CN201575865U - 半导体流水线中的零度控制器 - Google Patents
半导体流水线中的零度控制器 Download PDFInfo
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- CN201575865U CN201575865U CN2009200742487U CN200920074248U CN201575865U CN 201575865 U CN201575865 U CN 201575865U CN 2009200742487 U CN2009200742487 U CN 2009200742487U CN 200920074248 U CN200920074248 U CN 200920074248U CN 201575865 U CN201575865 U CN 201575865U
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Application Number | Priority Date | Filing Date | Title |
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CN2009200742487U CN201575865U (zh) | 2009-07-08 | 2009-07-08 | 半导体流水线中的零度控制器 |
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CN2009200742487U CN201575865U (zh) | 2009-07-08 | 2009-07-08 | 半导体流水线中的零度控制器 |
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CN201575865U true CN201575865U (zh) | 2010-09-08 |
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CN2009200742487U Expired - Fee Related CN201575865U (zh) | 2009-07-08 | 2009-07-08 | 半导体流水线中的零度控制器 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106814661A (zh) * | 2015-12-01 | 2017-06-09 | 佳霖科技股份有限公司 | 机台监控联锁系统 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106814661A (zh) * | 2015-12-01 | 2017-06-09 | 佳霖科技股份有限公司 | 机台监控联锁系统 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20140110 |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
|
TR01 | Transfer of patent right |
Effective date of registration: 20140110 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100908 Termination date: 20150708 |
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EXPY | Termination of patent right or utility model |