CN201753194U - Detection roller wheel and conveyer employing same - Google Patents
Detection roller wheel and conveyer employing same Download PDFInfo
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- CN201753194U CN201753194U CN2010201841694U CN201020184169U CN201753194U CN 201753194 U CN201753194 U CN 201753194U CN 2010201841694 U CN2010201841694 U CN 2010201841694U CN 201020184169 U CN201020184169 U CN 201020184169U CN 201753194 U CN201753194 U CN 201753194U
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- wheel body
- roller
- sensor
- phase place
- wheel
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Abstract
The utility model provides a detection roller wheel which comprises a wheel body, a low friction coefficient rotary piece and a phase sensor. The wheel body is provided with a through hole. The low friction coefficient rotary piece is embedded in the through hole, and the wheel body rotates on the rotary piece. The phase sensor is used for sensing the rotation phase of the wheel body to generate a sense signal. In the other embodiment, the detection roller wheel is applied to a conveyer to detect the speed of the substrate conveyed by the conveyer in time.
Description
Technical field
The utility model relates to a kind of feedway of automated production, refers in particular to a kind of principle of phase-detection of utilizing to detect a kind of roller and feedway thereof of detecting of base material state of kinematic motion.
Background technology
Delivery system is the indispensable some of the consistent production of modern factories automation, especially in quartz conductor and panel industry, even now being in flourish solar panels manufacturing industry, delivery system promotes and the production automation for output, is playing the part of considerable role.
Generally speaking, in the prior art, the design of conveying roller only is simple wheel body is connected with drive shaft body, makes base material must be between wheel body rely on the rolling of wheel body and be delivered to ad-hoc location.But owing to have the influence of residual or other factors of one on the base material, friction force between delivery wheel and the base material is less, therefore can make base material be stuck on the delivery wheel and can not move or moving velocity slows down or accelerates, cause the base material of front and back to collide mutually.
In order to solve such problem, in the prior art, for example: a kind of conveying roller that TaiWan, China bulletin patent is disclosed for I279380 number, it is the clipping up and down by delivery wheel and upper pressure wheel, can both be transferred the problem of colliding mutually between the base material to reduce to guarantee each base material.In addition, another kind of technology is as shown in Figure 1 feedway then, and it is to utilize having or not of detecting base material to judge whether base material enters processing apparatus 10 or also on feedway 11.Described feedway 11 has a plurality of conveying axis 110, has a plurality of conveying rollers 111 on each conveying axis 110.Side at feedway 11 has processing apparatus 10, to receive base material 90 described base material is carried out fabrication process.The reception base material end 91 of described feedway 11 with have one near process work bench end 92 respectively and relying on sensor 910 and 920, it is to detect having or not of base material, to judge that base material is whether on feedway or will enter processing apparatus.
Though in the technology of Fig. 1, can must know whether base material speed normally still slows down according to the time that sensor detects base material; yet in the zone of being contained for this section fed distance that enters behind the feedway 11 when arriving described processing apparatus 93; but can't learn the position of base material immediately, with as the foundation of judging whether base material speed slows down or stop.Though can increase a plurality of sensors, to remedy the deficiency of Fig. 1 technology.But such design will certainly increase the cost of board.
Comprehensively above-mentioned, therefore need badly and a kind ofly detect roller and feedway solves the problem that prior art produces.
Summary of the invention
The utility model provides a kind of roller and feedway thereof of detecting, its be utilize the phase place sensing mode with instant detection by the described speed that base material was had that detects roller.
The utility model provides a kind of roller and feedway thereof of detecting; it is the delivery speed that can detect base material immediately; and then judge whether base material has the phenomenon of velocity anomaly or stagnation when carrying, to carry out alignment processing immediately and then to avoid base material to collide mutually.
For achieving the above object, the technical solution adopted in the utility model comprises:
A kind of roller that detects is characterized in that, includes:
One wheel body has a through hole in it;
One low-friction coefficient changes part, and it is embedded in the described through hole, makes the motion that rotates on described commentaries on classics part of described wheel body; And
One phase place sensor, it provides the phase place that the described wheel body of sensing rotates, to produce a sensing signal.
Wherein: described wheel body has a wheel face, and a pair of side that is connected with described wheel face respectively, has more a plurality of flutings on the side wherein, and described phase place sensor more includes:
A plurality of magnetic substances, it is contained in respectively in described a plurality of fluting; And
One magnetic sensor, it is arranged on a side of the side with described a plurality of flutings, and when described magnetic sensor rotated at described wheel body, the described magnetic substance of sensing was to produce described sensing signal.
Wherein: described phase place sensor more includes:
One sun wheel body, it is arranged on the side of described wheel body, and described sun wheel body has a plurality of gear pieces, has a fluting between adjacent gear piece; And
One sensor, it is arranged on a side of described sun wheel body, produces described sensing signal with the state of the described sun wheel body rotation of sensing.
Wherein: a side of described wheel body more is provided with a compacting wheel, can provide a base material by rotating to drive described wheel body between described wheel body and described compacting wheel.
For achieving the above object, the technical solution adopted in the utility model also comprises:
A kind of feedway is characterized in that, includes:
One driver element, it provides a rotational power;
One power transmission shaft, it couples mutually with described driver element, makes described power transmission shaft produce a rotational motion to receive described rotational power, has a plurality of first power transmits the component on the described power transmission shaft;
A plurality of conveying axis, it has one second power transmits the component and a plurality of conveying roller respectively, and second power transmits the component on each conveying axis couples mutually with first power transmits the component on the described power transmission shaft; And
One detects roller, and it has: a wheel body has a through hole in it; One low-friction coefficient changes part, and it is embedded in the described through hole, makes the motion that rotates on described commentaries on classics part of described wheel body; And a phase place sensor, it provides the sensing phase place that described wheel body rotates, to produce a sensing signal.
Wherein: described wheel body has a wheel face, and a pair of side that is connected with described wheel face respectively, has more a plurality of flutings on the side wherein, and described phase place sensor more includes:
A plurality of magnetic substances, it is contained in respectively in described a plurality of fluting; And
One magnetic sensor, it is arranged on a side of the side with described a plurality of flutings, and when described magnetic sensor rotated at described wheel body, the described magnetic substance of sensing was to produce described sensing signal.
Wherein: described phase place sensor more includes:
One sun wheel body, it is arranged on the side of described wheel body, and described sun wheel body has a plurality of gear pieces, has a fluting between adjacent gear piece; And
One sensor, it is arranged on a side of described sun wheel body, produces described sensing signal with the state of the described sun wheel body rotation of sensing.
Wherein: described commentaries on classics part is a layer or lining, and described bearing is a ceramic bearing or a polyetheretherketone bearing.
Wherein: the described roller that detects is arranged on the conveying axis in described a plurality of conveying axis or relies on pivot shaft independently and be arranged on a side of a conveying axis wherein.
Wherein: a side of described wheel body more is provided with a compacting wheel, can provide a base material by rotating to drive described wheel body between described wheel body and described compacting wheel.
Compared with prior art, adopt the advantage that the utlity model has of technique scheme to be: more accurately to judge the position of base material, needn't increase the cost of board simultaneously.
Description of drawings
Fig. 1 is existing feedway and processing apparatus configuration schematic diagram;
Fig. 2 A is the roller perspective exploded view that detects of the present utility model;
Fig. 2 B is another embodiment schematic perspective view of roller that detects of the present utility model;
Fig. 3 A and Fig. 3 B are fluting configuration schematic diagram of the present utility model;
Fig. 4 A and Fig. 4 B are the schematic cross-sections that is respectively O type ring;
Fig. 5 A is that the roller that detects of the present utility model detects scheme drawing;
Fig. 5 B is the sensing signal scheme drawing;
Fig. 5 C be this wound detect the another kind of configuration mode scheme drawing of roller;
Fig. 5 D be this wound detect another configuration mode scheme drawing of roller;
Fig. 6 is a feedway schematic perspective view of the present utility model;
Fig. 7 is another embodiment schematic perspective view of feedway of the present utility model.
Description of reference numerals: 10-processing apparatus; The 11-feedway; The 110-conveying axis; The 111-conveying roller; 2-detects roller; The 20-wheel body; The 200-through hole; The 201-wheel face; 202,203-side; The 2020-fluting; 22-changes part; The 220-through hole; 23-phase place sensor; The 230-magnetic substance; 231-magnetic sensor; 24-O type ring; 25-phase place sensor; 250-sun wheel body; The 2500-gear piece; The 2501-fluting; The 251-sensor; 2510-light transmitting terminal; The 2511-optical receiving end; The 252-Connection Block; 26-suppresses wheel; The 27-rotating shaft; The 3-rotational motion; The 4-rotating shaft; The 5-delivery wheel; The 6-axis body; The 7-feedway; The 70-driver element; The 700-motor; The 701-output shaft; 702-the 3rd power transmits the component; The 71-power transmission shaft; 710-power receiving element; 711-first power transmits the component; 72,72a-conveying axis; 720-second power transmits the component; The 721-conveying roller; 73-detects roller; The 730-wheel body; 731-changes part; 732-phase place sensor; The 74-pivot shaft; 75-is relying on sensor; The 90-base material; 91-receives the base material end; 92-process work bench end; 910,920-is relying on sensor; The 93-zone.
The specific embodiment
For making your inspector further cognitive and understanding be arranged to feature of the present utility model, purpose and function, hereinafter special relevant thin bilge construction and design-calculated theory reason with device of the present utility model describes, so that the inspector can understand characteristics of the present utility model, detailed description is presented below:
See also shown in Fig. 2 A, described figure is the roller perspective exploded view that detects of the present utility model.The described roller 2 that detects includes a wheel body 20, low-friction coefficient commentaries on classics part 22 and a phase place sensor 23.Described wheel body 20 has a through hole 200 in it, described wheel body 20 has a wheel face 201, and a pair of side 202 and 203 that is connected with described wheel face 201 respectively, has more a plurality of flutings 2020 on the side 202 wherein.In the present embodiment, adjacent 2020 angles that had of fluting equate.In the embodiment of Fig. 2 A, the quantity of described fluting is four, and 2020 angles that had of adjacent fluting are pi/2.In addition, see also shown in Fig. 3 A and Fig. 3 B, described figure is a fluting configuration schematic diagram of the present utility model.At the fluting 2020 described in Fig. 3 A is two, also is that adjacent 2020 angles that had of fluting are π; And the angle that is had between adjacent fluting in Fig. 3 B is π/4.The quantity that is noted that described fluting 2020 is to decide according to the mobile accuracy that will follow the trail of base material, and the demonstration quantity with Fig. 3 A and Fig. 3 B is not restriction.In addition, the angle of adjacent fluting 2020 also can painstakingly be arranged to unequal state, still can implement as long as know the combination of its angle in advance.
Described commentaries on classics part 22, it is embedded in the described through hole 200, has the characteristic of low-friction coefficient on the relative face of described commentaries on classics part 22 and described through hole 200, makes the motion 3 that rotates on described commentaries on classics part 22 of described wheel body 20.Having a through hole 220 in the described commentaries on classics part 22 passes through so that rotating shaft to be provided.Described commentaries on classics part 22 generally speaking, described commentaries on classics part can be lining or bearing, but not as limit.Just, as long as described wheel body 20 is rotated on described commentaries on classics part 22 smooth-goingly, and the low-friction coefficient that can not be subjected to the influence that the rotating shaft by through hole 220 rotates changes part and can use.In the present embodiment, described commentaries on classics part 22 is bearings, and it is to may be selected to be ceramic bearing or a polyetheretherketone (polyetheretherketone, PEEK) bearing, or the bearing of low friction drag.
Described phase place sensor 23, it is the rotary state when being used for detecting described wheel body 20 and rotating on described commentaries on classics part 22.Described phase place sensor 23 is in the embodiment of Fig. 2 A, include a plurality of magnetic substances 230, it is contained in respectively in described a plurality of fluting 2020, an and magnetic sensor 231, it is arranged on a side of the side 202 with described a plurality of fluting 2020, when described magnetic sensor 231 rotated at described wheel body 20, the described magnetic substance 230 of sensing was to produce a sensing signal.In addition, on described wheel face 201, more can be provided with and have skidproof O type ring 24 (O-ring).Shown in Fig. 4 A and Fig. 4 B, described figure is the schematic cross-section that is respectively O type ring.The cross section of described O type ring 24 is rectangle or circle.
In addition, shown in Fig. 2 B, described figure is another embodiment scheme drawing of roller that detects of the present utility model.In the present embodiment, with Fig. 2 A difference be the structure that is the phase place sensor.Among Fig. 2 B, described phase place sensor 25 includes a sun wheel body 250, has a plurality of gear pieces 2500 on it, has fluting 2501 between adjacent gear piece.The quantity that is noted that described fluting 2501 is to decide according to the mobile accuracy that will follow the trail of base material, is not restriction with the demonstration quantity in scheming.Side at described sun wheel body 250 has a sensor 251, and it is an optical sensor, and described sensor 251 has a smooth transmitting terminal 2510 and an optical receiving end 2511.Described sun wheel body 250 is to rely on Connection Block 252 to couple mutually with wheel body 20, make sun wheel body 250 gear piece 2500 or slot and 2501 can pass through between light transmitting terminal 2510 and the optical receiving end 2511.
Next the sensing principle that detects roller of the present utility model is described.See also shown in Fig. 5 A, described figure is that the roller that detects shown in Fig. 2 A of the present utility model detects scheme drawing.The described bearing 22 that detects roller 2 is to match with a rotating shaft 4, and described rotating shaft 4 more is connected with at least one delivery wheel 5.Described rotating shaft 4 can receive by driver element, for example: motor, the rotational power that is produced and rotating.When base material 90 also not with detect roller 2 when contacting rotate because the rotation of rotating shaft 4 can drive delivery wheel 5, so delivery wheel 5 can move by means of friction force drive base material 90 when contact with base material 90.Though rotating shaft 4 also couples mutually with detecting roller 2, but have bearing 22 owing to detect the wheel body 20 and 4 of the rotating shafts of roller 2, even therefore rotating shaft 4 is rotated, the wheel body 20 that detects roller 2 is can not rotate thereupon.
When delivery wheel 5 is delivered to base material 90 gradually and detects roller 2 when contacting, at this moment,, can drive described wheel body 20 rotations that detect roller 2 owing to detect the friction force of roller 2 and 90 of base materials.When wheel body 20 rotated, because wheel body 20 is provided with magnetic substance 230, so magnetic substance 230 also can move along with the rotation of wheel body 20.And in the magnetic sensor 231 of a side that detects roller 2 and the variation that can sense magnetic, and produce corresponding sense signals.But be understandable that, even do not contact when detecting roller 2 at base material 90, in rotating shaft 4 rotating process, detect the vibrative phenomenon of roller 2 possibilities, may allow magnetic sensor 231 that the variation of sensing signal is arranged, but these all to be those of ordinary skills can rely on the technology of signal conditioning give filtering.
Obtain after the sensing signal, promptly can learn the delivery speed of base material according to sensing signal.Shown in Fig. 5 A and Fig. 5 B, wherein Fig. 5 B is the sensing signal scheme drawing.When sensing signal has magnitude of voltage, represent magnetic sensor 231 to detect magnetic substance 230.Because the quantity of magnetic substance 230 is known, therefore can learn the rotating speed when base material 90 drives wheel body 20 rotations that detect roller 2 according to time span between adjacent two signals.According to the rotating speed of sensing signal gained MS in the wheel body 20 that detects roller, can and the rotating speed of known rotating shaft 4 compare, can learn promptly whether the mobile status of base material 90 has unusually.Be noted that though the roller that detects shown in Fig. 5 A is coaxial structure with delivery wheel, also can be as the state of Fig. 5 C.In Fig. 5 C, the rotating shaft 4 of delivery wheel 5 is separate axles with supporting the axis body 6 that detects roller 2.
Shown in Fig. 5 D, described figure is the another embodiment scheme drawing of roller that detects of the present utility model.In the present embodiment, with have a compacting wheel 26 that couples mutually with a rotating shaft 27 above described wheel body 20 is corresponding, make the gap of 20 of described compacting wheel 26 and described wheel bodys can provide base material 90 to pass through.The gap length that relies on 20 of described compacting wheel 26 of adjustment and described wheel bodys, the friction force of control base material 90 and wheel body 20 surfaces or O type interannular, make base material 90 by described when detecting roller 2, base material 90 can drive really and detect roller 2 rotations, detects the accuracy of roller 2 sensing base materials 90 state of kinematic motions with lifting.In addition, if be the roller structure that detects of Fig. 2 B, also as aforesaid principle, because when wheel body 20 rotates, the gear piece 2500 of sun wheel body 250 and fluting 2501 can be by between the light transmitting terminals 2510 and optical receiving end 2511 of sensor 251.When gear piece 2500 passes through sensor 251, can interdict the light news, otherwise, if when fluting 2501 passes through sensor 251, then can allow the light news pass through, by means of in wheel body 20 rotating process, sensor 251 promptly can produce the sensing signal as Fig. 5 B.
See also shown in Figure 6ly, described figure is a feedway schematic perspective view of the present utility model.Described feedway 7 includes a driver element 70, a power transmission shaft 71, a plurality of conveying axis 72 and 72a and and detects roller 73.Described driver element 70, it provides a rotational power.In the present embodiment, described driver element 70 has more a motor 700, an output shaft 701 and one the 3rd power transmits the component 702.Described motor 700 is servomotor (but not as restrictions), so that described rotational power to be provided.Described output shaft 701, it is to couple mutually to receive described rotational power with described motor 700 to rotate.Described the 3rd power transmits the component 702, it is to be coupled on the described output shaft 701, described the 3rd power transmits the component 702 is to couple mutually with a power receiving element 710 of described power transmission shaft 71, makes described power transmission shaft 71 produce described rotational motion to receive described rotational power.Being noted that the combination of described the 3rd power transmits the component 702 and described power receiving element 710, in the present embodiment, is the gear of mutual toe joint.The employed gear forms of present embodiment is helical wheel (helical gear), but not as limit, for example: spur gear (spur gear), helical wheel (bevel gear) or wrom tooth wheel (wormgear) etc.In addition, except the combination of gear, the combination of power receiving element 710 and the 3rd power transmits the component 702 also can be the transmission combination of belt and belt pulley.
Described power transmission shaft 71, it is to couple mutually with described driver element 70, makes the motion that rotates of described power transmission shaft 71 to receive described rotational power, has a plurality of first power transmits the component 711 on the described power transmission shaft 71.In the present embodiment, described first power transmits the component 711 is helical wheels, but not as limit.Described a plurality of conveying axis 72, it is to have one second power transmits the component 720 and a plurality of conveying roller 721 respectively, second power transmits the component 720 on each conveying axis 72 be with described power transmission shaft 71 on first power transmits the component 711 couple mutually.Similarly, described second power transmits the component 720 is and described first power transmits the component 711 helical wheel of toe joint mutually in the present embodiment.The described roller 73 that detects, it is arranged on the conveying axis 72a in described a plurality of conveying axis, the described roller 73 that detects has wheel body 730, changes part 731 and phase place sensor 732, and its relevant structure is the structure shown in Fig. 2 A or Fig. 2 B, does not give unnecessary details at this.Relying on sensor 75 and have, relying on describedly will be separated from feedway 7 relying on sensor 75 can the sensing base material whether to enter feedway 7 or prepared in the rear and front end of feedway 7.Be noted that, though in the present embodiment, only on first conveying axis 72, be provided with and detect roller 73, in other embodiments, the described quantity that detects roller 73 can be looked the size of feedway 7 sizes or base material and increase is arranged, and be separately positioned on the different conveying axis 72, be not restriction therefore with one among Fig. 6.In addition, as shown in Figure 7, the described roller 73 that detects is to rely on pivot shaft 74 independently and the side that is arranged on a conveying axis 72a wherein.As for the principle that detects base material is as previously mentioned, does not give unnecessary details at this.In addition, be noted that detecting roller 73 tops compacting wheel also can being set of Fig. 6 and Fig. 7, its principle is not given unnecessary details at this shown in Fig. 5 D.
More than explanation is just illustrative for the utility model; and nonrestrictive, those of ordinary skills understand, under the situation of the spirit and scope that do not break away from claim and limited; can make many modifications, variation or equivalence, but all will fall within the protection domain of the present utility model.
Claims (10)
1. one kind detects roller, it is characterized in that, includes:
One wheel body has a through hole in it;
One low-friction coefficient changes part, and it is embedded in the described through hole, makes the motion that rotates on described commentaries on classics part of described wheel body; And
One phase place sensor, it provides the phase place that the described wheel body of sensing rotates, to produce a sensing signal.
2. the roller that detects according to claim 1, it is characterized in that: described wheel body has a wheel face, and a pair of side that is connected with described wheel face respectively, has more a plurality of flutings on the side wherein, and described phase place sensor more includes:
A plurality of magnetic substances, it is contained in respectively in described a plurality of fluting; And
One magnetic sensor, it is arranged on a side of the side with described a plurality of flutings, and when described magnetic sensor rotated at described wheel body, the described magnetic substance of sensing was to produce described sensing signal.
3. the roller that detects according to claim 1 is characterized in that: described phase place sensor more includes:
One sun wheel body, it is arranged on the side of described wheel body, and described sun wheel body has a plurality of gear pieces, has a fluting between adjacent gear piece; And
One sensor, it is arranged on a side of described sun wheel body, produces described sensing signal with the state of the described sun wheel body rotation of sensing.
4. the roller that detects according to claim 1 is characterized in that: a side of described wheel body more is provided with a compacting wheel, can provide a base material by rotating to drive described wheel body between described wheel body and described compacting wheel.
5. a feedway is characterized in that, includes:
One driver element, it provides a rotational power;
One power transmission shaft, it couples mutually with described driver element, makes described power transmission shaft produce a rotational motion to receive described rotational power, has a plurality of first power transmits the component on the described power transmission shaft;
A plurality of conveying axis, it has one second power transmits the component and a plurality of conveying roller respectively, and second power transmits the component on each conveying axis couples mutually with first power transmits the component on the described power transmission shaft; And
One detects roller, and it has: a wheel body has a through hole in it; One low-friction coefficient changes part, and it is embedded in the described through hole, makes the motion that rotates on described commentaries on classics part of described wheel body; And a phase place sensor, it provides the sensing phase place that described wheel body rotates, to produce a sensing signal.
6. feedway according to claim 5 is characterized in that: described wheel body has a wheel face, and a pair of side that is connected with described wheel face respectively, has more a plurality of flutings on the side wherein, and described phase place sensor more includes:
A plurality of magnetic substances, it is contained in respectively in described a plurality of fluting; And
One magnetic sensor, it is arranged on a side of the side with described a plurality of flutings, and when described magnetic sensor rotated at described wheel body, the described magnetic substance of sensing was to produce described sensing signal.
7. feedway according to claim 5 is characterized in that: described phase place sensor more includes:
One sun wheel body, it is arranged on the side of described wheel body, and described sun wheel body has a plurality of gear pieces, has a fluting between adjacent gear piece; And
One sensor, it is arranged on a side of described sun wheel body, produces described sensing signal with the state of the described sun wheel body rotation of sensing.
8. feedway according to claim 5 is characterized in that: described commentaries on classics part is a layer or lining, and described bearing is a ceramic bearing or a polyetheretherketone bearing.
9. feedway according to claim 5 is characterized in that: the described roller that detects is arranged on the conveying axis in described a plurality of conveying axis or relies on pivot shaft independently and be arranged on a side of a conveying axis wherein.
10. feedway according to claim 5 is characterized in that: a side of described wheel body more is provided with a compacting wheel, can provide a base material by rotating to drive described wheel body between described wheel body and described compacting wheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201841694U CN201753194U (en) | 2010-05-10 | 2010-05-10 | Detection roller wheel and conveyer employing same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201841694U CN201753194U (en) | 2010-05-10 | 2010-05-10 | Detection roller wheel and conveyer employing same |
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| Publication Number | Publication Date |
|---|---|
| CN201753194U true CN201753194U (en) | 2011-03-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010201841694U Expired - Fee Related CN201753194U (en) | 2010-05-10 | 2010-05-10 | Detection roller wheel and conveyer employing same |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102730382A (en) * | 2012-06-26 | 2012-10-17 | 深圳市华星光电技术有限公司 | Glass substrate conveying device and method for detecting rotation synchronism of driven shafts |
-
2010
- 2010-05-10 CN CN2010201841694U patent/CN201753194U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102730382A (en) * | 2012-06-26 | 2012-10-17 | 深圳市华星光电技术有限公司 | Glass substrate conveying device and method for detecting rotation synchronism of driven shafts |
| CN102730382B (en) * | 2012-06-26 | 2014-10-01 | 深圳市华星光电技术有限公司 | Glass substrate conveying device and method for detecting rotation synchronism of driven shafts |
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Granted publication date: 20110302 Termination date: 20130510 |