CN201637668U - Eigen safe optoacoustic spectrum gas monitoring system based on optical acoustic sensor - Google Patents

Eigen safe optoacoustic spectrum gas monitoring system based on optical acoustic sensor Download PDF

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Publication number
CN201637668U
CN201637668U CN2010201380274U CN201020138027U CN201637668U CN 201637668 U CN201637668 U CN 201637668U CN 2010201380274 U CN2010201380274 U CN 2010201380274U CN 201020138027 U CN201020138027 U CN 201020138027U CN 201637668 U CN201637668 U CN 201637668U
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sound wave
photo
wave sensor
resonant cavity
monitoring system
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CN2010201380274U
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刘祥志
成巍
王知学
刘晓建
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Institute of Automation Shandong Academy of Sciences
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Institute of Automation Shandong Academy of Sciences
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Abstract

The utility model relates to an eigen safe optoacoustic spectrum gas monitoring system based on an optical acoustic sensor, which comprises a light-source device. The system provided by the utility model is characterized in that: the light-source device is connected with an optoacoustic cell device through optical fiber by an optical fiber collimator; the incident direction of laser emitted by the light source is alignment to and is collinear with the axle center of the optoacoustic cell device; phase-shift erbium-doped optical-grating and optical-fiber of 1/4 wave length of the optical acoustic sensor is laid on the inner wall of the optoacoustic cell device in a ring shape; the optoacoustic cell device is communicated with the to-be-tested gas; the optical-grating and the optical-fiber are connected with a demodulating device and a data collecting device. The eigen safe optoacoustic spectrum gas monitoring system has advantages of high detection sensitivity and fast response speed, can realize rapid, accurate, and long-term online monitoring for trace toxic and harmful gas or other specific gases, and particularly can realize accurate measurement and analysis of gases under special detection environment, such as strong-electromagnetic environment, radioactive environment, and coal-mine gas production environment which prohibits power-supply device.

Description

Intrinsic safety optoacoustic spectroscopy gas monitoring system based on the photo-acoustic sound wave sensor
Technical field
The utility model belongs to gas-monitoring, detection range, is specifically related to the online intrinsic safety optoacoustic spectroscopy gas monitoring system based on the photo-acoustic sound wave sensor of high sensitivity of the monitoring gas content that (forceful electric power magnetic, radioactivity, no) used under a kind of particular surroundings.
Background technology
Optoacoustic effect is based on the effect that inspires sound wave after the material absorbing light modulated by radiationless relaxation heat release, because photocaustic spectroscopy is highly sensitive, sensing range is wide, not limited by the form of sample, to solid, liquid, gas, powder, film, even biological sample all can directly detect, thereby is widely used in many fields such as physics, chemistry, biology, environment, material, medical science, become in the analyzing and testing important method and means.Yet, traditional photo-acoustic spectrometer generally relies on the scene that excitation source is provided, the microphone that uses is as electricity structure, under particular surroundings, for example under forceful electric power magnetic and the radioactive environment, because physical characteristics is restricting the operation of electricity microphone, the influence of outside strong-electromagnetic field can cause the forfeiture of these functions of the equipments even destroy them; In gas environment, can not use active device, limited the use that on-the-spot need have traditional photo-acoustic spectrometer of power supply.Along with the development of optical-fiber laser technology, for (forceful electric power magnetic, radioactivity, no) under the particular surroundings provides high sensitivity system based on the on-line monitoring gas content of optoacoustic spectroscopy to provide may.
Through retrieval, found a little use optical fiber to carry out the relevant patent of gas detection, in patent of invention (patent publication No.: CN101532951A) " a kind of optical fiber mixed gas quantitative measurement system and measuring method ", patent of invention (patent publication No.: CN1793850A) " based on the gas concentration detection method and the equipment of annular optical fiber laser ", patent of invention (patent publication No.: CN1793849A) in " based on the gas concentration detection method and the equipment of optical fiber laser intracavity sensitivity ", the gas measuring method that proposes is based on spectral absorption, what utilize is remaining optical power value after the measured gas absorption of light source, inspires the photoacoustic signal of sound wave after the gas absorption light modulated of using in the photocaustic spectroscopy that adopts among non-the present invention by radiationless relaxation heat release; Adopt in the patent of photoacoustic method detection, in patent of invention (patent publication No.: CN101487818A) in " Gas in Oil of Transformer content on-line monitoring method and system ", use incoherent wide light source to add optical filter, microphone uses capacitor type electret microphone EK-23024; Patent of invention (patent publication No.: CN101498690A) in " online fault monitoring system for power transformer ", use be tunable cascade diode laser instrument coherent source, that microphone adopts is Bruel﹠amp; Kjear-4176; (patent publication No.: CN2849712) in " toxic and harmful based on photoacoustic principle detects and fire alarm installation ", light source adopts the Infrared High-Power heat radiation light source, and microphone is the EK-3133 of knowles company at utility model patent.More than adopt in the patent of photoacoustic method detected gas concentration, the light source and the on-site data processing circuit that use need the scene that power supply is provided, in particular surroundings, under gas environment, can not use, and the microphone that adopts is traditional microphone, traditional microphone comprises capacitor, electret and dynamic microphone, use and rely on the electronics line that contains capacitor or volume, particularly in preceding two patent of invention (patent publication No.: CN101487818A), CN101498690A) will be subjected to the on-the-spot transformer strong electromagnetic of applied environment in, if additionally do not carry out anti-electromagnetic interference (EMI) design, outside strong-electromagnetic field environment will influence the performance of these equipment, even make its afunction, and will destroy them when the most serious, in like manner in radioactive environment, also there is this problem.
The utility model content
The purpose of this utility model is exactly for addressing the above problem, propose one and be enclosed within strong electromagnetic, radioactive environment, the online intrinsic safety optoacoustic spectroscopy gas monitoring system that can normally use under the particular surroundings that test site can not be charged based on the photo-acoustic sound wave sensor, this system is based on optoacoustic spectroscopy, the deficiencies in the prior art have been overcome, the laser that long-range light source sends through ovennodulation can not have at the scene by optical fiber the electricity situation under the gas to be measured in the photoacoustic cell is excited, produce periodic vibration after the gas absorption light pulse, form sound wave, can gather sound intensity data by being different from the microphonic photo-acoustic sound wave sensor of conditional electronic, data can on-the-spot be stored, or by wired, wireless mode sends to the backstage and does further processing, realizes the monitoring of gas under the particular surroundings.
For achieving the above object, the utility model is achieved by the following technical solution:
A kind of intrinsic safety optoacoustic spectroscopy gas monitoring system based on the photo-acoustic sound wave sensor, it comprises light supply apparatus, the laser that this device produces is connected with the photoacoustic cell device through optical fiber collimator by optical fiber, the axle center conllinear collimation of laser incident direction and photoacoustic cell device; The photo-acoustic sound wave sensor is connected with the photoacoustic cell device, and the photoacoustic cell device is communicated with gas to be measured; The phase shift er-doped grating fibers ring-type of 1/4 wavelength in the photo-acoustic sound wave sensor is laid on photoacoustic cell device inwall, and the optoisolator in the photo-acoustic sound wave sensor then is connected with demodulating equipment simultaneously, and demodulating equipment is connected with data collector.
Described light supply apparatus comprises charged source Modulated Semiconductor Laser device LD, it enters the power supply loop through coupling mechanism I, through behind the Er-doped fiber, the light signal that produces is transferred to coupling mechanism behind optoisolator and adjustable insulating device, a part feeds back in the Er-doped fiber through coupling mechanism I, realizes loop oscillation, another part is coupled to output terminal output, output is through optical fiber and Erbium-Doped Fiber Amplifier (EDFA), after after the optical fiber collimator aiming, incide in the photoacoustic cell device; Sinusoidal signal generator, sawtooth signal generator and direct current signal stack back are as the driving power of semiconductor laser, this driving power is modulated by controller, and this controller output modulating frequency is as the reference signal frequency of phase-locked amplifying circuit in the demodulating equipment simultaneously.
Described photo-acoustic sound wave sensor comprises phase shift er-doped grating fibers, the 980/1550 wavelength division multiplexer WDM of 1/4 wavelength, the 980nm semiconductor laser LD and the optoisolator II of magnetic tape trailer fibre, the phase shift er-doped grating fibers of 1/4 wavelength is connected with 980/1550 wavelength division multiplexer WDM, the 980nm semiconductor laser LD of magnetic tape trailer fibre also is connected with 980/1550 wavelength division multiplexer WDM simultaneously, 980/1550 wavelength division multiplexer WDM is connected with optoisolator II, and optoisolator II is connected with demodulating equipment.
Described photoacoustic cell device is processed into by brass, and it comprises resonant cavity, and resonant cavity is communicated with air intake opening and gas outlet; At the resonant cavity two ends are internal diameter cushion chambers greater than resonant cavity, are Brewster optical windows of ZnSe in the end of two cushion chambers; The axle center of incident laser, cushion chamber, resonant cavity is located along the same line, and at the point midway of cushion chamber, is wound with the phase shift er-doped grating fibers of 1/4 wavelength along the inwall radial direction.
Described cushion chamber radius is 3 times of resonant cavity radius, and length is 1/2 of resonant cavity.
Described resonant cavity two ends are positioned at the node position of standing wave, and import and export and gas outlet are arranged on this place; The Brewster optical window of described ZnSe also is positioned at the node position of sound wave.
Described demodulating equipment comprises fiber coupler DC1, fiber coupler DC1 is connected with interferometer b arm with interferometer a arm respectively, interferometer a arm is connected with fiber coupler DC2 through coupling mechanism II, interferometer b arm directly is connected with fiber coupler DC2, fiber coupler DC2 is connected with photoelectric detector PD 2 with photoelectric detector PD 1 respectively, 2 of photoelectric detector PD 1 and photoelectric detector PD are connected with differential amplifier circuit, differential amplifier circuit is connected with phase-locked amplifying circuit, the reference signal frequency of phase-locked amplifying circuit comes from the controller of modulated light source, phase-locked amplifying circuit and data acquisition card connection.
The utility model mainly comprises: the Lights section (charged source Modulated Semiconductor Laser device LD, coupling mechanism I(coupler), the adjustable insulating device, optoisolator I, Er-doped fiber EDF, optical fiber, Erbium-Doped Fiber Amplifier (EDFA), optical fiber collimator), the photoacoustic cell part, photo-acoustic sound wave sensor part (DEB-FL part (the phase shift er-doped grating fibers of 1/4 wavelength), 980/1550 wavelength division multiplexer WDM, the 980nm semiconductor laser LD of magnetic tape trailer fibre, optoisolator II (ISO)), demodulation part (fiber coupler DC1 and DC2, photoelectric detector PD 1 and PD2), differential amplifier circuit, phase-locked amplifying circuit).Wherein: excite the sample gas in the photoacoustic cell after the laser after the remote light source in scene provides modulation by optical fiber collimates through optical fiber collimator, the laser incident direction is consistent with the axial line of photoacoustic cell resonant cavity, and the inwall ring-type of resonant cavity is laid 1/4 wavelength phase shift er-doped grating fibers in the photo-acoustic sound wave sensor.
The characteristic wavelength of the corresponding required monitoring gas of the optical maser wavelength that the Lights section provides is (such as acetylene C 2H 2Adopt 1520nm, methane CH 41654nm), the infrared light that light source sends all can directly be modulated by power supply, it specifically is sinusoidal signal generator, sawtooth signal generator and direct current signal stack back driving power as semiconductor laser, power supply is modulated by controller, and this controller output modulating frequency is as the reference signal frequency of lock-in amplifier simultaneously.
Brazen photoacoustic cell adopts the gas responance cavity configuration of standard, the incident of laser and outgoing window have adopted the Brewster optical window of ZnSe, purpose is to reduce the reflection loss of laser, is positioned at the node position of sound wave simultaneously, further reduces the noise error that the turbulent flow of gas causes; Be furnished with cushion chamber at the resonant cavity two ends, the cushion chamber radius is about 3 times of resonant cavity radius, and length is 1/2 of resonant cavity, and good noise isolation effect is arranged.
The phase shift er-doped grating fibers of 1/4 wavelength is laid on the strong position of sound field, it is the antinode of sound standing wave, design is at the resonant cavity middle part, grating fibers is close to the inwall ring-type to be placed in this and to sentence and obtain best detection effect, make the resonant cavity two ends be positioned at the node position of standing wave during design, air inlet/outlet is arranged on this place, the noise that can avoid gas flow to cause.In order from a large amount of noise in scene, to extract needed information, adopted lock-in amplifier, the reference signal frequency of lock-in amplifier is provided by the power supply modulation controller of the Lights section.
The beneficial effects of the utility model are: the online intrinsic safety optoacoustic spectroscopy gas monitoring system based on the photo-acoustic sound wave sensor of the high sensitivity of use, adopt photocaustic spectroscopy to measure minimum gas content, promptly do coherent source with fiber laser serial connection large-power optical fiber amplifier long-range, the laser that light source sends is by the sample gas in the fiber optic conduction radiation photoacoustic cell, the sample aspiration is received light pulse, inspire sound wave by radiationless relaxation heat release, phase shift er-doped grating fibers collection site sound pressure signal by 1/4 wavelength in the photo-acoustic sound wave sensor, pass to by optical fiber at last and carry out demodulation process at a distance, final data can be in the locality storage or by wired, wireless mode sends to the backstage and does further processing, thereby high sensitivity, monitor gas content situation in the site environment accurately, has the monitoring sensitivity height, advantages such as response speed is fast, can realize the quick of trace toxic harmful gas or other specific gas, accurately, long-term on-line monitoring, particularly realize not allowing to occur the Coal Production gas environment of supply unit such as the scene, and forceful electric power magnetic, under the special detection environment such as radioactivity to the accurate measurement and the analysis of gas.
Description of drawings
Fig. 1 is the utility model example and cut-away view.
Wherein, the charged source of 1-Modulated Semiconductor Laser device LD, 2-coupling mechanism I, 3-adjustable insulating device, 4-optoisolator I, 5-Er-doped fiber, 6-optical fiber, 7-Erbium-Doped Fiber Amplifier (EDFA), 8-optical fiber collimator, the Brewster optical window of 9-ZnSe, 10-air intake opening, 11-gas outlet, the 12-cushion chamber, 13-resonant cavity, the phase shift er-doped grating fibers of 14-1/4 wavelength, 15-980/1550 wavelength division multiplexer WDM, the 980nm semiconductor laser LD of 16-magnetic tape trailer fibre, 17-optoisolator II, 18-data collecting card, 19-fiber coupler DC1,20-interferometer a arm, 21-interferometer b arm, 22-coupling mechanism II, 23-fiber coupler DC2,24-photoelectric detector PD 1,25-photoelectric detector PD 2,26-differential amplifier circuit, 27-derives from the reference signal frequency of modulation power source, the phase-locked amplifying circuit of 28-.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is elaborated; this embodiment has provided detailed embodiment and concrete operation steps is being to implement under the prerequisite with technical solutions of the utility model, but the scope of the utility model protection is not limited to following embodiment.
As shown in Figure 1, embodiment comprises light supply apparatus, and the laser that this device produces is connected with the photoacoustic cell device through optical fiber collimator 8 by optical fiber 6, the axle center conllinear collimation of laser incident direction and photoacoustic cell device; The photo-acoustic sound wave sensor is connected with the photoacoustic cell device, and the photoacoustic cell device is communicated with gas to be measured; Wherein phase shift er-doped grating fibers 14 ring-types of 1/4 wavelength in the photo-acoustic sound wave sensor are laid on photoacoustic cell device inwall, and the optoisolator II17 in the photo-acoustic sound wave sensor then is connected with demodulating equipment simultaneously, and demodulating equipment is connected with data collector.
Light supply apparatus comprises charged source Modulated Semiconductor Laser device LD1, and it is connected with coupling mechanism I2, and coupling mechanism I2 is connected with optoisolator I4, adjustable insulating device 3 successively by Er-doped fiber 5; Coupling mechanism I2 also connects the photoacoustic cell device with optical fiber 6 by Erbium-Doped Fiber Amplifier (EDFA) 7, optical fiber collimator 8 simultaneously, and power modulation frequency is sent into demodulating equipment.Sinusoidal signal generator, sawtooth signal generator and direct current signal stack back are as the driving power of semiconductor laser, power supply is modulated by controller, and this controller output modulating frequency is as the reference signal frequency 27 of phase-locked amplifying circuit 28 in the demodulating equipment simultaneously.
As shown in Figure 1, embodiment comprises the photoacoustic cell device, and the photoacoustic cell device comprises resonant cavity 13, and resonant cavity 13 two ends are provided with cushion chamber 12, is respectively equipped with the Brewster optical window 9 of ZnSe in cushion chamber 12 ends; Resonant cavity 13 is provided with air intake opening 10 and gas outlet 11 is communicated with gas to be measured; The photo-acoustic sound wave sensor comprises the phase shift er-doped grating fibers 14 of 1/4 wavelength, and their ring-types are laid on resonant cavity 13 inwalls; The Brewster optical window 9 of ZnSe cooperates with optical fiber collimator 8, the axle center conllinear collimation of laser incident direction and resonant cavity 13.Resonant cavity 13 is a brass system; Cushion chamber 12 radiuses are 3 times of resonant cavity 13 radiuses, and length is 1/2 of resonant cavity 13.Resonant cavity 13 two ends are positioned at the node position of standing wave, and turnover, gas port are arranged on this place; The Brewster optical window 9 of ZnSe also is positioned at the node position of sound wave.
As shown in Figure 1, embodiment comprises demodulating equipment, demodulating equipment comprises the 980/1550 wavelength division multiplexer WDM15 that is connected with the photo-acoustic sound wave sensor, it is connected with optoisolator II17 with the 980nm semiconductor laser LD16 of magnetic tape trailer fibre respectively, optoisolator II17 is connected with fiber coupler DC119 through optical fiber 6, fiber coupler DC119 respectively with interferometer a arm 20 and interferometer b arm 21, interferometer a arm 20 is connected with fiber coupler DC223 through coupling mechanism II22, interferometer b arm 21 directly is connected with fiber coupler DC223, fiber coupler DC223 is connected with photoelectric detector PD 225 with photoelectric detector PD 124 respectively, 225 of photoelectric detector PD 124 and photoelectric detector PD are connected with differential amplifier circuit 26, differential amplifier circuit 26 is connected with phase-locked amplifying circuit 28, and phase-locked amplifying circuit 28 is connected with data collecting card 18.
The utility model is sent out method of work: photoacoustic cell is positioned at test site, the demodulation part of light source and photo-acoustic sound wave sensor is positioned at a distance, the laser that charged source Modulated Semiconductor Laser device LD1 sends enters the power supply loop through coupling mechanism I2, through behind the Er-doped fiber 5, behind optoisolator I4 and adjustable insulating device 3, be transferred to coupling mechanism I2 again, a part feeds back in the Er-doped fiber 5 through coupling mechanism I2, realize loop oscillation, another part is coupled to output terminal output, the laser of output is through optical fiber 6 and Erbium-Doped Fiber Amplifier (EDFA) 7, after after optical fiber collimator 8 aimings, the Brewster optical window 9 that sees through ZnSe incides in the photoacoustic cell, photoacoustic cell is processed into by brass, at two ends, resonant cavity 13 left and right sides cushion chamber 12 is arranged, its radius is about 3 times of resonant cavity 13 radiuses, and length is 1/2 of resonant cavity, incident laser, cushion chamber 12, resonant cavity 13 axle center are located along the same line.Point midway at resonant cavity 13, be wound with the phase shift er-doped grating fibers 14 of 1/4 wavelength along inwall direction ring-type, in resonant cavity, always be about 5 centimetres, survey the intensity of sound pressure signal, in detection process, the 980nm semiconductor laser LD16 of magnetic tape trailer fibre is as the pumping source of photo-acoustic sound wave sensor, pump light enters the phase shift er-doped grating fibers 14 of 1/4 wavelength after through 980/1550 wavelength division multiplexer 15, light signal through optoisolator II17 output arrives fiber coupler DC119 through optical fiber 6, the two-way light beam that is divided into apart, enter interferometer a arm 20 respectively, interferometer b arm 21, enter the relevant again mixing of fiber coupler DC223 at last, in output terminal photoelectric detector PD 124 and photoelectric detector PD 225 output result of interference, convert electric signal derives from modulation power source through differential amplifier circuit 26 and phase-locked its reference signal frequency of amplifying circuit 28(reference signal frequency 27 to through photoelectric commutator) output results to data collecting card 18 after handling.

Claims (8)

1. the intrinsic safety optoacoustic spectroscopy gas monitoring system based on the photo-acoustic sound wave sensor is characterized in that, the laser that light supply apparatus produces is connected with the photoacoustic cell device through optical fiber collimator by optical fiber, the axle center conllinear collimation of laser incident direction and photoacoustic cell device; The photo-acoustic sound wave sensor is connected with the photoacoustic cell device, and the photoacoustic cell device is communicated with gas to be measured; The phase shift er-doped grating fibers ring-type of 1/4 wavelength in the photo-acoustic sound wave sensor is laid on photoacoustic cell device inwall, and the optoisolator II in the photo-acoustic sound wave sensor then is connected with demodulating equipment simultaneously, and demodulating equipment is connected with data collector.
2. the intrinsic safety optoacoustic spectroscopy gas monitoring system based on the photo-acoustic sound wave sensor as claimed in claim 1, it is characterized in that, described light supply apparatus comprises charged source Modulated Semiconductor Laser device LD, it enters the power supply loop through coupling mechanism I, through behind the Er-doped fiber, the flashlight that produces is transferred to coupling mechanism behind optoisolator and adjustable insulating device, a part feeds back in the Er-doped fiber through coupling mechanism I, realizes loop oscillation; Another part is coupled to output terminal output, and the laser of output is through optical fiber and Erbium-Doped Fiber Amplifier (EDFA), after after the optical fiber collimator aiming, incide in the photoacoustic cell device; Power supply is modulated to sinusoidal signal generator, sawtooth signal generator and the direct current signal stack back driving power as semiconductor laser, power supply is modulated by controller, and this controller output modulating frequency is as the reference signal frequency of phase-locked amplifying circuit in the demodulating equipment simultaneously.
3. the intrinsic safety optoacoustic spectroscopy gas monitoring system based on the photo-acoustic sound wave sensor as claimed in claim 1, it is characterized in that, described photo-acoustic sound wave sensor comprises the phase shift er-doped grating fibers of 1/4 wavelength, 980/1550 wavelength division multiplexer WDM, the 980nm semiconductor laser LD of magnetic tape trailer fibre and optoisolator II, the phase shift er-doped grating fibers of 1/4 wavelength is connected with 980/1550 wavelength division multiplexer WDM, the 980nm semiconductor laser LD of magnetic tape trailer fibre also is connected with 980/1550 wavelength division multiplexer WDM simultaneously, 980/1550 wavelength division multiplexer WDM is connected with optoisolator II, and optoisolator II is connected with demodulating equipment.
4. the intrinsic safety optoacoustic spectroscopy gas monitoring system based on the photo-acoustic sound wave sensor as claimed in claim 1, it is characterized in that, described demodulating equipment comprises fiber coupler DC1, fiber coupler DC1 respectively with interferometer a arm and interferometer b arm, interferometer a arm is connected with fiber coupler DC2 through coupling mechanism II, interferometer b arm directly is connected with fiber coupler DC2, fiber coupler DC2 is connected with photoelectric detector PD 2 with photoelectric detector PD 1 respectively, 2 of photoelectric detector PD 1 and photoelectric detector PD are connected with differential amplifier circuit, differential amplifier circuit is connected with phase-locked amplifying circuit, the power modulation frequency of the Lights section is as the reference signal frequency of phase-locked amplifying circuit, phase-locked amplifying circuit and data acquisition card connection.
5. the intrinsic safety optoacoustic spectroscopy gas monitoring system based on the photo-acoustic sound wave sensor as claimed in claim 1 is characterized in that described data collector is a data collecting card.
6. the intrinsic safety optoacoustic spectroscopy gas monitoring system based on the photo-acoustic sound wave sensor as claimed in claim 1 or 2 is characterized in that described photoacoustic cell device is processed into by brass, and it comprises resonant cavity, and resonant cavity is communicated with air intake opening and gas outlet; At the resonant cavity two ends are internal diameter cushion chambers greater than resonant cavity, are Brewster optical windows of ZnSe in the cushion chamber end of two cushion chambers; The axle center of incident laser, cushion chamber, resonant cavity is located along the same line, and in the center of resonant cavity, is wound with the phase shift er-doped grating fibers of 1/4 wavelength along the inwall ring-type.
7. the intrinsic safety optoacoustic spectroscopy gas monitoring system based on the photo-acoustic sound wave sensor as claimed in claim 6 is characterized in that described cushion chamber radius is 3 times of resonant cavity radius, and length is 1/2 of resonant cavity.
8. the intrinsic safety optoacoustic spectroscopy gas monitoring system based on the photo-acoustic sound wave sensor as claimed in claim 6 is characterized in that described resonant cavity two ends are positioned at the node position of standing wave, and import and export and gas outlet are arranged on this place; The Brewster optical window of described ZnSe also is positioned at the node position of sound wave.
CN2010201380274U 2010-03-22 2010-03-22 Eigen safe optoacoustic spectrum gas monitoring system based on optical acoustic sensor Expired - Fee Related CN201637668U (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101887009B (en) * 2010-03-22 2012-07-04 山东省科学院自动化研究所 Intrinsic safety photoacoustic spectrum gas monitoring system based on optical acoustic sensor
CN104931427A (en) * 2015-07-02 2015-09-23 中国科学院合肥物质科学研究院 Opto-acoustic gas detection device based on multiple reflections of optical path
CN107677610A (en) * 2017-09-15 2018-02-09 大连理工大学 A kind of cantilever beam and photoacoustic cell double resonance enhanced photo acoustic spectral detection system and method
CN114062274A (en) * 2021-11-18 2022-02-18 国网安徽省电力有限公司电力科学研究院 Optical fiber photoacoustic sensing system and method for detecting dissolved gas in oil

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101887009B (en) * 2010-03-22 2012-07-04 山东省科学院自动化研究所 Intrinsic safety photoacoustic spectrum gas monitoring system based on optical acoustic sensor
CN104931427A (en) * 2015-07-02 2015-09-23 中国科学院合肥物质科学研究院 Opto-acoustic gas detection device based on multiple reflections of optical path
CN107677610A (en) * 2017-09-15 2018-02-09 大连理工大学 A kind of cantilever beam and photoacoustic cell double resonance enhanced photo acoustic spectral detection system and method
CN114062274A (en) * 2021-11-18 2022-02-18 国网安徽省电力有限公司电力科学研究院 Optical fiber photoacoustic sensing system and method for detecting dissolved gas in oil

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