CN201619013U - 用于srp系统研磨机的夹具 - Google Patents
用于srp系统研磨机的夹具 Download PDFInfo
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- CN201619013U CN201619013U CN2010200363322U CN201020036332U CN201619013U CN 201619013 U CN201619013 U CN 201619013U CN 2010200363322 U CN2010200363322 U CN 2010200363322U CN 201020036332 U CN201020036332 U CN 201020036332U CN 201619013 U CN201619013 U CN 201619013U
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CN2010200363322U CN201619013U (zh) | 2010-01-18 | 2010-01-18 | 用于srp系统研磨机的夹具 |
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CN2010200363322U CN201619013U (zh) | 2010-01-18 | 2010-01-18 | 用于srp系统研磨机的夹具 |
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CN201619013U true CN201619013U (zh) | 2010-11-03 |
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CN2010200363322U Expired - Fee Related CN201619013U (zh) | 2010-01-18 | 2010-01-18 | 用于srp系统研磨机的夹具 |
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Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20140113 |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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TR01 | Transfer of patent right |
Effective date of registration: 20140113 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101103 Termination date: 20150118 |
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EXPY | Termination of patent right or utility model |