CN201729763U - Deposition carrying device for quartz glass - Google Patents
Deposition carrying device for quartz glass Download PDFInfo
- Publication number
- CN201729763U CN201729763U CN201020150326XU CN201020150326U CN201729763U CN 201729763 U CN201729763 U CN 201729763U CN 201020150326X U CN201020150326X U CN 201020150326XU CN 201020150326 U CN201020150326 U CN 201020150326U CN 201729763 U CN201729763 U CN 201729763U
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- China
- Prior art keywords
- elevating
- translation
- guide rail
- screw
- drive mechanism
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a deposition carrying device for quartz glass. The deposition carrying device comprises a base and an upright post fixed on the base, wherein an elevating screw rod pair, an elevating guide rail pair and an elevating driving mechanism consisting of two alternating current servo motors and a double-input harmonic speed reducer are arranged on the upright post; an elevating seat is fixedly connected with a screw rod nut of the elevating screw rod pair and a guide rail slide block of the elevating guide rail pair; a translational screw rod pair, a translational guide rail pair and a translational driving mechanism consisting of an alternating current servo motor and a worm reduction gear are arranged on the elevating seat; a translational seat is fixedly connected to the screw rod nut of the translational screw rod pair and the guide rail of the translational guide rail pair; a vertical shaft the upper end of which is provided with a tray is vertically arranged on the translational seat; a rotary driving mechanism consisting of the alternating current servo motor and the worm reduction gear is matches with the vertical shaft. The deposition carrying device is suitable for a vertical deposition furnace for producing the quartz glass and can meet the requirements of a process on running speed and running accuracy.
Description
Technical field
The utility model relates to the silica glass production unit, is specifically related to a kind of quartz glass deposition carrying apparatus.
Background technology
Silica glass typically uses cvd furnace and accept burning blanking crystallization formation on deposited weight surface.Horizontal CVD production technique is adopted in silica glass production in the past, and employed cvd furnace is a horizontal chamber oven.At present, because vertical cvd furnace has the characteristics of sedimentation effect height, low, the suitable production large size specification silica glass ingot of energy consumption and is praised highly, but also do not have at present a kind of be fit to that vertical cvd furnace uses can satisfy the quartz glass deposition carrying apparatus that travelling speed, running precision require, restricted applying of silica glass new process of production.
Summary of the invention
The purpose of this utility model is at the problems referred to above, and a kind of quartz glass deposition carrying apparatus that vertical cvd furnace uses that is fit to is provided.
The technical scheme that realizes above-mentioned purpose is: a kind of quartz glass deposition carrying apparatus, it includes base, on base, be fixed with column, on column, be provided with perpendicular elevating screw of putting and the riser guide that places the elevating screw both sides, elevating screw nut and riser guide slide block have matched with elevating screw and riser guide, be installed on the column by by two AC servo motor and the lift drive mechanism that the dual input harmonic wave speed reducing machine is formed, this lift drive mechanism connects elevating screw through synchronous belt drive mechanism, be fixedly connected with an elevating bracket with elevating screw nut and riser guide slide block, on elevating bracket, be provided with horizontal translation leading screw and the translation guide rail slide block that places translation leading screw both sides, translation feed screw nut and translation guide rail have matched with translation leading screw and translation guide rail slide block, be installed on the elevating bracket and link to each other and be connected to the translational drive mechanism of forming by AC servo motor and worm-gear speed reducer with the translation leading screw, be fixedly connected on translation feed screw nut and the translation guide rail translating base is arranged, erect to put to be installed in a vertical shaft is arranged on the translating base, the upper end of this vertical shaft is provided with pallet, be provided with the rotary drive mechanism of being made up of AC servo motor and worm-gear speed reducer with vertical shaft phase configuration translating base, this rotary drive mechanism is connected with vertical shaft by synchronous belt drive mechanism.
The technical solution of the utility model also comprises: the lead screw pair that lead screw pair that described elevating screw and elevating screw nut are formed and described translation leading screw and translation feed screw nut are formed is a ball screw assembly; Upper end at described column is equipped with fixed pulley, and being assemblied in has wireline on the fixed pulley, and an end of this wireline connects elevating bracket, and the other end connects balancing weight.
The utility model adopts lead screw pair to realize the lifting and the translation of deposition carrying apparatus pallet, adds the rotation of the pallet that is driven by the transmission of motor synchronous band, can satisfy the processing requirement that vertical cvd furnace is produced silica glass, and simple in structure, convenient control of motion.
Lifting of the present utility model drives adopts AC servo motor to add accurate harmonic wave speed reducing machine of dual input and band transmission synchronously, has the advantages that to realize fast instantaneous at a slow speed conversion and high transmission accuracy.
The utility model adopts ball screw assembly,, have friction resistance little, can effectively control creep, the characteristics of machinery driving efficiency height, long service life.
The utility model can effectively reduce the distortion that the elevating screw axial load produces by Weighting system is installed, thereby improves transmission accuracy, and prolongs the work-ing life of equipment.
Description of drawings
Accompanying drawing is this quartz glass deposition carrying apparatus structural representation.
Embodiment
In conjunction with the accompanying drawings embodiment of the present utility model is described.
As accompanying drawing, this quartz glass deposition carrying apparatus has base 1 and the column 2 of bolt on base of being made up of shaped steel, steel plate welding, and base 1 and column 2 support whole deposition carrying apparatus.Rolling bearing units by two ends on column 2 are equipped with the perpendicular elevating screw of putting 3, being fixedly installed in the both sides of elevating screw 3 has riser guide 4 on the column 2, elevating screw nut 5 and riser guide slide block 6 have matched with elevating screw 3 and riser guide 4, be installed on the column 2 by by two AC servo motor and the lift drive mechanism 7 that the dual input harmonic wave speed reducing machine is formed, the output shaft of this lift drive mechanism 7 connects elevating screw 3 through synchronous belt drive mechanism 8, and the elevating bracket 9 of steel construction is fixedlyed connected with riser guide slide block 6 with elevating screw nut 5.Two AC servo motor by lift drive mechanism 7 are moved separately or together, the driving output shaft carries out slowly, twirl, its output shaft by belt wheel and synchronously band drive the elevating screw rotation, thereby cause that elevating screw nut 5 makes lifting moving, drive the elevating bracket up-and-down movement simultaneously.On elevating bracket 9, be provided with horizontal translation leading screw 10 and the translation guide rail slide block 11 that places translation leading screw both sides, translation feed screw nut 14 and translation guide rail 13 have matched with translation leading screw 10 and translation guide rail slide block 11, be installed on the elevating bracket 9 and link to each other and be connected to the translational drive mechanism of forming by AC servo motor and worm-gear speed reducer 12, be fixedly connected on the translating base 15 that steel construction is arranged on translation feed screw nut 14 and the translation guide rail 13 with translation leading screw 10.Utilize the AC servo motor of translational drive mechanism 12 that power is provided,, drive translating base 15 and move horizontally by cooperating of translation leading screw 10 and translation feed screw nut 14.The bearing that disposes through two ends erects to put to be installed in a vertical shaft 16 on the translating base 15, in the upper end of vertical shaft 16 pallet 17 is installed, be provided with the rotary drive mechanism of being made up of AC servo motor and worm-gear speed reducer 18 with vertical shaft 16 phase configuration translating bases 15, this rotary drive mechanism is connected with vertical shaft 16 by synchronous belt drive mechanism 19.Utilize the servomotor of rotary drive mechanism 18 that power is provided, can realize the rotation of pallet 17.In the upper end of column 2 two groups of fixed pulleys 20 are installed, being assemblied in has wireline 21 on the fixed pulley 20, and an end of wireline 21 connects elevating bracket 9, and it is fast 22 that the other end connects counterweight, constitutes the configuration-system of this deposition carrying apparatus.
Elevating screw pair of the present utility model and translation lead screw pair can adopt ball screw assembly.
Claims (3)
1. quartz glass deposition carrying apparatus, it is characterized in that: it includes base (1), on base (1), be fixed with column (2), on column (2), be provided with perpendicular elevating screw of putting (3) and the riser guide (4) that places elevating screw (3) both sides, elevating screw nut (5) and riser guide slide block (6) have matched with elevating screw (3) and riser guide (4), being installed in column (2) goes up by by two AC servo motor and the lift drive mechanism (7) that the dual input harmonic wave speed reducing machine is formed, this lift drive mechanism (7) connects elevating screw (3) through synchronous belt drive mechanism (8), be fixedly connected with an elevating bracket (9) with elevating screw nut (5) and riser guide slide block (6), on elevating bracket (9), be provided with horizontal translation leading screw (10) and place the translation guide rail slide block (11) of translation leading screw (10) both sides, translation feed screw nut (14) and translation guide rail (13) have matched with translation leading screw (10) and translation guide rail slide block (11), being installed in links to each other on the elevating bracket (9) and with translation leading screw (10) is connected to the translational drive mechanism of being made up of AC servo motor and worm-gear speed reducer (12), be fixedly connected on translation feed screw nut (14) and the translation guide rail (13) translating base (15) is arranged, erect to put to be installed in a vertical shaft (16) is arranged on the translating base (15), the upper end of this vertical shaft (16) is provided with pallet (17), be provided with the rotary drive mechanism of being made up of AC servo motor and worm-gear speed reducer (18) with vertical shaft (16) phase configuration translating base (15), this rotary drive mechanism (18) is connected with vertical shaft (16) by synchronous belt drive mechanism (19).
2. quartz glass deposition carrying apparatus according to claim 1 is characterized in that: described elevating screw (3) is a ball screw assembly, with the lead screw pair of elevating screw nut (5) composition and the lead screw pair of described translation leading screw (10) and translation feed screw nut (14) composition.
3. quartz glass deposition carrying apparatus according to claim 1, it is characterized in that: fixed pulley (20) is installed in the upper end of column (2), being assemblied in has wireline (21) on the fixed pulley (20), an end of this wireline connects elevating bracket (9), and the other end connects balancing weight (22).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201020150326XU CN201729763U (en) | 2010-04-01 | 2010-04-01 | Deposition carrying device for quartz glass |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201020150326XU CN201729763U (en) | 2010-04-01 | 2010-04-01 | Deposition carrying device for quartz glass |
Publications (1)
Publication Number | Publication Date |
---|---|
CN201729763U true CN201729763U (en) | 2011-02-02 |
Family
ID=43520921
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201020150326XU Expired - Fee Related CN201729763U (en) | 2010-04-01 | 2010-04-01 | Deposition carrying device for quartz glass |
Country Status (1)
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CN (1) | CN201729763U (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104532358A (en) * | 2014-12-24 | 2015-04-22 | 上海汉虹精密机械有限公司 | Rotary lifting mechanism for quartz crystal ingot furnace |
CN105174696A (en) * | 2015-08-11 | 2015-12-23 | 中国建筑材料科学研究总院 | Quartz glass roller making machine |
CN105648411A (en) * | 2014-11-12 | 2016-06-08 | 中国科学院沈阳科学仪器股份有限公司 | Arc scanning mechanism used for glass coating |
CN108772496A (en) * | 2018-07-09 | 2018-11-09 | 河南宏源车轮股份有限公司 | A kind of lifting feeding device |
CN109955049A (en) * | 2019-03-20 | 2019-07-02 | 燕山大学 | A kind of vertical posture adjusting system can be used for large-scale assembly |
CN110540356A (en) * | 2019-10-09 | 2019-12-06 | 四川中物技术股份有限公司 | lump making machine |
CN113526849A (en) * | 2021-07-03 | 2021-10-22 | 四川神光石英科技有限公司 | Positioning device for deposition foundation rod of vertical weight making machine |
-
2010
- 2010-04-01 CN CN201020150326XU patent/CN201729763U/en not_active Expired - Fee Related
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105648411A (en) * | 2014-11-12 | 2016-06-08 | 中国科学院沈阳科学仪器股份有限公司 | Arc scanning mechanism used for glass coating |
CN104532358A (en) * | 2014-12-24 | 2015-04-22 | 上海汉虹精密机械有限公司 | Rotary lifting mechanism for quartz crystal ingot furnace |
CN105174696A (en) * | 2015-08-11 | 2015-12-23 | 中国建筑材料科学研究总院 | Quartz glass roller making machine |
CN105174696B (en) * | 2015-08-11 | 2018-12-25 | 中国建筑材料科学研究总院 | Quartz glass system cuts or polish jade with an emery wheel machine |
CN108772496A (en) * | 2018-07-09 | 2018-11-09 | 河南宏源车轮股份有限公司 | A kind of lifting feeding device |
CN108772496B (en) * | 2018-07-09 | 2024-01-26 | 宏源精工车轮股份有限公司 | Lifting feeding device |
CN109955049A (en) * | 2019-03-20 | 2019-07-02 | 燕山大学 | A kind of vertical posture adjusting system can be used for large-scale assembly |
CN110540356A (en) * | 2019-10-09 | 2019-12-06 | 四川中物技术股份有限公司 | lump making machine |
CN110540356B (en) * | 2019-10-09 | 2024-02-13 | 四川中物技术股份有限公司 | Lump making machine |
CN113526849A (en) * | 2021-07-03 | 2021-10-22 | 四川神光石英科技有限公司 | Positioning device for deposition foundation rod of vertical weight making machine |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110202 Termination date: 20150401 |
|
EXPY | Termination of patent right or utility model |