CN201670894U - Sliding cover type polycrystalline silicon rod extractor - Google Patents

Sliding cover type polycrystalline silicon rod extractor Download PDF

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Publication number
CN201670894U
CN201670894U CN2010202028795U CN201020202879U CN201670894U CN 201670894 U CN201670894 U CN 201670894U CN 2010202028795 U CN2010202028795 U CN 2010202028795U CN 201020202879 U CN201020202879 U CN 201020202879U CN 201670894 U CN201670894 U CN 201670894U
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China
Prior art keywords
polycrystalline silicon
silicon rod
pad
protective guard
fixed
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Expired - Fee Related
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CN2010202028795U
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Chinese (zh)
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洪平
付保华
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Individual
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Individual
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Priority to CN2010202028795U priority Critical patent/CN201670894U/en
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Abstract

The utility model discloses a sliding cover type polycrystalline silicon rod extractor, which comprises a three-dimensional driving device and is characterized in that: the device further comprises a protective cover and a support plate; the two sides of the support plate are provided with a protective cover sliding rail; the two sides of the protective cover placed in the front of the support plate are sleeved with the protective cover sliding rail and the protective cover slides up and down along the support plate; the front at the bottom of the support plate is machined with a W-shaped baseboard fork; the baseboard fork can be inserted to the bottom of the n-shaped polycrystalline silicon rod to be extracted and then forks the polycrystalline silicon rod up. The three-dimensional driving device comprises a mobile base of which the bottom is provided with rollers, a fixed arm, a stretch arm, a rotating arm, an operating handle, a pneumatic motor or an electric motor and a power unit. The three-dimensional driving device can manually, pneumatically or electrically drive the support plate and the protective cover in three-dimensional motion. The utility model has the advantages of positioning exactly and quickly, safely integrally exacting the polycrystalline silicon rod, improving the working efficiency and the working quality and reducing the labor intensity.

Description

Sliding bell-type is got the polycrystalline silicon rod device
Technical field
The device of the taking-up polycrystalline silicon rod that the polycrystalline silicon rod that the utility model relates to photovoltaic and semiconductor applications uses when reduction furnace takes out especially relates to a kind of sliding bell-type and gets the polycrystalline silicon rod device.
Background technology
Polycrystalline silicon rod is formed by chemical gaseous phase depositing process, and it is the indispensable starting material of sun power and electron trade.Earthing electrode and high temperature generation reduction reaction in reduction furnace, forming diameter is tens millimeters n conformal polysilicon rods to the hundreds of millimeter.After the cover of reduction furnace hung oneself out from base plate, polycrystalline silicon rod just can take out, place from base plate, enter down production process then one.
At present, there are following three kinds to get excellent method in the prior art: 1, manually to get excellent method; 2, the power-assisted mechanical manipulator is got excellent method; 3, whole circle annular is got excellent method simultaneously.Wherein:
First kind is the method for manually getting rod, and it needs the people on the base plate of reduction furnace polycrystalline silicon rod to be broken, and takes away then.This method labor strength is big, wastes time and energy, and influences production efficiency, inconvenient operation, and the scene also is difficult to cleaning, thereby easily makes silicon be polluted the purity drop that makes silicon, reduces the rate of utilization of silicon stove, and broken silicon material makes injuries such as the workman is cut, pounds easily.
Second kind of method of getting rod for the power-assisted mechanical manipulator, because the gap between polycrystalline silicon rod and the polycrystalline silicon rod is little, machinery handgrip itself has certain thickness, the anchor clamps heaviness, so handgrip will be aimed at polycrystalline silicon rod and position very difficulty before grabbing rod, add that the power-assisted mechanical manipulator is subjected to the resistance of equilibrium air pressure when moving, be difficult to realize accurate location especially; When polycrystalline silicon rod self has slight crack, fracture, the growth thickness is inhomogeneous or during some unforeseen circumstances such as crooked, mechanical manipulator in the past just can not enter in the gap of polycrystalline silicon rod and carry out actions such as clamping, extracting, otherwise break polycrystalline silicon rod easily, the polycrystalline silicon rod that falls down after fractureing can be pounded disconnected other polycrystalline silicon rod, causes on-the-spot chaotic.
The third gets excellent method (referring to Chinese patent: 200810107025.6 and 200820137429.5) simultaneously for whole circle annular, because whole circle polycrystalline silicon rod is bulky, operational difficulty, complexity such as location, taking-up, inefficiency, after the taking-up, next procedure is also difficult; In addition, the assistance of need driving a vehicle of this method, when the polycrystalline silicon rod of a plurality of stoves need take out simultaneously, the waiting time was longer, and it is not enough to drive a vehicle.
Summary of the invention
The purpose of this utility model provide a kind of accurate positioning quick, can safe and complete ground polycrystalline silicon rod be taken out, increases work efficiency and work quality, the sliding bell-type that alleviates labor strength are got the polycrystalline silicon rod device.
The purpose of this utility model is achieved in that a kind of sliding bell-type gets the polycrystalline silicon rod device; comprise three-dimensional drive unit; feature is also to comprise protective guard and back up pad; dual-side in back up pad is equipped with the protective guard slide rail; the both sides that are positioned over back up pad forward protective guard are sleeved on the protective guard slide rail and make protective guard to slide up and down along back up pad; be processed with the base plate fork of W shape in the front portion, bottom of back up pad, the base plate fork can insert to be waited to get and be shaped as the polycrystalline silicon rod bottom of n shape and upwards fork polycrystalline silicon rod.
Three-dimensional drive unit is made up of movable pedestal, fixed arm, telescopic boom, pivoted arm, operating handle, power set and pneumatic motor or motor that the bottom is equipped with roller.Press the button on the operating handle; three-dimensional drive unit can drive protective guard and carry out up-and-down movement on back up pad; drive back up pad, base plate fork and protective guard and carry out up-and-down movement together, can also drive back up pad and protective guard moves horizontally and horizontally rotate motion together by manpower.
Because the gap between the adjacent n conformal polysilicon rod is very little; so; the utility model adopts the protective guard of sliding type that the polycrystalline silicon rod cover is got up to be protected earlier; and then with the base plate fork polycrystalline silicon rod and protective guard are forked together below; so can polycrystalline silicon rod be taken out safe and complete ground, and when polycrystalline silicon rod self has fracture, crooked, defective that thickness is uneven, also can take out polycrystalline silicon rod in the same old way.
The utlity model has following characteristics:
1, used the protective guard of sliding type, it has solved mechanical manipulator problem too big, contraposition difficulty when getting polycrystalline silicon rod, and also having solved simultaneously can fall down when polycrystalline silicon rod has fracture damages the problem of other polycrystalline silicon rod.
2, use back up pad and base plate fork, solved and be difficult to localized problem when getting polycrystalline silicon rod, shortened setting time greatly.
3, use two turning axles in portable protective guard slide rail and the three-dimensional drive unit and slide rail to carry out moving all around, needed human just can carry out pinpoint problem very energetically when having solved power-assisted mechanical arm location.
4, adopt the utility model greatly to increase work efficiency and work quality, alleviate working strength of workers, improve the comfort level of work.
Description of drawings
Fig. 1 is a structural representation of the present utility model;
Fig. 2 is the enlarged diagram of operating handle;
Fig. 3 is polycrystalline silicon rod and the isolating synoptic diagram of base plate.
Embodiment
Below in conjunction with embodiment and contrast accompanying drawing the utility model is described in further detail.
A kind of sliding bell-type is got the polycrystalline silicon rod device; form by protective guard 3, back up pad 4 and three-dimensional drive unit 7; dual-side in back up pad 4 is equipped with protective guard slide rail 6; the both sides that are positioned over back up pad 4 forward protective guards 3 are sleeved on the protective guard slide rail 6 and make protective guard 3 to slide up and down along back up pad 4; be processed with the base plate fork 5 of W shape in the front portion, bottom of back up pad 4, base plate fork 5 can insert to be waited to get and be shaped as polycrystalline silicon rod 1 bottom of n shape and upwards forks polycrystalline silicon rod 1.
Three-dimensional drive unit 7 is made up of movable pedestal 8, fixed arm 11, telescopic boom 13, pivoted arm 19, operating handle 26, power set 18 and pneumatic motor or motor 21 that the bottom is equipped with roller.On the base plate 27 of movable pedestal 8, be fixed with column 20, the right-hand member bottom that the fixed arm 11 of fixed arm slide rail 12 has been installed on both sides is fixed with the sleeve pipe 10 of lower ending opening, the top of column 20 is inserted in and is made fixed arm 11 to horizontally rotate around column 20 in the sleeve pipe 10, the both sides of the middle right-hand member of telescopic boom 13 are sleeved on the fixed arm slide rail 12 and make that telescopic boom 13 can be along carrying out horizontal slip at fixed arm 11, on telescopic boom 13 left ends, be fixed with pillar 16, on the top of pillar 16 preset pieces 17 and power set 18 are installed successively, pillar 16 the right at telescopic boom 13 left ends are processed with slide shaft circular hole 14, the upper end of slide shaft 15 is fixed on the right-hand member bottom of preset pieces 17, the lower end of slide shaft 15 is passed in the bearing 28 of cross bar 22 right-hand members of pivoted arm 19 that slide shaft circular hole 14 on the telescopic boom 13 is fixed on " L " shape, be processed with the projection 24 of two relative band pin-and-holes at the back of vertical back up pad 4 of placing, bottom at the montant 23 of pivoted arm 19 is processed with the montant circular hole, the bottom of the montant 23 of pivoted arm 19 is stuck between two relative projections 24, pin-and-hole and montant circular hole that bearing pin 25 passes projection 24 are hinged on the back of back up pad 4 with pivoted arm 19, and back up pad 4 can be rotated around bearing pin 25; Driving protective guard 3 carries out up-and-down movement on back up pad 4 pneumatic motor or motor 21 are installed at the back of back up pad 4.
Operating handle 26 is installed in the back of back up pad 4, the below of two projections 24, the button panel 31 that is connected with controller by lead or tracheae is installed on operating handle 24, on button panel 31, is provided with sliding closure rising/decline button 29, back up pad lifting/decline button 30 and several emergency buttons 32 successively.
The handle 9 that can promote movable pedestal 8 motions is installed on movable pedestal 8.
Described power set 18 is cylinder or micromachine.
Be fixed with somely to being used to generate the earthing electrode 33 of polycrystalline silicon rod 1 on the base plate 2 in reduction furnace, there is the Graphite Electrodes 34 that can be enclosed within from the top down on the earthing electrode 33 bottom of polycrystalline silicon rod 1.Earthing electrode 33 and high temperature generation reduction reaction, will form diameter on Graphite Electrodes 34 is tens millimeters n conformal polysilicon rods to the hundreds of millimeter, after then the cover of reduction furnace being hung oneself out from base plate 2, polycrystalline silicon rod can take out, place with regard to 1 from base plate 2, enters down production process then one.
Press each button on the operating handle 26; three-dimensional drive unit 7 can drive back up pad 4, base plate fork 5 and protective guard 3 and do rising or descending motion together, can drive protective guard 3 and do the rise and fall campaign along back up pad 4, can also drive back up pad 4, base plate fork 5 and protective guard 3 by manpower and horizontally rotate, moves horizontally around column 20 or slide shaft 15 respectively together.

Claims (5)

1. a sliding bell-type is got the polycrystalline silicon rod device; comprise three-dimensional drive unit (7) composition; it is characterized in that: also comprise protective guard (3) and back up pad (4); dual-side in back up pad (4) is equipped with protective guard slide rail (6); the both sides that are positioned over back up pad (4) forward protective guard (3) are sleeved on protective guard slide rail (6) and go up and make protective guard (3) to slide up and down along back up pad (4); be processed with the base plate fork (5) of W shape in the front portion, bottom of back up pad (4), base plate fork (5) can insert polycrystalline silicon rod (1) bottom of waiting to get and be shaped as n shape and upwards fork polycrystalline silicon rod (1).
2. sliding bell-type as claimed in claim 1 is got the polycrystalline silicon rod device, it is characterized in that: three-dimensional drive unit (7) is equipped with the movable pedestal (8) of roller by the bottom, fixed arm (11), telescopic boom (13), pivoted arm (19), operating handle (26), power set (18) and pneumatic motor or motor (21) are formed, on the base plate (27) of movable pedestal (8), be fixed with column (20), the right-hand member bottom that the fixed arm (11) of fixed arm slide rail (12) has been installed on both sides is fixed with the sleeve pipe (10) of lower ending opening, the top of column (20) is inserted in and is made fixed arm (11) to horizontally rotate around column (20) in the sleeve pipe (10), the both sides of the middle right-hand member of telescopic boom (13) are sleeved on the fixed arm slide rail (12) and make that telescopic boom (13) can be along carrying out horizontal slip at fixed arm (11), be fixed with pillar (16) above the left end at telescopic boom (13), preset pieces (17) and power set (18) are installed successively on the top of pillar (16), pillar (16) the right at telescopic boom (13) left end is processed with slide shaft circular hole (14), the upper end of slide shaft (15) is fixed on the right-hand member bottom of preset pieces (17), the lower end of slide shaft (15) is passed in the bearing (28) of cross bar (22) right-hand member of pivoted arm (19) that slide shaft circular hole (14) on the telescopic boom (13) is fixed on " L " shape, be processed with the projection (24) of two relative band pin-and-holes at the back of vertical back up pad (4) of placing, bottom at the montant (23) of pivoted arm (19) is processed with the montant circular hole, the bottom of the montant (23) of pivoted arm (19) is stuck between two relative projections (24), pin-and-hole and montant circular hole that bearing pin (25) passes projection (24) are hinged on the back of back up pad (4) with pivoted arm (19), and back up pad (4) can be rotated around bearing pin (25); Driving protective guard (3) carries out up-and-down movement on back up pad (4) pneumatic motor or motor (21) is installed at the back of back up pad (4).
3. sliding bell-type as claimed in claim 1 or 2 is got the polycrystalline silicon rod device, it is characterized in that: operating handle (26) is installed in the back of back up pad (4), the below of two projections (24), the button panel (31) that is connected with controller by lead or tracheae is installed on operating handle (24), on button panel (31), is provided with sliding closure rising/decline button (29), back up pad lifting/decline button (30) and several emergency buttons (32) successively.
4. sliding bell-type as claimed in claim 3 is got the polycrystalline silicon rod device, it is characterized in that: the handle (9) that can promote movable pedestal (8) motion is installed on movable pedestal (8).
5. sliding bell-type as claimed in claim 4 is got the polycrystalline silicon rod device, it is characterized in that: described power set (18) is cylinder or micromachine.
CN2010202028795U 2010-05-25 2010-05-25 Sliding cover type polycrystalline silicon rod extractor Expired - Fee Related CN201670894U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010202028795U CN201670894U (en) 2010-05-25 2010-05-25 Sliding cover type polycrystalline silicon rod extractor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010202028795U CN201670894U (en) 2010-05-25 2010-05-25 Sliding cover type polycrystalline silicon rod extractor

Publications (1)

Publication Number Publication Date
CN201670894U true CN201670894U (en) 2010-12-15

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Family Applications (1)

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CN2010202028795U Expired - Fee Related CN201670894U (en) 2010-05-25 2010-05-25 Sliding cover type polycrystalline silicon rod extractor

Country Status (1)

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CN (1) CN201670894U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012126854A1 (en) * 2011-03-18 2012-09-27 Memc Electronic Materials S.P.A. Tool for harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor
CN106124557A (en) * 2016-06-30 2016-11-16 芜湖鸣人热能设备有限公司 The resistance to heat detecting device of hot-water boiler handle
CN108098752A (en) * 2017-12-14 2018-06-01 哈尔滨博实自动化股份有限公司 Polycrystalline silicon rod automatic disassembling device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012126854A1 (en) * 2011-03-18 2012-09-27 Memc Electronic Materials S.P.A. Tool for harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor
US8906453B2 (en) 2011-03-18 2014-12-09 MEMC Electronics Materials, S.p.A. Tool for harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor
CN106124557A (en) * 2016-06-30 2016-11-16 芜湖鸣人热能设备有限公司 The resistance to heat detecting device of hot-water boiler handle
CN108098752A (en) * 2017-12-14 2018-06-01 哈尔滨博实自动化股份有限公司 Polycrystalline silicon rod automatic disassembling device

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C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20101215

Termination date: 20130525