CN201532192U - Large-range high-precision skeleton surveying displacement sensor - Google Patents

Large-range high-precision skeleton surveying displacement sensor Download PDF

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Publication number
CN201532192U
CN201532192U CN2009202442398U CN200920244239U CN201532192U CN 201532192 U CN201532192 U CN 201532192U CN 2009202442398 U CN2009202442398 U CN 2009202442398U CN 200920244239 U CN200920244239 U CN 200920244239U CN 201532192 U CN201532192 U CN 201532192U
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China
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main body
lever
measuring
zero
revolving shaft
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Expired - Fee Related
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CN2009202442398U
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Chinese (zh)
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于德海
吴东明
于淼
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Harbin Kerui Precision Instrument Co Ltd
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Harbin Kerui Precision Instrument Co Ltd
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Abstract

A large-range high-precision skeleton surveying displacement sensor relates to a high-precision skeleton surveying displacement sensor which solves the problems of an inductive surveying displacement sensor that the measuring range is small, the precision is low, the linearity error is big, the temperature drift is large, and the instrument residual profile is large. The scheme 1 including solutions is that a surveyprobe and an anti-rotation pole are fixedly mounted on a measuring bar, a measuring lever is fixedly connected with the measuring bar, a revolving axle supports a main body with a bearing, the bearing is compressed by a compressing piece, a mounting flange is fixed on the main body, regulating screws of a first revolving axle are screwed on the mounting flange, the revolving axle and a grating scale are fixedly connected with the measuring lever, a force measuring mechanism is connected with the measuring lever and the main body, a zero position bracket is fixedly mounted on the measuring lever, the zero position bracket is fixedly connected with zero position blocks, and a reading head is fastened on the main body; and the scheme 2 is different from the scheme 1 in that the compressing piece, the mounting flange, and the regulating screws of the first revolving axle are removed, and the bearing is compressed just by the regulating screws of a second revolving axle. The sensor is used for measuring overall dimension, surface shape error, surface waveness, and surface roughness of a workpiece.

Description

A kind of large range high precision profile measurement displacement transducer
Technical field
The utility model relates to a kind of high-accurate outline Displacement Measurement sensor.
Background technology
Along with the manufacturing develop rapidly of China, the development large range high precision and cheaply the Displacement Measurement sensor become most important.The inductance type measurement displacement transducer of domestic use of present stage exists that measurement range is little, precision is low, linear error is big, variation of ambient temperature is bigger to the measuring accuracy influence, it is bigger that circuit varies with temperature drift, defectives such as the remaining profile of instrument is bigger do not realize the high-acruracy survey to workpiece profile.The synthesis measuring profilometer of domestic production at present can only carry out the profile measurement of low side, and high-precision profile measurer all relies on import, annual country will spend a large amount of foreign exchanges and buy the high-accurate outline measuring instrument from Britain, Germany, Japan and other countries, satisfies the detection demand that the every profession and trade high-accurate outline is measured.
The utility model content
The purpose of this utility model provides a kind of large range high precision profile measurement displacement transducer, there is the cost height in existing inductance type measurement displacement transducer, measurement range is little, precision is low, linear error is big, temperature drift is big, the remaining profile of instrument is big to solve, and does not realize the problem that workpiece profile is accurately measured.
The utility model is that the technical scheme that solves the problems of the technologies described above employing has two:
Scheme one: displacement transducer of the present utility model is made up of measuring staff assembly, measurement lever, zero-bit support, zero-bit piece, grating chi, read head, web joint, rotary axis system, force measuring machine, position-limit mechanism, contiguous block, cover and front apron; Described measuring staff assembly is made up of chaining pin, measuring staff and anti-bull stick; Described rotary axis system is adjusted screw by main body, revolving shaft, two bearings, two compressing tablets, two support flanges and two first revolving shaftes and is formed; Described chaining pin and anti-bull stick all are packed on the measuring staff and the two ends of close measuring staff are provided with, one end of described measurement lever is provided with axial center hole, measuring staff is fastened in the axial center hole of measuring lever near an end of anti-bull stick, the other end of measuring lever is arranged in the inner chamber of main body, main body is contained in the cover, and described front apron and main body removably connect near the end face of anti-bull stick one end; The measurement lever that is arranged in the inner chamber of main body is provided with the revolution axis hole, described revolving shaft passes described revolution axis hole, revolving shaft is affixed with the measurement lever, with respectively be provided with a counterbore on two sidewalls of the corresponding main body of revolving shaft, the two ends of revolving shaft respectively are bearing on the main body by a bearing, bearing is arranged in the small diameter bore of counterbore, the outer shroud of each bearing is by a compressing tablet axial compression in the small diameter bore that is arranged on counterbore, a support flange affixed with main body is housed in each counterbore, support flange is provided with screwed hole of centre, first revolving shaft is adjusted screw and is threaded with the screwed hole of centre of support flange, the end face that first revolving shaft is adjusted screw is pressed on the compressing tablet, be fixed with the zero-bit support on the other end of measurement lever, described zero-bit piece is packed on the zero-bit support, the other end end face of measuring lever is outwards outstanding arc surface, the center of circle of described arc surface and the centres of measuring the revolution axis hole on the lever, described grating chi is packed on the arc surface, zero-bit piece and the corresponding setting of the zero-bit of read head, described read head is fastened on the main body by web joint, read head and the corresponding setting in the position of grating chi, the zero-bit of the cusp of chaining pin and the axle center of revolving shaft and grating chi point-blank, position-limit mechanism is fixed near on the main body of preventing bull stick one end, described contiguous block is fixed on the main body, and the grating chi is the metal grating chi.
Scheme two: displacement transducer of the present utility model is made up of measuring staff assembly, measurement lever, zero-bit support, zero-bit piece, grating chi, read head, web joint, rotary axis system, force measuring machine, position-limit mechanism, contiguous block, cover and front apron; Described measuring staff assembly is made up of chaining pin, measuring staff and anti-bull stick; Described rotary axis system is adjusted screw by main body, revolving shaft, two bearings and two second revolving shaftes and is formed; Described chaining pin and anti-bull stick all are packed on the measuring staff and the two ends of close measuring staff are provided with, one end of described measurement lever is provided with axial center hole, measuring staff is fastened in the axial center hole of measuring lever near an end of anti-bull stick, the other end of measuring lever is arranged in the inner chamber of main body, main body is contained in the cover, and described front apron and main body removably connect near the end face of anti-bull stick one end; The measurement lever that is arranged in the inner chamber of main body is provided with the revolution axis hole, described revolving shaft passes described revolution axis hole, revolving shaft is affixed with the measurement lever, with respectively be provided with a dead eye on two sidewalls of the corresponding main body of revolving shaft and a revolving shaft that communicates with this dead eye is adjusted screw hole, the two ends of revolving shaft respectively are bearing on the main body by a bearing, bearing is arranged in the dead eye on the main body, the center that second revolving shaft is adjusted the screw end face is provided with groove, the outer shroud of each bearing is adjusted screw axial by second revolving shaft that is threaded with revolving shaft adjustment screw hole and is compressed, be fixed with the zero-bit support on the other end of measurement lever, described zero-bit piece is packed on the zero-bit support, the other end end face of measuring lever is outwards outstanding arc surface, the center of circle of described arc surface and the centres of measuring the revolution axis hole on the lever, described grating chi is packed on the arc surface, zero-bit piece and the corresponding setting of the zero-bit of read head, described read head is fastened on the main body by web joint, read head and the corresponding setting in the position of grating chi, the zero-bit of the cusp of chaining pin and the axle center of revolving shaft and grating chi point-blank, position-limit mechanism is fixed near on the main body of preventing bull stick one end, described contiguous block is fixed on the main body, and the grating chi is the metal grating chi.
The utlity model has following beneficial effect: the utility model adopts unique one-piece construction, high-precision rotary axis system (adopting two kinds of different technical schemes), and be used with grating chi and read head, simplified the structure of sensor greatly, be characterized in simple in structure, measurement range is big, precision is high, long-time stability in use is good, linear error is little, cost is low, can realize the accurate measurement to workpiece profile.Sensor of the present utility model can be used for the measurement of overall size, surface shape error, morphology and the surfaceness of workpiece.Sensor of the present utility model is 10mm to the measurement range of the profile measurement of workpiece, and resolution can reach 5.0nm; Measurement range to the shape measure of workpiece can reach ± 10mm, ± 20mm, ± 30mm or bigger, resolution can reach 0.1 μ m.
Description of drawings
Fig. 1 is the one-piece construction front view of embodiment one of the present utility model, Fig. 2 is the A-A cut-open view of Fig. 1, Fig. 3 is that the B of Fig. 2 is to view (measure lever 3 remove zero-bit support 21 after), Fig. 4 is the partial enlarged drawing of the rotary axis system among Fig. 2, Fig. 5 is that the C of Fig. 1 is (clear in order to represent to view, position-limit mechanism 29 has only drawn, main body 5 and cover 1), Fig. 6 is the one-piece construction front view of embodiment four of the present utility model, Fig. 7 is the D-D cut-open view of Fig. 6, Fig. 8 is that the E of Fig. 7 is to view (measure lever 3 remove zero-bit support 21 after), Fig. 9 is the partial enlarged drawing of the rotary axis system among Fig. 6, Figure 10 is that (clear in order to represent, position-limit mechanism 29 has only drawn to view for the F of Fig. 6, main body 5 and cover 1).
Embodiment
Embodiment one: in conjunction with Fig. 1-Fig. 5 present embodiment is described, the displacement transducer of present embodiment is made up of measuring staff assembly, measurement lever 3, zero-bit support 21, zero-bit piece 20, grating chi 18, read head 19, web joint 22, rotary axis system, force measuring machine 30, position-limit mechanism 29, contiguous block 17, cover 1 and front apron 15; Described measuring staff assembly is made up of chaining pin 12, measuring staff 13 and anti-bull stick 11; Described rotary axis system is adjusted screws 25 by main body 5, revolving shaft 8, two bearings 23, two compressing tablets 24, two support flanges 26 and two first revolving shaftes and is formed; Described chaining pin 12 and anti-bull stick 11 are packed in all on the measuring staff 13 and are provided with near the two ends of measuring staff 13 that (anti-bull stick 11 in the present embodiment and chaining pin 12 adopt the gluing mode that connects to fix with measuring staff 13, the effect of anti-bull stick 11 is to prevent that measuring staff 13 from rotating), one end of described measurement lever 3 is provided with axial center hole, measuring staff 13 is fastened near an end of anti-bull sticks 11 that (present embodiment is fastened on measuring staff 13 in the axial center hole of measuring lever 3 by lock-screw 14 in the axial center hole of measuring lever 3, make measuring staff 13 and measure lever 3 and become one, unclamp lock-screw 14, be replaceable measuring staff assembly), the other end of measuring lever 3 is arranged in the inner chamber of main body 5 (main body 5 is support body of this sensor part), main body 5 is contained in the cover 1, described front apron 15 removably connects with the end face of main body 1 near anti-bull stick 11 1 ends, the measurement lever 3 that is arranged in the inner chamber of main body 5 is provided with the revolution axis hole, described revolving shaft 8 passes described revolution axis hole, revolving shaft 8 and measurement lever 3 affixed (present embodiment is fixing by trip bolt 6), with respectively be provided with a counterbore on two sidewalls of revolving shaft 8 corresponding main bodys 5, the two ends of revolving shaft 8 respectively are bearing on the main body 5 by a bearing 23, bearing 23 is arranged in the small diameter bore of counterbore, the outer shroud of each bearing 23 is by compressing tablet 24 axial compression in the small diameter bore that is arranged on counterbore, a support flange 26 affixed with main body 5 is housed in each counterbore, support flange 26 is provided with screwed hole of centre, first revolving shaft is adjusted screw 25 and is threaded with the screwed hole of centre of support flange 26, the end face that first revolving shaft is adjusted screw 25 is pressed on the compressing tablet 24, be fixed with zero-bit support 21 on the other end of measurement lever 3, described zero-bit piece 20 is packed on the zero-bit support 21, the other end end face of measuring lever 3 is outwards outstanding arc surface 31 (amount of curvature of arc surface 31 is determined by the lever ratio size of sensor), the center of circle of described arc surface 31 and the centres of measuring the revolution axis hole on the lever 3, described grating chi 18 is packed in (it is affixed that the two adopts bonding mode in the present embodiment) on the arc surface 31, (effect of zero-bit piece 20 is the cusps that guarantee chaining pin 12 to zero-bit piece 20 with the corresponding setting of the zero-bit of read head 19, the axle center of revolving shaft 8, the center of measuring the arc surface 31 of lever 3 becomes a horizontal line, this position is the initial zero-bit of sensor measurement), described read head 19 is fastened on the main body 5 by web joint 22, read head 19 and the corresponding setting in the position of grating chi 18, the zero-bit of the axle center of the cusp of chaining pin 12 and revolving shaft 8 and grating chi 18 point-blank, position-limit mechanism 29 is fixed near on the main body 5 of preventing bull stick 11 1 ends, described contiguous block 17 is fixed on (its effect is that high-accurate outline Displacement Measurement sensor is connected with driving box) on the main body 5, grating chi 18 is the metal grating chi, is convenient to the arc surface 31 of measuring lever 3 bonding.The grating chi 18 of present embodiment and read head 19 are outsourcing piece.
Embodiment two: in conjunction with Fig. 1 present embodiment is described, the force measuring machine 30 of present embodiment is adjusted screw 16 by dynamometer spring gib screw 2, dynamometer spring 4 and dynamometer spring and is formed; Described dynamometer spring gib screw 2 is screwed in to be measured on the lever 3, be provided with the adjustment screw hole with dynamometer spring gib screw 2 corresponding main bodys 5, dynamometer spring is adjusted screw 16 and is threaded with adjustment screw hole on the main body 5, the two ends of dynamometer spring 4 are hung in dynamometer spring gib screw 2 and dynamometer spring is adjusted on the screw 16, adjust the dynamometry size that screw is adjusted chaining pin by adjusting dynamometer spring.Other is identical with embodiment one.
Embodiment three: in conjunction with Fig. 1 and Fig. 5 present embodiment is described, the position-limit mechanism 29 of present embodiment is made up of limiting bracket 10 and two stop screws 9; Affixed on described limiting bracket 10 and the main body 5 near the end face of anti-bull stick 11 1 ends, the upper end of main body 5 is provided with the stop screw hole, one in described two stop screws 9 is fixed on the limiting bracket 10, and one of the residue in two stop screws 9 is threaded with stop screw hole on the main body 5.So be provided with, can guarantee that sensor has suitable measurement range.Other is identical with embodiment one or two.
Embodiment four: in conjunction with Fig. 6-Figure 10 present embodiment is described, the displacement transducer of present embodiment is made up of measuring staff assembly, measurement lever 3, zero-bit support 21, zero-bit piece 20, grating chi 18, read head 19, web joint 22, rotary axis system, force measuring machine 30, position-limit mechanism 29, contiguous block 17, cover 1 and front apron 15; Described measuring staff assembly is made up of chaining pin 12, measuring staff 13 and anti-bull stick 11; Described rotary axis system is adjusted screws 28 by main body 5, revolving shaft 8, two bearings 23 and two second revolving shaftes and is formed; Described chaining pin 12 and anti-bull stick 11 are packed in all on the measuring staff 13 and are provided with near the two ends of measuring staff 13 that (anti-bull stick 11 in the present embodiment and chaining pin 12 adopt the gluing mode that connects to fix with measuring staff 13, the effect of anti-bull stick 11 is to prevent that measuring staff 13 from rotating), one end of described measurement lever 3 is provided with axial center hole, measuring staff 13 is fastened near an end of anti-bull sticks 11 that (present embodiment is fastened on measuring staff 13 in the axial center hole of measuring lever 3 by lock-screw 14 in the axial center hole of measuring lever 3, make measuring staff 13 and measure lever 3 and become one, unclamp lock-screw 14, be replaceable measuring staff assembly), the other end of measuring lever 3 is arranged in the inner chamber of main body 5 (main body 5 is support body of this sensor part), main body 5 is contained in the cover 1, described front apron 15 removably connects with the end face of main body 5 near anti-bull stick 11 1 ends, the measurement lever 3 that is arranged in the inner chamber of main body 5 is provided with the revolution axis hole, described revolving shaft 8 passes described revolution axis hole, revolving shaft 8 and measurement lever 3 affixed (present embodiment is fixing by trip bolt 6), with respectively be provided with a dead eye on two sidewalls of revolving shaft 8 corresponding main bodys 5 and a revolving shaft that communicates with this dead eye is adjusted screw hole, the two ends of revolving shaft 8 respectively are bearing on the main body 5 by a bearing 23, bearing 23 is arranged in the dead eye on the main body 5, the center that second revolving shaft is adjusted screw 28 end faces is provided with groove, the outer shroud of each bearing 23 is by adjusting second revolving shaft adjustment screw, 28 axial compression that screw hole is threaded with revolving shaft, be fixed with zero-bit support 21 on the other end of measurement lever 3, described zero-bit piece 20 is packed on the zero-bit support 21, the other end end face of measuring lever 3 is outwards outstanding arc surface 31 (amount of curvature of arc surface 31 is determined by the lever ratio size of sensor), the center of circle of described arc surface 31 and the centres of measuring the revolution axis hole on the lever 3, described grating chi 18 is packed in (it is affixed that the two adopts bonding mode in the present embodiment) on the arc surface 31, (effect of zero-bit piece 20 is the cusps that guarantee chaining pin 12 to zero-bit piece 20 with the corresponding setting of the zero-bit of read head 19, the axle center of revolving shaft 8, the center of measuring the arc surface 31 of lever 3 becomes a horizontal line, this position is the initial zero-bit of sensor measurement), described read head 19 is fastened on the main body 5 by web joint 22, read head 19 and the corresponding setting in the position of grating chi 18, the zero-bit of the axle center of the cusp of chaining pin 12 and revolving shaft 8 and grating chi 18 point-blank, position-limit mechanism 29 is fixed near on the main body 5 of preventing bull stick 11 1 ends, described contiguous block 17 is fixed on (its effect is that high-accurate outline Displacement Measurement sensor is connected with driving box) on the main body 5, and grating chi 18 is the metal grating chi.
Embodiment five: in conjunction with Fig. 6 present embodiment is described, the force measuring machine 30 of present embodiment is adjusted screw 16 by dynamometer spring gib screw 2, dynamometer spring 4 and dynamometer spring and is formed; Described dynamometer spring gib screw 2 is screwed in to be measured on the lever 3, be provided with the adjustment screw hole with dynamometer spring gib screw 2 corresponding main bodys 5, dynamometer spring is adjusted screw 16 and is threaded with adjustment screw hole on the main body 5, the two ends of dynamometer spring 4 are hung in dynamometer spring gib screw 2 and dynamometer spring is adjusted on the screw 16, adjust the dynamometry size that screw is adjusted chaining pin by adjusting dynamometer spring.Other is identical with embodiment four.
Embodiment six: in conjunction with Fig. 6 and Figure 10 present embodiment is described, the position-limit mechanism 29 of present embodiment is made up of limiting bracket 10 and two stop screws 9; Affixed on described limiting bracket 10 and the main body 5 near the end face of anti-bull stick 11 1 ends, the upper end of main body 5 is provided with the stop screw hole, one in described two stop screws 9 is fixed on the limiting bracket 10, and one of the residue in two stop screws 9 is threaded with stop screw hole on the main body 5.So be provided with, can guarantee that sensor has suitable measurement range.Other is identical with embodiment four or five.
During measurement, the chaining pin on the sensor 12 is contacted with the surface of measured workpiece, sensor is driven case and drives along the direction of measurement of workpiece and slide.When chaining pin 12 when surface of the work slides, the upper and lower displacement of chaining pin 12 drives measuring staff 13 and measures lever 3, the centre of gyration rotation of grating chi 18 wraparound rotating shafts 8, promptly grating chi 18 is done the fillet motion with respect to read head 19.When the rotation of the center of grating chi 18 wraparound rotating shafts 8, in read head 19, an infrared light emitting diode is with the surface of light emission to the grating chi 18 of band scale, reflected light returns read head 19 by a transparent phase grating, generate the sinusoidal interference stripe signal on the detection faces in read head 19, this signal carries out digitized processing through circuit, the digital signal of output square wave, and this signal obtains the displacement scale of chaining pin 12 after treatment.

Claims (6)

1. large range high precision profile measurement displacement transducer, described displacement transducer by the measuring staff assembly, measure lever (3), zero-bit support (21), zero-bit piece (20), grating chi (18), read head (19), web joint (22), rotary axis system, force measuring machine (30), position-limit mechanism (29), contiguous block (17), cover (1) and front apron (15) and form; Described measuring staff assembly is made up of chaining pin (12), measuring staff (13) and anti-bull stick (11); It is characterized in that: described rotary axis system is adjusted screw (25) by main body (5), revolving shaft (8), two bearings (23), two compressing tablets (24), two support flanges (26) and two first revolving shaftes and is formed; The two ends that described chaining pin (12) and anti-bull stick (11) all are packed in the last and close measuring staff (13) of measuring staff (13) are provided with, one end of described measurement lever (3) is provided with axial center hole, measuring staff (13) is fastened in the axial center hole of measuring lever (3) near an end of anti-bull stick (11), the other end of measuring lever (3) is arranged in the inner chamber of main body (5), main body (5) is contained in the cover (1), and described front apron (15) removably connects with the end face of main body (1) near anti-bull stick (11) one ends; The measurement lever (3) that is arranged in the inner chamber of main body (5) is provided with the revolution axis hole, described revolving shaft (8) passes described revolution axis hole, revolving shaft (8) is affixed with measurement lever (3), with respectively be provided with a counterbore on two sidewalls of the corresponding main body of revolving shaft (8) (5), the two ends of revolving shaft (8) respectively are bearing on the main body (5) by a bearing (23), bearing (23) is arranged in the small diameter bore of counterbore, the outer shroud of each bearing (23) is by a compressing tablet (24) axial compression in the small diameter bore that is arranged on counterbore, a support flange (26) affixed with main body (5) is housed in each counterbore, support flange (26) is provided with screwed hole of centre, first revolving shaft is adjusted screw (25) and is threaded with the screwed hole of centre of support flange (26), the end face that first revolving shaft is adjusted screw (25) is pressed on the compressing tablet (24), be fixed with zero-bit support (21) on the other end of measurement lever (3), described zero-bit piece (20) is packed on the zero-bit support (21), the other end end face of measuring lever (3) is outwards outstanding arc surface (31), the center of circle of described arc surface (31) and the centres of measuring the revolution axis hole on the lever (3), described grating chi (18) is packed on the arc surface (31), the corresponding setting of zero-bit of zero-bit piece (20) and read head (19), described read head (19) is fastened on the main body (5) by web joint (22), the corresponding setting in position of read head (19) and grating chi (18), the zero-bit of the axle center of the cusp of chaining pin (12) and revolving shaft (8) and grating chi (18) point-blank, position-limit mechanism (29) is fixed near on the main body (5) of preventing bull stick (11) one ends, described contiguous block (17) is fixed on the main body (5), and grating chi (18) is the metal grating chi.
2. a kind of large range high precision profile measurement displacement transducer according to claim 1 is characterized in that: described force measuring machine (30) is adjusted screw (16) by dynamometer spring gib screw (2), dynamometer spring (4) and dynamometer spring and is formed; Described dynamometer spring gib screw (2) is screwed in to be measured on the lever (3), be provided with the adjustment screw hole with the corresponding main body of dynamometer spring gib screw (2) (5), dynamometer spring is adjusted screw (16) and is threaded with adjustment screw hole on the main body (5), and the two ends of dynamometer spring (4) are hung on dynamometer spring gib screw (2) and the dynamometer spring adjustment screw (16).
3. a kind of large range high precision profile measurement displacement transducer according to claim 1 and 2 is characterized in that: described position-limit mechanism (29) is made up of limiting bracket (10) and two stop screws (9); Described limiting bracket (10) is gone up near the end face of anti-bull stick (11) one ends affixed with main body (5), the upper end of main body (5) is provided with the stop screw hole, one in described two stop screws (9) is fixed on the limiting bracket (10), and one of the residue in two stop screws (9) is threaded with stop screw hole on the main body (5).
4. large range high precision profile measurement displacement transducer, described displacement transducer by the measuring staff assembly, measure lever (3), zero-bit support (21), zero-bit piece (20), grating chi (18), read head (19), web joint (22), rotary axis system, force measuring machine (30), position-limit mechanism (29), contiguous block (17), cover (1) and front apron (15) and form; Described measuring staff assembly is made up of chaining pin (12), measuring staff (13) and anti-bull stick (11); It is characterized in that: described rotary axis system is adjusted screw (28) by main body (5), revolving shaft (8), two bearings (23) and two second revolving shaftes and is formed; The two ends that described chaining pin (12) and anti-bull stick (11) all are packed in the last and close measuring staff (13) of measuring staff (13) are provided with, one end of described measurement lever (3) is provided with axial center hole, measuring staff (13) is fastened in the axial center hole of measuring lever (3) near an end of anti-bull stick (11), the other end of measuring lever (3) is arranged in the inner chamber of main body (5), main body (5) is contained in the cover (1), and described front apron (15) removably connects with the end face of main body (5) near anti-bull stick (11) one ends; The measurement lever (3) that is arranged in the inner chamber of main body (5) is provided with the revolution axis hole, described revolving shaft (8) passes described revolution axis hole, revolving shaft (8) is affixed with measurement lever (3), with respectively be provided with a dead eye on two sidewalls of the corresponding main body of revolving shaft (8) (5) and a revolving shaft that communicates with this dead eye is adjusted screw hole, the two ends of revolving shaft (8) respectively are bearing on the main body (5) by a bearing (23), bearing (23) is arranged in the dead eye on the main body (5), the center that second revolving shaft is adjusted screw (28) end face is provided with groove, the outer shroud of each bearing (23) is by adjusting second revolving shaft adjustment screw (28) axial compression that screw hole is threaded with revolving shaft, be fixed with zero-bit support (21) on the other end of measurement lever (3), described zero-bit piece (20) is packed on the zero-bit support (21), the other end end face of measuring lever (3) is outwards outstanding arc surface (31), the center of circle of described arc surface (31) and the centres of measuring the revolution axis hole on the lever (3), described grating chi (18) is packed on the arc surface (31), the corresponding setting of zero-bit of zero-bit piece (20) and read head (19), described read head (19) is fastened on the main body (5) by web joint (22), the corresponding setting in position of read head (19) and grating chi (18), the zero-bit of the axle center of the cusp of chaining pin (12) and revolving shaft (8) and grating chi (18) point-blank, position-limit mechanism (29) is fixed near on the main body (5) of preventing bull stick (11) one ends, described contiguous block (17) is fixed on the main body (5), and grating chi (18) is the metal grating chi.
5. a kind of large range high precision profile measurement displacement transducer according to claim 4 is characterized in that: described force measuring machine (30) is adjusted screw (16) by dynamometer spring gib screw (2), dynamometer spring (4) and dynamometer spring and is formed; Described dynamometer spring gib screw (2) is screwed in to be measured on the lever (3), be provided with the adjustment screw hole with the corresponding main body of dynamometer spring gib screw (2) (5), dynamometer spring is adjusted screw (16) and is threaded with adjustment screw hole on the main body (5), and the two ends of dynamometer spring (4) are hung on dynamometer spring gib screw (2) and the dynamometer spring adjustment screw (16).
6. according to claim 4 or 5 described a kind of large range high precision profile measurement displacement transducers, it is characterized in that: described position-limit mechanism (29) is made up of limiting bracket (10) and two stop screws (9); Described limiting bracket (10) is gone up near the end face of anti-bull stick (11) one ends affixed with main body (5), the upper end of main body (5) is provided with the stop screw hole, one in described two stop screws (9) is fixed on the limiting bracket (10), and one of the residue in two stop screws (9) is threaded with stop screw hole on the main body (5).
CN2009202442398U 2009-11-30 2009-11-30 Large-range high-precision skeleton surveying displacement sensor Expired - Fee Related CN201532192U (en)

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CN103516106A (en) * 2012-06-28 2014-01-15 深圳市大族激光科技股份有限公司 Hollow rotary motor and laser scribing device
CN103725602A (en) * 2012-10-16 2014-04-16 常州福生生物技术有限公司 Thermal cover plate used in nucleic acid amplification detector
CN104040288A (en) * 2012-01-04 2014-09-10 株式会社东京精密 Outline profile surface roughness measurement device and outline profile surface roughness measurement method
CN104197876A (en) * 2014-08-26 2014-12-10 北京海普瑞森科技发展有限公司 Contact type air flotation measuring head
CN104236599A (en) * 2014-09-19 2014-12-24 西安交通大学 One-dimensional raster scanning measuring head
CN106969740A (en) * 2017-04-14 2017-07-21 微微百检测技术(北京)有限公司 Hole perpendicularity measurement apparatus and system
CN107289872A (en) * 2017-06-28 2017-10-24 京东方科技集团股份有限公司 Height measuring device
CN108592842A (en) * 2018-08-06 2018-09-28 台州市诺伊曼科技有限公司 a kind of micro-displacement sensor
CN110537075A (en) * 2017-04-27 2019-12-03 罗伯特·博世有限公司 Inspection equipment and object check device for being optically inspected to object
CN111397492A (en) * 2020-04-08 2020-07-10 王浩 Intelligent plate shape instrument for plate processing
CN112476242A (en) * 2020-11-23 2021-03-12 洛阳中的电子科技有限公司 Perpendicularity online measuring mechanism and method for shaft machining workpiece profile

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CN102183217B (en) * 2011-03-17 2012-09-05 西安交通大学 Arc contourgraph measuring head and measuring method thereof
CN102183217A (en) * 2011-03-17 2011-09-14 西安交通大学 Arc contourgraph measuring head and measuring method thereof
CN104040288B (en) * 2012-01-04 2016-12-14 株式会社东京精密 Contour shape surface roughness measurement device and contour shape surface roughness measurement method
CN104040288A (en) * 2012-01-04 2014-09-10 株式会社东京精密 Outline profile surface roughness measurement device and outline profile surface roughness measurement method
CN103516106A (en) * 2012-06-28 2014-01-15 深圳市大族激光科技股份有限公司 Hollow rotary motor and laser scribing device
CN103516106B (en) * 2012-06-28 2017-09-29 大族激光科技产业集团股份有限公司 A kind of hollow rotating motor and laser scriber
CN102759377A (en) * 2012-07-18 2012-10-31 常州新亚电机有限公司 Reverse installing detection device and detection method for belt pulleys
CN103725602A (en) * 2012-10-16 2014-04-16 常州福生生物技术有限公司 Thermal cover plate used in nucleic acid amplification detector
CN103725602B (en) * 2012-10-16 2015-05-27 常州福生生物技术有限公司 Thermal cover plate used in nucleic acid amplification detector
CN104197876A (en) * 2014-08-26 2014-12-10 北京海普瑞森科技发展有限公司 Contact type air flotation measuring head
CN104197876B (en) * 2014-08-26 2017-12-15 北京海普瑞森科技发展有限公司 A kind of contact air bearing gauge head
CN104236599A (en) * 2014-09-19 2014-12-24 西安交通大学 One-dimensional raster scanning measuring head
CN104236599B (en) * 2014-09-19 2016-06-08 西安交通大学 A kind of one-dimensional grating scanning feeler
CN106969740A (en) * 2017-04-14 2017-07-21 微微百检测技术(北京)有限公司 Hole perpendicularity measurement apparatus and system
CN106969740B (en) * 2017-04-14 2023-07-14 微微一百检测技术(北京)有限公司 Hole verticality measuring device and system
CN110537075B (en) * 2017-04-27 2021-11-30 罗伯特·博世有限公司 Inspection apparatus for optically inspecting an object and object inspection device
CN110537075A (en) * 2017-04-27 2019-12-03 罗伯特·博世有限公司 Inspection equipment and object check device for being optically inspected to object
CN107289872A (en) * 2017-06-28 2017-10-24 京东方科技集团股份有限公司 Height measuring device
US10775155B2 (en) 2017-06-28 2020-09-15 Boe Technology Group Co., Ltd. Height measurement apparatus
CN108592842A (en) * 2018-08-06 2018-09-28 台州市诺伊曼科技有限公司 a kind of micro-displacement sensor
CN108592842B (en) * 2018-08-06 2024-04-16 台州市诺伊曼科技有限公司 Micro-motion displacement sensor
CN111397492A (en) * 2020-04-08 2020-07-10 王浩 Intelligent plate shape instrument for plate processing
CN111397492B (en) * 2020-04-08 2021-12-07 宁波海特技术转移有限公司 Intelligent plate shape instrument for plate processing
CN112476242A (en) * 2020-11-23 2021-03-12 洛阳中的电子科技有限公司 Perpendicularity online measuring mechanism and method for shaft machining workpiece profile
CN112476242B (en) * 2020-11-23 2024-01-09 洛阳中的电子科技有限公司 Online measuring mechanism and measuring method for verticality of profile of shaft-like machined workpiece

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