CN201738034U - Detacher of a czochralski crystal growth furnace heater - Google Patents

Abstract

The utility model relates to an auxiliary tool in maintenance and repair of a czochralski crystal growth furnace, especially a detacher of a czochralski crystal growth furnace heater. The detacher of the czochralski crystal growth furnace heater comprises a rod-shaped vertical post (2) and a bracket arranged at the lower end of the vertical post (2) and perpendicular with the vertical post (2), wherein the bracket uses the lower end of the vertical pole (2) as the round core and at least three support plates (4) radially uniformly extend out and are movably connected with an expansion plate (5) along the length direction of each support plate; the upper end of the vertical post (2) is connected with a slinger (1). The detacher has features of reduced cooling time of the heater, saved energy, greatly increased production efficiency of the crystal furnace, reduced damage on the heater during transport by man, reduced work intensity of the operator, saved man power and reduced damage on the operator. The conventional though of the technical personnel in the technical field is changed and a special device is provided and the current manual disassemble and assembly state is changed.

Description

A kind of dismounting utensil of vertical pulling crystal growing furnace well heater

Technical field

The utility model relates to a kind of auxiliary means in the vertical pulling crystal growing furnace, particularly relates to a kind of dismounting utensil of the big growth furnace well heater of vertical pulling crystal.

Background technology

Well heater is a core devices in the crystal growing furnace, and it adopts high-density, high strength graphite to make, and is fixed on the lower furnace body copper electrode, has thermal insulation layer to reach stay-warm case down down.

The technological process of production of silicon crystal is: tear the stove prepurging-shove charge-material-stable-crystal growth-blowing out of finding time (fill a certain amount of argon gas, furnace pressure keeps 1000-2000Pa)-change open.Therefore, when each stove is produced, need after blowing out, wait for that growth furnace cools down, below being positioned at worktable, the annular well heater that is fixed in the growth furnace undercut cylinder upwards be lifted then, outwards shift out again and carry out prepurging, shove charge operation.

Lagging material widespread use along with technical progress and excellent property, the heat-insulating property of hot system is become better and better, the power that crystal growth consumes declines to a great extent, (the melted silicon Tc is 1420 ℃ but the time that the stove cooling needs is more and more longer, heater temperature is not less than 1500 ℃, temperature should be taller when changing material), in order to enhance productivity, generally at well heater and lagging material in the resistance to oxidation temperature range limit, exit to normal atmosphere and open stove (blowing out 7-8 hour at present, temperature is about about 400-350 ℃ in the stove), because the good heat insulation effect of hot system, even cooling off, well heater also needs a very long time in air, prior art, during to the big prepurging of hot system, need wait it to be cooled to four people of room temperature can carry away, take out when temperature is higher, scald the people easily and damage thermal device.After taking out well heater, stay-warm case is cleared up under just can reaching the thermal insulation layer under it, needs certain cooling time.

Along with the continuous compression of solar battery sheet production cost, make the continuous increase of silicon wafer sizes, produce needs to satisfy.The large size silicon wafer needs bigger vertical pulling crystal growing furnace to draw, and big growth furnace needs bigger well heater that heat is provided.The increase of heating member size causes the interior temperature speed of cooling of whole growth stove slack-off, needs the longer time cooling, and the weight increase, and this just needs more times and manpower to go to dismantle.The prolongation of time, the insecurity of manpower dismounting causes the minimizing of production efficiency.

Production practice press for a kind of extracting tool, can quickly and easily well heater upwards be promoted from the bottom, shift out then and clear up, and reduce the time of cooling off required wait in the unloading process owing to well heater, increase work efficiency.

Summary of the invention

The purpose of this utility model provides the well heater quick-release arrangement that heat is provided in a kind of vertical pulling crystal growing furnace, can dismantle the well heater in the growth furnace convenient, fast, safely.The purpose of this utility model is realized by following technical scheme.

A kind of dismounting utensil of vertical pulling crystal growing furnace well heater is characterized in that, described stripping assembly comprises the rod shaped structure column and is positioned at column lower end, forms with the carriage that column is perpendicular;

Described carriage is, is the center of circle with the lower end of column, radially evenly stretches out at least three back up pads, along the length direction of each back up pad, connects expansion plate movably.

Described column upper end connects suspension ring.

Described expansion plate is connected with back up pad with the slotted hole structure with bolt.

Described expansion plate is connected with back up pad with the structure that long slab inserts elongated slot.

Described expansion plate is the T font, and riser is connected with back up pad, and transverse slat inserts the bottom of well heater.

Four back up pads are evenly stretched out in the lower end of described column.

Between described column and every back up pad, weld bracing diagonal.

Adopting this device is earlier its suspension ring to be fixed on the hoisting appliance, as driving, remove the retaining screw of well heater, stripping assembly drops to heater base, four expansion plates are regulated extending the well heater end opening, fixed heater and bear its weight, hoisting appliance slowly rises, promote and winch to growth furnace and cool off outward, cleaning thermal insulation layer down reaches stay-warm case down.The heater cartridge timing is equally as above operated.

The utility model has the advantages that:

1. reduce the cooling time of waiting for well heater, well heater need be cooled to normal temperature and could take out, otherwise overheated heater is scalded human body during dismounting, damage well heater when moving.

Adopt this device, can take out well heater fast, as 22 cun well heaters, the big prepurging of every stove took out 3 times in every month, saved 1 hour at every turn, calculated by 100 single crystal growing furnaces, can save 300 hours in every month, can produce 5 stove silicon crystal more, had improved crystal furnace production efficiency greatly.

2. reduce the people and be when moving damage to thermal device, well heater is made up of many lobe fluting graphite, and is heavier and frangible, costs an arm and a leg, be about 50 kilograms as 22 cun well heater weight, need 3-4 people to carry away, discontinuity during carrying can cause damage in the cross-notching place, reduce its work-ing life, and the several people operates simultaneously, can fall down unavoidably, pounds people or damage.

Adopt this device, stressed even, can not cause damage in the cross-notching place, increase the work-ing life of thermal device, reduce that pounding of human body injured damage.By normal operations, well heater stove in work-ing lifes 150 adopts this device, and can be increased to 170 stoves work-ing life, increases work-ing life more than 10%, has very remarkable economic efficiency.

3. adopt this device, reduced operator's working strength, reduce the injury that personnel are caused when saving manpower.

4. the utility model has changed those skilled in the art's custom thinking, generally for cylinder annular well heater is mentioned, is moved outward, only can take measures from top, the outside of well heater, such as a circle edge of clamping well heater by a plurality of anchor clamps from the top, perhaps catch on the outside lower rim of well heater from the outside, but facts have proved than being easier to collide, damage well heater by a plurality of hooks.Have only the utility model to put down, again expansion plate is extended radially out, backing from the cylindrical center of well heater, can be steadily, hang oneself safely, move outward.

Description of drawings

Fig. 1 is the front view of the dismounting utensil of the utility model vertical pulling crystal growing furnace well heater;

Fig. 2 is the vertical view of the dismounting utensil of the utility model vertical pulling crystal growing furnace well heater;

Fig. 3 vertically puts into the structural representation of well heater for the utility model device;

Fig. 4 is the structural representation of the protruding adjusting of the utility model stripping assembly expansion plate;

Fig. 5 is the structural representation of the well heater of being sling by the utility model stripping assembly.

Among the figure, the 1st, suspension ring, the 2nd, column, the 3rd, bracing diagonal, the 4th, back up pad, the 5th, expansion plate, the 6th, hoisting appliance, the 7th, well heater, the 8th, following stay-warm case.

Embodiment

Below in conjunction with accompanying drawing, the utility model is described in further detail.

A kind of dismounting utensil of vertical pulling crystal growing furnace well heater, described stripping assembly comprise rod shaped structure column 2 and be positioned at column 2 lower ends, forms with the carriage that column 2 is perpendicular;

Described carriage is, is the center of circle with the lower end of column 2, radially evenly stretches out at least three back up pads 4, along the length direction of each back up pad 4, connects expansion plate 5 movably;

Described column 2 upper ends connect suspension ring 1.

Described expansion plate 5 is connected with back up pad 4 with the slotted hole structure with bolt.This mode of connection is simple in structure, reliable.

Described expansion plate 5 is connected with back up pad 4 with the structure that long slab inserts elongated slot.Expansion plate 5 is inserted from the elongated slot that back up pad 4 outer ends are radially offered, from elongated slot, extract length arbitrarily, just can realize regulating collapsing length.

Described expansion plate 5 is the T font, and riser is connected with back up pad 4, and transverse slat inserts the bottom of well heater 7.Like this structure both had been convenient to being connected and adjusting of riser and back up pad 4, helped transverse slat again and held the well heater bottom with the contact area of broad, reduced the pressure of unit surface, protected well heater 7.

Four back up pads 4 are evenly stretched out in the lower end of described column 2.Generally hold well heater 7 and be advisable with four back up pads 4, existing suitable holding capacity, more steady again, and adjusting, supporting structure are also simpler.

Between described column 2 and every back up pad 4, weld bracing diagonal 3.Leg-of-mutton stability principle increases intensity and rigidity that welding bracing diagonal 3 can be reinforced whole column and carriage.

The utility model reduces the cooling time of waiting for well heater, saves energy, has improved crystal furnace production efficiency greatly.Reduce the people and be when moving the damage of thermal device, reduced operator's working strength, reduce the injury that personnel are caused when saving manpower.The utility model has changed those skilled in the art's custom thinking, and a kind of utensil structure of uniqueness is provided, and has changed the situation of artificial dismounting so far.

Claims (6)

1. the dismounting utensil of a vertical pulling crystal growing furnace well heater is characterized in that, described stripping assembly comprises rod shaped structure column (2) and is positioned at column (2) lower end, forms with the carriage that column (2) is perpendicular;

Described carriage is, is the center of circle with the lower end of column (2), radially evenly stretches out at least three back up pads (4), along the length direction of each back up pad (4), connects expansion plate (5) movably;

Described column (2) upper end connects suspension ring (1).

2. according to the dismounting utensil of the described vertical pulling crystal growing furnace of claim 1 well heater, it is characterized in that described expansion plate (5) is connected with back up pad (4) with the slotted hole structure with bolt.

3. according to the dismounting utensil of the described vertical pulling crystal growing furnace of claim 1 well heater, it is characterized in that described expansion plate (5) is connected with back up pad (4) with the structure that long slab inserts elongated slot.

4. according to the dismounting utensil of claim 1,2 or 3 described vertical pulling crystal growing furnace well heaters, it is characterized in that described expansion plate (5) is the T font, riser is connected with back up pad (4), and transverse slat inserts the bottom of well heater (7).

5. according to the dismounting utensil of the described vertical pulling crystal growing furnace of claim 1 well heater, it is characterized in that four back up pads (4) are evenly stretched out in the lower end of described column (2).

6. according to the dismounting utensil of the described vertical pulling crystal growing furnace of claim 1 well heater, it is characterized in that between described column (2) and every back up pad (4), welding bracing diagonal (3).

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