CN201653429U - MEMS gyro test system with double-shaft turntable - Google Patents
MEMS gyro test system with double-shaft turntable Download PDFInfo
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- CN201653429U CN201653429U CN2010201811491U CN201020181149U CN201653429U CN 201653429 U CN201653429 U CN 201653429U CN 2010201811491 U CN2010201811491 U CN 2010201811491U CN 201020181149 U CN201020181149 U CN 201020181149U CN 201653429 U CN201653429 U CN 201653429U
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Abstract
The utility model discloses an MEMS gyro test system with a double-shaft turntable. The double-shaft turntable with a high-low temperature case is combined with an MEMS gyro sensor test unit to form the full-automatic comprehensive MEMS gyro test system, the temperature case provides environmental temperature conditions for MEMS gyro test, the temperature range is controlled between minus 55DEG C and 120DEG C, thus ensuring that test items are more, so that an MEMS gyro can be calibrated under each temperature in order to increase the accuracy of calibration, and thereby the utility model meets the requirements of MEMS gyro test on high velocity, test temperature control and the like, and increases the testing efficiency.
Description
Technical field
The utility model relates to a kind of MEMS gyro test system of double axle table, can be applicable to the MEMS gyrosensor full-automatic testing in inertia device testing apparatus field.
Background technology
The test of MEMS gyrosensor generally includes constant multiplier, constant multiplier temperature control, constant multiplier, non-linear, zero inclined to one side, zero stable partially, the zero projects such as renaturation, zero bias temperature sensitivity, resolution, threshold value, random walk coefficient, input shaft misalignment that lay particular stress on.MEMS gyro research institute or application units are to the test of MEMS device at present, the condition restriction of tested equipment, adopt the unit and have the independence characteristics as test rate turntable, number, cause test process and method still to rest on the test aspect of individual parameters, the automaticity of its test and efficient are also lower.On the other hand, be subjected to test at present to use the restriction of rate table scope (it is following to be generally 1000 °/s), MEMS gyro test specification for wide range generally also can only be confined to carry out in the intrinsic speed range of equipment, can not effectively demarcate for the measurement range greater than testing apparatus.At present the generally acknowledged way of industry is, carries out effective rate test in the device-speed scope, then test result is done suitable extension, weighs extraneous index performance test, thereby causes the spreadability deficiency of test specification.
The utility model content
Technology of the present utility model is dealt with problems and is: the defective that overcomes prior art, a kind of MEMS gyro test system of double axle table is provided, two-forty, the problem such as test temperature requirements etc. of the requirement of MEMS gyro test have been solved, improve testing efficiency, can be used for the batch testing of MEMS gyrosensor.
Technical solution of the present utility model is: a kind of MEMS gyro integrated test system of double axle table comprises double axle table, high-low temperature incubator, MEMS gyro, incubator controller, compressor, rotary seal changeover valve, photoelectric encoder, MEMS gyro test unit and observing and controlling computing machine;
The double axle table stage body adopts U-T type tower structure, wherein sloping shaft axle head one side is installed the rotary seal changeover valve, opposite side is the signal conducting slip ring, the work top upper edge axis symmetry of double axle table azimuth axis is installed the MEMS gyro, high-low temperature incubator is installed on the framework of double axle table sloping shaft and with the sloping shaft framework and rotates, the work top of double axle table azimuth axis is included in the high-low temperature incubator, be connected by the rotary seal changeover valve between incubator casing and the compressor, refrigerant is injected in the casing of high-low temperature chamber continuously when axle rotated in control computer was used to guarantee by incubator controller control compressor, the temperature controlling range that makes high-low temperature chamber is-55 ℃～+ 120 ℃; Photoelectric encoder is installed on the double axle table azimuth axis as the Rate Feedback element, the photoelectric encoder output pulse signal is used for relatively back output motor control signal of the rotary speed instruction signal that sends with turntable controller, motor control signal control driven by motor double axle table rotates, MEMS gyro test unit is gathered the measuring-signal of MEMS gyro output, by control computer the data after gathering is handled obtaining test result then.
The utility model advantage compared with prior art is: the utility model combines turntable, incubator, MEMS gyro test unit, a convenience, test macro have efficiently been made up, incubator provides the temperature environment condition for the MEMS gyro test, temperature controlling range is-55 ℃～+ 120 ℃, guarantee that test event is more complete, so that under each temperature, the MEMS gyro is carried out from demarcating, increase the accuracy of its demarcation, solve two-forty, the problem such as test temperature requirements etc. of the requirement of MEMS gyro test, improved testing efficiency.
Description of drawings
Fig. 1 is that system of the present utility model forms synoptic diagram;
Fig. 2 is the band incubator double axle table structural drawing that the utility model adopts;
Fig. 3 is the function composition diagram of the utility model testing software;
Fig. 4 is the workflow diagram of the utility model testing software.
Embodiment
As shown in Figure 1, 2, a kind of MEMS gyro integrated test system of double axle table comprises double axle table, high-low temperature incubator 1, MEMS gyro 4, incubator controller, compressor, rotary seal changeover valve 6, photoelectric encoder 7, MEMS gyro test unit and observing and controlling computing machine; Double axle table has two axles, wherein outer shaft is called sloping shaft, interior axle is called azimuth axis, the double axle table stage body adopts U-T type tower structure, axle 2 axle heads one side is installed rotary seal changeover valve 6 in its medium dip, opposite side is the signal conducting slip ring, the work top 3 upper edge axis symmetries of double axle table azimuth axis 5 are installed MEMS gyro 4, high-low temperature incubator 1 is installed in double axle table and rotates on the framework of axle 2 and with axle 2 frameworks in tilting in tilting, the work top 3 of double axle table azimuth axis 5 is included in the high-low temperature incubator 1, be connected by rotary seal changeover valve 6 between incubator casing 1 and the compressor, refrigerant is injected in the casing of high-low temperature chamber 1 continuously when axle 2 rotated in control computer was used to guarantee by incubator controller control compressor, the temperature controlling range that makes high-low temperature chamber is-55 ℃～+ 120 ℃; Photoelectric encoder 7 is installed on the double axle table azimuth axis 5 as the Rate Feedback element, the photoelectric encoder output pulse signal is used for and the relatively back output motor control signal of rotary speed instruction signal, motor control signal control driven by motor double axle table rotates, and MEMS gyro test unit is handled the measuring-signal of MEMS gyro output and obtained test result.
High-low temperature chamber provides the temperature environment condition for the MEMS gyro test, and temperature controlling range is-55 ℃～+ 120 ℃.It is installed in the inclination of double axle table on the axle framework, can rotates with axle in tilting, and the perforate of azimuth axis by the incubator bottom risen up in the incubator, work top is installed on the turntable main-axis end, place incubator.The control of incubator and compressor section are separated with the incubator casing, and the pipeline between casing and the compressor is connected with a rotation changeover valve, assurance refrigerant unimpeded between casing and compressor.This structure is convenient to isolate the operational vibration of refrigeration compressor.
Double axle table provides position and attitude and angular speed input for the MEMS gyro test.Dress uses the high precision photoelectric scrambler as the Rate Feedback element on the azimuth axis of turntable, the pulse signal of its output pulse signal for being directly proportional with the actual speed value, the output umber of pulse of every circle is 36000, and distinguishable rate after the sub-circuit frequency multiplication reaches as high as every circle 3600K.The rotary speed instruction signal is the pulse signal that frequency values is directly proportional with the rotary speed instruction value, is sent by the pulse producer in the observing and controlling computer control turntable controller, and its reference frequency output is 100～100KHZ.Speed feedback signal and rotary speed instruction signal are compared the back by turntable controller output motor control signal, and the control motor rotates after power drive; Turntable controller can be provided with the segmentation multiple of encoder feedback signal automatically according to the size of rotary speed instruction value, when rotating speed is low, adopts less segmentation multiple, to improve rotary speed precision; When rotating speed is higher, adopt bigger segmentation multiple, to improve the dynamic response of system.Can realize very wide speed range and very high speed precision thus.
MEMS gyro test unit is inserted in the switch board, the simulating signal that is positioned at 10 MEMS gyrosensor outputs on the azimuth axis table top is incorporated into the analog input channel of 10 tunnel difference input of MEMS gyro test unit respectively behind conducting slip ring, after every road signal passes through signal conditioning circuit again, sending into high-precision A/D capture card of 18, can be digital signal with the output signal accurate transformation of 10 MEMS gyros thus.Utilize the control of observing and controlling computing machine, can realize signals collecting at a high speed, single channel frequency acquisition maximum can reach 625kps.Under different temperature environments and rotating speed, the method that each MEMS gyrosensor after the conversion is exported is in accordance with regulations calculated, can be obtained constant multiplier, constant multiplier temperature control, non-linear, zero inclined to one side, zero stable partially, the zero test values such as renaturation, zero bias temperature sensitivity, resolution, threshold value, random walk coefficient, input shaft misalignment of laying particular stress on.
High-low temperature chamber, double axle table and MEMS gyro test unit are by the observing and controlling computer control, software adopts modular design, as shown in Figure 3, mainly form by turntable control module, incubator measurement and control of temperature module, test task process module, database management module, MEMS data acquisition, data result calculating and processing module, remote communication interface module etc.The user can directly be provided with the project of incubator temperature, revolving table position and speed, MEMS gyro test on operation interface.Also can in every group of test different incubator temperature, revolving table position and speed, the project and the test duration of MEMS gyro test can be set all according to the many group tests of required flow process configuration.Utilize computer clock, software can be transferred to next group test, up to finishing whole test events automatically after one group of test is finished.After test was finished, software was by all content measurements calculating place test result automatically, and generated the test result form and deposit in the computing machine with document form, quit a program then.
Concrete test process as shown in Figure 4, before the test beginning, the user can set in advance parameters such as incubator temperature, temperature retention time, turntable corner or rate value, MEMS gyro test number and project; After beginning test, software can start timer automatically, begins test automatically according to user configured test event, after finishing a project, automatically switch to next project, finish all test events successively after, the software automatic manufacturing test is form as a result, and quits a program.
This MEMS gyro integrated test system is a kind of complete full-automatic test system, improve testing efficiency, satisfied the required multiparameter overall process test that once is installed, the requirement of dynamic rate scope spreadability, test temperature requirements and robotization batch testing greatly of MEMS gyrosensor test.
The utility model not detailed description is a technology as well known to those skilled in the art.
Claims (2)
1. the MEMS gyro test system of a double axle table is characterized in that: comprise double axle table, high-low temperature incubator (1), MEMS gyro (4), incubator controller, compressor, rotary seal changeover valve (6), photoelectric encoder (7), MEMS gyro test unit and observing and controlling computing machine;
The double axle table stage body adopts U-T type tower structure, wherein sloping shaft (2) axle head one side is installed rotary seal changeover valve (6), opposite side is the signal conducting slip ring, work top (3) the upper edge axis symmetry of double axle table azimuth axis (5) is installed MEMS gyro (4), high-low temperature incubator (1) is installed on the framework of double axle table sloping shaft (2) and with sloping shaft (2) framework and rotates, the work top (3) of double axle table azimuth axis (5) is included in the high-low temperature incubator (1), be connected by rotary seal changeover valve (6) between incubator casing (1) and the compressor, control computer is injected refrigerant in the casing of high-low temperature chamber (1) by incubator controller control compressor when axle (2) rotates in tilting continuously, photoelectric encoder (7) is installed on the double axle table azimuth axis (5) as the Rate Feedback element, photoelectric encoder (7) output pulse signal is used for relatively back output motor control signal of the rotary speed instruction signal that sends with turntable controller, motor control signal control driven by motor double axle table rotates, MEMS gyro test unit is gathered the measuring-signal of MEMS gyro output, by control computer the data after gathering is handled obtaining test result then.
2. the MEMS gyro test system of a kind of double axle table according to claim 1, it is characterized in that: the temperature controlling range of described high-low temperature chamber (1) is-55 ℃～+ 120 ℃.
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| CN2010201811491U CN201653429U (en) | 2010-04-29 | 2010-04-29 | MEMS gyro test system with double-shaft turntable |
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| CN2010201811491U CN201653429U (en) | 2010-04-29 | 2010-04-29 | MEMS gyro test system with double-shaft turntable |
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Cited By (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102147264A (en) * | 2010-12-30 | 2011-08-10 | 东莞易步机器人有限公司 | Method for calibrating gyroscope modules in batch |
| CN102435207A (en) * | 2011-09-01 | 2012-05-02 | 中国航空工业第六一八研究所 | Rotary joint-free double-shaft rotary table structure with incubator |
| CN103017786A (en) * | 2011-09-26 | 2013-04-03 | 东莞易步机器人有限公司 | Self-balanced two-wheeled vehicle steering offset calibrating device and calibrating method |
| CN103017785A (en) * | 2011-09-26 | 2013-04-03 | 东莞易步机器人有限公司 | Gyroscope sensor calibrating device and calibrating method |
| CN103063879A (en) * | 2012-12-28 | 2013-04-24 | 苏州中盛纳米科技有限公司 | Multi-parameter batch test equipment of micro-electromechanical systems (MEMS) acceleration sensor |
| CN103115630A (en) * | 2013-01-29 | 2013-05-22 | 中国工程物理研究院电子工程研究所 | In-batch micromechanical gyroscope testing device |
| CN103335670A (en) * | 2013-06-20 | 2013-10-02 | 北京航天控制仪器研究所 | Two-axis turntable based levelness and orientation adjusting mechanism |
| CN103411611A (en) * | 2013-08-06 | 2013-11-27 | 湖北航天技术研究院总体设计所 | Method and equipment for full-automatic temperature compensation test of inertia measurement assembly |
| CN103697913A (en) * | 2013-12-17 | 2014-04-02 | 陕西宝成航空仪表有限责任公司 | Rotary table fixture for testing aircraft course precision |
| CN104677381A (en) * | 2015-01-29 | 2015-06-03 | 中国空空导弹研究院 | Testing system for micro-inertial measurement unit |
| CN104880202A (en) * | 2015-04-30 | 2015-09-02 | 北京航天计量测试技术研究所 | High-speed data fusing and processing system and method of turntable control system |
| CN104897169A (en) * | 2015-02-03 | 2015-09-09 | 南京航空航天大学 | Testing system and method for dynamic precision of micro attitude module |
| CN105466452A (en) * | 2015-11-20 | 2016-04-06 | 中船重工西安东仪科工集团有限公司 | A test measurement method for an output-temperature drift error coefficient of an MEMS sensor combination |
| CN105910622A (en) * | 2016-04-06 | 2016-08-31 | 中国航空工业集团公司上海航空测控技术研究所 | System for comprehensive testing of performance of gyro combination and testing method thereof |
| CN105952905A (en) * | 2016-06-27 | 2016-09-21 | 九江精密测试技术研究所 | Thermostat rotating table shaft system seal design |
| CN108007475A (en) * | 2016-10-27 | 2018-05-08 | 恩智浦美国有限公司 | MEMS devices test system and method |
| CN108132059A (en) * | 2016-11-30 | 2018-06-08 | 北京航天计量测试技术研究所 | Condensate water-proof device with incubator rotation double axle table |
| CN108168574A (en) * | 2017-11-23 | 2018-06-15 | 东南大学 | A kind of 8 position Strapdown Inertial Navigation System grade scaling methods based on speed observation |
| CN108268026A (en) * | 2018-01-29 | 2018-07-10 | 天津英创汇智汽车技术有限公司 | Testing apparatus and method |
| CN109141473A (en) * | 2018-08-17 | 2019-01-04 | 北方电子研究院安徽有限公司 | A kind of variable damping MEMS gyro sensitive structure test device |
| CN109781145A (en) * | 2019-02-21 | 2019-05-21 | 湖北三江航天万峰科技发展有限公司 | The screening test system and method for laser seeker MEMS gyro |
| CN110083184A (en) * | 2019-04-19 | 2019-08-02 | 北京航天发射技术研究所 | A kind of twin shaft band incubator turnplate control method and device |
| CN110672122A (en) * | 2019-09-26 | 2020-01-10 | 中国航空工业集团公司北京航空精密机械研究所 | Electric control device of single-shaft speed double-shaft position rotary table |
| CN111006688A (en) * | 2019-11-11 | 2020-04-14 | 上海航天控制技术研究所 | Intelligent online monitoring system for inertial navigation temperature test |
| CN111982154A (en) * | 2020-08-20 | 2020-11-24 | 华芯智能(珠海)科技有限公司 | Temperature calibration equipment and calibration method for single-shaft inertial device |
| CN113959463A (en) * | 2021-10-25 | 2022-01-21 | 北京计算机技术及应用研究所 | Automatic testing platform of inertia measuring device |
| CN114295148A (en) * | 2021-12-27 | 2022-04-08 | 九江冠成仿真技术有限公司 | Compact gyro dynamic calibration platform |
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2010
- 2010-04-29 CN CN2010201811491U patent/CN201653429U/en not_active Expired - Lifetime
Cited By (36)
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| CN102147264A (en) * | 2010-12-30 | 2011-08-10 | 东莞易步机器人有限公司 | Method for calibrating gyroscope modules in batch |
| CN102435207A (en) * | 2011-09-01 | 2012-05-02 | 中国航空工业第六一八研究所 | Rotary joint-free double-shaft rotary table structure with incubator |
| CN103017786A (en) * | 2011-09-26 | 2013-04-03 | 东莞易步机器人有限公司 | Self-balanced two-wheeled vehicle steering offset calibrating device and calibrating method |
| CN103017785A (en) * | 2011-09-26 | 2013-04-03 | 东莞易步机器人有限公司 | Gyroscope sensor calibrating device and calibrating method |
| CN103017785B (en) * | 2011-09-26 | 2015-10-07 | 东莞易步机器人有限公司 | Gyro sensor calibrating installation and calibration steps |
| CN103063879B (en) * | 2012-12-28 | 2014-11-05 | 苏州中盛纳米科技有限公司 | Multi-parameter batch test equipment of micro-electromechanical systems (MEMS) acceleration sensor |
| CN103063879A (en) * | 2012-12-28 | 2013-04-24 | 苏州中盛纳米科技有限公司 | Multi-parameter batch test equipment of micro-electromechanical systems (MEMS) acceleration sensor |
| CN103115630A (en) * | 2013-01-29 | 2013-05-22 | 中国工程物理研究院电子工程研究所 | In-batch micromechanical gyroscope testing device |
| CN103115630B (en) * | 2013-01-29 | 2015-05-27 | 中国工程物理研究院电子工程研究所 | In-batch micromechanical gyroscope testing device |
| CN103335670A (en) * | 2013-06-20 | 2013-10-02 | 北京航天控制仪器研究所 | Two-axis turntable based levelness and orientation adjusting mechanism |
| CN103335670B (en) * | 2013-06-20 | 2015-12-23 | 北京航天控制仪器研究所 | A kind of levelness based on double axle table and position adjusting mechanism |
| CN103411611A (en) * | 2013-08-06 | 2013-11-27 | 湖北航天技术研究院总体设计所 | Method and equipment for full-automatic temperature compensation test of inertia measurement assembly |
| CN103411611B (en) * | 2013-08-06 | 2016-03-09 | 湖北航天技术研究院总体设计所 | Tank-type mixture Full-automatic temperature compensation test method and equipment |
| CN103697913A (en) * | 2013-12-17 | 2014-04-02 | 陕西宝成航空仪表有限责任公司 | Rotary table fixture for testing aircraft course precision |
| CN103697913B (en) * | 2013-12-17 | 2016-02-03 | 陕西宝成航空仪表有限责任公司 | For the turntable clamper of testing airplane course precision |
| CN104677381A (en) * | 2015-01-29 | 2015-06-03 | 中国空空导弹研究院 | Testing system for micro-inertial measurement unit |
| CN104897169A (en) * | 2015-02-03 | 2015-09-09 | 南京航空航天大学 | Testing system and method for dynamic precision of micro attitude module |
| CN104897169B (en) * | 2015-02-03 | 2018-04-17 | 南京航空航天大学 | A kind of dynamic accuracy test system and method for Miniature posture module |
| CN104880202A (en) * | 2015-04-30 | 2015-09-02 | 北京航天计量测试技术研究所 | High-speed data fusing and processing system and method of turntable control system |
| CN105466452A (en) * | 2015-11-20 | 2016-04-06 | 中船重工西安东仪科工集团有限公司 | A test measurement method for an output-temperature drift error coefficient of an MEMS sensor combination |
| CN105910622A (en) * | 2016-04-06 | 2016-08-31 | 中国航空工业集团公司上海航空测控技术研究所 | System for comprehensive testing of performance of gyro combination and testing method thereof |
| CN105952905A (en) * | 2016-06-27 | 2016-09-21 | 九江精密测试技术研究所 | Thermostat rotating table shaft system seal design |
| CN108007475A (en) * | 2016-10-27 | 2018-05-08 | 恩智浦美国有限公司 | MEMS devices test system and method |
| CN108132059A (en) * | 2016-11-30 | 2018-06-08 | 北京航天计量测试技术研究所 | Condensate water-proof device with incubator rotation double axle table |
| CN108168574A (en) * | 2017-11-23 | 2018-06-15 | 东南大学 | A kind of 8 position Strapdown Inertial Navigation System grade scaling methods based on speed observation |
| CN108168574B (en) * | 2017-11-23 | 2022-02-11 | 东南大学 | 8-position strapdown inertial navigation system-level calibration method based on speed observation |
| CN108268026A (en) * | 2018-01-29 | 2018-07-10 | 天津英创汇智汽车技术有限公司 | Testing apparatus and method |
| CN109141473A (en) * | 2018-08-17 | 2019-01-04 | 北方电子研究院安徽有限公司 | A kind of variable damping MEMS gyro sensitive structure test device |
| CN109781145B (en) * | 2019-02-21 | 2020-09-04 | 湖北三江航天万峰科技发展有限公司 | Screening test system and method for MEMS gyroscope with laser seeker |
| CN109781145A (en) * | 2019-02-21 | 2019-05-21 | 湖北三江航天万峰科技发展有限公司 | The screening test system and method for laser seeker MEMS gyro |
| CN110083184A (en) * | 2019-04-19 | 2019-08-02 | 北京航天发射技术研究所 | A kind of twin shaft band incubator turnplate control method and device |
| CN110672122A (en) * | 2019-09-26 | 2020-01-10 | 中国航空工业集团公司北京航空精密机械研究所 | Electric control device of single-shaft speed double-shaft position rotary table |
| CN111006688A (en) * | 2019-11-11 | 2020-04-14 | 上海航天控制技术研究所 | Intelligent online monitoring system for inertial navigation temperature test |
| CN111982154A (en) * | 2020-08-20 | 2020-11-24 | 华芯智能(珠海)科技有限公司 | Temperature calibration equipment and calibration method for single-shaft inertial device |
| CN113959463A (en) * | 2021-10-25 | 2022-01-21 | 北京计算机技术及应用研究所 | Automatic testing platform of inertia measuring device |
| CN114295148A (en) * | 2021-12-27 | 2022-04-08 | 九江冠成仿真技术有限公司 | Compact gyro dynamic calibration platform |
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