CN201681798U - Cleaning equipment - Google Patents
Cleaning equipment Download PDFInfo
- Publication number
- CN201681798U CN201681798U CN201020180741XU CN201020180741U CN201681798U CN 201681798 U CN201681798 U CN 201681798U CN 201020180741X U CN201020180741X U CN 201020180741XU CN 201020180741 U CN201020180741 U CN 201020180741U CN 201681798 U CN201681798 U CN 201681798U
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- CN
- China
- Prior art keywords
- cleaning equipment
- side cabinet
- gas
- plenum system
- pipeline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning In General (AREA)
Abstract
The utility model discloses cleaning equipment which comprises a chemical reaction tank and side cabinets arranged on the two sides of the reaction tank. Pipeline assemblies are arranged on the side cabinets. Each pipeline assembly comprises a pipeline and a pipe fitting. A gas supply system is arranged on each side cabinet and comprises a gas inlet and a gas outlet, wherein the gas inlet is arranged below the side cabinet and the gas outlet is arranged above the side cabinet. Since the gas supply system is arranged on the side cabinet of the cleaning equipment to supply inert gas or nitrogen into the side cabinet, acid mist entering the side cabinet is hard to react with the nitrogen, the acid mist is prevented from drifting to the surface of metal parts, the metal parts in the side cabinet are prevented from being corroded, the service life of the pipelines is arranged, the service life of the cleaning equipment is correspondingly prolonged, and the stability of a driving device connected into the acid cleaning equipment through the pipe fitting is improved.
Description
Technical field
The utility model relates to a kind of device, specifically, relates to a kind of cleaning equipment that semiconductor is made that is applied to.
Background technology
Wafer is in the manufacture process of complexity, and in order to improve the good chip of process rate or obtained performance, pickling need be carried out to it in some worker station, after finishing in the exposure etching, carry out next step first being processed, crystal column surface need be carried out pickling, in order to remove the pollutant on surface.
See also Fig. 1, Fig. 1 is the cross section structure schematic diagram of existing cleaning equipment, this pickler comprises chemical reaction groove 1, be provided with side cabinet 2 in chemical reaction groove 1 both sides, described side cabinet 2 is provided with the pipeline 30 of connection dry air (CDA:clean dry air) etc., and these pipelines are connected to interior drive unit of pickler such as cylinder etc. by connector (pipe fitting) 31.In actual production process, chemical liquid in the chemical reaction groove 1 is when cleaning wafer, part evaporates, spread in the chemical reaction groove 1, and enter into the described side cabinet 2 in both sides, corrode metal parts such as connector 31 in the described side cabinet 2, cause the gas leakage in the pipeline 30, thereby influenced the operate as normal of pickler.
The utility model content
Technical problem to be solved in the utility model provides a kind of cleaning equipment, prevents that the chemical liquid that volatilizees from contacting with metal parts in the side cabinet.
For solving above technical problem, a kind of cleaning equipment that the utility model provides, comprise chemical reaction groove and at the side cabinet of chemical reaction groove both sides, described side includes the pipeline assembly cashier's office in a shop, described pipeline assembly comprises pipeline and connector, and described side is provided with plenum system cashier's office in a shop, and described plenum system comprises air inlet and gas outlet, described air inlet is arranged on the below of described side cabinet, and described gas outlet is arranged on the top of described side cabinet.
Further, the described plenum system gas of flowing through is inert gas.
Further, the described plenum system gas of flowing through is nitrogen.
Further, described plenum system also is provided with gas pressure detection unit, and described gas pressure detection unit is positioned on the sidewall of described side cabinet.
Further, described cleaning equipment is a pickler.
Further, the air pressure of described plenum system is malleation.
Compared with prior art, the cleaning equipment that the utility model proposes, by in the side cabinet of cleaning device, being provided with plenum system, in described side cabinet, send into inert gas or nitrogen, acid mist in the approaching side cabinet is difficult to react with nitrogen, prevent that acid mist from drifting to metal part surface, thereby prevent that the metal parts in the side cabinet from being corroded, prolonged the useful life of pipeline, in the corresponding useful life that strengthens cleaning equipment, improved the stability that is connected to the drive unit in the pickler by connector (pipe fitting).
Description of drawings
Fig. 1 is the cross section structure schematic diagram of existing cleaning equipment;
Fig. 2 is the cleaning equipment cross section structure schematic diagram of the utility model embodiment.
Embodiment
For technical characterictic of the present utility model is become apparent,, the utility model is further described below in conjunction with accompanying drawing and embodiment.
See also Fig. 2, Fig. 2 is the cleaning equipment cross section structure schematic diagram of the utility model embodiment.The cleaning equipment of present embodiment comprises chemical reaction groove 1 and at the side cabinet 2 of chemical reaction groove both sides, described side cabinet 2 is provided with pipeline assembly 3, described pipeline assembly comprises pipeline 30 and connector 31, on described side cabinet 2, be provided with plenum system, described plenum system comprises air inlet 40 and gas outlet 41, described air inlet 40 is arranged on the below of described side cabinet 2, and described gas outlet 41 is arranged on the top of described side cabinet 2.In order better to monitor this plenum system, described plenum system also is provided with gas pressure detection unit 42, and described gas pressure detection unit 42 is fixed on the sidewall of described side cabinet 2.
Described cleaning equipment is a pickler, promptly in chemical reaction groove 1, fill the required chemical liquid of cleaning wafer, such as the HF/HNO3 mixed liquor, during cleaning, wafer is put into described chemical reaction groove 1, because in cleaning process, having partially mixed liquid evaporates, form acid mist and spread in chemical reaction groove 1, even enter in the described side cabinet 2 in both sides, corrode the metal parts in the described side cabinet 2 in order to prevent acid mist, send into inert gas by the air inlet 40 of described plenum system, such as helium, neon, argon, krypton, xenon, radons etc. all can, perhaps send into nitrogen, the relatively abundance because nitrogen is originated in factory usually is in the present embodiment, preferably use nitrogen, nitrogen is full of in the described side cabinet 2.
The air pressure of described plenum system is malleation, and by the gas pressure detection unit 42 real-time pressure that detect nitrogen in the described side cabinet 2, pressure in the assurance side cabinet 2 is greater than described chemical reaction groove 1, acid mist in the approaching side cabinet 2 is difficult to react with nitrogen, make acid mist be difficult to drift to metal part surface, prevent that the metal parts in side cabinet 2 from being corroded, thereby prolonged the useful life of pipeline 30, in the corresponding useful life that strengthens cleaning equipment, improved the stability that is connected to the drive unit in the pickler by connector (pipe fitting) 31.
More than show and described basic principle of the present utility model, principal character and advantage of the present utility model.The technical staff of the industry should understand; that describes in the foregoing description and the specification just illustrates principle of the present utility model; the utility model also has various changes and modifications under the prerequisite that does not break away from the utility model spirit and scope, and these changes and improvements all fall in claimed the utility model scope.
Claims (6)
1. cleaning equipment, comprise chemical reaction groove and at the side cabinet of chemical reaction groove both sides, described side is provided with the pipeline assembly cashier's office in a shop, described pipeline assembly comprises pipeline and connector, it is characterized in that: described side is provided with plenum system cashier's office in a shop, described plenum system comprises air inlet and gas outlet, and described air inlet is arranged on the below of described side cabinet, and described gas outlet is arranged on the top of described side cabinet.
2. cleaning equipment as claimed in claim 1 is characterized in that: the gas that described plenum system is flowed through is inert gas.
3. cleaning equipment as claimed in claim 1 is characterized in that: the gas that described plenum system is flowed through is nitrogen.
4. cleaning equipment as claimed in claim 1 is characterized in that: described plenum system also is provided with gas pressure detection unit, and described gas pressure detection unit is positioned on the sidewall of described side cabinet.
5. cleaning equipment as claimed in claim 1 is characterized in that: described cleaning equipment is a pickler.
6. cleaning equipment as claimed in claim 1 is characterized in that: the air pressure of described plenum system is malleation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201020180741XU CN201681798U (en) | 2010-04-29 | 2010-04-29 | Cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201020180741XU CN201681798U (en) | 2010-04-29 | 2010-04-29 | Cleaning equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201681798U true CN201681798U (en) | 2010-12-22 |
Family
ID=43346834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201020180741XU Expired - Fee Related CN201681798U (en) | 2010-04-29 | 2010-04-29 | Cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201681798U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11248125B2 (en) * | 2017-06-01 | 2022-02-15 | The Johns Hopkins University | Coating system for aluminum-magnesium alloys |
-
2010
- 2010-04-29 CN CN201020180741XU patent/CN201681798U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11248125B2 (en) * | 2017-06-01 | 2022-02-15 | The Johns Hopkins University | Coating system for aluminum-magnesium alloys |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101222 Termination date: 20190429 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |