CN201536101U - Wet processing machine - Google Patents
Wet processing machine Download PDFInfo
- Publication number
- CN201536101U CN201536101U CN2009200739677U CN200920073967U CN201536101U CN 201536101 U CN201536101 U CN 201536101U CN 2009200739677 U CN2009200739677 U CN 2009200739677U CN 200920073967 U CN200920073967 U CN 200920073967U CN 201536101 U CN201536101 U CN 201536101U
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- brilliant boat
- closes
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- platform
- boat
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Abstract
The utility model discloses a wet processing machine. The technical scheme is that two sets of correlation sensors are respectively mounted above and below a position near the two sides of a boat on a boat awarding table, an emission unit and a receiving unit of each set of correlation sensor are respectively mounted on the boat awarding table where the boat is placed and a fixing piece above the closing initial position of the boat, and when a silicon chip falls down or inclines, the correlation rays of the sensors are sheltered, and the output voltages of the sensors change. A closing signal transmission control logic circuit is added between a closing signal output end of a control system and a closing cylinder, and a closing signal sent to the closing cylinder from the control system is intercepted through the change of the output voltages of the correlation sensors, so as to detect whether a silicon chip on the boat falls down before the boat is closed; and if a silicon chip falls down, a mechanical hand stops carrying the boat to a processing groove for processing, and meanwhile an alarm is sent out, so as to avoid crashing the falling-down silicon chip.
Description
Technical field
The utility model relates to the semiconductor technology device, particularly a kind of wet treatment board.
Background technology
The wet treatment board is a process unit commonly used in the semiconductor technology, the parts such as control system that generally include that film magazine plummer, silicon chip are awarded platform and silicon chip anchor clamps, translation cylinder, closed up cylinder, brilliant boat is awarded platform, brilliant boat closes up initial position sensor, brilliant boat closes up target location transducer, brilliant boat, manipulator, treatment trough and PLC (Program Logic Controler).The film magazine plummer is used to place film magazine, and brilliant boat places brilliant boat to award on the platform.At first as shown in Figure 1, silicon chip is awarded platform and silicon chip anchor clamps and is positioned at silicon chip and accepts the brilliant boat of position and award on the brilliant boat on the platform 12 being sent to the film magazine of silicon chip from the film magazine plummer; Then as shown in Figure 2, PLC (Program Logic Controler) thus control system control translation cylinder drives brilliant boat to be awarded platform 12 and moves and each brilliant boat is accepted the position from silicon chip move to brilliant boat and close up initial position, each brilliant boat is awarded platform and is moved to after brilliant boat closes up initial position, and brilliant boat closes up initial position sensor 13 and sends and close up the initial position arriving signal to the PLC control system; Then as shown in Figure 3, Figure 4, the PLC control system is closed up signal 1 to closing up 2 in cylinder after receiving and closing up the initial position arriving signal, thereby close up cylinder 2 and receive that closing up the brilliant boat of signal 1 rear drive awards platform 12 and move and each brilliant boat is closed up initial position from brilliant boat move to brilliant boat and close up the target location, each brilliant boat moves to after brilliant boat closes up the target location, and brilliant boat closes up target location transducer 14 and sends and close up the target location arriving signal to the PLC control system; After the PLC control system is received and closed up the target location arriving signal, control the brilliant boat of manipulator conveyance again and enter treatment trough 11 and handle.
In technical process, the wet treatment board need be awarded one batch silicon chip and be sent to silicon chip platform and the film magazine of silicon chip anchor clamps from the film magazine plummer and accept the brilliant boat of position and award on the brilliant boat 5 on the platform 12 by silicon chip, reaching by film magazine in the process of brilliant boat, silicon chip 4 need through silicon chips award platform and silicon chip anchor clamps etc. repeatedly conveyance just can be sent on the brilliant boat 5, because the midfeather of the silicon chip in the film magazine is less, silicon chip is awarded the normal conveyance that must quite accurately could guarantee each piece silicon chip of the draw-in groove position on platform and the silicon chip anchor clamps, silicon chip is awarded the error that platform and silicon chip anchor clamps are subjected to artificial adjustment or is used the influence of draw-in groove change in size that wearing and tearing cause etc., cause silicon chip normally to stick into the draw-in groove on the brilliant boat easily and the phenomenon of lamination or reviewing 41 (silicon chip of toppling over) occurs, reviewing 41 directly crash silicon chip 4 when as shown in Figure 5, wherein will cause manipulator to grasp brilliant boat 5.
The utility model content
The technical problems to be solved in the utility model provides a kind of wet treatment board, can prevent from that the brilliant boat of manipulator conveyance from entering to crash reviewing when treatment trough is handled.
For solving the problems of the technologies described above, wet treatment board of the present utility model comprises that closing up cylinder, brilliant boat awards that platform, brilliant boat close up initial position sensor, brilliant boat closes up target location transducer, brilliant boat, manipulator, treatment trough and control system; Brilliant boat places brilliant boat to award on the platform, closing up cylinder drives brilliant boat and awards platform and close up initial position and brilliant boat at brilliant boat and close up between the target location and move, each brilliant boat is awarded platform and is accepted the position from silicon chip and move to after brilliant boat closes up initial position, brilliant boat closes up the initial position sensor transmission and closes up the initial position arriving signal to control system, control system is received to close up to send out behind the initial position arriving signal and is closed up signal, thereby close up cylinder and receive that closing up the brilliant boat of signal rear drive awards platform and move and each brilliant boat is closed up initial position from brilliant boat move to brilliant boat and close up the target location, each brilliant boat moves to after brilliant boat closes up the target location, brilliant boat closes up target location transducer transmission and closes up the target location arriving signal to control system, after control system is received and closed up the target location arriving signal, control the brilliant boat of manipulator conveyance again and handle to treatment trough; It is characterized in that, also comprise many group correlation transducers, one closes up signal transmitting control logical circuit, the transmitter unit of one group of correlation transducer with the receiving element position when not corresponding receiving element can not receive the signal of transmitter unit, the upper-lower position that places brilliant boat to award each the brilliant boat left and right sides on the platform is installed one group of correlation transducer respectively, the transmitter unit of every group of correlation transducer and receiving element are installed in brilliant boat that brilliant boat puts respectively and award on the platform and brilliant boat closes up on the fixture of initial position top, when brilliant boat was awarded platform and is positioned at brilliant boat and closes up initial position, it is corresponding with the receiving element position that each group is penetrated the transmitter unit of transducer; Each organizes the output of correlation transducer and the signal output part that closes up of control system connects the described signal transmitting control logical circuit that closes up, described output of closing up signal transmitting control logical circuit connects closes up cylinder control signal receiving terminal, when each group correlation transducer receiving element all receives the signal of transmitter unit, described close up signal transmitting control logical circuit output control system close up signal to closing up cylinder control signal receiving terminal, when any one group of correlation transducer receiving element did not receive the signal of transmitter unit, the described signal transmitting control logical circuit that closes up was delayed setting-up time disconnection control system to the signal that closes up that closes up cylinder.
Output high level when one group of correlation transducer receiving element does not receive the signal of transmitter unit, output low level when receiving the signal of transmitter unit, the described signal transmitting control logical circuit that closes up comprises electrical relay in a plurality of relays and the time-delay, relay coil one end of described a plurality of relays connects the output of many group correlation transducers respectively, the other end is with connecing high level, normally-closed contact one end of described a plurality of relays is with connecing low level, the other end is with relay coil one end that connects electrical relay in the described time-delay, another termination high level of the relay coil of electrical relay in the described time-delay, in the described time-delay normally-closed contact one termination control system of electrical relay close up signal output part, another termination is closed up cylinder control signal receiving terminal.
Wet treatment board of the present utility model, award the position of close brilliant boat both sides on the platform at brilliant boat one group of correlation transducer is installed respectively up and down, the transmitter unit of every group of correlation transducer and receiving element are installed in brilliant boat that brilliant boat puts respectively and award on the platform and brilliant boat closes up on the fixture of initial position top, when silicon chip falls down or tiltedly go out, transducer correlation light is blocked, and the output voltage of transducer will change.The signal output part that closes up in control system closes up signal transmitting control logical circuit to closing up cylinder middle the adding, utilize the variation of the output voltage of correlation transducer to intercept control system to the signal that closes up that closes up the cylinder transmission, be implemented in the silicon chip that detects on the brilliant boat before brilliant boat closes up whether reviewing is arranged, manipulator is handled the brilliant boat of not conveyance to treatment trough when reviewing, can also provide warning simultaneously, avoid crashing reviewing.
Description of drawings
Below in conjunction with the drawings and the specific embodiments the utility model is described in further detail.
Fig. 1 is that the brilliant boat of common wet treatment board is positioned at loading silicon chip position view;
Fig. 2 is that the brilliant boat of common wet treatment board is positioned at brilliant boat and closes up the initial position schematic diagram;
Fig. 3 is that the brilliant boat of common wet treatment board is positioned at brilliant boat and closes up the target location schematic diagram;
Fig. 4 is that the PLC control system of common wet treatment board sends and closes up signal to closing up the cylinder schematic diagram;
Fig. 5 the reviewing schematic diagram occurs in the brilliant boat of wet treatment board;
Fig. 6 is that wet treatment board one execution mode of the present utility model is installed correlation transducer schematic diagram;
Fig. 7 is that wet treatment board one execution mode correlation sensor of the present utility model is to the reviewing schematic diagram;
Fig. 8 is that wet treatment board one execution mode of the present utility model closes up signal transmitting control logical circuit;
Fig. 9 is that wet treatment board one embodiment of the present utility model closes up signal transmitting control logical circuit;
Figure 10 is that the brilliant boat of wet treatment board one execution mode of the present utility model is awarded platform and is positioned at silicon chip and accepts position view;
Figure 11 is that the brilliant boat of wet treatment board one execution mode of the present utility model is awarded platform and is positioned at brilliant boat and closes up the initial position schematic diagram;
Figure 12 is that the brilliant boat of wet treatment board one execution mode of the present utility model is awarded platform and is positioned at brilliant boat and closes up the target location schematic diagram.
Embodiment
Wet treatment board one execution mode of the present utility model, comprise that film magazine plummer, silicon chip are awarded platform and silicon chip anchor clamps, translation cylinder, closed up cylinder, brilliant boat is awarded platform, brilliant boat closes up initial position sensor, brilliant boat closes up parts such as target location transducer, brilliant boat, manipulator, treatment trough and PLC (Program LogicControler) control system, comprise that also many group correlation transducers, close up signal transmitting control logical circuit, the transmitter unit of one group of correlation transducer with the receiving element position when not corresponding receiving element can not receive the signal of transmitter unit.
Silicon chip is awarded platform and silicon chip anchor clamps and is used for silicon chip with the film magazine on the film magazine plummer and is sent to and is positioned at silicon chip and accepts the brilliant boat of position and award brilliant boat on the platform; The PLC control system can be controlled the translation cylinder and drive brilliant boat and award platform and accept position and brilliant boat at silicon chip and close up between initial position and move, can control closing up cylinder closes up initial position and brilliant boat at brilliant boat and closes up between the target location and move, each brilliant boat is awarded platform and is accepted the position from silicon chip move to brilliant boat when closing up initial position under the translation cylinder drives, brilliant boat closes up the initial position sensor transmission and closes up the initial position arriving signal to the PLC control system, the PLC control system is received to close up to send out behind the initial position arriving signal and is closed up signal to closing up signal transmitting control logical circuit, the output of closing up signal transmitting control logical circuit connects closes up cylinder control signal receiving terminal, thereby close up cylinder and receive that closing up the brilliant boat of signal rear drive awards platform and move and each brilliant boat is closed up initial position from brilliant boat move to brilliant boat and close up the target location, each brilliant boat is awarded platform and is moved to after brilliant boat closes up the target location, and brilliant boat closes up the target location transducer and sends and close up the target location arriving signal to the PLC control system; After the PLC control system is received and closed up the target location arriving signal, control the brilliant boat of manipulator conveyance again and enter treatment trough and handle.
As shown in Figure 6, the upper-lower position that places brilliant boat to award each brilliant boat 5 left and right sides on the platform 12 is installed one group of correlation transducer respectively, and the transmitter unit 31 of every group of correlation transducer and receiving element 32 are installed in brilliant boat that brilliant boat 5 put respectively and award on the platform 12 and brilliant boat closes up on the fixture of initial position top; As shown in Figure 7, awarding platform 12 when brilliant boat accepts the position from silicon chip 4 and moves to brilliant boat when closing up initial position, be installed on brilliant boat award platform and close up on the fixture of initial position top respectively to organize correlation sensor emission unit 31 corresponding respectively with receiving element 32 positions, if 41 receiving elements 32 of no reviewing can receive the signal of transmitter unit 31, if brilliant boat 5 one sides exist 41 of reviewings to be positioned at the signal that one group of correlation transducer of this side receiving element 32 can not receive transmitter unit 31.
Closing up signal transmitting control logical circuit is used to control the PLC control system and sends and to close up signal to closing up cylinder, each organizes the output of correlation transducer and the signal output part that closes up of control system connects the described signal transmitting control logical circuit that closes up, describedly close up signal transmitting control logical circuit output and connect and close up cylinder control signal receiving terminal, when each group correlation transducer receiving element all receives the signal of transmitter unit, described close up signal transmitting control logical circuit output control system close up signal to closing up cylinder, when any one group of correlation transducer receiving element did not receive the signal of transmitter unit, the described signal transmitting control logical circuit that closes up was delayed setting-up time disconnection control system to the signal that closes up that closes up cylinder.That is to say, award platform when each brilliant boat and move to when closing up initial position to have only when respectively organizing correlation transducer receiving element and can both receive the signal of transmitter unit, the PLC control system sends closes up signal and could arrive and close up cylinder.One execution mode as shown in Figure 8.
An embodiment of the present utility model, the wet treatment board comprises two brilliant boats 5, two brilliant boats 5 place two brilliant boats to award on the platform 12 respectively, as Fig. 6, shown in Figure 7, the upper-lower position of each brilliant boat 5 left and right sides is installed one group of illumination correlation transducer respectively, four groups of correlation optical sensors are installed altogether, four transmitter units of four groups of illumination correlation transducers are installed in the two brilliant boats that two brilliant boats put and award on the platform, four receiving elements are installed on the fixture that brilliant boat closes up initial position top, the transmitter unit 31 of one group of illumination correlation transducer with receiving element 32 positions when not corresponding receiving element can not receive the signal of transmitter unit, output high level 24V; Award platform when brilliant boat and move to brilliant boat when closing up initial position, be installed on that brilliant boat is awarded platform 12 and four groups of correlation sensor emission unit 31 closing up on the fixture of initial position top are corresponding respectively with receiving element 32 positions, if the signal that illumination correlation transducer receiving element can receive transmitter unit is respectively organized in 41 of no reviewings, output low level 0V, if brilliant boat 5 one sides exist 41 of reviewings to be positioned at the signal that one group of correlation transducer of this side receiving element 32 can not receive transmitter unit 31, this group illumination correlation transducer output high level 24V.Each organizes the correlation sensor output signal to closing up signal transmitting control logical circuit.
Close up signal transmitting control logical circuit as shown in Figure 9, the end of relay coil Rc1, Rc2, Rc3 and the Rc4 of 4 OMRON MY2NJ relays is with meeting high level 24V, the other end connects signal output part S1, S2, S3, the S4 of four groups of correlation optical sensors respectively, the relay normally-closed contact Rk1 of 4 OMRON MY2NJ, Rk2, Rk3, Rk4 one termination low level 0V, the other end is with an end that meets the relay coil Rc5 of electrical relay in the OMRONH3Y-2 time-delay, another termination high level 24V of the relay coil Rc5 of electrical relay in the OMRON H3Y-2 time-delay; The relay normally-closed contact Rk5 of electrical relay is serially connected in the PLC control system and closes up signal output part and close up between cylinder control signal receiving terminal in the H3Y-2 time-delay, and the delay adjustments time of electrical relay is that brilliant boat is awarded platform and normally closed up the time in the OMRON H3Y-2 time-delay.
The course of work is as follows, at first as shown in figure 10, silicon chip is awarded platform and silicon chip anchor clamps and is positioned at silicon chip and accepts the brilliant boat of position and award on the brilliant boat 5 on the platform 12 being sent to the film magazine of silicon chip from the film magazine plummer, it is not corresponding with receiving element 32 positions that respectively organize illumination correlation sensor emission unit 31 this moment, receiving element 32 can not receive the signal of transmitter unit 31, all export high level 24V, the relay normally-closed contact Rk1 that closes up 4 OMRONMY2NJ of signal transmitting control logical circuit, Rk2, Rk3, Rk4 is failure to actuate, the relay normally-closed contact Rk5 delay adjustments of electrical relay disconnected after the time in the H3Y-2 time-delay, this setting-up time is set at brilliant boat usually and awards platform and normally close up the time, much smaller than each group illumination correlation sensor emission unit with the not corresponding time of receiving element position;
Then as shown in figure 11, PLC control system control translation cylinder drives brilliant boat and awards platform 12 and move and each brilliant boat 5 is accepted the position from silicon chip move to brilliant boat and close up initial position, each brilliant boat is awarded platform 12 and is moved to brilliant boat when closing up initial position, brilliant boat closes up initial position sensor 13 and sends and close up the initial position arriving signal to the PLC control system, and the PLC control system receives that closing up the initial position arriving signal sends and close up signal.Awarding platform 12 when brilliant boat simultaneously is positioned at when closing up initial position, it is corresponding with receiving element 32 positions that each organizes correlation sensor emission unit 31, this moment is if the signal that illumination correlation transducer receiving element 32 can receive transmitter unit 31 is then respectively organized in no reviewing, equal output low level 0V, the relay normally-closed contact Rk1 that closes up 4 OMRON MY2NJ of signal transmitting control logical circuit, Rk2, Rk3, Rk4 all moves disconnection, the relay normally-closed contact Rk5 of electrical relay reverts to normally off in the H3Y-2 time-delay, the signal that closes up that the PLC control system is sent closes up cylinder through the relay normally-closed contact Rk5 of H3Y-2 arrival, as shown in figure 12, close up the cylinder action, closing up the brilliant boat of cylinder action rear drive awards platform 12 shift in position, the transmitter unit 31 that can have illumination correlation transducer is not corresponding with receiving element 32 positions, receiving element 32 can not receive the signal of transmitter unit, output high level 24V, the relay normally-closed contact of exporting the OMRON MY2NJ that is connected with this group illumination correlation transducer reverts to normally off, the relay normally-closed contact Rk5 delay adjustments of electrical relay disconnected after the time in the H3Y-2 time-delay, this setting-up time is set at brilliant boat usually and awards platform and normally close up the time, so the relay normally-closed contact Rk5 of electrical relay awards platform at each brilliant boat to move to and disconnect after brilliant boat closes up the target location in the H3Y-2 time-delay, again because setting-up time is organized illumination correlation sensor emission unit with the not corresponding time of receiving element position less than each, so each brilliant boat is awarded platform and is moved to brilliant boat and close up before the initial position, the relay normally-closed contact Rk5 of electrical relay disconnects in the H3Y-2 time-delay, correlation drives each brilliant boat award platform and arrive brilliant boat and close up the target location after, brilliant boat closes up target location transducer 14 positions and sends and close up the target location arriving signal to the PLC control system, and the PLC control system receives that closing up behind the arriving signal of target location control manipulator conveyance crystalline substance boat enters treatment trough 11 and handle; Awarding platform 12 when brilliant boat is positioned at when closing up initial position, if brilliant boat 5 one sides exist reviewing then to be positioned at the signal that one group of correlation transducer of this side receiving element 32 can not receive transmitter unit 31, this group illumination correlation transducer output high level 24V, relay with the continuous OMRON MY2NJ of this group correlation transducer output is failure to actuate, this relay normally-closed contact remains closed, electrical relay normally-closed contact Rk5 keeps disconnecting in the OMRON H3Y-2 time-delay, the PLC control system is sent closes up signal and can not arrive and close up cylinder, thereby closing up cylinder is failure to actuate, can not drive brilliant boat awards platform 12 and arrives brilliant boat and close up the target location, brilliant boat closes up target location transducer 14 and can not send and close up the target location arriving signal to the PLC control system, manipulator is to brilliant boat 5 conveyances, thereby can prevent that the brilliant boat 5 of manipulator conveyance from entering crashes reviewing when treatment trough 11 is handled.
Close up the target location arriving signal if the PLC control system is sent not close up behind the signal through what a setting-up time (be slightly larger than close up cylinder normally close up the time) received that brilliant boat closes up that transducer 14 positions in target location send, then can provide brilliant boat simultaneously and close up overtime warning.
Wet treatment board of the present utility model, award the position of close brilliant boat both sides on the platform at brilliant boat one group of correlation transducer is installed respectively up and down, the transmitter unit of every group of correlation transducer and receiving element are installed in brilliant boat that brilliant boat puts respectively and award on the platform and brilliant boat closes up on the fixture of initial position top, when silicon chip falls down or tiltedly go out, transducer correlation light is blocked, and the output voltage of transducer will change.The signal output part that closes up in control system closes up signal transmitting control logical circuit to closing up cylinder middle the adding, utilize the variation of the output voltage of correlation transducer to intercept control system to the signal that closes up that closes up the cylinder transmission, be implemented in the silicon chip that detects on the brilliant boat before brilliant boat closes up whether reviewing is arranged, manipulator is handled the brilliant boat of not conveyance to treatment trough when reviewing, can also provide warning simultaneously, avoid crashing reviewing.
Claims (5)
1. wet treatment board comprises that closing up cylinder, brilliant boat awards that platform, brilliant boat close up initial position sensor, brilliant boat closes up target location transducer, brilliant boat, manipulator, treatment trough and control system; Brilliant boat places brilliant boat to award on the platform, closing up cylinder drives brilliant boat and awards platform and close up initial position and brilliant boat at brilliant boat and close up between the target location and move, each brilliant boat is awarded platform and is accepted the position from silicon chip and move to after brilliant boat closes up initial position, brilliant boat closes up the initial position sensor transmission and closes up the initial position arriving signal to control system, control system is received to close up to send out behind the initial position arriving signal and is closed up signal, thereby close up cylinder and receive that closing up the brilliant boat of signal rear drive awards platform and move and each brilliant boat is closed up initial position from brilliant boat move to brilliant boat and close up the target location, each brilliant boat moves to after brilliant boat closes up the target location, brilliant boat closes up target location transducer transmission and closes up the target location arriving signal to control system, after control system is received and closed up the target location arriving signal, control the brilliant boat of manipulator conveyance again and handle to treatment trough; It is characterized in that, also comprise many group correlation transducers, one closes up signal transmitting control logical circuit, the transmitter unit of one group of correlation transducer with the receiving element position when not corresponding receiving element can not receive the signal of transmitter unit, the upper-lower position that places brilliant boat to award each the brilliant boat left and right sides on the platform is installed one group of correlation transducer respectively, the transmitter unit of every group of correlation transducer and receiving element are installed in brilliant boat that brilliant boat puts respectively and award on the platform and brilliant boat closes up on the fixture of initial position top, when brilliant boat was awarded platform and is positioned at brilliant boat and closes up initial position, it is corresponding with the receiving element position that each group is penetrated the transmitter unit of transducer; Each organizes the output of correlation transducer and the signal output part that closes up of control system connects the described signal transmitting control logical circuit that closes up, described output of closing up signal transmitting control logical circuit connects closes up cylinder control signal receiving terminal, when each group correlation transducer receiving element all receives the signal of transmitter unit, described close up signal transmitting control logical circuit output control system close up signal to closing up cylinder control signal receiving terminal, when any one group of correlation transducer receiving element did not receive the signal of transmitter unit, the described signal transmitting control logical circuit that closes up was delayed setting-up time disconnection control system to the signal that closes up that closes up cylinder.
2. wet treatment board according to claim 1 is characterized in that, described setting-up time is that cylinder normally closes up the time.
3. wet treatment board according to claim 1, it is characterized in that, comprise that also film magazine plummer, silicon chip award platform and silicon chip anchor clamps, translation cylinder, the film magazine plummer is used to place film magazine, silicon chip is awarded platform and silicon chip anchor clamps and is positioned at silicon chip and accepts the brilliant boat of position and award on the brilliant boat on the platform being sent to the film magazine of silicon chip from the film magazine plummer, and control system control translation cylinder drives brilliant boat and awards platform and accept position and brilliant boat at silicon chip and close up between initial position and move.
4. wet treatment board according to claim 1, it is characterized in that, output high level when one group of correlation transducer receiving element does not receive the signal of transmitter unit, output low level when receiving the signal of transmitter unit, the described signal transmitting control logical circuit that closes up comprises electrical relay in a plurality of relays and the time-delay, relay coil one end of described a plurality of relays connects the output of many group correlation transducers respectively, the other end is with connecing high level, normally-closed contact one end of described a plurality of relays is with connecing low level, the other end is with relay coil one end that connects electrical relay in the described time-delay, another termination high level of the relay coil of electrical relay in the described time-delay, in the described time-delay normally-closed contact one termination control system of electrical relay close up signal output part, another termination is closed up cylinder control signal receiving terminal.
5. wet treatment board according to claim 1 is characterized in that, it is two that described brilliant boat is awarded platform, and described correlation transducer is four groups.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200739677U CN201536101U (en) | 2009-05-26 | 2009-05-26 | Wet processing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200739677U CN201536101U (en) | 2009-05-26 | 2009-05-26 | Wet processing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201536101U true CN201536101U (en) | 2010-07-28 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009200739677U Expired - Fee Related CN201536101U (en) | 2009-05-26 | 2009-05-26 | Wet processing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201536101U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106783675A (en) * | 2016-12-07 | 2017-05-31 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of lateral Chu Zhou mechanisms of graphite boat with reviewing detection means |
-
2009
- 2009-05-26 CN CN2009200739677U patent/CN201536101U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106783675A (en) * | 2016-12-07 | 2017-05-31 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of lateral Chu Zhou mechanisms of graphite boat with reviewing detection means |
| CN106783675B (en) * | 2016-12-07 | 2019-04-23 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of lateral Chu Zhou mechanism of graphite boat with reviewing detection device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20131216 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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| TR01 | Transfer of patent right |
Effective date of registration: 20131216 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100728 Termination date: 20150526 |
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| EXPY | Termination of patent right or utility model |