CN201622361U - Two-channel spectrum energy tuning optical filter - Google Patents
Two-channel spectrum energy tuning optical filter Download PDFInfo
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- CN201622361U CN201622361U CN2009201782617U CN200920178261U CN201622361U CN 201622361 U CN201622361 U CN 201622361U CN 2009201782617 U CN2009201782617 U CN 2009201782617U CN 200920178261 U CN200920178261 U CN 200920178261U CN 201622361 U CN201622361 U CN 201622361U
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Abstract
The utility model relates to a two-channel spectrum energy tuning optical filter, which is characterized by being manufactured in the following steps of: plating a layer of uniform hafnium dioxide film layer on a substrate layer, plating a layer of photoresist on the hafnium dioxide film layer, and manufacturing a grating using the photoresist and incidence medium as high and low refractive index materials on the photoresist layer. The spectrum energy can be reflected in a tuning mode in two channels through adjusting an azimuth angle. The utility model has convenient implementation and narrow-band spectrum, and can be widely applied to the field of optical instruments, optical detection, optical measurement, biomedicine and the like.
Description
Technical field
The utility model relates to a kind of double-channel spectral energy tuning filter, be specifically related to utilize and regulate the energy tuning filter that the position angle obtains binary channels tuned reflective spectral energy, can be applicable to technical fields such as optical instrument, optical detection, optical measurement and biomedicine.
Background technology
The optical filter device has application fields, for example in the biological study field, needed spectrum is normally obtained through optical filter by light source, the result that studies for a long period of time clearly illustrates that: the spectroscopic optics parameter that obtains by optical filter is to the generation key effect of growing of biology, and spectrum can influence biological growth, the control biological development changes.But up to now, owing to can't obtain the adjustable light source of spectral energy by current experiments instrument and means, the researcher still can not regulate and control and set the needed spectrum parameter of experimentation subtly, therefore restricting the research of photobiology accurate quantification and carrying out in a deep going way, so, the optical filter device in the biology with the technical research of spectrum parameter related science, be a vital device.A kind of infrared absorbing filter is formerly arranged, Chinese invention patent " infrared absorbing filter ", the patent No.: ZL00135776.X in the technology.This optical filter has lot of advantages, still, still exists some essence not enough: the 1) spectrum that obtains by this infrared absorbing filter, and its spectrum parameter can't be regulated, the optical filter very flexible; 2) optical filter is implemented complexity, and the spectral bandwidth broad, has limited the usable range of optical filter.
The utility model content
For overcoming the above-mentioned defective of prior art, the utility model discloses a kind of double-channel spectral energy tuning filter, not only simple in structure, have narrowband reflection spectrum, and can realize that two pass reflectance spectrum energy distributions regulates by changing the position angle.Energy tuning filter of the present utility model is based on the guide mode resonance structure and a kind of brand-new energy tuning filter that designs.
A kind of double-channel spectral energy tuning filter, it is characterized in that: plate the even hafnium oxide rete of one deck at basalis, plate one deck photoresist and oven dry on the hafnium oxide rete, on photoresist layer, make the grating that high low-index material is photoresist and incident medium again, promptly obtain double-channel spectral energy tuning filter with exposure and developing technique.
Can realize binary channels tuned reflective spectral energy by regulating the position angle.
Compared with prior art, advantage of the present utility model and good effect are: the structure of utilizing guide mode resonance optical filter, reach purpose by regulating the position angle at the quick tuned reflective spectral energy of binary channels, have and implement convenient, narrow-band spectrum, can be widely used in fields such as optical instrument, optical detection, optical measurement and biomedicine.
Description of drawings
Fig. 1 is the double-channel spectral energy tuning filter structural representation;
Fig. 2 is 0 ° of incident angle in the utility model air, the incident of TE polarization, and during different orientations, spectral energy tuning filter is at the reflective spectral property curve of different passages.
(a)0°，(b)20°，(c)30°，(d)45°，(e)60°，(f)70°，(g)80°，(h)90°。
1. basalis, 2. evenly hafnium oxide rete, the 3. photoresist of grating high index of refraction, 4. low refracting sphere air, 5. incident medium of grating.
Embodiment
Below in conjunction with drawings and Examples the utility model is described in further detail, but present embodiment is not limited to the utility model, every employing analog structure of the present utility model and similar variation thereof all should be listed protection domain of the present utility model in.
A kind of double-channel spectral energy tuning filter, the concrete parameter of embodiment is: grating cycle 409nm, dutycycle 0.3, grating depth 134nm, the high low-index material of grating is respectively photoresist and air, corresponding refractive index is respectively 1.63 and 1.0, and the hafnium oxide rete is as ducting layer, and refractive index is 1.98.
Concrete steps are as follows:
1. on basalis 1, plate the even hafnium oxide rete 2 that a layer thickness is 160nm with the electronics evaporation method.
2. on hafnium oxide rete 2, plate photoresist 3 and the oven dry that a layer thickness is 227nm with spin-coating method.
3. on photoresist layer, make the grating that high low-index material is photoresist and air with exposure and developing technique.The photoresist model that embodiment adopted is ARP3120, and this model positive photoresist is a 441.6nm light beam sensitization sensitivity height to wavelength.Therefore, holographic exposure utilizes optical wavelength to interfere on the photoresist layer surface for the monochromatic uniform plane wave of the helium cadmium laser generation of 441.6nm, and concentration, dilutability and the development time by the control developer solution obtains required optical grating construction to the photoresist developing that has exposed again.
Obtain the structure of double-channel spectral energy tuning filter as shown in Figure 1 like this.
Incident medium 5 is an air.By regulating the narrowband reflection spectrum that the position angle can change different passages, reach the function of double-channel spectral energy tuning filter.
Fig. 2 is 0 ° of incident angle in the air of the present utility model, the incident of TE polarization, and the double-channel spectral energy tuning filter during different orientations is at the reflective spectral property curve of different passages (wavelength is 723nm and 684.6nm).(a) position angle is 0 ° among Fig. 2, and (b) position angle is 20 °, and (c) position angle is 30 °, and (d) position angle is 45 °, and (e) position angle is 60 °, and (f) position angle is 70 °, and (g) position angle is 80 °, and (h) position angle is 90 °.As seen from the figure, the resonant wavelength of this optical filter when 0 ° of position angle is 723nm, and the resonant wavelength the when position angle changes to 90 ° is 684.6nm, and the position angle is when being 0 ° and 90 °, all approaches 100% at the reflectivity of resonance wave strong point.When the position angle was 45 °, reflectivity was about 50% at wavelength 684.6nm and 723nm place, the energy of reflectance spectrum along with the position angle from 0 ° to 90 ° variation two passage linear change.The utility model has successfully realized utilizing the function of the tuning spectrum of double-channel spectral energy tuning filter.
Claims (1)
1. double-channel spectral energy tuning filter, it is characterized in that: plate the even hafnium oxide rete of one deck at basalis, plate one deck photoresist on the hafnium oxide rete, making high low-index material again on photoresist layer is the grating of photoresist and incident medium, promptly obtains double-channel spectral energy tuning filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201782617U CN201622361U (en) | 2009-10-20 | 2009-10-20 | Two-channel spectrum energy tuning optical filter |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201782617U CN201622361U (en) | 2009-10-20 | 2009-10-20 | Two-channel spectrum energy tuning optical filter |
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| Publication Number | Publication Date |
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| CN201622361U true CN201622361U (en) | 2010-11-03 |
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| CN2009201782617U Expired - Fee Related CN201622361U (en) | 2009-10-20 | 2009-10-20 | Two-channel spectrum energy tuning optical filter |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102530822A (en) * | 2011-12-26 | 2012-07-04 | 南京邮电大学 | Suspending imaging hafnium oxide substrate nitride syntony photon device and preparation method thereof |
| CN102570313A (en) * | 2011-12-26 | 2012-07-11 | 南京邮电大学 | Integrated photonic device based on silicon substrate nitride material and preparation method of same |
| CN102602878A (en) * | 2011-12-26 | 2012-07-25 | 南京邮电大学 | Silicon substrate nitride based optical micro-electromechanical device and production method thereof |
| CN103185918A (en) * | 2013-03-18 | 2013-07-03 | 南京邮电大学 | Micro-electro-mechanical adjustable nitride resonant grating and preparation method thereof |
| CN103424995A (en) * | 2013-06-05 | 2013-12-04 | 上海理工大学 | Optimization method for photoresist layer of guide mode resonance optical filter |
-
2009
- 2009-10-20 CN CN2009201782617U patent/CN201622361U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102530822A (en) * | 2011-12-26 | 2012-07-04 | 南京邮电大学 | Suspending imaging hafnium oxide substrate nitride syntony photon device and preparation method thereof |
| CN102570313A (en) * | 2011-12-26 | 2012-07-11 | 南京邮电大学 | Integrated photonic device based on silicon substrate nitride material and preparation method of same |
| CN102602878A (en) * | 2011-12-26 | 2012-07-25 | 南京邮电大学 | Silicon substrate nitride based optical micro-electromechanical device and production method thereof |
| CN102570313B (en) * | 2011-12-26 | 2013-12-25 | 南京邮电大学 | Integrated photonic device based on silicon substrate nitride material and preparation method of same |
| CN103185918A (en) * | 2013-03-18 | 2013-07-03 | 南京邮电大学 | Micro-electro-mechanical adjustable nitride resonant grating and preparation method thereof |
| CN103185918B (en) * | 2013-03-18 | 2015-05-06 | 南京邮电大学 | Micro-electro-mechanical adjustable nitride resonant grating |
| CN103424995A (en) * | 2013-06-05 | 2013-12-04 | 上海理工大学 | Optimization method for photoresist layer of guide mode resonance optical filter |
| CN103424995B (en) * | 2013-06-05 | 2015-02-11 | 上海理工大学 | Optimization method for photoresist layer of guide mode resonance optical filter |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101103 Termination date: 20141020 |
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| EXPY | Termination of patent right or utility model |