CN201607215U - Non-contact fretsaw guide wheel groove shape detector - Google Patents

Non-contact fretsaw guide wheel groove shape detector Download PDF

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Publication number
CN201607215U
CN201607215U CN2009202177301U CN200920217730U CN201607215U CN 201607215 U CN201607215 U CN 201607215U CN 2009202177301 U CN2009202177301 U CN 2009202177301U CN 200920217730 U CN200920217730 U CN 200920217730U CN 201607215 U CN201607215 U CN 201607215U
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CN
China
Prior art keywords
imaging lens
workpiece
measured
guide wheel
guide rail
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2009202177301U
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Chinese (zh)
Inventor
张新忠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuxi Sida New Energy Technology Co.,Ltd.
Original Assignee
WUXI SIDA CONTROLLED EQUIPMENT CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to CN2009202177301U priority Critical patent/CN201607215U/en
Application granted granted Critical
Publication of CN201607215U publication Critical patent/CN201607215U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

The utility model relates to a non-contact fretsaw guide wheel groove shape detector, which comprises a base, an imaging lens and a computer processing element, wherein the base is used for support a workpiece to be measured; the CCD imaging lens is arranged correspondingly to upper part of the workpiece to be measured at the side surface of the base; a high-brightness whitelight LED adjustable light source and an X-axis and Y-axis measurement grating bar are arranged under the workpiece to be measured; the imaging lens is arranged on a linear guide rail fixed on the base by a support; and the strike of the guide rail is parallel to the axle center of the workpiece to be measured. When in measuring, the central direction of the imaging lens is tangent with the surface of the workpiece to be measured, the imaging lens is used for projection imaging for the surface groove shape of the workpiece to be measured, the projected image can be amplified by the process of the computer program and then is displayed on a software operation interface, and the image on the workpiece can be amplified by dozens of times even hundreds of times after the processes, therefore, a user can label various data such as the groove space, the angle, the groove shape depth and the like of the workpiece to be measured according to the image analyzing software, and the flaw of the surface of the workpiece to be measured can be amplified and displayed on the soft interface, so as to be convenient for a client to detect and track the quality of a product.

Description

A kind of non-contact scroll saw guide wheel slot type detector
Technical field
The utility model relates to a kind of slot type detector of cutting steel wire guide roller of the silicon chip cutting equipment that is used for semiconductor and photovoltaic industry, also can be used for the screw thread form of other field of machining and the detection of size.
Background technology
The grooved of the cutting steel wire guide roller of the silicon chip cutting equipment of semiconductor and photovoltaic industry detects, measuring equipment commonly used all is the survey instrument that adopts the traditional mechanical structure, as profile measurer etc., because the grooved surface of scroll saw guide wheel own is very tiny, distance between general groove and the groove is less than 0.4 millimeter, so it is big to adopt common measuring equipment to measure difficulty, measurement result accuracy is poor, and precision is also low.The part of slight flaws is particularly arranged for guide pulley surface, and traditional survey instrument can not meet the demands far away.So based on the problems referred to above, I have designed a kind of novel high precision non-contact scroll saw guide wheel slot type survey instrument, amplify after adopting the imaging of CCD camera, measure by computer system then and compare, not only can the measuring flume distance, can also measure the grooved angle and the degree of depth simultaneously, compare with traditional survey instrument, this instrument is a technical leap, can improve the precision and the accuracy of measurement greatly, and can observe the slight flaws part of guide pulley surface intuitively.When measuring, need not consumptive material, use cost is low.Have good market outlook.
The utility model content
The purpose of this utility model provides the high precision measurement instrument that a kind of non-contact scroll saw guide wheel slot type detects, not high, the big problem of measurement difficulty of solution traditional measurement instrument measuring accuracy.
The purpose of this utility model is to be achieved through the following technical solutions:
The high precision measurement instrument that a kind of non-contact scroll saw guide wheel slot type detects, comprise the pedestal, CCD imaging lens, high-brightness white-light LED tunable light source, X-axis Y-axis measurement grating chi and the Computer Processing element that support measured workpiece, above the corresponding measured workpiece in the side of pedestal, be provided with the CCD imaging lens, described imaging lens is installed on the guide rail that is fixed on the pedestal by support, the trend of described guide rail and the axis parallel of measured workpiece, and the side of the straight line that become with tunable light source of imaging lens and measured workpiece is tangent.
The CCD imaging lens of top and the high-brightness white-light LED tunable light source of below are installed on the same movable platform, when measuring, move simultaneously, so CCD imaging lens and light source remain straight line, imaging is clear.
The X-axis Y-axis is provided with measures high-resolution grating chi and Survey Software cooperation, accurately measures, and can select the grating chi of 0.1um, 0.3um, 0.5um and 1um resolution according to the requirement of measuring accuracy.
The movable platform of measured workpiece is installed on the base by guide rail, and moves by servomotor drive leading screw control movable platform, and the table top load-bearing is big, and is not yielding, can satisfy the clamping of the scroll saw guide wheel of different length and weight.
The CCD imaging lens is installed on the guide rail, drives leading screw control imaging lens by servomotor and moves up and down focusing, and it moves up and down and can operate by being contained in the other control knob of computing machine, and is easy to use.
The move left and right of the movable platform of CCD imaging lens and high-brightness white-light LED tunable light source is housed, the control of employing servomotor, its side-to-side movement can be operated by being contained in the other control knob of computing machine, its translational speed cocoa is by being contained in the knob stepless speed regulation of the other servocontrol power supply of computing machine, and is easy to use.
Described support is installed on the guide rail that is fixed on the base, and drives leading screw control support move left and right by servomotor.
When measuring, surperficial tangent with the center position of imaging lens and measured workpiece, surperficial grooved to measured workpiece carries out projection imaging, amplify through after the processing of computer program after the imaging, be presented on the software operation interface, imaging on the workpiece can be carried out the amplification of tens times even hundreds of times after handling through these, and the user can mark the slot pitch of measured workpiece according to the data of imaging analysis software and grating chi, multinomial data such as the angle and the grooved degree of depth, and the flaw on measured workpiece surface also can be shown blown up on the software interface, is convenient to the client quality of product is carried out detection and tracking.
Description of drawings
With embodiment the utility model is described in further detail with reference to the accompanying drawings below.
Fig. 1 is the side-looking structural drawing of the described non-contact scroll saw guide wheel slot type detector of the utility model embodiment
Fig. 2 is the plane structure chart of base
Among the figure:
1, pedestal; 2, imaging lens; 3, guide rail; 4, support; 5, measured workpiece; 6, grating chi; 7, tunable light source; 8, servomotor; 9, leading screw; 10, movable platform.
Embodiment
Shown in Fig. 1-2, the high precision measurement instrument that non-contact scroll saw guide wheel slot type described in the utility model detects, comprise the pedestal 1 that supports measured workpiece, CCD imaging lens 2, high-brightness white-light LED tunable light source 7, the X-axis Y-axis is measured grating chi 6 and Computer Processing element, above the corresponding measured workpiece 5 in the side of pedestal 1, be provided with CCD imaging lens 2, described imaging lens 2 is installed on the guide rail 3 that is fixed on the pedestal 1 by support 4, the axis parallel of the trend of described guide rail 3 and measured workpiece 5, and the side of the straight line that become with tunable light source 7 of imaging lens 2 and measured workpiece 5 is tangent.
The CCD imaging lens 2 of top and the high-brightness white-light LED tunable light source 5 of below are installed on the same movable platform 10, when measuring, move simultaneously, so CCD imaging lens and light source remain straight line, imaging is clear.
The X-axis Y-axis is provided with measures high-resolution grating chi 6 and Survey Software cooperation, accurately measures, and can select the grating chi 6 of 0.1um, 0.3um, 0.5um and 1um resolution according to the requirement of measuring accuracy.
The movable platform 10 of measured workpiece 5 is installed on the base 1 by guide rail 3, and moves by servomotor 8 drive leading screws 9 control movable platforms 10, and the table top load-bearing is big, and is not yielding, can satisfy the clamping of the scroll saw guide wheel of different length and weight.
CCD imaging lens 2 is installed on the guide rail 3, drives leading screw 9 control imaging lens 2 by servomotor 8 and moves up and down focusing, and it moves up and down and can operate by being contained in the other control knob of computing machine, and is easy to use.
The move left and right of the movable platform 10 of CCD imaging lens 2 and high-brightness white-light LED tunable light source 7 is housed, adopt servomotor 8 controls, its side-to-side movement can be operated by being contained in the other control knob of computing machine, its translational speed cocoa is by being contained in the knob stepless speed regulation of the other servocontrol power supply of computing machine, and is easy to use.
Described support 4 is installed on the guide rail 3 that is fixed on the base 1, and drives leading screw 9 control supports 4 move left and right by servomotor 8.
When measuring, surperficial tangent with the center position of imaging lens 2 and measured workpiece 5, thread surface to measured workpiece 5 carries out projection imaging, amplify through after the processing of computer program after the imaging, be presented on the software operation interface, imaging on the workpiece can be carried out the amplification of tens times even hundreds of times after handling through these, and the user can be according to the pitch of imaging analysis measured workpiece, multinomial data such as the angle of rifling, and the flaw on measured workpiece surface also can be shown blown up on the software interface, is convenient to the client quality of product is carried out detection and tracking.
The design of the guide rail 4 of this instrument can make operator's traversing carriage 3 carry out many places and measure, because the trend of guide rail is identical with the fixed-direction of measured workpiece 5, so can guarantee that in traversing carriage 3 imaging lens 2 remains unchanged apart from the distance at the point of contact of measured workpiece 5, so can not influence imaging effect, guarantee that the precision of measuring in the moving process is constant.

Claims (7)

1. non-contact scroll saw guide wheel slot type detector device, comprise the pedestal, CCD imaging lens, high-brightness white-light LED tunable light source and the Computer Processing element that support measured workpiece, it is characterized in that, above the corresponding measured workpiece in the side of pedestal, be provided with imaging lens, described imaging lens is installed on the guide rail that is fixed on the pedestal by support, the trend of described guide rail and the axis parallel of measured workpiece, and the side of the straight line that become with tunable light source of imaging lens and measured workpiece is tangent.
2. non-contact scroll saw guide wheel slot type detector device according to claim 1 is characterized in that, the CCD imaging lens of top and the high-brightness white-light LED tunable light source of below are installed on the same movable platform.
3. non-contact scroll saw guide wheel slot type detector device according to claim 1 is characterized in that, also includes to measure high-resolution grating chi, is located at the X-axis Y-axis.
4. non-contact scroll saw guide wheel slot type detector device according to claim 1 is characterized in that the movable platform of measured workpiece is installed on the base by guide rail, and moves by servomotor drive leading screw control movable platform.
5. non-contact scroll saw guide wheel slot type detector device according to claim 1 is characterized in that the CCD imaging lens is installed on the guide rail, drives leading screw control imaging lens by servomotor and moves up and down focusing.
6. non-contact scroll saw guide wheel slot type detector device according to claim 1 is characterized in that, the move left and right of the movable platform of CCD imaging lens and high-brightness white-light LED tunable light source is housed, and adopts servomotor control.
7. non-contact scroll saw guide wheel slot type detector device according to claim 1 is characterized in that described support is installed on the guide rail that is fixed on the base, and drives leading screw control support move left and right by servomotor.
CN2009202177301U 2009-09-29 2009-09-29 Non-contact fretsaw guide wheel groove shape detector Expired - Lifetime CN201607215U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009202177301U CN201607215U (en) 2009-09-29 2009-09-29 Non-contact fretsaw guide wheel groove shape detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009202177301U CN201607215U (en) 2009-09-29 2009-09-29 Non-contact fretsaw guide wheel groove shape detector

Publications (1)

Publication Number Publication Date
CN201607215U true CN201607215U (en) 2010-10-13

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CN2009202177301U Expired - Lifetime CN201607215U (en) 2009-09-29 2009-09-29 Non-contact fretsaw guide wheel groove shape detector

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103913463A (en) * 2014-03-07 2014-07-09 陕西理工学院 Ball screw reconstruction method by utilization of linear array CCD
CN107741202A (en) * 2017-11-17 2018-02-27 山东理工大学 A kind of leaf springs of car camber detection means

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103913463A (en) * 2014-03-07 2014-07-09 陕西理工学院 Ball screw reconstruction method by utilization of linear array CCD
CN107741202A (en) * 2017-11-17 2018-02-27 山东理工大学 A kind of leaf springs of car camber detection means

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: WUXI SIDA NEW ENERGY TECHNOLOGY CO., LTD.

Free format text: FORMER OWNER: WUXI SIDA CONTROLLED EQUIPMENT CO., LTD.

Effective date: 20110518

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20110518

Address after: 214187 312 National Road South, Renmin Road, Huishan District, Wuxi, Jiangsu

Patentee after: Wuxi Sida New Energy Technology Co.,Ltd.

Address before: 214187 312 National Road South, Renmin Road, Huishan District, Wuxi, Jiangsu

Patentee before: WuXi Sida Controlled Equipment Co., Ltd.

AV01 Patent right actively abandoned

Granted publication date: 20101013

Effective date of abandoning: 20090929