CN201766094U - Group-III nitride semiconductor luminous device adopting nano-imprint technology - Google Patents

Group-III nitride semiconductor luminous device adopting nano-imprint technology Download PDF

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CN201766094U
CN201766094U CN2010201970318U CN201020197031U CN201766094U CN 201766094 U CN201766094 U CN 201766094U CN 2010201970318 U CN2010201970318 U CN 2010201970318U CN 201020197031 U CN201020197031 U CN 201020197031U CN 201766094 U CN201766094 U CN 201766094U
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layer
type contact
nitride semiconductor
contact layer
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胡建正
武乐可
李忠武
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SHANGHAI LANBAO PHOTOELECTRIC MATERIALS CO Ltd
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SHANGHAI LANBAO PHOTOELECTRIC MATERIALS CO Ltd
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Abstract

The utility model relates to a group-III nitride semiconductor luminous device adopting the nano-imprint technology. Selective epitaxial growth of nitrides is realized through dielectric film graphic arrays manufactured according to the nano-imprint technology, thereby obtaining the group-III nitride semiconductor luminous device with higher external quantum efficiency, internal quantum efficiency and reliability, such as GaN-series LED or LD.

Description

Adopt the III group-III nitride semiconductor light-emitting device of nanometer embossing
Technical field
The utility model relates to a kind of III group-III nitride semiconductor light-emitting device, particularly relates to a kind of III group-III nitride semiconductor light-emitting device that adopts nanometer embossing.
Background technology
Recent years, each state is all making great efforts to advance the semiconductor lighting industry, and---light-emitting diode (LED)---replaces traditional incandescent lamp and fluorescent light promptly to use more reliable and energy-conservation semiconductor light sources.
The major obstacle that LED-based semiconductor light sources replaces conventional light source comprise luminous efficiency (lumens/watt, lm/W) and luminous efficiency and the life-span of the III group-III nitride LED in life-span, particularly blue green light wave band.At present, most of business-like III group-III nitride LED only has the luminous efficiency of 60-80lm/W, ten thousand hours life-span of 1-3.Therefore, for reducing the cost and the use cost of unit lumen, people wish further to improve luminous efficiency and the life-span of III group-III nitride LED.
Yet owing to lack low cost, high-quality, large-sized homo-substrate, III group-III nitride LED grows on sapphire or carborundum foreign substrate usually.Because the structure of higher refractive index of III group-III nitride alloy and the parallel active luminescent layer that LED had makes nearly 80% light fail to emit and absorbed by chip material.Simultaneously, because the crystal lattice difference of III group-III nitride semiconductor and foreign substrate, cause a large amount of defective of generation in the active layer of the nitride film of growing and device.Therefore,, high efficiency high-power for obtaining, long-life LED or LD must reduce the defect concentration of nitride film growth.
In order to solve the problems of the technologies described above, people have adopted various technical scheme.For example modes such as the superficial layer by adopting Bragg reflecting layer, alligatoring, photonic crystal, pyramid chip form, patterned substrate improve external quantum efficiency; And by adopting low temperature gallium nitride (GaN) or aluminium nitride (AlN) thus resilient coating, selective epitaxy/modes such as epitaxial lateral overgrowth technology improve crystal mass and improve internal quantum efficiency and reliability.
Yet technique scheme is in different links and implements respectively, has the problem that efficient is low, cost is high.In addition, for the scheme of using patterned substrate and making graphic array, when dimension of picture enters nanoscale, adopt existing etching system processing cost very high even can't realize, thereby highdensity graphic array can't be provided, and that highdensity graphic array promotes external quantum efficiency just is needed.
The utility model content
The purpose of this utility model is to provide a kind of III group-III nitride semiconductor light-emitting device with dielectric film graphic array of nanometer embossing making, and this III group-III nitride semiconductor light-emitting device has higher external quantum efficiency, internal quantum efficiency and reliability.
III group-III nitride semiconductor light-emitting device of the present utility model comprises:
Substrate, its monocrystalline oxide that can be approached nitride-based semiconductor by alumina single crystal, 6H-SiC, 4H-SiC or the lattice constant of C-face, R-face or A-face is made;
Resilient coating, it is positioned on the described substrate, can be made of the III group-III nitride semiconductor;
N type contact layer, it is positioned on the described resilient coating, is made of n type III group-III nitride semiconductor;
Active layer, it is positioned on the described n type contact layer and covers the part surface of described n type contact layer, by the trap layer of n type III group-III nitride semiconductor with build the Multiple Quantum Well that layer interaction cascading form and constituted;
N type electrode layer, it is positioned on the upper surface that described n type contact layer do not cover by described active layer;
Electronic barrier layer, it is positioned on the described active layer, can be made of III group-III nitride semiconductor single or multiple lift;
P type contact layer, it is positioned on the described electronic barrier layer, is made of p type III group-III nitride semiconductor;
P type electrode layer, it is positioned on the described p type contact layer; It is characterized in that,
Described III group-III nitride semiconductor light-emitting device also comprises the dielectric film graphic array that adopts nanometer embossing to make, and the dielectric film material that constitutes this dielectric film graphic array can not provide the insulation material of nucleus for the growth of III group-III nitride semiconductor for silicon dioxide, silicon nitride or other;
Wherein, aspect one of the present utility model, described n type contact layer is divided into n type contact layer part and the 2nd n type contact layer part, and described dielectric film graphic array is between n type contact layer part and the 2nd n type contact layer part;
On the other hand of the present utility model, described dielectric film graphic array is between described substrate and described resilient coating.
Alternatively, III group-III nitride semiconductor light-emitting device of the present utility model comprises:
Substrate, its monocrystalline oxide that can be approached nitride-based semiconductor by alumina single crystal, 6H-SiC, 4H-SiC or the lattice constant of C-face, R-face or A-face is made;
Resilient coating, it is positioned on the described substrate, is made of the III group-III nitride semiconductor;
P type contact layer, it is positioned on the described resilient coating, is made of p type III group-III nitride semiconductor;
Active layer, it is positioned on the described p type contact layer and covers the part surface of described p type contact layer, by the trap layer of p type III group-III nitride semiconductor with build the Multiple Quantum Well that layer interaction cascading form and constituted;
P type electrode layer, it is positioned on the upper surface that described p type contact layer do not cover by described active layer;
Electronic barrier layer, it is positioned on the described active layer, can be made of III group-III nitride semiconductor single or multiple lift;
N type contact layer, it is positioned on the described electronic barrier layer, is made of n type III group-III nitride semiconductor;
N type electrode layer, it is positioned on the described n type contact layer; It is characterized in that,
Described III group-III nitride semiconductor light-emitting device also comprises the dielectric film graphic array that adopts nanometer embossing to make, and the dielectric film material that constitutes described dielectric film graphic array can not provide the insulation material of nucleus for the growth of III group-III nitride semiconductor for silicon dioxide, silicon nitride or other;
Wherein, aspect one of the present utility model, described p type contact layer is divided into p type contact layer part and the 2nd p type contact layer part, and described dielectric film graphic array is between p type contact layer part and the 2nd p type contact layer part;
Aspect another, described dielectric film graphic array is between described substrate and described resilient coating of the present utility model.
The nanometer embossing that being used in the utility model made the dielectric film graphic array can be hot press printing technology (HE-NIL), UV-cured imprint lithography techniques (UV-NIL) or little contact printing photoetching technique (Microcontact-NIL) etc.
The scope of the characteristic size of the dielectric film graphic array in the utility model is preferably 1 nanometer～10 micron, and promptly the spacing of the length of each graphic element, diameter and adjacent pattern unit is 1 nanometer～10 micron.Because the difference of the refractive index of III group-III nitride semiconductor (such as gallium nitride) and foreign substrate (such as sapphire or carborundum), the light that makes LED send is lost by waveguiding effect.The utility model can change the incidence angle of light effectively, and then weaken waveguiding effect by making the dielectric film graphic array on substrate or in the III group-III nitride film, reduces the loss of light.And the validity that waveguiding effect is weakened is directly relevant with the density (number of the interior graphic element of unit are) of graphic element, can increase the density of graphic element and then weaken waveguiding effect by the characteristic size that reduces graphic element.Simultaneously, in the nanostructure below the hundreds of nanometer,, thereby can reach maximization by optimizing graphic array to the extraction of light because the nano effect of photon can cause the change of polarization, phase place, wavelength and refractive index.And for selective epitaxial growth, then mainly obtain high-quality crystal by the lateral growth district, because nitride side direction (perpendicular to the c direction of principal axis) speed of growth is very slow, if the graphic element characteristic size greater than 10 microns, the time that needs are oversize finishes side direction and merges; Otherwise the graphic element characteristic size is not then carried out the zone of lateral growth and is increased less than 1 nanometer, and the regional crystal mass that does not carry out lateral growth is poor, thereby overall crystal mass is relatively poor.Therefore, the utility model is set at 1 nanometer～10 micron by the characteristic size with the dielectric film graphic array, can further improve the external quantum efficiency and the internal quantum efficiency of light-emitting device.
In another preferred implementation of the present utility model, alternately formed by described dielectric film graphic array and the layer that the layer that is positioned on the described dielectric film graphic array is constituted.
Technique effect of the present utility model can the situation of dielectric film graphic array between first n type contact layer part and the 2nd n type contact layer part be that example describes.In this embodiment, (two-step method is meant growth low temperature buffer layer earlier at first to adopt two-step method Metalorganic chemical vapor deposition (MOCVD) growth regulation one deck nitride film, and then high growth temperature), deposit one deck insulating film layer then on this nitride film, the material of this insulating film layer includes but not limited to silicon dioxide, indefinite form silicon nitride etc.; Then adopt nano-imprint lithography and lithographic technique that graphic array is transferred on this insulating film layer and (promptly form the insulation mask), thereby make the ground floor nitride film be insulated rete covering or exposure regularly according to the figure of design; Then carry out Metalorganic chemical vapor deposition growth second layer nitride film then.Under such condition, second layer nitride film only can be grown on the ground floor nitride film that comes out, and can on the insulation mask, not grow, when the thickness of second layer nitride film surpasses the thickness of insulation mask, second layer nitride film will be not only along the growth of c direction of principal axis, thereby and covered fully by second layer nitride film up to the insulation mask along the zone that lateral growth extends to the insulation mask simultaneously.In this way, can reduce the dislocation density in the nitride film of being grown effectively, thereby reduce the dislocation density of active layer; Can obtain maximum external quantum efficiency by the shape of adjusting the dielectric film graphic array simultaneously.Further, can repeat the mode of front and carry out repeatedly selective epitaxy growth (promptly on second layer nitride film, forming insulation mask, alternating growth by that analogy again), thereby further reduce dislocation density.
Therefore, in III group-III nitride semiconductor light-emitting device of the present utility model, realize the growth of one or many selective epitaxy, thereby greatly reduce the dislocation density in the nitride film by the dielectric film graphic array that adopts nanometer embossing to make; In addition, the high density graph array on the dielectric film that the employing nanometer embossing is made can strengthen the extraction to light greatly, promptly improves external quantum efficiency.
Description of drawings
Fig. 1 is the embodiment 1 that has the GaN series LED of the dielectric film graphic array that nanometer embossing makes according to of the present utility model.
Fig. 2 is the embodiment 2 that has the GaN series LED of the dielectric film graphic array that nanometer embossing makes according to of the present utility model.
Fig. 3 adopts nanometer embossing to make the schematic flow sheet of the dielectric film graphic array in the utility model.
The explanation of reference number:
10 substrates
11 resilient coatings
12 dielectric film graphic arrays
13 n type contact layers
130 the one n type contact layer parts
131 the 2nd n type contact layer parts
14 active layers
15 electronic barrier layers
16 high temperature p type contact layers
17 n type electrode layers
18 p type electrode layers
20 substrates
21 dielectric film graphic arrays
22 resilient coatings
23 n type contact layers
24 active layers
25 electronic barrier layers
26 high temperature p type contact layers
27 n type electrode layers
28 p type electrode layers
30 nitride films
31 dielectric films
32 photoresists
33 impression blocks
Embodiment
Below in conjunction with embodiment and accompanying drawing the utility model is specifically described, but the utility model is not limited to this.
Fig. 1 is for according to the embodiment 1 with GaN series LED of the dielectric film graphic array that nanometer embossing makes of the present utility model.As shown in Figure 1, this embodiment is to be substrate 10 with the alumina single crystal of C-face, R-face or A-face or SiC (6H-SiC or 4H-SiC), and other materials that can be used for substrate 10 also comprise Si, ZnO, GaAs, spinelle (MgAl 2O 4) or lattice constant approach the monocrystalline oxide of nitride-based semiconductor.
At first on substrate 10, form by In xAl 1-x-yGa yThe resilient coating 11 that N (wherein 0≤x＜1,0≤y≤1,0≤x+y≤1) is constituted.Form the n type contact layer part 130 in the n type contact layer 13 then on resilient coating 11, this n type contact layer 13 is made of n type gallium nitride.Then on a n type contact layer part 130, form the dielectric film graphic array 12 that adopts nanometer embossing to make, the scope of the characteristic size of this dielectric film graphic array 12 is 1 nanometer～10 micron (are the spacing of length, diameter and the adjacent pattern unit of each graphic element be 1 nanometer～10 micron), and the dielectric film material that constitutes this dielectric film graphic array 12 can not provide the insulation material of nucleus for the growth of III group-III nitride for silicon dioxide, silicon nitride or other.On dielectric film graphic array 12, form the 2nd n type contact layer part 131 in the n type contact layer 13 then.For further reducing dislocation density, the layer that is made of dielectric film graphic array 12 and the 2nd n type contact layer part 131 can alternately be formed and (promptly formed the dielectric film graphic array once more on the 2nd n type contact layer part 131, on this dielectric film graphic array, form n type contact layer, alternating growth by that analogy then once more).
Then form the active layer 14 that covers its part surface on the 2nd n type contact layer part 131, this active layer 14 is by In xGa 1-xN (wherein 0＜x＜1) trap layer and In yAl zGa 1-y-zThe Multiple Quantum Well that N (0≤y＜1,0≤z＜1,0≤y+z＜1) builds the formation of layer interaction cascading constitutes.In the part that n type contact layer 13 is not covered by active layer 14, form n type electrode layer 17 in addition.Form electronic barrier layer 15 then on active layer 14, this electronic barrier layer 15 is by In yAl zGa 1-y-zN (0≤y＜1,0＜z＜1,0≤y+z＜1) single or multiple lift constitutes.At last forming the high temperature p type contact layer 16 that constitutes by p type gallium nitride on the electronic barrier layer 15 and be positioned at p type electrode layer 18 on the high temperature p type contact layer 16.
This p type electrode layer 18 can be metal conducting layer or oxidic, transparent, conductive layers, and wherein this metal conducting layer mainly comprises Ni/Au, Ni/Pt, Ni/Pd, Ni/Co, Pd/Au, Pt/Au, Ti/Au, Cr/Au, Sn/Au, Ta/Au, TiN, TiWNx (x 〉=0) or WSix (x 〉=0); This oxidic, transparent, conductive layers mainly comprises ITO, CTO, ZnO:Al, ZnGa 2O 4, SnO 2: Sb, Ga 2O 3: Sn, AgInO 2: Sn, In 2O 3: Zn, CuAlO 2, LaCuOS, NiO, CuGaO 2, SrCu 2O 2
The nanometer embossing that is used to prepare dielectric film graphic array 12 mainly includes but not limited to following several: hot press printing technology (HE-NIL), UV-cured imprint lithography techniques (UV-NIL), little contact printing photoetching (Microcontact-NIL) etc.
Figure 3 shows that with UV-cured imprint lithography techniques (UV-NIL) to be the manufacturing process of example explanation dielectric film graphic array 12.As shown in Figure 3, on nitride film 30 by suitable mode (as the plasma reinforced chemical vapour deposition technology, PECVD) deposition one deck insulation film 31, then on insulation film 31 coating one deck low viscosity, to the liquid macroimolecule photoresist 32 of ultraviolet (UV) light sensation light, template 33 and substrate (being nitride film 30 herein) aim at finish after, template is pressed into photoresist layer and irradiating ultraviolet light is shaped the photoresist sclerosis, the demoulding then, carry out etching at last, obtain the dielectric film graphic array that needs.
Fig. 2 is for according to the embodiment 2 with GaN series LED of the dielectric film graphic array that nanometer embossing makes of the present utility model.This embodiment 2 adopts the mode identical with embodiment 1 to make, different just, the dielectric film graphic array 21 that adopts the nanometer embossing making is between substrate 20 and resilient coating 22.
The utility model carries out the selective epitaxy growth of nitride by the dielectric film graphic array that adopts nanometer embossing to make, and the III group-III nitride semiconductor light-emitting device that has obtained to have higher external quantum efficiency, internal quantum efficiency and reliability is LED or LD such as GaN.
The foregoing description only is used to specify the utility model, should not see as restriction of the present utility model.Anyly do not break away from the various modifications and changes that the utility model aim is carried out, all should be in protection range of the present utility model.

Claims (11)

1. III group-III nitride semiconductor light-emitting device, it comprises:
Substrate;
Resilient coating, it is positioned on the described substrate;
N type contact layer, it is positioned on the described resilient coating, is made of n type III group-III nitride semiconductor;
Active layer, it is positioned on the described n type contact layer and covers the part surface of described n type contact layer, by the trap layer of described n type III group-III nitride semiconductor with build the Multiple Quantum Well that layer interaction cascading form and constituted;
N type electrode layer, it is positioned on the upper surface that described n type contact layer do not cover by described active layer;
Electronic barrier layer, it is positioned on the described active layer;
P type contact layer, it is positioned on the described electronic barrier layer, is made of p type III group-III nitride semiconductor;
P type electrode layer, it is positioned on the described p type contact layer; It is characterized in that,
Described III group-III nitride semiconductor light-emitting device also comprises the dielectric film graphic array that adopts nanometer embossing to make, and the dielectric film material that constitutes described dielectric film graphic array is silicon dioxide or silicon nitride, wherein
Described n type contact layer is divided into n type contact layer part and the 2nd n type contact layer part, and described dielectric film graphic array is between described n type contact layer part and described the 2nd n type contact layer part.
2. III group-III nitride semiconductor light-emitting device, it comprises:
Substrate;
Resilient coating, it is positioned on the described substrate, is made of the III group-III nitride semiconductor;
N type contact layer, it is positioned on the described resilient coating, is made of n type III group-III nitride semiconductor;
Active layer, it is positioned on the described n type contact layer and covers the part surface of described n type contact layer, by the trap layer of described n type III group-III nitride semiconductor with build the Multiple Quantum Well that layer interaction cascading form and constituted;
N type electrode layer, it is positioned on the upper surface that described n type contact layer do not cover by described active layer;
Electronic barrier layer, it is positioned on the described active layer;
P type contact layer, it is positioned on the described electronic barrier layer, is made of p type III group-III nitride semiconductor;
P type electrode layer, it is positioned on the described p type contact layer; It is characterized in that,
Described III group-III nitride semiconductor light-emitting device also comprises the dielectric film graphic array that adopts nanometer embossing to make, and the dielectric film material that constitutes described dielectric film graphic array is silicon dioxide or silicon nitride, wherein
Described dielectric film graphic array is between described substrate and described resilient coating.
3. III group-III nitride semiconductor light-emitting device, it comprises:
Substrate;
Resilient coating, it is positioned on the described substrate;
P type contact layer, it is positioned on the described resilient coating, is made of p type III group-III nitride semiconductor;
Active layer, it is positioned on the described p type contact layer and covers the part surface of described p type contact layer, by the trap layer of described p type III group-III nitride semiconductor with build the Multiple Quantum Well that layer interaction cascading form and constituted;
P type electrode layer, it is positioned on the upper surface that described p type contact layer do not cover by described active layer;
Electronic barrier layer, it is positioned on the described active layer;
N type contact layer, it is positioned on the described electronic barrier layer, is made of n type III group-III nitride semiconductor;
N type electrode layer, it is positioned on the described n type contact layer; It is characterized in that,
Described III group-III nitride semiconductor light-emitting device also comprises the dielectric film graphic array that adopts nanometer embossing to make, and the dielectric film material that constitutes described dielectric film graphic array is silicon dioxide or silicon nitride, wherein
Described p type contact layer is divided into p type contact layer part and the 2nd p type contact layer part, and described dielectric film graphic array is between described p type contact layer part and described the 2nd p type contact layer part.
4. III group-III nitride semiconductor light-emitting device, it comprises:
Substrate;
Resilient coating, it is positioned on the described substrate, is made of the III group-III nitride semiconductor;
P type contact layer, it is positioned on the described resilient coating, is made of p type III group-III nitride semiconductor;
Active layer, it is positioned on the described p type contact layer and covers the part surface of described p type contact layer, by the trap layer of described p type III group-III nitride semiconductor with build the Multiple Quantum Well that layer interaction cascading form and constituted;
P type electrode layer, it is positioned on the upper surface that described p type contact layer do not cover by described active layer;
Electronic barrier layer, it is positioned on the described active layer;
N type contact layer, it is positioned on the described electronic barrier layer, is made of n type III group-III nitride semiconductor;
N type electrode layer, it is positioned on the described n type contact layer; It is characterized in that,
Described III group-III nitride semiconductor light-emitting device also comprises the dielectric film graphic array that adopts nanometer embossing to make, and the dielectric film material that constitutes described dielectric film graphic array is silicon dioxide or silicon nitride, wherein
Described dielectric film graphic array is between described substrate and described resilient coating.
5. as each described III group-III nitride semiconductor light-emitting device in the claim 1～4, it is characterized in that, the scope of the characteristic size of described dielectric film graphic array is 1 nanometer～10 micron, and promptly the spacing of the length of each graphic element, diameter and adjacent pattern unit is 1 nanometer～10 micron.
6. as each described III group-III nitride semiconductor light-emitting device in the claim 1～4, it is characterized in that, alternately formed by described dielectric film graphic array and the layer that the layer that is positioned on the described dielectric film graphic array is constituted.
7. as each described III group-III nitride semiconductor light-emitting device in the claim 1～4, it is characterized in that described substrate is made by the monocrystalline oxide that alumina single crystal, 6H-SiC, 4H-SiC or the lattice constant of C-face, R-face or A-face approaches nitride-based semiconductor.
8. as each described III group-III nitride semiconductor light-emitting device in the claim 1～4, it is characterized in that described n type contact layer is made of n type GaN, described p type contact layer is made of p type GaN.
9. III group-III nitride semiconductor light-emitting device as claimed in claim 8 is characterized in that described resilient coating is by In xAl 1-x-yGa yN constitutes, wherein 0≤x＜1,0≤y≤1.
10. III group-III nitride semiconductor light-emitting device as claimed in claim 8 is characterized in that described trap layer is In xGa 1-xN trap layer, described base layer is InyAlzGa 1-y-zN builds layer, wherein 0＜x＜1,0≤y＜1,0≤z＜1,0≤y+z＜1.
11. III group-III nitride semiconductor light-emitting device as claimed in claim 8 is characterized in that described electronic barrier layer is by In yAl zGa 1-y-zThe N single or multiple lift constitutes, wherein 0≤y＜1,0＜z＜1,0≤y+z＜1.
CN2010201970318U 2010-05-18 2010-05-18 Group-III nitride semiconductor luminous device adopting nano-imprint technology Expired - Fee Related CN201766094U (en)

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