CN201488530U - Vacuum sintering furnace in 1,800 DEG C high-temperature protective atmosphere - Google Patents
Vacuum sintering furnace in 1,800 DEG C high-temperature protective atmosphere Download PDFInfo
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- CN201488530U CN201488530U CN2009202033930U CN200920203393U CN201488530U CN 201488530 U CN201488530 U CN 201488530U CN 2009202033930 U CN2009202033930 U CN 2009202033930U CN 200920203393 U CN200920203393 U CN 200920203393U CN 201488530 U CN201488530 U CN 201488530U
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Abstract
The utility model relates to a vacuum sintering furnace in 1,800 DEG C high-temperature protective atmosphere. A control system is connected with an electrical control executive component arranged in the equipment; a graphite sealed box is arranged in a heating chamber; and an air inlet pipeline and an exhaust pipeline of the high-temperature vacuum sintering furnace is connected with the graphite sealed box. The vacuum sintering furnace is characterized in that one furnace has two sets of processing atmosphere sintering and vacuum sintering and function conversion measures can be implemented by control programs; a furnace body is provided with a thermocouple and a copper electrode; a pipe joint is arranged at a casing cylinder position and communicated with an evacuation unit of a vacuum system; a square heating chamber is arranged in the furnace body; a heater is fixed on peripheral walls in the heating chamber; a sealed box and a support material feeding frame are arranged in the heater; the air inlet pipeline and the exhaust pipeline which are communicated with the sealed box pass through the upper wall and the lower wall of the heating chamber and the sealed box by a graphite pipe and are communicated with the inside of the sealed box; a gas circulation cooling blower is arranged at one end of the furnace casing; a thermocouple and a copper electrode are arranged on the inner wall of the sealed box; and the copper electrode is connected with the heater through a graphite electrode. When in vacuum sintering, volatile substances sealed in the sealed box cannot disperse, thereby effectively preventing the pollution and the damage of the volatile substances to the heater, simultaneously ensuring that the volatile substances are taken away by protective gas and the charging material is protected, and improving the utilization rate of the protective gas.
Description
Technical field
The utility model belongs to the manufacturing equipment of special cermacis, is used for the vacuum-sintering of sic ceramic component.
Background technology
The Sic pottery is a kind of superior performance new material, its application is expansion rapidly, make the visual plant high temperature sintering furnace of sic ceramic component, the Sic ceramic sintering temperature is higher, need mostly at the 1450-1750 degree, sintering process exists the volatilization of silicon steam serious, the problem of fragile equipment, and the yield rate of sintered products is also lower.Sintering furnace of the present invention at the problem that the sic sintering process exists, is carrying out brand-new design aspect agglomerating chamber's structure, the sintering process process, solves silicon steam contamination problem, improves the reliability of equipment, helps enhancing product performance.
Summary of the invention
The invention provides a kind of 1800 degree protective atmosphere vacuum sintering furnace with high temperature, as sic ceramic component vacuum or atmosphere sintering.Characteristics with energy-saving and environmental protection, a stove is suitable for two kinds of technologies, and the function conversion measure of atmosphere sintering and vacuum-sintering is provided.
This 1800 degree protective atmosphere vacuum sintering furnace with high temperature; control system links to each other with automatically controlled execution unit in being arranged on equipment; be provided with the graphite grazing case in the heating clamber; the inlet and outlet pipeline of high-temperature vacuum sintering furnace links to each other with the graphite grazing case; it is characterized in that a stove and accessory is equipped with two kinds of technologies--the setting of atmosphere sintering and vacuum-sintering, and implement function conversion measure by control program.Thermocouple, copper electrode are installed on the furnace shell, and housing cylinder position has interface tube to communicate with the unit of finding time of vacuum system, and the side's of dress body heating clamber, heater are fixed on the interior wall of heating clamber in the furnace shell, heater inside is installed seal box again and supported bin; Seal box inwall in the heater is established thermocouple; Communicate in the inlet and outlet pipeline of UNICOM's seal box passes heating clamber and seal box by graphite-pipe last lower wall and the seal box, copper electrode is connected with heater by graphite electrode; Furnace shell one end is installed the gas circulation cooling blower.
This novel device is the equipment that the high-temperature vacuum sintering technology is combined with the gas shield heating technique, and the control system and the technology of sintering furnace is complementary, and has designed two kinds of corresponding programs, and the translation function of atmosphere sintering and vacuum-sintering is provided.Can vacuum-sintering, also can charge into the protective gas heating again after the forvacuum, and be in slight positive pressure state always and carry out the protective atmosphere sintering.The volatile matter foreign gas that material in the sintering process discharges is recycled flowing protective gas and takes away and discharge out of the furnace, so this equipment also has (fat) function of coming unstuck, and (binding agent) sintering that can be used for coming unstuck is once finished.When vacuum-sintering; because the straight-through seal box of inlet and outlet pipeline; the volatile matter that is closed in the seal box can not shed; effectively prevent the pollution damage of volatile matter to heater; also make simultaneously the path flow of protective gas along regulation; even inswept furnace charge strengthens the effect of taking away volatile matter, protection furnace charge, improves the utilization rate of protective gas.
The insulation system of supporting heater had adopted the advanced ceramic insulating materials, and has been designed to special combining structure during this was novel, insulated when having solved high temperature and sealing problem, improved equipment dependability and energy-saving effect.
This equipment is a large high-temperature vacuum drying oven, and the key technical indexes is as follows:
Maximum temperature: 1800 ℃
Space, workspace: 800x800x1000mm
End vacuum: 2x10-1pa
Maximum batch: 800KG
Description of drawings
Fig. 1 is the axial cutaway view of the device structure of vacuum sintering furnace of the present invention;
Fig. 2 is the radial cross-section of figure;
Fig. 3 is seal box and a charge and exhaust pipe road system diagram in the heating clamber;
Fig. 4 is graphite-pipe and the seal ring structure figure that penetrates seal box;
Fig. 5 is the combined insulation structure chart of electrode area;
Fig. 6 is electrical control system structure figure.
The specific embodiment
The 1800 degree protective atmosphere vacuum sintering furnace with high temperature that this is novel; see Fig. 1, Fig. 2: furnace shell 1 is cylinder; axially level is installed; the stove end opens the door, and it is characterized in that the side's of dress body heating clamber 2 in the furnace shell 1, and graphite heater 3 is fixed on the heating clamber 2 interior walls; seal box 6 is installed in heater 3 again; the base plate secured in parallel that supports bin 5 is in housing 1, and its vertical pillars is passed heating clamber 2, seal box 6, and level board is installed in the column upper end in seal box 6.Communicate in the admission line 10 of UNICOM's seal box 6, discharge duct 12 pass heating clamber 2 and seal box 6 by graphite-pipe 16 last lower wall and the case, see Fig. 3, the thermocouple 4 of measuring temperature is fixed on the housing 1, and its thermometric end enters in the seal box 6.Go back fixed copper electrode 8 on the housing 1, the graphite electrode 9 that links to each other with copper electrode 8 penetrates heating clamber 2 and is connected with heater 3, and electric energy is input to heater 3; Circulating fan 7 is installed on the furnace shell 1 one end doors, is driven gas circulation in the furnace shell when effect of blower fan 7 is cooling, accelerate cooling velocity.Housing 1 cylinder position has interface tube to communicate with the unit 11 of finding time of vacuum system.
Inlet and outlet pipeline 12,10 all communicates by in graphite-pipe 16 and the seal box 6, as shown in Figure 4, graphite-pipe 16 passes heating clamber 2 heat-insulation layers and is connected with the seal box 6 of graphite, for improving the seal of interface, between graphite-pipe 16 and seal box 6 inwalls, add a graphite-seal ring 15, be close to the seal box inside panel below this ring, annular gap retaining bigger between graphite grazing case 6 and the graphite-pipe 16 is tight, the sealing of increase graphite grazing case 6.Air intake control valve 19 is housed, flow controller 20 on the air inlet pipeline 12.Cooler 17 is installed in gas exhaust piping 10 outlets additional, the high-temperature gas that the cooling graphite boxes is discharged, and air bleeding valve 18 is installed in the outlet of cooler 17.
Figure 5 shows that the graphite electrode 9 vertical thermal insulation layer walls that pass heating clamber 2 that link to each other with heater 3, by interior corundum ceramic pipe 22, it is outer that alundum tube 21 is coaxial successively is enclosed between electrode 9 peripheries and the heating clamber 2 thermal insulation layer outer walls, the length of interior corundum ceramic pipe 22 and outer alundum tube 21 accounts at the outside of thermal insulation layer wall 2/3 thickness, again with boron nitride insulation tube 23, play coaxial successively being enclosed between electrode 9 peripheries and the heating clamber 2 thermal insulation layer inwalls of boron nitride dead ring 24 of humidification, boron nitride insulation tube 23 1 end external diameters form outer lug boss greater than external diameter of pipe, and length of tube equates with electrode 9 remainders.Boron nitride dead ring 24 internal diameters and its coupling of boron nitride insulation tube 23 external diameters are enclosed within on the outer lug boss.Interior corundum ceramic pipe 22,23 effects of boron nitride insulation tube are to guarantee that the insulation between insulation material and graphite electrode, the effect of outer alundum tube 21 stop the insulation material chip to enter in the gap that may form between interior corundum ceramic pipe 22 and the boron nitride insulation tube 23, improve contamination resistance.Outer alundum tube 21 1 ends have the outer, protrude in heating clamber 2 insulation outer walls, play fixation.
Control system setting is seen Fig. 6:
Adopt the administrative center of man-machine interface (10.4 inches touch-screens) as The whole control system, show some significant datas in the stove running in real time, as by the temperature control instrument that is provided with the thermocouple on the equipment, power controller transmission desired temperature, measured temperature, give administrative center by the pressure sensor on the pressure controller table transmission equipment, feedback information such as running time, vacuum, charge flow rate as shown in the flow controller, these data can also show in multiple modes such as curve, rod figure.Actions such as the pump of equipment, valve control, safety interlocking protection, warning processing and partial data collection (as stove power, vacuum, charge flow rate etc.) adopt PLC (Programmable Logic Controller) to finish.Special-purpose single loop temperature controller is adopted in temperature control, accepts the temperature acquisition model of stove thermocouple, and through after the PID computing of instrument itself, the angle of flow of control controllable silicon power controller makes the stove heating power adjustable continuously.A pressure controller table is adopted in pressure control during atmosphere sintering, accepts the input signal of stove pressure sensor, with setting signal relatively after, through the PID computing of instrument itself, the charge flow rate by flow controller control stove reaches the controlled pressure purpose.On " on the man-machine interface ", can work out temperature-time technology, the parameters such as furnace pressure that need control when selecting application of vacuum mode or atmosphere processing mode and atmosphere to handle during start.These parameters are stored in the data cell of " on the man-machine interface ".During the stove operation, these pre-set parameter downloads to temperature controller and pressure controller table, are carried out the control of temperature and pressure by the next instrument.Designed the dynamic flow diagram that stove moves in " on the man-machine interface ", the whole working condition of stove is come into plain view; Corresponding position is provided with soft key on the flow chart, and when the user signed in to " on the man-machine interface " in " director " mode, setup parameter is directly operated or revised to available these soft key to stove.USB storage is preserved the historical data of the whole stove course of work.Printer is history of printing data form or history curve at any time.
Claims (5)
1. spend protective atmosphere vacuum sintering furnace with high temperature for one kind 1800, control system links to each other with automatically controlled execution unit in being arranged on equipment, the high-temperature vacuum sintering furnace links to each other with the inlet and outlet pipeline with vacuum system, it is characterized in that a stove and accessory is equipped with the setting of two kinds of processing atmosphere sintering and vacuum-sintering and implements function conversion measure by control program; Opening the door in vacuum-sintering furnace shell two ends, circulating fan is installed on the end door, thermocouple, copper electrode are installed on the furnace shell, and having pipeline to link to each other with vacuum system, body heating clamber in the side's of dress in the furnace shell, the heater, the heater inside that are fixed on wall in the heating clamber are installed seal box again and are supported bin; The inlet and outlet pipeline of UNICOM's seal box by graphite-pipe pass furnace shell, heating clamber communicates with the last lower wall of seal box, the seal box inwall establishes that the outer thermocouple of temperature sensor and housing links to each other, copper electrode is connected by the graphite electrode heater.
2. 1800 degree protective atmosphere vacuum sintering furnace with high temperature according to claim 1; it is characterized in that intake and exhaust pipeline (10), (12) end all are connected with seal box (6) by graphite-pipe (16); graphite-pipe (16) passes heating clamber (2) heat-insulation layer and is connected with the seal box (6) of graphite; for improving the seal of interface; between graphite-pipe (16) and seal box inwall, add a graphite-seal ring (15); be close to the seal box inside panel below this ring; annular gap retaining bigger between graphite boxes and the pipe is tight, the sealing of increase graphite grazing case (6).
3. 1800 degree protective atmosphere vacuum sintering furnace with high temperature according to claim 1; the insulation layer that it is characterized in that (2) six faces of heating clamber is made with the hard carbon fiber reinforce plastic felt of high-temperature molding; heater (3), seal box (6), support bin (5) and the breather line (16) that links to each other with seal box (6) all adopt high temperature resistant, and the high-quality graphite that volatile matter own is few is made.
4. 1800 degree protective atmosphere vacuum sintering furnace with high temperature according to claim 1; it is characterized in that the vertical thermal insulation layer wall that passes heating clamber (2) of the graphite electrode (9) that links to each other with heater (3); and by interior corundum ceramic pipe (22); coaxial successively being enclosed between electrode (9) periphery and heating clamber (2) the thermal insulation layer outer wall of outer alundum tube (21); outer alundum tube (21) one ends have the outer; protruding in heating clamber (2) insulation outer wall fixes; again with boron nitride insulation tube (23); play coaxial successively being enclosed between electrode (9) periphery and heating clamber (2) the thermal insulation layer inwall of boron nitride dead ring (24) of humidification, boron nitride dead ring (24) is enclosed within on the outer lug boss.
5. 1800 degree protective atmosphere vacuum sintering furnace with high temperature according to claim 4; the length of corundum ceramic pipe (22) and outer alundum tube (21) accounts at the outside of thermal insulation layer wall 2/3 thickness in it is characterized in that; boron nitride insulation tube (23) one end external diameters form outer lug boss greater than external diameter of pipe; length of tube equates with electrode (9) remainder, boron nitride dead ring (24) internal diameter and its coupling of boron nitride insulation tube (23) external diameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202033930U CN201488530U (en) | 2009-09-18 | 2009-09-18 | Vacuum sintering furnace in 1,800 DEG C high-temperature protective atmosphere |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202033930U CN201488530U (en) | 2009-09-18 | 2009-09-18 | Vacuum sintering furnace in 1,800 DEG C high-temperature protective atmosphere |
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| CN201488530U true CN201488530U (en) | 2010-05-26 |
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| CN2009202033930U Expired - Lifetime CN201488530U (en) | 2009-09-18 | 2009-09-18 | Vacuum sintering furnace in 1,800 DEG C high-temperature protective atmosphere |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102200393A (en) * | 2011-06-21 | 2011-09-28 | 中国电子科技集团公司第二研究所 | Vacuum heating equipment |
| CN102464494A (en) * | 2010-11-16 | 2012-05-23 | 中国科学院合肥物质科学研究院 | Microwave pressure sintering device |
| CN103644729A (en) * | 2013-11-22 | 2014-03-19 | 宝钛特种金属有限公司 | High temperature hydrogen sintering furnace |
| CN105157416A (en) * | 2015-09-16 | 2015-12-16 | 苏州汇科机电设备有限公司 | High-temperature vacuum sintering furnace |
| CN105157424A (en) * | 2015-09-16 | 2015-12-16 | 苏州汇科机电设备有限公司 | High-temperature vacuum sintering furnace capable of heating with graphite heating rods |
| CN111283189A (en) * | 2020-03-26 | 2020-06-16 | 宁波恒普真空技术有限公司 | Vacuum degreasing sintering furnace with double internal pumping down pipelines |
-
2009
- 2009-09-18 CN CN2009202033930U patent/CN201488530U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102464494A (en) * | 2010-11-16 | 2012-05-23 | 中国科学院合肥物质科学研究院 | Microwave pressure sintering device |
| CN102200393A (en) * | 2011-06-21 | 2011-09-28 | 中国电子科技集团公司第二研究所 | Vacuum heating equipment |
| CN103644729A (en) * | 2013-11-22 | 2014-03-19 | 宝钛特种金属有限公司 | High temperature hydrogen sintering furnace |
| CN105157416A (en) * | 2015-09-16 | 2015-12-16 | 苏州汇科机电设备有限公司 | High-temperature vacuum sintering furnace |
| CN105157424A (en) * | 2015-09-16 | 2015-12-16 | 苏州汇科机电设备有限公司 | High-temperature vacuum sintering furnace capable of heating with graphite heating rods |
| CN105157416B (en) * | 2015-09-16 | 2017-05-03 | 苏州汇科机电设备有限公司 | High-temperature vacuum sintering furnace |
| CN111283189A (en) * | 2020-03-26 | 2020-06-16 | 宁波恒普真空技术有限公司 | Vacuum degreasing sintering furnace with double internal pumping down pipelines |
| WO2021189564A1 (en) * | 2020-03-26 | 2021-09-30 | 宁波恒普真空技术有限公司 | Vacuum degreasing and sintering furnace with dual internal pumping lower pipes |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20100526 Effective date of abandoning: 20090918 |