CN201713609U - Single crystal furnace or multicrystal furnace circulating water pipeline device - Google Patents
Single crystal furnace or multicrystal furnace circulating water pipeline device Download PDFInfo
- Publication number
- CN201713609U CN201713609U CN2010202318285U CN201020231828U CN201713609U CN 201713609 U CN201713609 U CN 201713609U CN 2010202318285 U CN2010202318285 U CN 2010202318285U CN 201020231828 U CN201020231828 U CN 201020231828U CN 201713609 U CN201713609 U CN 201713609U
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- furnace
- single crystal
- water
- communicated
- multicrystal
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Abstract
The utility model discloses a single crystal furnace or multicrystal furnace circulating water pipeline device comprising a main pipeline communicated to a single crystal furnace or a multicrystal furnace, and a plurality of water pumps, wherein a water inlet pipeline of each water pump is communicated to the single crystal furnace or multicrystal furnace, and water outlet pipelines thereof are communicated with the main pipeline from above respectively. The device has simple structure, is easy for installation and routine attention, greatly saves water source, solves the problem of insufficient water pressure, and greatly improves the production efficiency of single crystal silicon and polycrystalline silicon.
Description
Technical field
The utility model relates to the semiconductor production field, is specially a kind of single crystal growing furnace, polycrystalline furnace circulating pipe duct device.
Background technology
Semi-conductor need be used silicon single crystal, polysilicon, so single crystal growing furnace, polycrystalline furnace are the heating units that arrives commonly used in the semiconductor production.In actual production, need water flowing in single crystal growing furnace, polycrystalline furnace, to cool off.And often need to use a large amount of water in producing, and can run into the not enough problem of hydraulic pressure, restricted the output of silicon single crystal, polysilicon greatly, production efficiency is greatly reduced, also caused the waste of water resources simultaneously.
The utility model content
The purpose of this utility model provides a kind of single crystal growing furnace, polycrystalline furnace circulating pipe duct device, and the hydraulic pressure that runs into during with solution silicon single crystal, production of polysilicon is not enough, causes the problem of water resource waste.
In order to achieve the above object, the technical scheme that the utility model adopted is:
Single crystal growing furnace, polycrystalline furnace circulating pipe duct device, include the straight main pipe line that is communicated to single crystal growing furnace or polycrystalline furnace, it is characterized in that: also comprise a plurality of water pumps, on the entery and delivery port of each water pump respectively correspondence the water-in and water-out pipeline is installed, described inlet channel is communicated to described single crystal growing furnace or polycrystalline furnace respectively, described outlet conduit is communicated with main pipe line from the main pipe line top respectively, the identical angle of a plurality of outlet conduits main pipe line inclination parallel to each other and all described relatively.
The utility model is simple in structure, is easy to install and routine maintenance, and the round-robin pipeline makes the water in single crystal growing furnace, the polycrystalline furnace can recycle, has saved water resources greatly.By the outlet conduit of installing in water pump and the water pump, and the outlet conduit certain angle that tilts is communicated with main pipe line from the top of main pipe line, can impose on the certain pressure of ducted water like this, solved the not enough problem of hydraulic pressure, improve the production efficiency of silicon single crystal, polysilicon greatly.
Description of drawings
Fig. 1 is the utility model structural representation.
Embodiment
As shown in Figure 1.Single crystal growing furnace, polycrystalline furnace circulating pipe duct device, include the straight main pipe line that is communicated to single crystal growing furnace or polycrystalline furnace 1, also comprise a plurality of water pumps, on the entery and delivery port of each water pump 2 respectively correspondence water-in and water-out pipeline 3,4 is installed, inlet channel 3 is communicated to single crystal growing furnace or polycrystalline furnace respectively, outlet conduit 4 is communicated with main pipe line 1 from main pipe line 1 top respectively, a plurality of outlet conduit 4 parallel to each other and identical angles of all relative main pipe line 1 inclination.
Claims (1)
1. single crystal growing furnace, polycrystalline furnace circulating pipe duct device, include the straight main pipe line that is communicated to single crystal growing furnace or polycrystalline furnace, it is characterized in that: also comprise a plurality of water pumps, on the entery and delivery port of each water pump respectively correspondence the water-in and water-out pipeline is installed, described inlet channel is communicated to described single crystal growing furnace or polycrystalline furnace respectively, described outlet conduit is communicated with main pipe line from the main pipe line top respectively, the identical angle of a plurality of outlet conduits main pipe line inclination parallel to each other and all described relatively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202318285U CN201713609U (en) | 2010-06-17 | 2010-06-17 | Single crystal furnace or multicrystal furnace circulating water pipeline device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202318285U CN201713609U (en) | 2010-06-17 | 2010-06-17 | Single crystal furnace or multicrystal furnace circulating water pipeline device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201713609U true CN201713609U (en) | 2011-01-19 |
Family
ID=43459609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010202318285U Expired - Fee Related CN201713609U (en) | 2010-06-17 | 2010-06-17 | Single crystal furnace or multicrystal furnace circulating water pipeline device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201713609U (en) |
-
2010
- 2010-06-17 CN CN2010202318285U patent/CN201713609U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110119 Termination date: 20130617 |