CN201596642U - Vacuum ultrasonic cleaning machine - Google Patents

Vacuum ultrasonic cleaning machine Download PDF

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Publication number
CN201596642U
CN201596642U CN2009202622403U CN200920262240U CN201596642U CN 201596642 U CN201596642 U CN 201596642U CN 2009202622403 U CN2009202622403 U CN 2009202622403U CN 200920262240 U CN200920262240 U CN 200920262240U CN 201596642 U CN201596642 U CN 201596642U
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CN
China
Prior art keywords
vacuum
cleaning machine
ultrasonic cleaning
sprocket
throwing
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Expired - Fee Related
Application number
CN2009202622403U
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Chinese (zh)
Inventor
高瑞远
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Hkd Ultrasonic Equipment Co ltd
Original Assignee
Shenzhen Hkd Ultrasonic Equipment Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Priority to CN2009202622403U priority Critical patent/CN201596642U/en
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Publication of CN201596642U publication Critical patent/CN201596642U/en
Anticipated expiration legal-status Critical
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Abstract

The utility model relates to a vacuum ultrasonic cleaning machine, which comprises a vacuum cleaning groove (1). An ultrasonic generator (2) and a throwing frame (9) are disposed inside the vacuum cleaning groove (1), a driving motor (6) is disposed outside the throwing frame (9) via a rotating seal mechanism (1), the throwing frame (9) is provided with a first rotating shaft (105) and a second rotating shaft (106) which are connected via a transmission mechanism, and the first rotating shaft (105) and the second rotating shaft (106) are driven by the driving motor (6). The vacuum cleaning machine can lead workpieces to be thrown up and down and rotate during an ultrasonic cleaning process in a vacuum state, is fine in sealing property, reasonable and compact in overall structure and design and stable in operation without noise, and can totally meet requirements of cleaning complex workpieces.

Description

A kind of vacuum ultrasonic cleaning machine
Technical field
The utility model relates to the ultrasonic cleaning industry, more particularly, relates to a kind of vacuum ultrasonic cleaning machine.
Background technology
In cleaning industry, such as hardware stamping spare, automobile metal precise part, compressor air-conditioning accessory, electronic component etc., because the workpiece appearance structure is various and complicated, employing conventional clean pattern ubiquity cleans not totally, thorough phenomenon.The workpiece that more particularly has blind hole, micropore etc., conventional clean pattern need carry out multipass, multiple working procedure cleans, and this increases production cost undoubtedly, production efficiency can't improve, and cleaning performance is very little, can not satisfy customer requirement, has a strong impact on the market competitiveness of enterprise.
The utility model content
The technical problems to be solved in the utility model is that the defective at the above-mentioned conventional clean pattern of prior art need be carried out multipass, multiple working procedure cleaning provides a kind of vacuum ultrasonic cleaning machine.
The technical scheme that its technical problem that solves the utility model adopts is: construct a kind of vacuum ultrasonic cleaning machine, comprise the vacuum cleaned groove, described vacuum cleaned groove inside is provided with supersonic generator and throws moving frame, the moving frame of described throwing is by the external drive motors of rotary seal mechanism, the moving frame of described throwing is provided with first power transmission shaft and second power transmission shaft that connects by transmission mechanism, and described first power transmission shaft and second power transmission shaft drive by drive motors.
In vacuum ultrasonic cleaning machine described in the utility model, the moving frame of described throwing is provided with the washing basket guide plate, cleans basket and is positioned at the zone that described washing basket guide plate is surrounded;
Also be provided with directive wheel and throw the action-oriented plate on the moving frame of described throwing, described directive wheel is installed in by governor motion on the madial wall of described vacuum cleaned groove, and described directive wheel is adjacent with throwing action-oriented plate.
In vacuum ultrasonic cleaning machine described in the utility model, described rotary seal mechanism comprises axle, and the end of described axle in vacuum cleaned groove outside is connected with drive motors by transmission mechanism, the described sheathed eccentric wheel of an end in vacuum cleaned groove inside;
Described eccentric wheel is provided with latch, and the moving frame of described throwing is provided with fixed axis, and described latch is fixedlyed connected with described fixed axis; Described fixed axis is connected by transmission device with first power transmission shaft.
In vacuum ultrasonic cleaning machine described in the utility model, described axle sleeve is established bearing, and described bearing is contained in the bearing block, and described bearing block one end opening is provided with oil sealing between described bearing and the bearing block bottom.
In vacuum ultrasonic cleaning machine described in the utility model, described bearing block is fixedly mounted on the vacuum cleaned groove by welded flange and the locking flange that locking connects;
Be provided with cushion between described welded flange and the locking flange, described cushion is in pressured state; Described welded flange is welded on the vacuum cleaned groove outer wall, and described locking flange is welded on the bearing block.
In vacuum ultrasonic cleaning machine described in the utility model, be arranged with sealing ring and baffle plate on the described axle, described sealing ring is in impaction state between bearing block bottom and baffle plate.
In vacuum ultrasonic cleaning machine described in the utility model, described cushion is the Teflon pad.
In vacuum ultrasonic cleaning machine described in the utility model, described latch is provided with first installing plate, and described fixed axis is provided with second installing plate, and described first installing plate is fixedlyed connected with second installing plate;
Described first installing plate is installed in latch by bearing, and described second installing plate is installed on the fixed axis by bearing.
In vacuum ultrasonic cleaning machine described in the utility model, also there is the relation of being in transmission connection between described latch and the described fixed axis;
Sheathed rotating sprocket on the described latch, described first installing plate is provided with tightener sprocket, and described fixed axis is provided with double-deck sprocket wheel; Described tightener sprocket, double-deck sprocket wheel and rotating sprocket connect by same chain between described tightener sprocket, double-deck sprocket wheel and the rotating sprocket not on same straight line.
In vacuum ultrasonic cleaning machine described in the utility model, described drive motors is provided with drive sprocket, and the end that described axle is positioned at vacuum cleaned groove outside is provided with outside sprocket wheel, connects by chain between described drive sprocket and the outside sprocket wheel.
Implement vacuum ultrasonic cleaning machine of the present utility model, have following beneficial effect: realize its upset when in the ultrasonic cleaning process of vacuum cleaning machine provided by the utility model under vacuum state workpiece being thrown up and down.The utility model good seal performance, overall construction design are rationally compact, and stable noiselessness satisfies the cleaning performance of complex part fully.Because can realizing throwing, this utility model moves and rotates operation simultaneously simultaneously, or rotation moving with traditional single throwing reaches to be compared the cleaning repeatedly of workpiece, can reduce its cleaning, can effectively solve the cleaning blind area of workpiece, shorten scavenging period greatly, reduce cleaning, enhance productivity greatly, and cleaning performance is splendid, is embodied in:
1) overcomes the moving or rotation cleaning model of traditional single throwing in the cleaning process, can reduce cleaning, reduce production costs, enhance productivity greatly;
2) the workpiece cleaning effect is good, can not occur cleaning the blind area and causes the clean phenomenon of workpiece cleaning for complex part;
3) overall sealing performance is good, can normally move under the environment of condition of high vacuum degree and ultrasonic wave cleaning;
4) overall construction design is rationally compact, stable noiselessness, and can satisfy circle washing basket and the general function of square washing basket.
Description of drawings
The utility model is described in further detail below in conjunction with drawings and Examples, in the accompanying drawing:
Fig. 1 is the structural representation one of the utility model vacuum ultrasonic cleaning machine;
Fig. 2 is the structural representation two of the utility model vacuum ultrasonic cleaning machine;
Fig. 3 is the local enlarged diagram of the I of rotary seal mechanism among Fig. 2;
Fig. 4 is the structural representation three of the utility model vacuum ultrasonic cleaning machine.
The specific embodiment
The utility model is mainly formed an integral body by vacuum cleaned groove, drive motors, transmission mechanism, rotary seal mechanism, axis of rolling bearing sleeve, the moving frame of throwing, power transmission shaft, governor motion and strainer.Rotary seal mechanism one end is connected with the drive motors of vacuum cleaned groove outside, provides driving force by drive motors.The other end of rotary seal mechanism is connected with double-deck sprocket wheel, throws moving frame both sides two turning cylinders are installed.Throwing moving frame left and right sides installation throwing action-oriented plate and washing basket guide plate, directive wheel and governor motion thereof are installed in the vacuum tank left and right sides simultaneously.Throw and move frame by installing plate and transmission mechanism and the complete moving mechanism that moves simultaneously with rotation of throwing of guider formation one cover.
When motor moved, the parts that eccentric wheel in the rotary seal mechanism and axis of rolling bearing sleeve are formed can realize that throwing frame throws up and down; The mechanism of rotary seal simultaneously drives the rotation that the transmission mechanism work on the turning cylinder of throwing on the moving frame can realize changeing basket.
Realize its upset when in the ultrasonic cleaning process of vacuum cleaning machine provided by the utility model under vacuum state workpiece being thrown up and down.Below in conjunction with accompanying drawing the specific embodiment of the present utility model is elaborated.
As shown in Figure 1, Figure 2, Figure 3 and Figure 4, vacuum ultrasonic cleaning machine of the present utility model comprises vacuum cleaned groove 1, and vacuum cleaned groove 1 is provided with vacuum cover sealing device 12.Vacuum cleaned groove 1 inside is provided with supersonic generator 2 and throws moving frame 9, throws moving frame 9 and is provided with first power transmission shaft 105 that connects by transmission mechanism and second power transmission shaft, 106, the first power transmission shafts 105 and second power transmission shaft 106 and drives by drive motors 6.Throw moving frame 9 and be provided with washing basket guide plate 10, clean circle basket 100 or the side's of cleaning basket 101 and be positioned at the zone that washing basket guide plate 10 is surrounded.
Also be provided with directive wheel 102 and throw action-oriented plate 103 on the moving frame 9 of throwing, directive wheel 102 is installed in by governor motion 18 on the madial wall of vacuum cleaned groove 1, and directive wheel 102 is adjacent with throwing action-oriented plate 103.Throwing moving frame guide plate 103 in the present embodiment is trench structure, and directive wheel 102 is positioned at the groove of throwing moving frame guide plate 103.Governor motion 18 can be adjusted the position of directive wheel 102 as the case may be.
The I of rotary seal mechanism comprises axle 77, and axle 77 ends in vacuum cleaned groove 1 outside are connected with drive motors 6 by transmission mechanism.Axle 77 is fixedly mounted on the cell wall of vacuum cleaned groove 1 and passes vacuum cleaned groove 1, axle 77 ends in vacuum cleaned groove 1 outside are provided with hard-wired outside sprocket wheel 71, drive motors 6 is provided with drive sprocket 8, connects by chain between drive sprocket 8 and the outside sprocket wheel 71.Axle 77 ends that are positioned at vacuum cleaned groove 1 outside are provided with diameter greater than the limiting plate 78 of its end face diameter less than the diameter of sprocket wheel 71.
Axle 77 sheathed bearings 76, bearing 76 is contained in the bearing block 72, and bearing block 72 1 end openings are provided with oil sealing 715 between bearing 76 and bearing block 72 bottoms.
Bearing block 72 is fixedly mounted on the vacuum cleaned groove 1 by welded flange 75 and the locking flange 73 that locking connects.Be provided with cushion 717 between welded flange 75 and the locking flange 73, cushion 717 is in pressured state.Welded flange 75 is welded on vacuum cleaned groove 1 outer wall, and locking flange 73 is welded on the bearing block 72.Cushion 717 is the Teflon pad, can be when specifically implementing to meet the elastic material part that sealing property requires.
Be arranged with sealing ring 711 and baffle plate 718 on the axle 77, sealing ring 711 is in impaction state between bearing block 72 bottoms and baffle plate 718.
Axle 77 is at the sheathed eccentric wheel 710 of an end of vacuum cleaned groove 1 inside, and eccentric wheel 710 is provided with latch 720, throws moving frame 9 and is provided with fixed axis 104, and latch 720 is fixedlyed connected with fixed axis 104; Fixed axis 104 is connected by transmission device with first power transmission shaft 105.
Latch 720 is provided with first installing plate 719, and fixed axis 104 is provided with second installing plate, 4, the first installing plates 719 and fixedlys connected with second installing plate 4.First installing plate 719 is installed in latch 720, the second installing plates 4 by bearing and is installed on the fixed axis 104 by bearing.
Also there is the relation of being in transmission connection between latch 720 and the fixed axis 104.Sheathed rotating sprocket 7, the first installing plates 719 are provided with tightener sprocket 5 on the latch 720, and fixed axis 104 is provided with double-deck sprocket wheel 13; Tightener sprocket 5, double-deck sprocket wheel 13 and rotating sprocket 7 connect by same chain between the outside sprocket wheel of tightener sprocket 5, double-deck sprocket wheel 13 and the rotating sprocket 7 not on same straight line.Tightener sprocket 5 is used to regulate the tightness of chain.
First rotating shaft 105 and second rotating shaft 106 lay respectively at fixed axis 104 both sides.First rotating shaft, 105 two ends are respectively equipped with the 3rd sprocket wheel 107 and second sprocket wheel, 109, the three sprocket wheels 107 and double-deck sprocket wheel 13 and are positioned at the homonymy of throwing moving frame 9.Second rotating shaft, 106 1 ends are provided with first sprocket wheel 108, and described first sprocket wheel 108 and second sprocket wheel 109 are positioned at the same side of throwing moving frame 9.
The inboard sprocket wheel of double-deck sprocket wheel 13 is connected by chain with the 3rd sprocket wheel 107, and first sprocket wheel 108 is connected by chain with second sprocket wheel 109.
During concrete enforcement, the cleaning basket that cleaning part is housed (100,101) is placed on the moving frame 9 of throwing, makes vacuum cleaned groove 1 inside reach vacuum state by vacuum seal lid 12.Open drive motors 6, drive motors 6 drives axle 77 and rotates, and eccentric wheel 710 drives latch 720 along irregular orbiting motion.Latch 720 drives fixed axis 104 motions, and fixed axis 104 drives throws moving frame 9, first fixed axis 105 and 106 motions of second fixed axis.Throw on the moving frame 9 cleaning basket (100,101) will throw moving frame 9, please washing basket guide plate 4, throw thrown under the effect of action-oriented plate 103 and directive wheel 102 moving, rotate, and the cleaning part that cleans basket (100,101) lining also can be stirred.Be issued to quick, the all-directional ultrasonic cleaning of cleaning part in the effect of supersonic generator 2.
Can make workpiece realize its upset in the throwing up and down in the ultrasonic cleaning process of vacuum cleaning machine provided by the utility model under vacuum state. The utility model good seal performance, overall construction design are rationally compact, and stable noiselessness satisfies the cleaning performance of complex part fully. Simultaneously because this utility model can realize throwing and simultaneously operation of rotation, with traditional single throwing or rotate and the repeatedly cleaning of workpiece is compared, can reduce its cleaning, can effectively solve the cleaning blind area of workpiece, greatly shorten scavenging period, reduce cleaning, greatly enhance productivity, and cleaning performance is splendid, is embodied in:
1) overcomes traditional single throwing or rotation cleaning model in the cleaning process, can reduce cleaning, reduce production costs, greatly enhance productivity;
2) the workpiece cleaning effect is good, can not occur cleaning the blind area and causes the clean phenomenon of workpiece cleaning for complex part;
3) overall sealing performance is good, can normally move under the environment of condition of high vacuum degree and Ultrasonic Cleaning;
4) overall construction design is rationally compact, stable noiselessness, and can satisfy circle washing basket and the general function of square washing basket.

Claims (10)

1. vacuum ultrasonic cleaning machine, it is characterized in that, comprise vacuum cleaned groove (1), described vacuum cleaned groove (1) inside is provided with supersonic generator (2) and throws moving frame (9), described throwing is moved frame (9) by the external drive motors of rotary seal mechanism (I) (6), described throwing is moved frame (9) and is provided with first power transmission shaft (105) and second power transmission shaft (106) that connects by transmission mechanism, and described first power transmission shaft (105) and second power transmission shaft (106) drive by drive motors (6).
2. vacuum ultrasonic cleaning machine according to claim 1 is characterized in that described throwing is moved frame (9) and is provided with washing basket guide plate (10), cleans basket (100,101) and is positioned at the zone that described washing basket guide plate (10) is surrounded;
Described throwing is moved and also is provided with directive wheel (102) on the frame (9) and throws action-oriented plate (103), described directive wheel (102) is installed in by governor motion (18) on the madial wall of described vacuum cleaned groove (1), and described directive wheel (102) is adjacent with throwing action-oriented plate (103).
3. vacuum ultrasonic cleaning machine according to claim 1, it is characterized in that, described rotary seal mechanism (I) comprises axle (77), described axle (77) is connected with drive motors (6) by transmission mechanism at the outside end of vacuum cleaned groove (1), and described axle (77) is at the inner sheathed eccentric wheel of an end (710) of vacuum cleaned groove (1);
Described eccentric wheel (710) is provided with latch (720), and described throwing is moved frame (9) and is provided with fixed axis (104), and described latch (720) is fixedlyed connected with described fixed axis (104); Described fixed axis (104) is connected by transmission device with first power transmission shaft (105).
4. vacuum ultrasonic cleaning machine according to claim 3, it is characterized in that, described axle (77) sheathed bearing (76), described bearing (76) is contained in the bearing block (72), described bearing block (72) one end openings are provided with oil sealing (715) between described bearing (76) and bearing block (72) bottom.
5. vacuum ultrasonic cleaning machine according to claim 3 is characterized in that, described bearing block (72) is fixedly mounted on the vacuum cleaned groove (1) by welded flange (75) and the locking flange (73) that locking connects;
Be provided with cushion (717) between described welded flange (75) and the locking flange (73), described cushion (717) is in pressured state; Described welded flange (75) is welded on vacuum cleaned groove (1) outer wall, and described locking flange (73) is welded on the bearing block (72).
6. vacuum ultrasonic cleaning machine according to claim 5 is characterized in that, is arranged with sealing ring (711) and baffle plate (718) on the described axle (77), and described sealing ring (711) is positioned between bearing block (72) bottom and the baffle plate (718), is in impaction state.
7. vacuum ultrasonic cleaning machine according to claim 6 is characterized in that described cushion (717) is the Teflon pad.
8. vacuum ultrasonic cleaning machine according to claim 3, it is characterized in that, described latch (720) is provided with first installing plate (719), and described fixed axis (104) is provided with second installing plate (4), and described first installing plate (719) is fixedlyed connected with second installing plate (4);
Described first installing plate (719) is installed in latch (720) by bearing, and described second installing plate (4) is installed on the fixed axis (104) by bearing.
9. vacuum ultrasonic cleaning machine according to claim 8 is characterized in that, also has the relation of being in transmission connection between described latch (720) and the described fixed axis (104);
Described latch (720) is gone up sheathed rotating sprocket (7), and described first installing plate (719) is provided with tightener sprocket (5), and described fixed axis (104) is provided with double-deck sprocket wheel (13); Described tightener sprocket (5), double-deck sprocket wheel (13) and rotating sprocket (7) connect by same chain between described tightener sprocket (5), double-deck sprocket wheel (13) and the rotating sprocket (7) not on same straight line.
10. vacuum ultrasonic cleaning machine according to claim 3, it is characterized in that, described drive motors (6) is provided with drive sprocket (8), described axle (77) is positioned at the outside end of vacuum cleaned groove (1) and is provided with outside sprocket wheel (71), connects by chain between described drive sprocket (8) and the outside sprocket wheel (71).
CN2009202622403U 2009-12-30 2009-12-30 Vacuum ultrasonic cleaning machine Expired - Fee Related CN201596642U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009202622403U CN201596642U (en) 2009-12-30 2009-12-30 Vacuum ultrasonic cleaning machine

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Application Number Priority Date Filing Date Title
CN2009202622403U CN201596642U (en) 2009-12-30 2009-12-30 Vacuum ultrasonic cleaning machine

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CN201596642U true CN201596642U (en) 2010-10-06

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Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102211097A (en) * 2011-03-29 2011-10-12 常州亿晶光电科技有限公司 Ultrasonic cleaning device for film coated graphite frame
CN102553854A (en) * 2011-12-31 2012-07-11 上海新阳半导体材料股份有限公司 Lifting and shaking device
CN103433232A (en) * 2012-09-29 2013-12-11 山东常林机械集团股份有限公司 Cleaning kettle for cleaning precision parts
CN103551331A (en) * 2013-10-29 2014-02-05 科威信(无锡)洗净科技有限公司 Throwing and rotating device in hydrocarbon cleaning machine
CN103894367A (en) * 2012-12-28 2014-07-02 赫菲斯热处理系统江苏有限公司 Vacuum cleaning machine for thermal treatment production line
CN103894366A (en) * 2012-12-28 2014-07-02 赫菲斯热处理系统江苏有限公司 Vacuum cleaning chamber
CN103949433A (en) * 2014-04-15 2014-07-30 苏州金牛精密机械有限公司 Guide device of ultrasonic cleaning machine throwing rack
CN106623213A (en) * 2017-02-09 2017-05-10 山东康源堂中药饮片股份有限公司 Cleaning device for preparation of leech decoction pieces
CN106733910A (en) * 2016-12-13 2017-05-31 无锡南方声学工程有限公司 A kind of anilox roll supersonic wave cleaning machine
CN106733911A (en) * 2016-12-13 2017-05-31 无锡南方声学工程有限公司 A kind of cylindrical workpiece ultrasonic cleaning equipment
CN107116064A (en) * 2017-06-16 2017-09-01 粉嫩公主生物科技有限公司耒阳分公司 A kind of frozen dried food processing cleaning device
CN108273799A (en) * 2017-08-23 2018-07-13 东莞市精志智能自动化设备有限公司 A kind of full-automatic planer cleaning machine
CN108325915A (en) * 2018-03-28 2018-07-27 安徽尼古拉电子科技有限公司 A kind of electronic component surface film oxide cleaning device and method
CN108687016A (en) * 2018-03-28 2018-10-23 安徽尼古拉电子科技有限公司 A kind of microelectron-mechanical cleaning device

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102211097A (en) * 2011-03-29 2011-10-12 常州亿晶光电科技有限公司 Ultrasonic cleaning device for film coated graphite frame
CN102553854A (en) * 2011-12-31 2012-07-11 上海新阳半导体材料股份有限公司 Lifting and shaking device
CN102553854B (en) * 2011-12-31 2014-05-14 上海新阳半导体材料股份有限公司 Lifting and shaking device
CN103433232A (en) * 2012-09-29 2013-12-11 山东常林机械集团股份有限公司 Cleaning kettle for cleaning precision parts
CN103433232B (en) * 2012-09-29 2016-05-04 山东常林机械集团股份有限公司 A kind of cleaning still for precision parts washing and cleaning operation
CN103894367A (en) * 2012-12-28 2014-07-02 赫菲斯热处理系统江苏有限公司 Vacuum cleaning machine for thermal treatment production line
CN103894366A (en) * 2012-12-28 2014-07-02 赫菲斯热处理系统江苏有限公司 Vacuum cleaning chamber
CN103551331B (en) * 2013-10-29 2015-05-13 科威信(无锡)洗净科技有限公司 Throwing and rotating device in hydrocarbon cleaning machine
CN103551331A (en) * 2013-10-29 2014-02-05 科威信(无锡)洗净科技有限公司 Throwing and rotating device in hydrocarbon cleaning machine
CN103949433A (en) * 2014-04-15 2014-07-30 苏州金牛精密机械有限公司 Guide device of ultrasonic cleaning machine throwing rack
CN106733910A (en) * 2016-12-13 2017-05-31 无锡南方声学工程有限公司 A kind of anilox roll supersonic wave cleaning machine
CN106733911A (en) * 2016-12-13 2017-05-31 无锡南方声学工程有限公司 A kind of cylindrical workpiece ultrasonic cleaning equipment
CN106623213A (en) * 2017-02-09 2017-05-10 山东康源堂中药饮片股份有限公司 Cleaning device for preparation of leech decoction pieces
CN107116064A (en) * 2017-06-16 2017-09-01 粉嫩公主生物科技有限公司耒阳分公司 A kind of frozen dried food processing cleaning device
CN108273799A (en) * 2017-08-23 2018-07-13 东莞市精志智能自动化设备有限公司 A kind of full-automatic planer cleaning machine
CN108325915A (en) * 2018-03-28 2018-07-27 安徽尼古拉电子科技有限公司 A kind of electronic component surface film oxide cleaning device and method
CN108687016A (en) * 2018-03-28 2018-10-23 安徽尼古拉电子科技有限公司 A kind of microelectron-mechanical cleaning device

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Granted publication date: 20101006

Termination date: 20121230