A kind of superhigh pressure short-arc mercury lamp
Technical field
The utility model relates to the photolithographic fabrication field, relates in particular to a kind of superhigh pressure short-arc mercury lamp
Background technology
All the time, the blast problem of superhigh pressure mercury shot arc lamp is perplexing manufacturing industry always, and industry has dropped into a large amount of man power and materials, because of can't find the reason that causes blast always, so the problem of blast can't be resolved always.
Referring to Fig. 1, be the structural representation of superhigh pressure short-arc mercury lamp, wherein, metal cap 7 welds conducting by molybdenum foil 8 mutually with the Metallic rod 9 that includes pad 92.
In the prior art, be electrically connected because superhigh pressure short-arc mercury lamp metal cap need form with the inside of lamp, therefore, the superhigh pressure short-arc mercury lamp need use welding material different parts to be comprised the conducting that welds between conduction molybdenum foil and the electrode with dispatch from foreign news agency in the lamp.At present, it (is that pure platinum or base material are molybdenum that the welding method of the conduction molybdenum foil of superhigh pressure short-arc mercury lamp is used the platinum paper tinsel usually, the surface gold,platinized welding material) fixedly molybdenum foil 8 on pad 92, because platinum is the basic scolder in the superhigh pressure short-arc mercury lamp welding procedure, it not only is applied to molybdenum foil 8 and includes in the welding of circular gasket Metallic rod, also is applied to molybdenum foil 8 and includes in the welding of starching shape pad Metallic rod.Company is through a large amount of discovering, the blast of superhigh pressure short-arc mercury lamp, be because white gold solder can cause the superhigh pressure short-arc mercury lamp in use to have potential safety hazard, concrete, in the work of superhigh pressure short-arc mercury lamp, company is through discovering, mercury vapor in platinum and the superhigh pressure short-arc mercury lamp can react, thereby make being connected progressively loosening and causing coming off between molybdenum foil and pad, contact resistance and temperature all can increase and blast, this hidden danger not only can be blown up optics and carve machine but also can cause to a certain degree damage to optical system, more can cause the pause of production.
After company uses tantalum paper tinsel or niobium paper tinsel instead, find that through a large amount of experiments tantalum and niobium have outstanding corrosion resistance to mercury and steam thereof, also solve the superhigh pressure short-arc mercury lamp blast problem that always perplexs industry thereupon.
The utility model content
The utility model embodiment technical problem to be solved is, a kind of superhigh pressure short-arc mercury lamp is provided, and tantalum paper tinsel layer or niobium paper tinsel layer are set between described molybdenum foil and described pad or the described molybdenum cup, has improved the life-span and the safety in utilization of product.
In order to solve the problems of the technologies described above, the utility model embodiment provides a kind of superhigh pressure short-arc mercury lamp, comprise: described pad or described molybdenum cup are fixedly installed on the described Metallic rod, described molybdenum foil is fixed on described pad or the described molybdenum cup, between described molybdenum foil and described pad or described molybdenum cup solder layer is set, described solder layer comprises a kind of in tantalum paper tinsel layer or the niobium paper tinsel layer at least.
Preferably, described pad comprises circular gasket, and described tantalum paper tinsel layer or niobium paper tinsel layer are weldingly fixed between described circular gasket and the described molybdenum foil.
Preferably, described pad comprises slurry shape pad, and described tantalum paper tinsel layer or niobium paper tinsel layer are weldingly fixed between described slurry shape pad and the described molybdenum foil.
Preferably, described tantalum paper tinsel layer or niobium paper tinsel layer are weldingly fixed between described molybdenum cup and the described molybdenum foil.
Preferably, described tantalum paper tinsel layer comprises tantalum alloy paper tinsel layer, and described niobium paper tinsel layer comprises the niobium alloy foil layer.
Implement the superhigh pressure short-arc mercury lamp of the utility model embodiment, because pad or molybdenum cup are fixedly installed on the Metallic rod, molybdenum foil is fixed on pad or the molybdenum cup, between molybdenum foil and pad or molybdenum cup solder layer is set, and described solder layer comprises a kind of in tantalum paper tinsel layer or the niobium paper tinsel layer at least.Tantalum paper tinsel layer (comprising tantalum alloy paper tinsel layer) or niobium paper tinsel layer (niobium alloy foil layer) can not react with the mercury vapor of high temperature, have avoided using the generation of platinum scolder potential safety hazard, have improved the life-span and the safety in utilization of superhigh pressure short-arc mercury lamp product.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below, apparently, accompanying drawing in describing below only is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of superhigh pressure short-arc mercury lamp in the prior art;
Fig. 2 is the structural representation that the Metallic rod of the utility model embodiment superhigh pressure short-arc mercury lamp is connected with circular gasket;
Fig. 3 is circular gasket and the molybdenum foil welded structure schematic diagram mutually of the utility model embodiment superhigh pressure short-arc mercury lamp;
Fig. 4 is the local structure for amplifying schematic diagram that circular gasket and the molybdenum foil of the utility model embodiment superhigh pressure short-arc mercury lamp welds mutually;
Fig. 5 is a circular gasket and molybdenum foil welded structure schematic diagram mutually in the utility model first embodiment superhigh pressure short-arc mercury lamp;
Fig. 6 is the local structure for amplifying schematic diagram that circular gasket and molybdenum foil weld mutually in the utility model first embodiment superhigh pressure short-arc mercury lamp;
Fig. 7 is the structural representation of the slurry shape pad of the utility model embodiment superhigh pressure short-arc mercury lamp;
Fig. 8 is the structural representation that the Metallic rod of the utility model embodiment superhigh pressure short-arc mercury lamp is connected with slurry shape pad;
Fig. 9 is slurry shape pad and the molybdenum foil welded structure schematic diagram mutually of the utility model embodiment superhigh pressure short-arc mercury lamp;
Figure 10 is the local structure for amplifying schematic diagram that slurry shape pad and the molybdenum foil of the utility model embodiment superhigh pressure short-arc mercury lamp welds mutually;
Figure 11 is a slurry shape pad and molybdenum foil welded structure schematic diagram mutually in the utility model second embodiment superhigh pressure short-arc mercury lamp;
Figure 12 is the local structure for amplifying schematic diagram that slurry shape pad and molybdenum foil weld mutually in the utility model second embodiment superhigh pressure short-arc mercury lamp;
Figure 13 is the structural representation of the molybdenum cup of the utility model embodiment superhigh pressure short-arc mercury lamp;
Figure 14 is a molybdenum cup and molybdenum foil welded structure schematic diagram mutually in the utility model the 3rd embodiment superhigh pressure short-arc mercury lamp;
Figure 15 is the local structure for amplifying schematic diagram that molybdenum cup and molybdenum foil weld mutually in the utility model the 3rd embodiment superhigh pressure short-arc mercury lamp.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, the utility model is described in further detail below in conjunction with accompanying drawing.
The utility model embodiment superhigh pressure short-arc mercury lamp, comprise: described molybdenum foil welds the path that conducting forms dispatch from foreign news agency in the lamp mutually with the Metallic rod that includes pad or molybdenum cup, described pad or described molybdenum cup are fixedly installed on the described Metallic rod, described molybdenum foil is fixed on described pad or the described molybdenum cup, between described molybdenum foil and described pad or described molybdenum cup solder layer is set, described solder layer comprises a kind of in tantalum paper tinsel layer or the niobium paper tinsel layer at least.
Preferably, the mode that pad or molybdenum cup are fixed on the Metallic rod does not limit, and can take to weld or the mode (welding together with platinum wire mostly) of mechanical fixation, and Metallic rod is that refractory metal material is made.
Preferably, pad comprises circular gasket, and described tantalum paper tinsel layer or described niobium paper tinsel layer are weldingly fixed between described circular gasket and the described molybdenum foil.
Preferably, described pad comprises slurry shape pad, and described tantalum paper tinsel layer or described niobium paper tinsel layer are weldingly fixed between described slurry shape pad and the described molybdenum foil.
Preferably, described tantalum paper tinsel layer or described niobium paper tinsel layer are weldingly fixed between described molybdenum cup and the described molybdenum foil.
Preferably, described tantalum paper tinsel layer comprises tantalum alloy paper tinsel layer, and described niobium paper tinsel layer comprises the niobium alloy foil layer.
Preferably, the various parts in the described lamp comprise guide rod or pad, also available molybdenum and molybdenum alloy, tungsten and tungsten alloy, niobium and niobium alloy, tantalum and tantalum alloy manufacturing.
Preferably, can also extend as the left end of the pad among Fig. 2-shown in Figure 6 Metallic rod is set
The utility model is implemented in other execution modes of superhigh pressure short-arc mercury lamp, and the conduction molybdenum foil does not limit with the mode that Metallic rod is conducted, and welds fixedly molybdenum foil on pad or molybdenum cup as long as satisfy at least a scolder that uses at least in tantalum paper tinsel or the niobium paper tinsel.
The concrete structure of the superhigh pressure short-arc mercury lamp of the utility model embodiment comprises, metal cap body 1, molybdenum foil 2 and Metallic rod 3, Metallic rod 3 comprises pad 32 or molybdenum cup 34, and metal cap body 1 welds conducting by molybdenum foil 2 mutually with the Metallic rod 3 that includes pad 32 or molybdenum cup 34.
Among first embodiment of superhigh pressure short-arc mercury lamp of the present utility model, as shown in Figure 2, pad 32 comprises circular gasket 322, circular gasket 322 is fixed on the Metallic rod 3, wherein, circular gasket 322 is sheet ringwise, and Metallic rod 3 is connected with circular gasket 322 by the mode of welding or mechanical fixation.
In conjunction with referring to as shown in Figure 3, Figure 4, molybdenum foil 2 is long and narrow sheet, and molybdenum foil 2 is weldingly fixed on the ring-type circular gasket 322 that Metallic rod 3 has, and concrete, tantalum paper tinsel layer or niobium paper tinsel layer 4 are weldingly fixed between circular gasket 322 and the described molybdenum foil 2.
In conjunction with referring to as Fig. 5, shown in Figure 6, tantalum paper tinsel layer or niobium paper tinsel layer 4 are weldingly fixed in the concrete enforcement between described circular gasket 322 and the described molybdenum foil 2 in the utility model superhigh pressure short-arc mercury lamp, the size and the position of tantalum paper tinsel layer or niobium paper tinsel layer 4 do not limit, and have tantalum paper tinsel layer or niobium paper tinsel layer 4 between circular gasket 322 and the described molybdenum foil 2 as long as satisfy.
Among second embodiment of superhigh pressure short-arc mercury lamp of the present utility model, as shown in Figure 7 and Figure 8, pad 32 comprises slurry shape pad 324, slurry shape pad 324 is fixed on the Metallic rod 3, wherein, slurry shape pad 324 is sheet ringwise, is roughly polygon, and Metallic rod 3 is connected with slurry shape pad 324 by the mode of welding or mechanical fixation.
In conjunction with referring to as Fig. 9, shown in Figure 10, molybdenum foil 2 is long and narrow sheet, and molybdenum foil 2 is weldingly fixed on the ring-type slurry shape pad 324 that Metallic rod 3 has, and concrete, tantalum paper tinsel layer or niobium paper tinsel layer 4 are weldingly fixed between slurry shape pad 324 and the described molybdenum foil 2.
In conjunction with referring to as Figure 11, shown in Figure 12, tantalum paper tinsel layer or niobium paper tinsel layer 4 are weldingly fixed in the described concrete enforcement of starching between shape pad 324 and the described molybdenum foil 2 in the utility model superhigh pressure short-arc mercury lamp, the size and the position of tantalum paper tinsel layer or niobium paper tinsel layer 4 do not limit, and have tantalum paper tinsel layer or niobium paper tinsel layer 4 as long as satisfy between slurry shape pad 324 and the described molybdenum foil 2.
Among the 3rd embodiment of superhigh pressure short-arc mercury lamp of the present utility model, as shown in figure 13, molybdenum cup 326 is cup-shapeds that an end has opening, and its bottom has through hole (figure does not show), and Metallic rod 3 is connected with molybdenum cup 326 by the mode of welding or mechanical fixation.
In conjunction with referring to as Figure 14, shown in Figure 15, tantalum paper tinsel layer or niobium paper tinsel layer 4 are weldingly fixed between molybdenum cup 326 and the described molybdenum foil 2.
Tantalum paper tinsel layer or niobium paper tinsel layer 4 are weldingly fixed in the concrete enforcement between molybdenum cup 326 and the described molybdenum foil 2 in the utility model superhigh pressure short-arc mercury lamp, the size and the position of tantalum paper tinsel layer or niobium paper tinsel layer 4 do not limit, and have tantalum paper tinsel layer or niobium paper tinsel layer 4 between circular gasket 322 and the described molybdenum foil 2 as long as satisfy.
The superhigh pressure short-arc mercury lamp of the utility model embodiment and this superhigh pressure short-arc mercury lamp, because pad or molybdenum cup are fixedly installed on the Metallic rod, molybdenum foil is fixed on pad or the molybdenum cup, between molybdenum foil and pad or molybdenum cup solder layer is set, described solder layer comprises a kind of in tantalum paper tinsel layer or the niobium paper tinsel layer at least.Tantalum paper tinsel layer (comprising tantalum alloy paper tinsel layer) or niobium paper tinsel layer (niobium alloy foil layer), tantalum paper tinsel layer (comprising tantalum alloy paper tinsel layer) or niobium paper tinsel layer (niobium alloy foil layer) can not react with the mercury vapor of high temperature, process structure is simple, guaranteed the reliability of welding position, thereby the possibility of welding disconnection and blast takes place when having avoided using the welding of platinum material, improved the useful life and the safe application performance of product.
Above disclosed only is a kind of preferred embodiment of the utility model, can not limit the interest field of the utility model certainly with this, and therefore the equivalent variations of being done according to the utility model claim still belongs to the scope that the utility model is contained.