CN201532492U - Flood lamp of optical microscope - Google Patents
Flood lamp of optical microscope Download PDFInfo
- Publication number
- CN201532492U CN201532492U CN200920211926XU CN200920211926U CN201532492U CN 201532492 U CN201532492 U CN 201532492U CN 200920211926X U CN200920211926X U CN 200920211926XU CN 200920211926 U CN200920211926 U CN 200920211926U CN 201532492 U CN201532492 U CN 201532492U
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- fiber cable
- optical fiber
- luminous source
- optical microscope
- horizontal stand
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Abstract
The utility model relates to a microscope, in particular to a flood lamp of an optical microscope, which comprises a luminous source device and an optical fiber cable. The luminous source device comprises a rotary type luminous source base, a control panel and a plurality of luminous source bodies which are uniformly distributed on the luminous source base, the luminous source base is arranged opposite to an incident end of the optical fiber cable through a fixed frame, an emergent end of the optical fiber cable is disposed above an objective table for placing wafers, the luminous source base and the luminous source bodies are respectively connected with the control panel, and the control panel controls rotation of the luminous source base to lead required luminous source bodies to align to the incident end of the optical fiber cable. Because the flood lamp of the optical microscope is provided with multiple light sources, suitable light sources can be selected according to different wafers, thereby bringing convenience for work personnel to find relative small aberration shortages and increasing wafer shortage detection accuracy and efficiency. Through additionally disposing a light beam diverging elements, areas of light sources illuminated on wafers can be expanded.
Description
Technical field
The utility model relates to a kind of microscope, relates in particular to a kind of major light of optical microscope.
Background technology
The visual inspection of wafer macroscopic view is all undertaken by the optical microscope major light in the existing semiconductor industry, but finds that in use there are following three shortcomings in the optical microscope major light at present:
1, the major light of optical microscope can only provide single light source.But for wafer, different products has different light sensitivity, if just carry out the visual inspection of wafer macroscopic view by single light source, causes some chromatic aberration defect to be difficult for being found probably, thereby causes the generation of wafer defect omission situation.
2, the major light of optical microscope is undertaken luminous by the halogen optical fiber cable, but the light source that the halogen optical fiber cable sends is more concentrated, so in wafer macroscopic view visual inspection process, can only cover the sub-fraction zone of the crystal face or the brilliant back of the body of wafer, can not cover the crystal face of wafer or the Zone Full of the brilliant back of the body, thereby cause easily and disperse the situation that causes the omission of wafer gross imperfection inadequately because of light source and take place.
3, the optical fiber cable kalamein corrugated tube of the light head of the major light of control optical microscope, because the soft height of light head that makes of metallic bellows can not be fixed, thereby, in actual mechanical process easily because of metallic bellows excessively is bent downwardly, thereby cause the major light light head to cause the broken incident of wafer to take place.
The utility model content
The purpose of this utility model is to provide a kind of major light of optical microscope, the major light of this optical microscope has multiple light courcess, can select to be suitable for suitable light source according to different wafers, be convenient to the testing staff and search less chromatic aberration defect, improve the wafer detection efficiency.
To achieve the above object, the utility model adopts following technical scheme:
A kind of major light of optical microscope, comprise light emitting source device and optical fiber cable, described light emitting source device comprises revolving luminous source(-)holder, control panel and the some light emitting source bodies that are distributed on the described luminous source(-)holder reach, the incident end of described luminous source(-)holder and optical fiber cable is oppositely arranged by fixed frame, the exit end of described optical fiber cable (being light head) is arranged on the objective table top that is used to place wafer, described luminous source(-)holder is connected with described control panel respectively with described light emitting source body, and described control panel is controlled described luminous source(-)holder and rotated the incident end that the feasible light emitting source body that needs is aimed at described optical fiber cable.
The exit end of described optical fiber cable is provided with the beam divergence element.
Described beam divergence element is the prismoid of the up-small and down-big boring of upper and lower bottom surface opening, and the sidewall of described prismoid is by the irradiated area with the beam reflection expanded light beam.
Described optical fiber cable is near the pipeline section outsourcing hard tube of exit end, and described optical fiber cable is provided with the adjusting control gear near the pipeline section of exit end.
Described adjusting control gear comprises handle, link assembly and fixed mount, described link assembly comprises first waling stripe, the intermediate connecting rod and second waling stripe, the lower end of described handle and fixed mount first is point articulated, one end of described first waling stripe and the close lower end of handle are hinged, the other end of described first waling stripe and the lower end of described intermediate connecting rod are hinged, one end of the upper end of described intermediate connecting rod and described second waling stripe is hinged, the other end of described second waling stripe and described optical fiber cable are hinged near the upper end of the pipeline section of exit end, and the close upper end of the pipeline section of the close exit end of described optical fiber cable and fixed mount second is point articulated.
Described fixed mount comprises first horizontal stand, vertical rack, second horizontal stand and fixed support, described first horizontal stand, vertical rack, second horizontal stand are fixed by described fixed support respectively, one end of described first horizontal stand is first fulcrum, the other end of described first horizontal stand is fixedlyed connected with the lower end of described vertical rack, fixedly connected with an end of described second horizontal stand in the upper end of described vertical rack, the other end of described second horizontal stand is second fulcrum.
Described first waling stripe is provided with lock sleeve, and described lock sleeve is fixedlyed connected with described fixed mount, and described first horizontal tube is set in the described lock sleeve, and described lock sleeve is provided with clamping element outward.
Described clamping element is the fishbolt assembly.
The beneficial effects of the utility model are as follows:
The major light of the utility model optical microscope has multiple light courcess, can select to be suitable for suitable light source according to different wafers, is convenient to the testing staff and searches less chromatic aberration defect, improves wafer defect and detects accuracy rate and efficient.In addition, by exit end the beam divergence element is set, light source is dispersed, thereby enlarge the area of light source irradiation on wafer at optical fiber cable, avoid not causing the omission phenomenon, thereby further improve the detection accuracy of wafer defect owing to the crystal face of wafer or the brilliant back of the body cover light source fully.In addition, by setting up the adjusting control gear, can regulate the also pipeline section of the close exit end of fixed fiber cable, and regulate the height and the angle of dispersing element with fixed beam by this, thereby reach the best required light angle effect of check wafer, can also avoid fixedly not causing simultaneously the generation of beam divergence component wear wafer incident because of the height of beam divergence element.
Description of drawings
The major light of optical microscope of the present utility model is provided by following embodiment and accompanying drawing.
Fig. 1 is the structural representation of the major light of the utility model optical microscope;
Fig. 2 regulates control gear to adjust optical fiber cable near one of constitutional diagram of the pipeline section of exit end;
Fig. 3 regulates control gear to adjust optical fiber cable near two of the constitutional diagram of the pipeline section of exit end;
Among the figure, 1-light emitting source device, the luminous source(-)holder of 11-, 111-light emitting source body, the 12-fixed frame, the 13-control panel, the 2-optical fiber cable, the 21-optical fiber cable is near the pipeline section of exit end, the 3-objective table, 4-beam divergence element, 5-handle, 61-first waling stripe, the 62-intermediate connecting rod, 63-second waling stripe, 71-first horizontal stand, 711-first fulcrum, the 72-vertical rack, 73-second horizontal stand, 731-second fulcrum, the 8-fixed support, 9-lock sleeve, 10-clamping element.
Embodiment
Below will the major light of optical microscope of the present utility model be described in further detail.
Below with reference to accompanying drawings the utility model is described in more detail, has wherein represented preferred embodiment of the present utility model, should be appreciated that those skilled in the art can revise the utility model described here and still realize advantageous effects of the present utility model.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as to restriction of the present utility model.
For clear, whole features of practical embodiments are not described.In the following description, be not described in detail known function and structure, because they can make the utility model because unnecessary details and confusion.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details, for example, change into another embodiment by an embodiment according to relevant system or relevant commercial restriction to realize developer's specific objective.In addition, will be understood that this development may be complicated and time-consuming, but only be routine work to those skilled in the art.
For the purpose of this utility model, feature are become apparent, embodiment of the present utility model is further described below in conjunction with accompanying drawing.It should be noted that accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the purpose of aid illustration the utility model embodiment lucidly.
See also Fig. 1, Figure 1 shows that the structural representation of the major light of the utility model optical microscope;
The major light of this optical microscope comprises light emitting source device 1 and optical fiber cable 2.Described light emitting source device 1 comprises revolving luminous source(-)holder 11, control panel 13 and is distributed in some light emitting source bodies 111 on the described luminous source(-)holder 11.The incident end of described luminous source(-)holder 11 and optical fiber cable 2 is oppositely arranged by fixed frame 12.The exit end of described optical fiber cable 2 (being the light head of major light) is arranged on objective table 3 tops that are used to place wafer.Described luminous source(-)holder 11 is connected with described control panel 13 respectively with described light emitting source body 111, and the described luminous source(-)holder 11 of described control panel 13 controls rotates, and makes the light emitting source body 111 that needs aim at the incident end of described optical fiber cable 2.Because the major light of this optical microscope has multiple light courcess, promptly have a plurality of light emitting source bodies 111, but also can select to be suitable for suitable light emitting source body 111 by control panel 13 according to different wafers, be convenient to the testing staff and search less chromatic aberration defect, improve accuracy rate and efficient that wafer defect detects.
The exit end of described optical fiber cable 2 is provided with beam divergence element 4.In the present embodiment, described beam divergence element 4 is prismoids of the up-small and down-big boring of upper and lower bottom surface opening, and the sidewall of described prismoid is by the irradiated area with the beam reflection expanded light beam.Certainly, described beam divergence element 4 also can be other versions that can play beam divergence.By exit end beam divergence element 4 is set at optical fiber cable 2, the beam divergence that light source is sent, thereby enlarge the area of light source irradiation on wafer, avoid not causing the omission phenomenon less than being covered by light source fully, thereby further improve the detection accuracy of wafer defect owing to the crystal face or the brilliant back of the body of wafer.
Preferably, described optical fiber cable 2 is near the pipeline section outsourcing hard tube of exit end, and the pipeline section of described optical fiber cable 2 close exit ends is provided with the adjusting control gear.By setting up the adjusting control gear, can regulate the also pipeline section 21 of the close exit end of fixed fiber cable, and then the height and the angle of beam divergence element 4 of regulating and being fixed at the exit end of optical fiber cable 2, thereby reach the best required light angle of check wafer, also can avoid simultaneously fixedly not causing beam divergence element 4 to damage the generation of wafer incident because of the height of beam divergence element 4.
Described adjusting control gear comprises handle 5, link assembly and fixed mount.Described link assembly comprises first waling stripe 61, intermediate connecting rod 62 and second waling stripe 63.First fulcrum 711 of the lower end of described handle 5 and fixed mount is hinged.One end of described first waling stripe 61 and the close lower end of handle 5 are hinged.The lower end of the other end of described first waling stripe 61 and described intermediate connecting rod 62 is hinged.One end of the upper end of described intermediate connecting rod 62 and described second waling stripe 63 is hinged.The other end of described second waling stripe 63 and described optical fiber cable are hinged near the upper end of the pipeline section 21 of exit end, and the close upper end of the pipeline section 21 of the close exit end of described optical fiber cable and second fulcrum 731 of described fixed mount are hinged.
Described fixed mount comprises first horizontal stand 71, vertical rack 72, second horizontal stand 73 and fixed support 8.Described first horizontal stand 71, vertical rack 72, second horizontal stand 73 are fixed by described fixed support 8 respectively.One end of described first horizontal stand 71 is first fulcrum 711 of fixed mount, and the other end of described first horizontal stand 71 is fixedlyed connected with the lower end of described vertical rack 72.Fixedly connected with an end of described second horizontal stand 73 in the upper end of described vertical rack 72.The other end of described second horizontal stand 73 is second fulcrum 731 of fixed mount.
In addition, described first waling stripe 61 is provided with lock sleeve 9, and described lock sleeve 9 is fixedlyed connected with described fixed mount, and described first waling stripe 61 is set in the described lock sleeve 9, the described lock sleeve 9 outer clamping elements 10 that are provided with.In the present embodiment, described clamping element 10 is fishbolt assemblies.
The utility model is to use like this:
For wafer, different product wafers has different light sensitivity.After preparing to check the wafer of specific materials, can select for use suitable light emitting source body 111 to detect, avoid some chromatic aberration defect omission.Wherein, select the method for light emitting source body 111 to be: the supervisory personnel rotates by the luminous source(-)holder 11 of control panel 13 controls, makes required light emitting source body 111 aim at the incident end of described optical fiber cable 2; Then, make that by control panel 13 this required light emitting source body 111 is luminous, thus the light beam that makes required light emitting source body 111 send directly inject in the optical fiber cable 2, and the exit end of washing fine cable 2 off penetrates and is radiated on the wafer.So, the testing staff just can detect wafer.
See also Fig. 2 and Fig. 3, Fig. 2 and Fig. 3 show respectively and regulate the two states figure that control gear is adjusted the pipeline section 21 of the close exit end of optical fiber cable.Please in conjunction with consulting Fig. 1, it is as follows near the method for the height of the pipeline section 21 of exit end and angle that described adjusting control gear is adjusted optical fiber cable: when clamping element 10 loosens lock sleeve 9, can regulate the pipeline section 21 of optical fiber cable near exit end by turning handle 5.When handle 5 from vertical position (as shown in Figure 2), when rotating, can move by the drivening rod assembly, thereby drive pipeline section 21 rotations of optical fiber cable, make beam divergence element 4 rotations that are positioned at exit end with conversion irradiating angle (as shown in Figure 3) near exit end.After beam divergence element 4 is adjusted to required height and angle, clamp lock sleeve 9 by clamping element 10, the waling stripe 61 relative fixed framves of winning are fixed, thereby fixed pipeline section 21 height and the angles of optical fiber cable, and then the height and the angle of having fixed beam divergence element 4 near exit end.Therefore, the angle of optical fiber cable can be regulated easily, thereby the height and the irradiating angle of beam divergence element 4 can be regulated easily near the pipeline section 21 of exit end by this adjusting control gear.And when beam divergence element 4 is adjusted to suitable height and irradiating angle, can pin first waling stripe 61 by clamping element 10 and the lock sleeve of regulating in the control gear 9, pin the height and the irradiating angle of described beam divergence element 4, thereby avoid beam divergence element 4 because the generation of the wafer incident that highly fixedly is not damaged.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.
Claims (8)
1. the major light of an optical microscope, comprise light emitting source device and optical fiber cable, it is characterized in that, described light emitting source device comprises revolving luminous source(-)holder, control panel and the some light emitting source bodies that are distributed on the described luminous source(-)holder reach, the incident end of described luminous source(-)holder and optical fiber cable is oppositely arranged by fixed frame, the exit end of described optical fiber cable is arranged on the objective table top that is used to place wafer, described luminous source(-)holder is connected with described control panel respectively with described light emitting source body, and described control panel is controlled described luminous source(-)holder and rotated the incident end that the feasible light emitting source body that needs is aimed at described optical fiber cable.
2. the major light of optical microscope as claimed in claim 1 is characterized in that, the exit end of described optical fiber cable is provided with the beam divergence element.
3. the major light of optical microscope as claimed in claim 2, it is characterized in that, described beam divergence element is the prismoid of the up-small and down-big boring of upper and lower bottom surface opening, and the sidewall of described prismoid is by the irradiated area with the beam reflection expanded light beam.
4. as the major light of any described optical microscope among the claim 1-3, it is characterized in that described optical fiber cable is near the pipeline section outsourcing hard tube of exit end, and the pipeline section of the close exit end of described optical fiber cable is provided with the adjusting control gear.
5. the major light of optical microscope as claimed in claim 4, it is characterized in that, described adjusting control gear comprises handle, link assembly and fixed mount, described link assembly comprises first waling stripe, the intermediate connecting rod and second waling stripe, the lower end of described handle and fixed mount first is point articulated, one end of described first waling stripe and the close lower end of handle are hinged, the other end of described first waling stripe and the lower end of described intermediate connecting rod are hinged, one end of the upper end of described intermediate connecting rod and described second waling stripe is hinged, the other end of described second waling stripe and described optical fiber cable are hinged near the upper end of the pipeline section of exit end, and the close upper end of the pipeline section of the close exit end of described optical fiber cable and fixed mount second is point articulated.
6. the major light of optical microscope as claimed in claim 5, it is characterized in that, described fixed mount comprises first horizontal stand, vertical rack, second horizontal stand and fixed support, described first horizontal stand, vertical rack, second horizontal stand is fixed by described fixed support respectively, one end of described first horizontal stand is first fulcrum, the other end of described first horizontal stand is fixedlyed connected with the lower end of described vertical rack, fixedly connected with an end of described second horizontal stand in the upper end of described vertical rack, the other end of described second horizontal stand is second fulcrum.
7. the major light of optical microscope as claimed in claim 5, it is characterized in that described first waling stripe is provided with lock sleeve, described lock sleeve is fixedlyed connected with described fixed mount, described first horizontal tube is set in the described lock sleeve, and described lock sleeve is provided with clamping element outward.
8. the major light of optical microscope as claimed in claim 7 is characterized in that, described clamping element is the fishbolt assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920211926XU CN201532492U (en) | 2009-11-05 | 2009-11-05 | Flood lamp of optical microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920211926XU CN201532492U (en) | 2009-11-05 | 2009-11-05 | Flood lamp of optical microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201532492U true CN201532492U (en) | 2010-07-21 |
Family
ID=42527895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200920211926XU Expired - Fee Related CN201532492U (en) | 2009-11-05 | 2009-11-05 | Flood lamp of optical microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201532492U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108087761A (en) * | 2017-11-23 | 2018-05-29 | 芜湖惊鸿广告传媒有限公司 | A kind of stage lighting |
-
2009
- 2009-11-05 CN CN200920211926XU patent/CN201532492U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108087761A (en) * | 2017-11-23 | 2018-05-29 | 芜湖惊鸿广告传媒有限公司 | A kind of stage lighting |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130219 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130219 Address after: 100176 No. 18 Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100721 Termination date: 20181105 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |