CN201490171U - Crystal orientation adjusting device for semiconductor dedicated equipment - Google Patents
Crystal orientation adjusting device for semiconductor dedicated equipment Download PDFInfo
- Publication number
- CN201490171U CN201490171U CN200920104637XU CN200920104637U CN201490171U CN 201490171 U CN201490171 U CN 201490171U CN 200920104637X U CN200920104637X U CN 200920104637XU CN 200920104637 U CN200920104637 U CN 200920104637U CN 201490171 U CN201490171 U CN 201490171U
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Abstract
The utility model relates to a crystal orientation adjusting device used for semiconductor dedicated equipment, which includes a longitudinal adjusting system, a transversal adjusting system and a base. A plurality of hinging mechanisms are adopted, the utility model realizes simple and compact structure and small volume; at the same time, the longitudinal adjusting system and the transversal adjusting system respectively adopt a screw rod locking mechanism and a fastening screw locking mechanism, therefore the reliability and the safety of the whole device are improved; and the cost is lower, therefore the equipment manufacture cost and the use cost of users are reduced. The utility model is an ideal crystal orientation adjusting device for semiconductor dedicated equipment, which is used for processing wafers. The utility model provides the crystal orientation adjusting device with the advantages of simple and practical structure and convenient and reliable operation.
Description
Technical field
The utility model relates to a kind of semiconductor manufacturing equipment crystal orientation adjusting device.
Background technology
Semiconductor manufacturing equipment is in the process that wafer is processed, because the requirement of wafer process technology need be carried out the crystal orientation adjustment to equipment.What common crystal orientation adjusting device adopted is bolt direct pull adjusting device and linear slider formula adjusting device, there is certain deficiency in actual applications respectively in above-mentioned several device, and is complicated as structure, overall dimension is big, cost is higher, the life-span is short etc.
Summary of the invention
The purpose of this utility model be for overcome provide outside the above-mentioned deficiency of the prior art a kind of compact conformation, easy to adjust, cost is lower, simple semiconductor manufacturing equipment crystal orientation adjusting device is installed.
The utility model adopts following technical scheme:
The utility model comprises vertical Adjustment System, horizontal Adjustment System and base, wherein, the longitudinal oscillation plate rear end of vertical Adjustment System establishes hinge and base is hinged, the joint pin upper end in its worm drive lifting regulating mechanism and the middle bottom-hinged of longitudinal oscillation plate, adjusting knob and adjusting screw(rod) are threaded with the middle and lower part of joint pin respectively, pressing plate and jam plate with jam plate clamping adjusting knob are fixed, it is hinged to establish hinge between jam plate and supporting plate, supporting plate and connecting plate are fixed, connecting plate and base are fixed, horizontal circle and longitudinal oscillation plate are fixed, and horizontal scale indicating dial and the base relative with horizontal circle are fixed; The teeter plate rear end of horizontal Adjustment System establishes hinge and the longitudinal oscillation plate is hinged, arm-tie in the lateral adjustment establishes hinge and the teeter front edge of board is hinged, the horizontal adjustment piece establishes hinge and vertically adjustable plate is hinged, pressing plate and horizontal adjustment piece with horizontal adjustment piece clamping adjusting screw(rod) are fixed, be threaded between adjusting screw(rod) and arm-tie and constitute the worm drive pair of lateral adjustments, laterally dial and teeter plate are fixed, and horizontal scale indicating dial and the longitudinal oscillation plate relative with horizontal dial are fixed.
The middle bottom-hinged of joint pin in the said worm drive lifting regulating mechanism of the utility model upper end and longitudinal oscillation plate is on the joint pin and to establish hinge between a gland hinged, and gland and longitudinal oscillation plate are fixed.
Arm-tie in the said horizontal Adjustment System of the utility model is provided with the locking jackscrew, fixedlys connected with a locking handgrip in the outer end of locking jackscrew.
The beneficial effects of the utility model:
The utility model is a kind of simple and practical, easy to operate and safe and reliable crystalline substance
To adjusting device.Owing to adopted a plurality of linkworks, realized simple and compact for structure, volume is little, simultaneously owing to adopted screw rod retaining mechanism and jackscrew retaining mechanism respectively in vertical Adjustment System and the horizontal Adjustment System, the reliability and the fail safe of whole device have been improved, and cost is lower, has reduced device fabrication and user's use cost.The utility model is a kind of desirable crystal orientation adjusting device that is used for semiconductor manufacturing equipment that wafer is processed.
Description of drawings
In the accompanying drawings: 1 base, 2 hinges, 3 horizontal scale indicating dials, 4 horizontal dials, 5 hinges, 6 teeter plates, 7 horizontal adjustment pieces, 8 hinges, 9 arm-ties, 10 locking handgrips, 11 pressing plates, 12 hinges, 13 adjusting screw(rod)s, 14 horizontal circles, 15 horizontal scale indicating dials, 16 longitudinal oscillation plates, 17 hinges, 18 joint pins, 19 glands, 20 connecting plates, 21 supporting plates, 22 hinges, 23 jam plates, 24 adjusting knobs, 25 adjusting screw(rod)s, 26 pressing plates.
Embodiment
Referring to accompanying drawing 1,2, comprise vertical Adjustment System in the formation of the present utility model, horizontal Adjustment System and base, it is hinged with base 1 that hinge 2 is established in longitudinal oscillation plate 16 rear ends of said vertical Adjustment System, joint pin 18 upper ends in its worm drive lifting regulating mechanism and the middle bottom-hinged of longitudinal oscillation plate 16, adjusting knob 24 and adjusting screw(rod) 25 are threaded with the middle and lower part of joint pin 18 respectively, pressing plate 26 with jam plate 23 clamping adjusting knobs 24 is fixing with jam plate 23, it is hinged that 21 of jam plate 23 and supporting plates are established hinge 22, supporting plate 21 is fixing with connecting plate 20, connecting plate 20 is fixing with base 1, horizontal circle 14 is fixing with longitudinal oscillation plate 16, and the horizontal scale indicating dial 15 relative with horizontal circle 14 is fixing with base 1; It is hinged with longitudinal oscillation plate 16 that hinge 5 is established in teeter plate 6 rear ends of horizontal Adjustment System, it is hinged with teeter plate 6 front ends that arm-tie 9 in the lateral adjustment is established hinge 8, horizontal adjustment piece 7 establishes hinge 12 and vertically adjustable plate 16 is hinged, pressing plate 1 with horizontal adjustment piece 7 clamping adjusting screw(rod)s 13 is fixing with horizontal adjustment piece 7, adjusting screw(rod) 13 is threaded with 9 of arm-ties and constitutes the worm drive pair of lateral adjustments, laterally dial 4 is fixing with teeter plate 6, and the horizontal scale indicating dial 3 relative with horizontal dial 4 is fixing with longitudinal oscillation plate 16.
It is hinged that joint pin 18 upper ends in the said worm drive lifting regulating mechanism and the middle bottom-hinged of longitudinal oscillation plate 16 are that joint pin 18 upper ends and 19 on a gland are established hinge 17, and gland 19 is fixing with longitudinal oscillation plate 16.
Arm-tie 9 in the said horizontal Adjustment System is provided with the locking jackscrew, fixedlys connected with a locking handgrip 10 in the outer end of locking jackscrew.
In the adjustment process of vertical Adjustment System, adjusting knob 24 turns clockwise, by being threaded of joint pin 18, can realize that joint pin 18 moves downward, because joint pin 18 is rotationally connected by hinge 17 with gland 19, gland 19 is fixed on the longitudinal oscillation plate 16, can realize that longitudinal oscillation plate 16 rotates around hinge 2, can reach needed angle by vertical dial 4 and vertical scale indicating dial 3, rotation supplies the adjusting screw(rod) 25 of locking then, and locking.Can be rotated counterclockwise adjusting knob equally, reach needed angle.Because adjusting knob 24 is by jam plate 23 and pressing plate 26 clampings, so it can only rotate can not about play.
In the adjustment process of horizontal Adjustment System, adjusting screw(rod) 13 turns clockwise, by with being threaded of arm-tie 9, can realize that arm-tie 9 outwards moves, owing to arm-tie 9 and teeter plate 6 are hinged by hinge 8, can realize that teeter plate 6 rotates around hinge 5, can reach needed angle by horizontal dial 4 and horizontal scale indicating dial 3, the rotational lock handgrip 10 then, and by jackscrew locking arm-tie 9.Can be rotated counterclockwise adjusting screw(rod) 13 equally, reach required angle.
Under the clamping of pressing plate 11 and horizontal adjustment piece 7, screw rod 13 can only rotate and can not produce axial endplay.
Claims (3)
1. semiconductor manufacturing equipment crystal orientation adjusting device, it is characterized in that it comprises vertical Adjustment System, horizontal Adjustment System and base, wherein, it is hinged with base (1) that hinge (2) is established in longitudinal oscillation plate (16) rear end of vertical Adjustment System, joint pin (18) upper end in its worm drive lifting regulating mechanism and the middle bottom-hinged of longitudinal oscillation plate (16), adjusting knob (24) and adjusting screw(rod) (25) are threaded with the middle and lower part of joint pin (18) respectively, pressing plate (26) with jam plate (23) clamping adjusting knob (24) is fixing with jam plate (23), it is hinged to establish hinge (22) between jam plate (23) and supporting plate (21), supporting plate (21) is fixing with connecting plate (20), connecting plate (20) is fixing with base (1), horizontal circle (14) is fixing with longitudinal oscillation plate (16), and the horizontal scale indicating dial (15) relative with horizontal circle (14) is fixing with base (1); It is hinged with longitudinal oscillation plate (16) that hinge (5) is established in teeter plate (6) rear end of horizontal Adjustment System, it is hinged with teeter plate (6) front end that arm-tie in the lateral adjustment (9) is established hinge (8), horizontal adjustment piece (7) establishes hinge (12) and vertically adjustable plate (16) is hinged, pressing plate (11) with horizontal adjustment piece (7) clamping adjusting screw(rod) (13) is fixing with horizontal adjustment piece (7), be threaded between adjusting screw(rod) (13) and arm-tie (9) and constitute the worm drive pair of lateral adjustments, laterally dial (4) is fixing with teeter plate (6), and the horizontal scale indicating dial (3) relative with horizontal dial (4) is fixing with longitudinal oscillation plate (16).
2. semiconductor manufacturing equipment crystal orientation adjusting device according to claim 1, the middle bottom-hinged that it is characterized in that joint pin (18) upper end and longitudinal oscillation plate (16) in the said worm drive lifting regulating mechanism be joint pin (18) upper end with a gland (19) between to establish hinge (17) hinged, gland (19) and longitudinal oscillation plate (16) are fixed.
3. semiconductor manufacturing equipment crystal orientation adjusting device according to claim 1 is characterized in that the arm-tie (9) in the said horizontal Adjustment System is provided with the locking jackscrew, fixedlys connected with a locking handgrip (10) in the outer end of locking jackscrew.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920104637XU CN201490171U (en) | 2009-09-11 | 2009-09-11 | Crystal orientation adjusting device for semiconductor dedicated equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920104637XU CN201490171U (en) | 2009-09-11 | 2009-09-11 | Crystal orientation adjusting device for semiconductor dedicated equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201490171U true CN201490171U (en) | 2010-05-26 |
Family
ID=42429038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200920104637XU Expired - Fee Related CN201490171U (en) | 2009-09-11 | 2009-09-11 | Crystal orientation adjusting device for semiconductor dedicated equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201490171U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101882592A (en) * | 2010-06-12 | 2010-11-10 | 中国电子科技集团公司第四十五研究所 | Elastic adjusting mechanism for special semiconductor device |
| CN102581976A (en) * | 2012-03-14 | 2012-07-18 | 浙江昀丰新能源科技有限公司 | Crystal processing orientation device |
-
2009
- 2009-09-11 CN CN200920104637XU patent/CN201490171U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101882592A (en) * | 2010-06-12 | 2010-11-10 | 中国电子科技集团公司第四十五研究所 | Elastic adjusting mechanism for special semiconductor device |
| CN102581976A (en) * | 2012-03-14 | 2012-07-18 | 浙江昀丰新能源科技有限公司 | Crystal processing orientation device |
| CN102581976B (en) * | 2012-03-14 | 2015-04-29 | 浙江昀丰新能源科技有限公司 | Crystal processing orientation device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100526 Termination date: 20130911 |