CN201780983U - High-capacity silicon wafer carrying device - Google Patents

Abstract

A high-capacity silicon wafer carrying device comprises two end boards parallel to each other, at least two limit rods fixed to the two end boards in mutually parallel, positioned between the two end boards and perpendicular to the two end boards, and at least one support rod used for supporting silicon wafers, fixed onto the end boards, positioned below the limit rods and parallel to the limit rods. A notch for clamping a silicon wafer is arranged on the inner lateral face of each limit rod, and both sides of the upper portion of each of the two end boards are provided with clamping hooks for holding a clamping tool to operate and fasten the silicon wafer carrying device. The high-capacity silicon wafer carrying device is characterized in that all the limit rods and the support rods include two layers, the outer layers are protective layers, and the inner layers are carrying layers. The carrying number is two to four times of that of an existing carrying device and reaches a high capacity of 100 wafers, and further the high-capacity silicon wafer carrying device is simple in structure, facilitates flowing of cleaning liquid, is high in carrying capacity and high in contained silicon wafer quantity, and can increase production efficiency of solar cell silicon wafers.

Description

Big capacity silicon wafer bogey

[technical field]

The utility model relates to the electromagnetic radiation to infrared radiation, light, shorter wavelength, or the corpuscular radiation sensitivity, and be specially adapted for such radiant energy is converted to electric energy, perhaps be specially adapted for being undertaken the semiconductor device of controlling electric energy by such radiation; Be specially adapted for making or handling the method or the equipment of these semiconductor device or its parts; Relate to the cleaning that contacts with liquid.Be specifically related to the silicon wafer matting in the silicon wafer production process.

[background technology]

The production of solar cell and application are one of fastest-rising industries in the world at present.The silicon wafer battery accounts for about 70% in the solar cell, is a fastest-rising kind.The production process of silicon wafer battery need be cleaned silicon wafer with NaOH, HCI, HF solution under 150 ℃ of temperature.In the cleaning process, need to use bogey splendid attire silicon wafer.Present most of silicon wafer carrier construction is too complicated, preponderance own, the planform of bogey is unfavorable for that the smooth and easy of cleaning fluid flows, and the gag lever post insufficient strength of bogey, use down at high temperature (150 ℃) for a long time, bad phenomenon such as distortion, bending can occur, cause cleaning fluid to be trapped on the silicon wafer easily.The patent of our company " a kind of silicon wafer bogey " (patent No. 200920133787.3) discloses a kind of silicon wafer bogey.This silicon wafer bogey comprises two end plates (first end plate that is parallel to each other, second end plate), what be parallel to each other is fixed on this two end plates between this two end plates and at least two piece gag lever post (first gag lever posts vertical with this two end plates, second gag lever post) with on being fixed in two end plates be positioned at gag lever post below and at least one piece support bar that be used to support silicon wafer parallel with described gag lever post: described gag lever post medial surface one of (relative side) all offers the age of a draught animal in order to the silicon wafer that is installed: the both sides on described two end plates top all offer and are used to place the trip of clamping device with operation and fastening this silicon wafer bogey.

The silicon wafer bogey of this patent because its structure is mainly end plate and the bar structure is formed, has the advantages that the less and long-term use of simple for structure, weight own and size can not be out of shape; But because the demand of solar cell silicon wafer is growing, this silicon wafer holds that to plant device too little because of capacity, can not satisfy the requirement of silicon wafer production in enormous quantities.

[summary of the invention]

The purpose of this utility model is to provide that a kind of bearing capacity is big, splendid attire silicon wafer quantity is many, can make full use of silicon wafer production line and cleaning equipment ability, thereby can improve the big capacity silicon wafer bogey of solar cell silicon wafer production efficient.

The technical scheme that its technical problem that solves the utility model adopts is: a kind of big capacity silicon wafer bogey is provided; comprise two end plates (first end plate that is parallel to each other; second end plate); what be parallel to each other is fixed on the two end plates between two end plates and at least two piece gag lever post (first gag lever posts vertical with this two end plates; second gag lever post) and be fixed in and be positioned at the described gag lever post below at least one piece support bar that be used to support silicon wafer parallel on the two end plates with described gag lever post; described gag lever post medial surface one of (relative side) all offers the age of a draught animal in order to the silicon wafer that is installed: the both sides on described two end plates top all offer and are used to place the trip of clamping device with operation and fastening this silicon wafer bogey; it is characterized in that: described gag lever post and support bar all have two-layer, and skin is a protective layer; internal layer is a supporting course.

Described supporting course uses the strong material of weight capacity to make, and described protective layer is wrapped in supporting course, makes supporting course avoid the corrosion of cleaning fluid.Described supporting course can use stainless steel or carbon steel to make, and described protective layer can use fluoroplastics to make.

The beneficial effects of the utility model are: carrying quantity is 2--times of prior art bogey, can reach 100 big capacity, and it is simple for structure, being beneficial to cleaning fluid flows, can make full use of silicon wafer production line and cleaning equipment ability, be the big capacity silicon wafer bogey that a kind of bearing capacity is big, splendid attire silicon wafer quantity is many, can improve the production efficiency of solar cell silicon wafer.

[description of drawings]

The utility model will be further described below in conjunction with accompanying drawing.

Fig. 1 is a structural representation of the present utility model.

Fig. 2 is the A portion partial enlarged drawing of Fig. 1.

Among the figure: 1 is that first end plate, 2 is that second end plate, 3 is that first gag lever post, 4 is that second gag lever post, 5 is that support bar, 6 is to be that trip, 8 is that concentric holes, 9 is that the 3rd gag lever post, 10 is that the 4th gag lever post, 101 is that supporting course, 102 is a protective layer age of a draught animal, 7.

[embodiment]

Referring to accompanying drawing, the utility model comprises the two end plates (first end plate 1, second end plate 2) that is parallel to each other, being fixed on the two end plates between the two end plates and with vertical at least two gag lever posts (first gag lever post 3, second gag lever post 4) of this two end plates and be fixed in and be positioned at the described gag lever post below at least one piece support bar 5 that be used to support silicon wafer parallel with described gag lever post on the two end plates of being parallel to each other, and described gag lever post medial surface one of (relative side) all offers the age of a draught animal 6 in order to the silicon wafer that is installed; The both sides on described two end plates top all offer the trip 7 of this device of mounting board, it is characterized in that: described gag lever post and support bar all have two-layer, and outer is that protective layer 102, internal layer are supporting course 101.

In embodiment of the present utility model: described supporting course 101 uses stainless steel to make, and described protective layer 102 uses fluoroplastics to make.

Ages of a draught animal 6 of the described silicon wafer that is installed are adopted oval design, seamlessly transit, and the distance of corresponding two ages of a draught animal equals the Nominal Width+0.5mm of the silicon wafer that carried.Make square silicon wafer can arbitrarily insert in the silicon wafer bogey, take out, silicon wafer can be adjusted to the tram automatically when turnover carrier direction is also not exclusively vertical, and turnover does not smoothly have to hinder, and is not unlikely to damage silicon wafer yet.

Lower end at first end plate 1, second end plate 2 all offers concentric holes 8.First end plate, 1 concentric holes periphery has 3 apertures uniform, helps distinguishing the positive and negative of silicon wafer; Because square silicon wafer bottom is straight, and is applicable to automatic equipment production, this concentric holes 8 is to be used for equipment up and down to one heart, can straight putting into to guarantee silicon wafer, and also concentric holes 8 is fixing with finger when also being beneficial to producers and extracting.

For when cleaning, better fixing silicon wafer, between first gag lever post 3, second gag lever post 4 and support bar 5, have with described first gag lever post 3 parallel with second gag lever post 4 and lay respectively at first gag lever post 3, second gag lever post 4 under the 3rd gag lever post 9 and the 4th gag lever post 10.

Claims (5)

1. one kind big capacity silicon wafer bogey, comprise the two end plates that is parallel to each other, being fixed on the two end plates between the two end plates and with vertical at least two gag lever posts of this two end plates and be fixed in and be positioned at least one piece support bar that be used to support silicon wafer parallel with described gag lever post below the described gag lever post on the two end plates of being parallel to each other, described gag lever post medial surface all offers the age of a draught animal in order to the silicon wafer that is installed; The both sides on described two end plates top all offer the trip of this device of mounting board, it is characterized in that: described gag lever post and support bar all have two-layer, and outer is that protective layer (102), internal layer are supporting course (101).

2. according to the big capacity silicon wafer bogey of claim 1, it is characterized in that: all offer concentric holes (8) in the lower end of described two end plates.

3. according to the big capacity silicon wafer bogey of claim 2, it is characterized in that: described two end plates is first end plate (1) and second end plate (2), has 3 apertures uniform at first end plate (1) concentric holes (8) periphery.

4. according to the big capacity silicon wafer bogey of claim 1, it is characterized in that: the age of a draught animal of the described silicon wafer that is installed (6) is adopted oval design, seamlessly transits, and the distance of corresponding two ages of a draught animal equals the Nominal Width+0.5mm of the silicon wafer that carried.

5. according to the big capacity silicon wafer bogey of claim 1, it is characterized in that: described at least two gag lever posts are first gag lever post (3), second gag lever post (4), between first gag lever post (3), second gag lever post (4) and support bar (5), have with described first gag lever post (3) parallel with second gag lever post (4) and lay respectively at first gag lever post (3), second gag lever post (4) under the 3rd gag lever post (9) and the 4th gag lever post (10).

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