in the hollow shell body 22, and wherein, hollow shell body 22 and hollow inner housing 23 are mounted on the bracket 25.Power supply source of supply 31 and bracket 25 electric property couplings form a cooling chamber 24 between hollow inner housing 23 and the hollow shell body 22, have a hollow cavity body 28 in the hollow inner housing 23, and be laid with a plurality of magnetites 29 in the hollow cavity body 28.Gasket 30 is disposed between hollow shell body 22 and hollow inner housing 23 and the bracket 25.In the present embodiment, a plurality of magnetites 29 are all magnet.
In addition, in the present embodiment, first mouth of pipe 261 of first tubing 26 and second mouth of pipe 271 of second tubing 27 all are positioned at the bottom of cooling chamber 24 and are communicated with cooling chamber 24, and first mouth of pipe 261 and second mouth of pipe, 271 relative two sides that are disposed at this hollow inner housing 23.Be provided with dividing plate 33 in the cooling chamber 24 and be cut into two parts with space with cooling chamber 24.So, water coolant is inputed in the cooling chamber 24 by the outside via first mouth of pipe 261, is full of the cooling chamber 24 that flows into right half part behind the cooling chamber 24 of left-half among Fig. 3 again, and discharges via second mouth of pipe 271, and forms a refrigeration cycle mechanism.
As shown in Figure 3, in the present embodiment, the interior diameter D1 of hollow shell body 22 is 160mm, the outside diameter D2 of hollow inner housing 23 is 154mm, so, the difference of the interior diameter D1 of hollow shell body 22 and the outside diameter D2 of hollow inner housing 23 is 6mm, that is to represent the thickness D3 that water can be flowed through in the cooling chamber 24 be 3mm.
In sum, the columnar electrode of tool cooling structure of the present utility model, it utilizes a hollow inner housing and with the intravital separated by spaces of hollow shell, formation one is cooling chamber and hollow cavity body independently, and make water coolant only can near the cooling chamber of hollow shell surface, flow (making the hollow cavity body need not be full of water), therefore the usage quantity that can significantly save water coolant reduces use cost.
In addition, via experiment confirm and since in the columnar electrode of the present utility model cooling-water flowing through sky ask (that is cooling chamber) cooling-water flowing come through the space in traditional columnar electrode little, therefore the flow velocity of water coolant in cooling chamber can be increased effectively, and then promotes cool effect.Therefore, the cooling structure of the more known columnar electrode of the accessible cooling efficiency of the cooling structure of columnar electrode of the present utility model is better.Moreover, owing to have a hollow cavity body in the columnar electrode of the present utility model, magnetite can be placed in this hollow cavity body and contact, so can promote the assembly work-ing life of magnetite with water.
The foregoing description is only given an example for convenience of description, and the interest field that the utility model is advocated is from should but not only limiting to the foregoing description with described being as the criterion of claim scope of application.
Claims (10)
1. a columnar electrode is characterized in that, comprising:
One hollow shell body;
One hollow inner housing is disposed in this hollow shell body, wherein, forms a cooling chamber between this hollow inner housing and this hollow shell body, has a hollow cavity body in this hollow inner housing;
At least one magnetite is laid in the hollow cavity body of this hollow inner housing;
One bracket, wherein, this hollow shell body and this hollow inner housing are mounted on this bracket;
One first tubing is communicated to this cooling chamber; And
One second tubing is communicated to this cooling chamber.
2. columnar electrode as claimed in claim 1 is characterized in that, wherein this first tubing runs through this hollow cavity body, and one first mouth of pipe of this first tubing is disposed at the top of this hollow inner housing.
3. columnar electrode as claimed in claim 1 is characterized in that, comprising a power supply source of supply, with this bracket electric property coupling.
4. columnar electrode as claimed in claim 1 is characterized in that, comprising a gasket, is disposed between this hollow shell body and hollow inner housing and this bracket.
5. columnar electrode as claimed in claim 1 is characterized in that, comprising most magnetites.
6. columnar electrode as claimed in claim 1 is characterized in that, wherein the outside diameter difference of the interior diameter of this hollow shell body and this hollow inner housing is 2mm to 20mm.
7. columnar electrode as claimed in claim 1 is characterized in that, wherein the outside diameter difference of the interior diameter of this hollow shell body and this hollow inner housing is 5mm to 15mm.
8. columnar electrode as claimed in claim 1 is characterized in that, wherein the outside diameter of this hollow shell body is 80mm to 200mm.
9. columnar electrode as claimed in claim 1 is characterized in that, wherein the outside diameter of this hollow shell body is 100mm to 180mm.
10. columnar electrode as claimed in claim 1 is characterized in that, wherein this magnetite is a permanent magnet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201949209U CN201785481U (en) | 2010-05-11 | 2010-05-11 | Columnar electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201949209U CN201785481U (en) | 2010-05-11 | 2010-05-11 | Columnar electrode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201785481U true CN201785481U (en) | 2011-04-06 |
Family
ID=43817455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201949209U Expired - Fee Related CN201785481U (en) | 2010-05-11 | 2010-05-11 | Columnar electrode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201785481U (en) |
-
2010
- 2010-05-11 CN CN2010201949209U patent/CN201785481U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110406 Termination date: 20120511 |