CN201666844U - Detecting device of quartz tube in battery coating equipment - Google Patents
Detecting device of quartz tube in battery coating equipment Download PDFInfo
- Publication number
- CN201666844U CN201666844U CN2010201429897U CN201020142989U CN201666844U CN 201666844 U CN201666844 U CN 201666844U CN 2010201429897 U CN2010201429897 U CN 2010201429897U CN 201020142989 U CN201020142989 U CN 201020142989U CN 201666844 U CN201666844 U CN 201666844U
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- quartz tube
- quartz ampoule
- checked
- plug
- detected
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Abstract
The utility model discloses a detecting device of a quartz tube in battery coating equipment, which comprises a quartz tube to be detected, an upper sealing plug, a lower sealing plug, a vacuum gauge, a valve, a vacuum pump, vent pipes and a silica gel sealing ring, wherein the upper sealing plug and the lower sealing plug are plugged in two ends of the quartz tube to be detected, so that a closed cavity is formed in the quartz tube to be detected; and the vacuum gauge, the valve and the vacuum pump are connected in series by the vent pipes and then communicated with the closed cavity in the quartz tube to be detected. The detecting device can be used for detecting the pressure-resistance gas tightness of the quartz tube in the solar battery coating equipment, can correctly and reliably judge whether quality hidden trouble exists in the quartz tube to be detected, prevent normal coating production and quality from being influenced by quality defects of the quartz tube, and ensure the safety of workers and production equipment.
Description
Technical field:
The utility model relates to the solar cell filming equipment, relates in particular to the wherein pick-up unit of quartz ampoule.
Background technology:
PECVD is the abbreviation of solar battery sheet plasma chemistry deposition plating method, in the production run of solar cell, to silicon chip film-coated be the gordian technique that improves solar absorption efficient, opto-electronic conversion electricity generating principle according to silicon chip, there is reflection in irradiate light to silicon chip, the optical loss of silicon chip and recombination losses all can make the output of solar cell be lower than ideal value, it is mature technology on the present suitability for industrialized production application that silicon chip surface is carried out coating film treatment, at present, silicon chip film-coated most flat-plate type plasma chemical deposition that adopts promptly forms one deck antireflecting film by PECVD at silicon chip surface.
The chemogenic deposit plated film principle of solar cell filming equipment is: many vitreosil pipes are housed in the enclosed vacuum sedimentary origin, in every vitreosil pipe, be placed with a copper pipe, in sedimentary origin, feed silane and ammonia, make the copper pipe in the vitreosil pipe launch microwave by automatically controlled part again, under hot conditions, silane in the sedimentary origin, ammonia and silicon chip react the generation silicon nitride, and silicon nitride can slowly be deposited on the battery sheet surface, thereby realizes silicon chip film-coated.Because silicon nitride has good reflection preventing ability, therefore the extinction face at silicon chip carries out the extinction efficient that plated film can increase substantially solar cell.
Because quartz ampoule has extremely stable physics and chemical property, its expansion coefficient is minimum, can bear violent temperature variation, thereby is widely used in the solar cell filming equipment.In the solar cell filming equipment, the quality of quartz ampoule quality is most important to whole technological process, if there is defective in quartz ampoule, ambient atmos will enter sedimentary origin, can directly influence the reaction of silane, ammonia and silicon chip, directly influence the quality of the plated film of silicon chip, even the explosion caused accident of meeting, therefore, must carry out withstand voltage airtight test to the quartz ampoule in the solar cell filming equipment.At present, all manufacture of solar cells enterprises all do not have corresponding self-checking unit, bring very big hidden danger for product quality and operator's production safety.
The utility model content:
The purpose of this utility model is the pick-up unit that quartz ampoule in a kind of cell coating equipment is provided for manufacture of solar cells enterprise, it can carry out withstand voltage airtight test to the quartz ampoule in the solar cell filming equipment, can accurately search quartz ampoule and whether have hidden danger of quality, avoid guaranteeing the safety of staff and production equipment because of quartz ampoule mass defect influences normal plated film production and quality.
The technical scheme that the utility model adopted is:
The pick-up unit of quartz ampoule in the cell coating equipment described in the utility model, it is characterized in that: it comprises quartz ampoule to be checked, goes up sealing-plug, lower seal plug, vacuum meter, valve, vacuum pump, snorkel and silica gel sealing ring, last sealing-plug and lower seal plug plug are contained in the two ends of quartz ampoule to be checked, make and form airtight cavity volume in the quartz ampoule to be checked, vacuum meter, valve and vacuum pump three are communicated by snorkel serial connection airtight cavity volume back and in the quartz ampoule to be checked.
Further, the seal section at quartz ampoule to be checked and last sealing-plug and lower seal plug is provided with silica gel sealing ring.
The concrete method of inspection: open vacuum pump, make valve be in opening, because vacuum pump is constantly worked, the interior vacuum tightness of airtight cavity volume of quartz ampoule to be checked is improved constantly, when vacuum tightness reached predetermined value, the reading on the vacuum meter, valve-off and vacuum pump then observed in record, gas leakage test through certain hour, write down the reading on the vacuum meter once more, the front and back reading of vacuum meter is compared, if self-consistentency, quartz ampoule reliable in quality to be checked then is described, can normal mounting uses.On the contrary, illustrate that then there is hidden danger of quality in quartz ampoule to be checked, can not use.
Since the utility model can the simulates real blank pipe the real work pressured state detect, by airtight quartz ampoule to be checked is vacuumized, whether the vacuum tightness of observing in it through certain hour can change, judge with this whether quartz ampoule to be checked exists hidden danger of quality, avoid guaranteeing the safety of staff and production equipment because of quartz ampoule mass defect influences normal plated film production and quality.
Description of drawings:
Fig. 1 is a structural representation of the present utility model;
Fig. 2 is the connection diagram of quartz ampoule to be checked and last sealing-plug, lower seal plug.
Among the figure: 1-quartz ampoule to be checked; The last sealing-plug of 2-; 3-lower seal plug; The 4-vacuum meter; The 5-valve; The 6-vacuum pump; The 7-snorkel; The 8-silica gel sealing ring.
Embodiment:
The pick-up unit of quartz ampoule in the cell coating equipment described in the utility model, as shown in Figure 1 and Figure 2, it is made up of quartz ampoule 1 to be checked, last sealing-plug 2, lower seal plug 3, vacuum meter 4, valve 5, vacuum pump 6, snorkel 7 and silica gel sealing ring 8, last sealing-plug 2 and lower seal plug 3 are hermetic filled in the two ends that are contained in quartz ampoule 1 to be checked by silica gel sealing ring 8, make and form airtight cavity volume in the quartz ampoule to be checked 1, vacuum meter 4, valve 5 and vacuum pump 6 threes are communicated by snorkel 7 serial connection backs and quartz ampoule to be checked 1 interior airtight cavity volume.
The concrete method of inspection: open vacuum pump 6, make valve 5 be in opening, because vacuum pump 6 is constantly worked, the interior vacuum tightness of airtight cavity volume of quartz ampoule 1 to be checked is improved constantly, when vacuum tightness reached predetermined value, the reading on the vacuum meter 4 observed in record, and valve-off 5 then, through 10 fens clock times, write down the reading on the vacuum meter 4 once more, the front and back reading of vacuum meter 4 is compared, if self-consistentency, quartz ampoule 1 reliable in quality to be checked then is described, can normal mounting uses.On the contrary, illustrate that then there is hidden danger of quality in quartz ampoule 1 to be checked, can not use.
Claims (2)
1. the pick-up unit of quartz ampoule in the cell coating equipment, it is characterized in that: it comprises quartz ampoule to be checked (1), goes up sealing-plug (2), lower seal plug (3), vacuum meter (4), valve (5), vacuum pump (6), snorkel (7) and silica gel sealing ring (8), last sealing-plug (2) and lower seal plug (3) plug are contained in the two ends of quartz ampoule to be checked (1), make and form airtight cavity volume in the quartz ampoule to be checked (1), vacuum meter (4), valve (5) and vacuum pump (6) three are communicated by the interior airtight cavity volume of snorkel (7) serial connection back and quartz ampoule to be checked (1).
2. according to the pick-up unit of the described battery plated film of claim 1 with quartz ampoule, it is characterized in that: the seal section at quartz ampoule to be checked (1) and last sealing-plug (2) and lower seal plug (3) is provided with silica gel sealing ring (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201429897U CN201666844U (en) | 2010-03-19 | 2010-03-19 | Detecting device of quartz tube in battery coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201429897U CN201666844U (en) | 2010-03-19 | 2010-03-19 | Detecting device of quartz tube in battery coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201666844U true CN201666844U (en) | 2010-12-08 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201429897U Expired - Fee Related CN201666844U (en) | 2010-03-19 | 2010-03-19 | Detecting device of quartz tube in battery coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201666844U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101876580A (en) * | 2010-03-19 | 2010-11-03 | 常州亿晶光电科技有限公司 | Detection device of quartz tube in cell coating equipment and application method thereof |
| CN104075859A (en) * | 2014-06-26 | 2014-10-01 | 深圳市瑞必达科技有限公司 | Switching mode power supply waterproof tester and testing method of switching mode power supply waterproof tester |
-
2010
- 2010-03-19 CN CN2010201429897U patent/CN201666844U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101876580A (en) * | 2010-03-19 | 2010-11-03 | 常州亿晶光电科技有限公司 | Detection device of quartz tube in cell coating equipment and application method thereof |
| CN104075859A (en) * | 2014-06-26 | 2014-10-01 | 深圳市瑞必达科技有限公司 | Switching mode power supply waterproof tester and testing method of switching mode power supply waterproof tester |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101208 Termination date: 20140319 |