CN201699603U - High frequency power supply for monocrystalline silicon furnace - Google Patents

High frequency power supply for monocrystalline silicon furnace Download PDF

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Publication number
CN201699603U
CN201699603U CN2010202252860U CN201020225286U CN201699603U CN 201699603 U CN201699603 U CN 201699603U CN 2010202252860 U CN2010202252860 U CN 2010202252860U CN 201020225286 U CN201020225286 U CN 201020225286U CN 201699603 U CN201699603 U CN 201699603U
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Prior art keywords
high frequency
power
power model
model
input
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Expired - Fee Related
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CN2010202252860U
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Chinese (zh)
Inventor
石新春
郑庆红
张小龙
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BAODING SIFANGSANYI ELECTRIC CO., LTD.
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BAODING SANYI POWER ELECTRONIC Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02BCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B70/00Technologies for an efficient end-user side electric power management and consumption
    • Y02B70/10Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02BCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B70/00Technologies for an efficient end-user side electric power management and consumption
    • Y02B70/30Systems integrating technologies related to power network operation and communication or information technologies for improving the carbon footprint of the management of residential or tertiary loads, i.e. smart grids as climate change mitigation technology in the buildings sector, including also the last stages of power distribution and the control, monitoring or operating management systems at local level
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y04INFORMATION OR COMMUNICATION TECHNOLOGIES HAVING AN IMPACT ON OTHER TECHNOLOGY AREAS
    • Y04SSYSTEMS INTEGRATING TECHNOLOGIES RELATED TO POWER NETWORK OPERATION, COMMUNICATION OR INFORMATION TECHNOLOGIES FOR IMPROVING THE ELECTRICAL POWER GENERATION, TRANSMISSION, DISTRIBUTION, MANAGEMENT OR USAGE, i.e. SMART GRIDS
    • Y04S20/00Management or operation of end-user stationary applications or the last stages of power distribution; Controlling, monitoring or operating thereof
    • Y04S20/20End-user application control systems

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Abstract

The utility model discloses a high frequency power supply for a monocrystalline silicon furnace, which comprises a main control circuit, an input reactor, a three-phase rectifier bridge, a power module and a filter loop, wherein the power module comprises an RC filter circuit, a phase shift full-bridge ZVS-PWM converter, a high-frequency step-down transformer and a fast diode rectifier unit which are sequentially connected. The utility model has small volume, light weight, low energy consumption and high reliability, is used for producing monocrystalline silicon, and can greatly reduce cost.

Description

The high frequency electric source that is used for monocrystaline silicon stove
Technical field
The utility model belongs to a kind of power module, particularly a kind of power module that is used for monocrystaline silicon stove.
Background technology
Fast development along with photovoltaic industry, demand to monocrystalline silicon also increases thereupon, the influence of World Economics overall situation in addition, the production cost that how to reduce monocrystalline silicon then becomes problem demanding prompt solution, yet the power supply that its main energy consumption equipment then is a monocrystaline silicon stove in the production process of monocrystalline silicon, therefore how to reduce the energy consumption of power supply, become energy-conservation key.
At present, the power supply that is used for monocrystaline silicon stove mainly contains two kinds of 6 pulse wave rectifier power supplys and 12 pulse wave doube bridge rectifier power sources.Figure 4 shows that the circuit diagram of 6 pulse wave rectifier power supplys, mainly adopt three-phase and five-pole dry rectifier transformer to carry out rectification, primary side adopts thyristor voltage regulation, secondary side to adopt diode rectification; The loss of rectifier transformer secondary side diode is bigger during its work, and the ripple coefficient of output waveform is big, as shown in Figure 5; Because monocrystaline silicon stove is in that to change time and power difference that material and isometrical state consumed bigger, thus the rectifier transformer most of the time only move with 70 percent capacity, power consumption is bigger, utilance is lower.Figure 6 shows that the circuit diagram of 12 pulse wave doube bridge rectifier power sources, the main rectifier transformer that adopts carries out rectification, and rectifier transformer adopts double winding output, its secondary side adopts two fully controlled bridge rectifications, because output current ripple is bigger, must increase interphase reactor the double winding output current is adjusted, adjusted output waveform as shown in Figure 7; Though the output waveform of 12 pulse wave doube bridge rectifier power sources makes moderate progress than the output waveform harmonic content of 6 pulse wave rectifier power supplys, need to increase compensation arrangement.And these two kinds of traditional power supplys have all adopted rectifier transformer, and its volume is bigger, and weight is also quite heavy, between 1300~2000Kg, process this kind rectifier transformer and need consume a large amount of copper materials, steel greatly; And rectifier transformer mostly is water-cooled and air-cooled, also needs to consume outside resources, not only consume bigger, also inconvenient during installation, be unfavorable for producing in batches.
The theoretical analysis and practical experience show that the volume weight of electric equipment products and the square root of its frequency of supply are inversely proportional to, when power when power frequency 50Hz brings up to 20kHz, 5 percent to 10 the when volume and weight of power consumption equipment will be reduced to the power frequency design.Therefore the production that power supply how to seek a kind of high frequency is used for monocrystalline silicon then becomes the direction of people's research.
The utility model content
It is less that the technical problem that the utility model solves provides a kind of volume, and weight is lighter, and the high frequency electric source that energy consumption is less, reliability is higher.
For solving the problems of the technologies described above, technical solution adopted in the utility model is:
A kind of high frequency electric source that is used for monocrystaline silicon stove comprises governor circuit, input reactance device, three-phase commutation bridge, power model and filter circuit, and governor circuit wherein is used for controlling in real time the operating state of each module; The input reactance device is connected with the three-phase input ac power, is used to reduce system harmonics; Three-phase commutation bridge, its input is connected with the output that exchanges inlet wire input reactance device, and the AC power rectification that is used for input is a DC power supply, and the direct current signal after the rectification is exported to power model; Power model, with direct current signal through the high-frequency inverter inversion be high frequency ac signal, then after step-down and rectification, export to filter circuit; Filter circuit is used for the direct current signal of power model output being carried out filtering, output then.
Improvement of the present utility model is: described power model comprises RC filter circuit, phase-shifting full-bridge ZVS-PWM converter, high frequency voltage descending transformer and the rectification unit that connects successively.Described rectification unit is the fast diode rectification unit.Wherein phase-shifting full-bridge ZVS-PWM converter is a high frequency ac signal with the direct current signal inversion of input, the high frequency voltage descending transformer is used for the high-frequency and high-voltage AC signal is depressurized in the withstand voltage scope of fast diode rectification unit, and it is direct current signal that fast diode is used for the rectification of high frequency low voltage AC signal.
The improvement of described power model is: described power model is at least two.
Owing to adopted above technical scheme, the obtained technological progress of the utility model is:
The smoothing reactor that input of the present utility model adopts has reduced the harmonic content of system effectively, helps the fail safe and the stability of power work.The phase-shifting full-bridge ZVS-PWM converter that adopts is soft switch control technology, can be in conducting under the zero voltage condition or shutoff, under the zero current condition, turn-off or conducting, compare its loss with hard switching less, greatly reduce the power loss of switching tube, reduced the noise pollution and the electromagnetic interference of power supply; Adopt this soft switch technique voltage change ratio and current changing rate all greatly to reduce, can eliminate corresponding electromagnetic interference and radio frequency interference, when having improved the reliability of converter and conversion efficiency, reduced the volume and weight of converter, thereby the high frequency electric source that has guaranteed many covers power model composition neither interacts when working, and also can not produce other control appliances and disturb.The IGBT inverter operating frequency that is provided with in the phase-shifting full-bridge ZVS-PWM converter is about 20kHz, the input of IGBT inverter has adopted the bus lamination techniques, not only effectively utilized the space, and can guarantee that the IGBT incoming line has higher input impedance and lower conduction voltage drop, reduce the infringement of due to voltage spikes, prolong the useful life of I GBT, reduce system noise and electromagnetic interference IGBT, the convenient installation and on-site maintenance increased the reliability of system.High frequency voltage descending transformer in the power model, volume is less, weight is lighter, have only about 15kg, and this transformer adopting iron based nano crystal iron core, have high saturated magnetic induction, high permeability, low-coercivity, low-loss and good advantages such as temperature stability, therefore make high frequency transformer possess characteristics such as volume is little, high efficiency, low excitatory power.AC signal in the power model after the step-down of high frequency voltage descending transformer is when rectification unit is exported, and the fast diode of employing has that resume speed is fast, tube voltage drop is low and small loss and other features.Power model is set to more than two covers, each independently power model be in the parallel operation state, adopt flow equalize technology, the common load sharing electric current of all modules, even wherein certain module breaks down, other modules are the mean allocation load current again, therefore the capacity of equipment and the requirement of big electric current output have not only been improved, and just by increasing the redundant power module that power is very little with respect to whole system, just greatly improve the stability of a system, fully guaranteed the continuous operation of equipment.
In sum, the utlity model has following advantage by what above-mentioned technical characterictic constituted:
1) volume is little, and is in light weight;
2) reliability height: the power model of high frequency electric source adopts N+1 Redundancy Design theory, and a usefulness N is equipped with, and assurance equipment can move continuously;
3) power factor height: power factor is not less than 0.98, reduces line loss, improves the utilance for distribution transformer;
4) loss is low, efficient is high: conversion efficiency can reach 92%, meets current low-carbon (LC) social desirability;
5) power output is big: maximum VD 60V, and electric current 3000A, power can arrive 180kW;
6) ripple coefficient is low: ripple coefficient≤0.2%;
7) control precision height can prolong load useful life; And the waveform of output is the smooth direct current ripple, has guaranteed the stability of power work.
Description of drawings
Fig. 1 is a structured flowchart of the present utility model;
Fig. 2 is the structured flowchart of the utility model power model;
Fig. 3 is an output waveform of the present utility model;
Fig. 4 is the schematic diagram of 6 pulse wave rectifier power supplys;
Fig. 5 is the output waveform of 6 pulse wave rectifier power supplys;
Fig. 6 is 12 pulse wave doube bridge rectifier power source schematic diagrams;
Fig. 7 is the output waveform of 12 pulse wave doube bridge rectifier power sources.
Wherein: AC. AC power, DC. direct current signal, SCR. thyristor voltage regulation unit, D. diode rectification unit, T. transformer.
Embodiment
Below in conjunction with specific embodiment the utility model is described in more detail.
Fig. 1 is a kind of high frequency electric source that is used for monocrystaline silicon stove, comprise governor circuit, input reactance device, three-phase commutation bridge, power model and filter circuit, wherein power model comprises RC filter circuit, phase-shifting full-bridge ZVS-PWM converter, high frequency voltage descending transformer and the fast diode rectification unit that connects successively as described in Figure 2.Power model is three covers in the present embodiment.
Electrical connection of the present utility model is: input reactance device, three-phase commutation bridge, power model and filter circuit are electrically connected successively; Governor circuit is electrically connected with input reactance device, three-phase commutation bridge, power model respectively, controls the operating state of each module in real time; The current signal of filter circuit feeds back to governor circuit, so that governor circuit is made work order according to the current signal that detects.
Operation principle of the present utility model is: AC power AC is input to the input reactance device, then through three-phase commutation bridge, direct current signal after the rectification is input in the power model, after this moment, signal carried out filtering through the RC filter circuit in the power model, through the inversion of phase-shifting full-bridge ZVS-PWM converter is high frequency ac signal, the high frequency low voltage AC signal of high frequency ac signal in the step-down of high frequency voltage descending transformer is the withstand voltage scope of fast diode, the high frequency low voltage AC signal is carried out rectification through the fast diode rectification unit again, exports direct current signal then; The direct current signal of this moment passes through the direct current ripple of filtering loop filter output smoothing again, as shown in Figure 3.

Claims (4)

1. a high frequency electric source that is used for monocrystaline silicon stove comprises governor circuit, three-phase commutation bridge and filter circuit, it is characterized in that: also comprise input reactance device and power model, wherein
Governor circuit is used for controlling in real time the operating state of each module;
The input reactance device is connected with three-phase input power supply, is used to reduce system harmonics;
Three-phase commutation bridge, its input is connected with the output of input reactance device, and the AC power rectification that is used for input is a DC power supply, and the direct current signal after the rectification is exported to power model;
Power model, with direct current signal through the high-frequency inverter inversion be high frequency ac signal, then after step-down and rectification, export to filter circuit;
Filter circuit is used for the direct current signal of power model output is carried out exporting after the filtering.
2. the high frequency electric source that is used for monocrystaline silicon stove according to claim 1 is characterized in that: described power model comprises RC filter circuit, phase-shifting full-bridge ZVS-PWM converter, high frequency voltage descending transformer and the rectification unit that connects successively.
3. the high frequency electric source that is used for monocrystaline silicon stove according to claim 2 is characterized in that: described rectification unit is the fast diode rectification unit.
4. according to each described high frequency electric source that is used for monocrystaline silicon stove of claim 1 to 3, it is characterized in that: described power model is at least two.
CN2010202252860U 2010-06-13 2010-06-13 High frequency power supply for monocrystalline silicon furnace Expired - Fee Related CN201699603U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108347184A (en) * 2018-01-30 2018-07-31 安徽省金屹电源科技有限公司 A kind of pulverized coal boiler ignition plasma cabinet power source special
CN110112936A (en) * 2019-05-20 2019-08-09 哈尔滨理工大学 A kind of voltage levels rectifier
CN110444371A (en) * 2019-07-17 2019-11-12 孙崇山 Wire current contrary distribution core type smoothing reactor
CN115250074A (en) * 2022-09-22 2022-10-28 四川大学 Electrolytic hydrogen production rectifier with harmonic and ripple compensation function and control method
CN117578893A (en) * 2024-01-16 2024-02-20 兰州交通大学 Parallel type multi-pulse rectifier based on three-stage PET

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108347184A (en) * 2018-01-30 2018-07-31 安徽省金屹电源科技有限公司 A kind of pulverized coal boiler ignition plasma cabinet power source special
CN110112936A (en) * 2019-05-20 2019-08-09 哈尔滨理工大学 A kind of voltage levels rectifier
CN110444371A (en) * 2019-07-17 2019-11-12 孙崇山 Wire current contrary distribution core type smoothing reactor
CN115250074A (en) * 2022-09-22 2022-10-28 四川大学 Electrolytic hydrogen production rectifier with harmonic and ripple compensation function and control method
CN117578893A (en) * 2024-01-16 2024-02-20 兰州交通大学 Parallel type multi-pulse rectifier based on three-stage PET

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C56 Change in the name or address of the patentee

Owner name: BAODING SIFANG SANYI ELECTRIC CO., LTD.

Free format text: FORMER NAME: BAODING SANYI POWER ELECTRONICAL CO., LTD.

CP01 Change in the name or title of a patent holder

Address after: 071051 No. 1968 Xiangyang North Street, Hebei, Baoding

Patentee after: BAODING SIFANGSANYI ELECTRIC CO., LTD.

Address before: 071051 No. 1968 Xiangyang North Street, Hebei, Baoding

Patentee before: Baoding Sanyi Power Electronic Co., Ltd.

Address after: 071051 No. 1968 Xiangyang North Street, Hebei, Baoding

Patentee after: BAODING SIFANGSANYI ELECTRIC CO., LTD.

Address before: 071051 No. 1968 Xiangyang North Street, Hebei, Baoding

Patentee before: Baoding Sanyi Power Electronic Co., Ltd.

CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110105

Termination date: 20190613

CF01 Termination of patent right due to non-payment of annual fee