CN201637757U - Pneumatic linkage type revolving extraction device - Google Patents

Pneumatic linkage type revolving extraction device Download PDF

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Publication number
CN201637757U
CN201637757U CN2010200006096U CN201020000609U CN201637757U CN 201637757 U CN201637757 U CN 201637757U CN 2010200006096 U CN2010200006096 U CN 2010200006096U CN 201020000609 U CN201020000609 U CN 201020000609U CN 201637757 U CN201637757 U CN 201637757U
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China
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axis unit
longitudinal axis
air pressure
driving belt
linkage type
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Expired - Fee Related
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CN2010200006096U
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Chinese (zh)
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薛伯承
朱文庆
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Individual
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Individual
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The utility model discloses a pneumatic linkage type revolving extraction device, which comprise a base, a power source, a transverse shaft unit, and a plurality of longitudinal shaft units, wherein the transverse shaft unit comprises a driving belt driven by the power source and at least two movable pulleys annularly sleeved and driven by the driving belt; and one of the longitudinal shaft units fixedly arranged on the base is defined as a standard longitudinal shaft unit, and other longitudinal shaft units are symmetrically positioned on two sides of the standard longitudinal shaft unit, and respectively and fixedly arranged on the driving belt and the axle centers of the movable pulleys. In the pneumatic linkage type revolving extraction device provided by the utility model, when the driving belt drives, the horizontal shift distance of the driving belt and that of the axle centers of the movable pulleys are in set proportion, so that the device can adjust the distance between every longitudinal shaft unit, and is suitable for extracting semiconductor packaging pieces of various different specifications.

Description

Air pressure linkage type rotation suction means
Technical field
The utility model relates to a kind of suction means, particularly relates to a kind of air pressure linkage type rotation suction means that is used to draw semiconductor package part.
Background technology
Generally speaking, after wafer package becomes semiconductor package part, normally utilize the principle of vacuum suction to pick and place on semiconductor package part to a substrate and test, whether to determine that after encapsulation process wafer is still up to specification, it is perfect also to detect encapsulation in the lump.
Consult Fig. 1, for TaiWan, China is announced the disclosed prior art of novel patent case No. 496530, it is the axial moving mechanism 11 that utilizes on the IC wafer delivery apparatus 1, serve as the migration of entire I C wafer delivery apparatus 1, and this axial moving mechanism 11 is provided with the sticking unit 12 of most constant spacings, and the suction nozzle 121 by described sticking unit 12 picks up the IC wafer 10 that places on the IC bearing dish 100.
Yet, the spacing of the sticking unit 12 of above-mentioned IC wafer delivery apparatus 1 is fixed, the spacing that causes described suction nozzle 121 is single specification, can only draw the fixedly IC wafer 10 of specification, if in the time of will testing the IC wafer 10 of another kind of different size size, just need to change the sticking unit 12 of another kind of size, in using quite inconvenience in the operation; In addition, described sticking unit 12 does not possess the function that any rotation is arranged yet.And present semiconductor industry is because of integrating multinational different dimensions, the product of existing various sizes diversification, if therefore in order to detect the IC wafer 10 of various different sizes, and to change the sticking unit 12 of different size again and again, not only can significantly increase the cost in the production, also can't effectively promote yield-power simultaneously.
Summary of the invention
The purpose of this utility model be provide a kind of can be in response to the air pressure linkage type rotation suction means of the semiconductor package part of all size.
The purpose of this utility model and to solve its technical matters be to adopt following technical scheme to realize.According to a kind of air pressure linkage type rotation suction means that the utility model proposes, be to be connected in outside an air pressure drive source and a vacuum drive source, to draw semiconductor package part, this air pressure linkage type rotation suction means comprises: a pedestal; A power source is fixedly arranged on this pedestal; A transverse axis unit comprises a driving belt that is driven by this power source, and at least two travelling block by this driving belt institute ring set and drive, and this driving belt is transmission on a surface level; And most longitudinal axis unit, defining any longitudinal axis unit is benchmark longitudinal axis unit, this benchmark longitudinal axis unit is to be fixedly arranged on this pedestal, other longitudinal axis unit is the both sides that are symmetrically located at this benchmark longitudinal axis unit, and be fixedly arranged on respectively on the axle center of the driving belt of this transverse axis unit and travelling block, when this driving belt transmission, the horizontal shift distance of this driving belt is into a preset proportion with the horizontal shift distance in the axle center of described travelling block, adjust each longitudinal axis distance between cells whereby, each longitudinal axis unit comprises: a housing; A trace vertically is extended through in this housing, and drives and vertically to-and-fro movement with this air pressure drive source; A catch bar laterally is slidedly arranged in this housing, and drives and promote this trace and rotate an angle with this air pressure drive source; And a suction nozzle, be connected with in this trace below, inhale with this vacuum drive source driving and put semiconductor package part.
The purpose of this utility model and solve its technical matters and can also be further achieved by the following technical measures.
Preferably, aforesaid air pressure linkage type rotation suction means, wherein this transverse axis unit comprises that also at least two are fixedly arranged on the inboard toothrow that also is engaged in this two travelling block respectively of this driving belt, this two travelling block is driven mobilely by described toothrow, described longitudinal axis unit then is to be fixedly arranged on respectively on the axle center of the toothrow of this transverse axis unit and travelling block.
Preferably, aforesaid air pressure linkage type rotation suction means, wherein the trace of each longitudinal axis unit has a body of rod, and one be fixedly arranged on this body of rod and to pushing part that should the catch bar position, and this catch bar is to promote this pushing part and make this trace rotate an angle.
Preferably, aforesaid air pressure linkage type rotation suction means, wherein each longitudinal axis unit housing has one to cross-perforating that should the position, pushing part, and each longitudinal axis unit comprises that also one is inserted in this perforation and limits the latch of this pushing part anglec of rotation.
Preferably, aforesaid air pressure linkage type rotation suction means, wherein each longitudinal axis unit also comprises a sensing element that is arranged at this housing top, in order to respond to vertically moving of this trace.
Preferably, aforesaid air pressure linkage type rotation suction means, wherein said sensing element is the form of photoinduction.
Preferably, aforesaid air pressure linkage type rotation suction means, wherein the horizontal shift of this driving belt distance is 2: 1 with the ratio of the horizontal shift distance in the axle center of described travelling block.
Preferably, aforesaid air pressure linkage type rotation suction means, wherein this air pressure drive source has two gas inlet and outlets, and one in order to drive the vertical to-and-fro movement of described trace, and another is then in order to drive the horizontal slippage of described catch bar.
Preferably, aforesaid air pressure linkage type rotation suction means, wherein the material of this latch is a wolfram steel.
Preferably, aforesaid air pressure linkage type rotation suction means, wherein this power source is a motor.
The utility model compared with prior art has tangible advantage and beneficial effect.By technique scheme, the utility model air pressure linkage type rotation suction means has following advantage and beneficial effect at least: when this driving belt transmission, the horizontal shift distance of this driving belt is into a preset proportion with the horizontal shift distance in the axle center of described travelling block, adjust each longitudinal axis distance between cells whereby, and can be applicable to the semiconductor package part of drawing various different sizes.
In sum, the utility model relates to a kind of air pressure linkage type rotation suction means, comprises a pedestal, a power source, a transverse axis unit, and most longitudinal axis unit.This transverse axis unit comprises a driving belt that is driven by this power source, and at least two travelling block by this driving belt institute ring set and drive.Definition one longitudinal axis unit that is fixedly arranged on this pedestal is benchmark longitudinal axis unit, and other longitudinal axis unit then is the both sides that are symmetrically located at this base longitudinal axis unit, and is fixedly arranged on respectively on the axle center of this driving belt and described travelling block.Useful effect is, when this driving belt transmission, the horizontal shift distance of this driving belt is into a preset proportion with the horizontal shift distance in the axle center of described travelling block, adjusts each longitudinal axis distance between cells whereby, and can be applicable to the semiconductor package part of drawing various different sizes.The utility model has obvious improvement technically, and has tangible good effect, really is a new and innovative, progressive, practical new design.
Above-mentioned explanation only is the general introduction of technical solutions of the utility model, for can clearer understanding technological means of the present utility model, and can be implemented according to the content of instructions, and for above-mentioned and other purposes, feature and advantage of the present utility model can be become apparent, below especially exemplified by preferred embodiment, and conjunction with figs., be described in detail as follows.
Description of drawings
Fig. 1 is that TaiWan, China is announced in No. 496530 disclosed prior art of novel patent case the stereographic map of an IC wafer delivery apparatus.
Fig. 2 is the whole vertical view of the preferred embodiment of the utility model air pressure linkage type rotation suction means.
Fig. 3 is in this preferred embodiment of the utility model, the side view of the structure of each longitudinal axis unit;
Fig. 4 is that the side view that rises behind the semiconductor package part is drawn in each longitudinal axis unit of the utility model.
Fig. 5 is the relative position vertical view cutaway drawing partly of the pushing part of each catch bar of the utility model and this trace.
Fig. 6 is the part vertical view cutaway drawing that each catch bar promotes this pushing part among Fig. 5.
Embodiment
For further setting forth the utility model is to reach technological means and the effect that predetermined goal of the invention is taked, below in conjunction with accompanying drawing and preferred embodiment, to according to its embodiment of the air pressure linkage type that the utility model proposes rotation suction means, structure, feature and effect thereof, describe in detail as after.
Consult Fig. 2, the preferred embodiment of the utility model air pressure linkage type rotation suction means 2, this air pressure linkage type rotation suction means 2 comprises a pedestal 3, one and is fixedly arranged on the power source 4 on this pedestal 3, a transverse axis unit 5, and five longitudinal axis unit 6.In the present embodiment, this power source 4 is a motor, and the quantity of described longitudinal axis unit 6 is the enforcement aspect of present embodiment, not as limit.
This transverse axis unit 5 comprises that a driving belt that is driven by this power source 4 51, two are by 51 ring sets of this driving belt and the travelling block 52 that drives, and two toothrows 53 that are fixedly arranged on this driving belt 51 inboards and are engaged in this two travelling block 52 respectively, this driving belt 51 is transmissions on a surface level.What specify is, described travelling block 52 is to be provided with according to the quantity of described longitudinal axis unit 6 with the quantity of toothrow 53, and when the quantity of longitudinal axis unit 6 increased and decreased to some extent, described travelling block 52 also can be along with change with the quantity of toothrow 53.
In five longitudinal axis unit 6, define any longitudinal axis unit 6 that is fixedly arranged on this pedestal 3 and be benchmark longitudinal axis unit 6a, it is to be fixedly arranged on respectively on the axle center of corresponding travelling block 52 that two longitudinal axis unit 6 are arranged, 6 of other two longitudinal axis unit are to be fixedly arranged on respectively on the toothrow 53 of these driving belt 51 correspondences, in the present embodiment, this benchmark longitudinal axis unit 6a is positioned at central authorities, and this two travelling block 52 is to be positioned at this 6a both sides, benchmark longitudinal axis unit, so that other longitudinal axis unit 6 is the both sides that are symmetrically located at this benchmark longitudinal axis unit 6a.
Consult Fig. 3, each longitudinal axis unit 6 comprises that a housing 61, one vertically are extended through trace 62 in this housing 61, one and laterally are slidedly arranged on catch bar 63 in this housing 61, one and are connected with in the suction nozzle 64 of this trace 62 belows, and a sensing element 65 that is arranged at these housing 61 tops.
This air pressure linkage type rotation suction means 2 is to be connected in an outside air pressure drive source and a vacuum drive source (figure does not show), to draw semiconductor package part 20, and this air pressure drive source has two gas inlet and outlets, one in order to drive described trace 62 vertical to-and-fro movements, and another is then in order to drive described catch bar 63 horizontal slippages; This vacuum drive source then is to drive described suction nozzle 64 to put described semiconductor package part 20 with suction.Since the form of this air pressure drive source and vacuum drive source with make flowing mode and can understand easily for knowing this operator, so illustrate no longer in addition, the while is also no longer given unnecessary details.
Consult Fig. 2 and Fig. 3 in the lump, next the flowing mode of doing of this air pressure linkage type rotation suction means 2 is described, when described suction nozzle 64 will be drawn semiconductor package part 20, to adjust according to the specification of described semiconductor package part 20 earlier the distance of 6 of each longitudinal axis unit.
When these driving belt 51 transmissions, be fixedly arranged on toothrow 53 meetings and these driving belt 51 same moved further on this driving belt 51, and drive described travelling block 52 and move, and the horizontal shift distance in the horizontal shift of described toothrow 53 distance and the axle center of described travelling block 52 to be tooth pitches by described toothrow 53 form a preset proportion, in the present embodiment, the horizontal shift distance of described toothrow 53 is 2: 1 with the ratio of the horizontal shift distance in the axle center of described travelling block 52, can certainly look actual demand and other ratio is arranged, not as limit.
Therefore, direction finding as Fig. 2, when this driving belt 51 moves 5 centimetres in a clockwise direction, unit 6a is motionless for this benchmark longitudinal axis, the longitudinal axis unit 6c that this benchmark longitudinal axis unit 6a below is fixedly arranged on the toothrow 53 moves down 5 centimetres, be fixedly arranged on the travelling block 52 and the longitudinal axis unit 6b that is positioned at this benchmark longitudinal axis unit 6a below then toward moving right 2.5 centimetres; The longitudinal axis unit 6c that this benchmark longitudinal axis unit 6a top is fixedly arranged on the toothrow 53 up moves 5 centimetres, is fixedly arranged on the travelling block 52 and the longitudinal axis unit 6b that is positioned at this benchmark longitudinal axis unit 6a top then up moves 2.5 centimetres.
Mode whereby makes the distance of 6 of each longitudinal axis unit all maintain 2.5 centimetres; If reduce the distance of 6 of each longitudinal axis unit, as long as make this driving belt 51 just passable counterclockwise to move.Owing to the mobile of described travelling block 52 is to drive described toothrow 53 by this driving belt 51 to control, therefore as long as the displacement of this driving belt 51 of control, just can control the displacement of described travelling block 52, and reach the effect of the distance that changes 6 of each longitudinal axis unit.
Consult Fig. 3 and Fig. 4, after the spacing of having adjusted each longitudinal axis unit 6, just can make this vacuum drive source drive each suction nozzle 64 and draw the semiconductor package part 20 that is placed on the bearing dish 200, as shown in Figure 3, after each suction nozzle 64 is drawn to semiconductor package part 20, this air pressure drive source then drives each trace 62 as shown in Figure 4 and moves up, be the form of photoinduction owing to be arranged at the sensing element 65 of each housing 61 top, and be in order to respond to vertically moving of corresponding trace 62, therefore when covering the light that described sensing element 65 launched when described trace 62 risings, described sensing element 65 just can judge that described suction nozzle 64 is drawn to semiconductor package part 20.
Then, when semiconductor package part 20 is drawn by described suction nozzle 64 and after rising, begin to detect action, after action to be detected is finished, the strength that this air pressure drive source drives disappears, then described trace 62 can move down, and the strength that this moment, this vacuum drive source drove disappears, and semiconductor package part 20 can be put back on this bearing dish 200 as shown in Figure 3.
What specify is, after described suction nozzle 64 is drawn to semiconductor package part 20, described trace 62 just is driven rising, this is a successional action, and can be controlled by external computer institute line, and with this foundation that is drawn to semiconductor package part 20 is arranged as suction nozzle 64, and above-mentioned control action, and the detection of semiconductor package part 20 action understood by knowing this technology personage, and non-for the feature technology of this case, no longer given unnecessary details.
Consult Fig. 4 and Fig. 5, each trace 62 has a body of rod 621, and one is fixedly arranged on this body of rod 621 and to pushing part 622 that should catch bar 63 positions; Each housing 61 has one to cross-perforating 611 (only seeing Fig. 5) that should 622 positions, pushing part, and each longitudinal axis unit 6 also comprises a latch 66 that is inserted in this perforation 611.If described semiconductor package part 20 is when detecting action, in the time of need detecting at 20 4 sides of described semiconductor package part, this air pressure drive source can drive the catch bar 63 of each longitudinal axis unit 6 and promote this pushing part 622, allow this trace 62 rotate an angle, to carry out the detection of other adjacent side.
Consult Fig. 5 and Fig. 6, after these trace 62 rotations, as shown in Figure 6, this pushing part 622 can impact on this latch 66, block by this latch 66 is used for avoiding these trace 62 anglecs of rotation excessive, after the pressure that promotes disappeared, this catch bar 63 is homing as shown in Figure 5, and this trace 62 then goes back to angle originally.Because this latch 66 is movable designs of substituting, therefore can limit the anglec of rotation of this pushing part 622 by the latch 66 of changing different-thickness.And because this latch 66 can be subjected to impacting of this pushing part 622, therefore in present embodiment, the material of this latch 66 is a wolfram steel, in order to keep enough intensity.
Consult Fig. 4 again, after if described suction nozzle 64 is drawn semiconductor package part 20 by this bearing dish 200, make semiconductor package part 20 rotation one angles and be positioned on the bearing dish (figure does not show) of another different azimuth, can use the function of above-mentioned trace 62 rotations to reach equally.
Whereby, the utility model air pressure linkage type rotation suction means 2 has the advantage of the following stated when reality is used:
One, the distance of 6 of convertible each longitudinal axis unit, the applicability height:
Tooth pitch design by the toothrow 53 on this driving belt 51, make when described toothrow 53 moves with this driving belt 51, can drive described travelling block 52 moves, and keep the displacement of a preset proportion, adjust the distance of 6 of each longitudinal axis unit whereby, and can be applicable to the specification of various different semiconductor package parts 20.
Two, effectively save production cost:
From the above, by of the design of this driving belt 51 with described toothrow 53, just can reach the effect that changes each longitudinal axis unit 6 distance, do not need to make and change in the mode of background technology again the longitudinal axis unit 6 of different size, except saving the manufacturing cost, also need not spend the time of replacing, therefore can significantly reduce the expenditure on the production cost.
In sum, the utility model air pressure linkage type rotation suction means 2 by the design of this transverse axis unit 5, with regard to the distance of 6 of each longitudinal axis unit of energy conversion, can be suitable for the semiconductor package part 20 of various different sizes, can also effectively save production cost.
The above, it only is preferred embodiment of the present utility model, be not that the utility model is done any pro forma restriction, though the utility model discloses as above with preferred embodiment, yet be not in order to limit the utility model, any those skilled in the art are not in breaking away from the technical solutions of the utility model scope, when the technology contents that can utilize above-mentioned announcement is made a little change or is modified to the equivalent embodiment of equivalent variations, in every case be the content that does not break away from technical solutions of the utility model, according to technical spirit of the present utility model to any simple modification that above embodiment did, equivalent variations and modification all still belong in the scope of technical solutions of the utility model.

Claims (10)

1. an air pressure linkage type rotation suction means is to be connected in outside an air pressure drive source and a vacuum drive source, to draw semiconductor package part, it is characterized in that, this air pressure linkage type rotation suction means comprises:
A pedestal;
A power source is fixedly arranged on this pedestal;
A transverse axis unit comprises a driving belt that is driven by this power source, and at least two travelling block by this driving belt institute ring set and drive, and this driving belt is transmission on a surface level; And
A most longitudinal axis unit, defining any longitudinal axis unit is benchmark longitudinal axis unit, this benchmark longitudinal axis unit is to be fixedly arranged on this pedestal, other longitudinal axis unit is the both sides that are symmetrically located at this benchmark longitudinal axis unit, and be fixedly arranged on respectively on the axle center of the driving belt of this transverse axis unit and travelling block, when this driving belt transmission, the horizontal shift distance of this driving belt is into a preset proportion with the horizontal shift distance in the axle center of described travelling block, adjust each longitudinal axis distance between cells whereby, each longitudinal axis unit comprises:
A housing;
A trace vertically is extended through in this housing, and drives and vertically to-and-fro movement with this air pressure drive source;
A catch bar laterally is slidedly arranged in this housing, and drives and promote this trace and rotate an angle with this air pressure drive source; And
A suction nozzle is connected with in this trace below, inhales with this vacuum drive source driving and puts semiconductor package part.
2. air pressure linkage type rotation suction means as claimed in claim 1, it is characterized in that: this transverse axis unit comprises that also at least two are fixedly arranged on the inboard toothrow that also is engaged in this two travelling block respectively of this driving belt, this two travelling block is driven mobilely by described toothrow, described longitudinal axis unit then is to be fixedly arranged on respectively on the axle center of the toothrow of this transverse axis unit and travelling block.
3. air pressure linkage type rotation suction means as claimed in claim 2, it is characterized in that: the trace of each longitudinal axis unit has a body of rod, and one be fixedly arranged on this body of rod and to pushing part that should the catch bar position, and this catch bar is to promote this pushing part and make this trace rotate an angle.
4. air pressure linkage type rotation suction means as claimed in claim 3, it is characterized in that: each longitudinal axis unit housing has one to cross-perforating that should the position, pushing part, and each longitudinal axis unit comprises that also one is inserted in this perforation and limits the latch of this pushing part anglec of rotation.
5. air pressure linkage type rotation suction means as claimed in claim 4 is characterized in that: each longitudinal axis unit also comprises a sensing element that is arranged at this housing top, in order to respond to vertically moving of this trace.
6. air pressure linkage type rotation suction means as claimed in claim 5, it is characterized in that: described sensing element is the form of photoinduction.
7. air pressure linkage type rotation suction means as claimed in claim 6 is characterized in that: the horizontal shift distance of this driving belt is 2: 1 with the ratio of the horizontal shift distance in the axle center of described travelling block.
8. air pressure linkage type as claimed in claim 7 rotation suction means, it is characterized in that: this air pressure drive source has two gas inlet and outlets, and one in order to drive the vertical to-and-fro movement of described trace, and another is then in order to drive the horizontal slippage of described catch bar.
9. air pressure linkage type rotation suction means as claimed in claim 4, it is characterized in that: the material of this latch is a wolfram steel.
10. air pressure linkage type rotation suction means as claimed in claim 1, it is characterized in that: this power source is a motor.
CN2010200006096U 2010-01-19 2010-01-19 Pneumatic linkage type revolving extraction device Expired - Fee Related CN201637757U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010200006096U CN201637757U (en) 2010-01-19 2010-01-19 Pneumatic linkage type revolving extraction device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010200006096U CN201637757U (en) 2010-01-19 2010-01-19 Pneumatic linkage type revolving extraction device

Publications (1)

Publication Number Publication Date
CN201637757U true CN201637757U (en) 2010-11-17

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010200006096U Expired - Fee Related CN201637757U (en) 2010-01-19 2010-01-19 Pneumatic linkage type revolving extraction device

Country Status (1)

Country Link
CN (1) CN201637757U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103298326A (en) * 2012-02-28 2013-09-11 Juki株式会社 Electronic component supply device and electronic component installation apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103298326A (en) * 2012-02-28 2013-09-11 Juki株式会社 Electronic component supply device and electronic component installation apparatus
CN103298326B (en) * 2012-02-28 2017-04-12 Juki株式会社 Electronic component supply device and electronic component installation apparatus

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CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20101117

Termination date: 20190119