CN201472435U

CN201472435U - Trolley used in semiconductor process

Info

Publication number: CN201472435U
Application number: CN2009202077089U
Authority: CN
Inventors: 黄臣; 赵庆国
Original assignee: Semiconductor Manufacturing International Shanghai Corp
Current assignee: Semiconductor Manufacturing International Beijing Corp
Priority date: 2009-08-11
Filing date: 2009-08-11
Publication date: 2010-05-19
Anticipated expiration: 2019-08-11

Abstract

The utility model provides a trolley used in the semiconductor process, which comprises a pedestal, a vehicle body, partition plates and trolley handles. The vehicle body is formed by vehicle body rods and the partition plates divide the vehicle body rods into sections, wherein a slide track is arranged at the upper part of each section of the vehicle body rods, stop bars are arranged on the first and the second side surfaces of the trolley respectively and positioned between the adjacent two layers of partition plates, and the two ends of each stop bar are arranged inside the two slide tracks on the same side surface respectively. The stop bars are locked by the fixing bolts when the stop bars are positioned at the top end of the slide tracks, and the stop bars slide towards the bottommost part of the slide tracks after the fixing bolts are unfastened. The trolley used in the semiconductor process improves the structure of the present trolley and reduces the damage of the trolley during the transportation process caused by design flaws.

Description

The semiconductor technology hand barrow

Technical field

The utility model relates to the semiconductor technology hand barrow, and is particularly related to a kind of semiconductor technology hand barrow of protecting article on it.

Background technology

Along with wafer size is increased to 12 cun from 8 cun, be used to place wafer carrying box (the Wafer FrontShipping Opening Box of wafer, FOSB) or brilliant box (the Front Opening Unified Pod of front open type, FOUP) and the size of their spare and accessory parts also increasing, make the weight of brilliant box constantly increase.If these materials all are automatic jobs, the increase of so this size and weight may not can cause any great human-body biological engineering risk.

But full-automatic operation can not realize fully, therefore still has the situation of a dead lift inevitably, and for example chip is measured, brilliant box is transported to links such as artificial shelf.Along with increasing chip manufacturer shifts toward the Asia, and most operating personnel is the women, and it is more obvious that the size of brilliant box and weight issue become.

Usually adopt hand barrow to carry in the prior art with multilayer fixed type shelf, place two brilliant boxes for every layer, yet existing hand barrow has open defect on project organization, it can't fix brilliant box, does not simultaneously also have pin, causes brilliant box to move easily in transportation or even drops, hand barrow is owing to be artificial control brake, also be easy to cause go-cart to topple, above reason all can cause the damage of brilliant box, thereby causes wherein wafer scratch, pollution or even breakage.

The utility model content

The utility model proposes a kind of semiconductor technology hand barrow, improve the structure of existing hand barrow, thereby cause the damage of product easily in transportation to reduce in present go-cart defective in design.

In order to achieve the above object, the utility model proposes a kind of semiconductor technology hand barrow, comprise base, vehicle body, dividing plate and trammer handle, described vehicle body is made up of the vehicle body bridge, described dividing plate is with the segmentation of vehicle body bridge, wherein the epimere of each section vehicle body bridge has slideway, hand barrow first side and second side have pin respectively, be arranged between the adjacent two layers dividing plate, the two ends of the described pin of each root are separately positioned in two slideways of same side, spacing by bolt of rear end plate when wherein said pin is positioned at the slideway top, after unclamping bolt of rear end plate, pin slides into the slideway lowermost end.

Optionally, described hand barrow the 3rd side and the 4th side have the arc countercheck rod respectively, are arranged between two sections vehicle body bridges between the adjacent two layers dividing plate.

Optionally, have a plurality of fixed parts on described every layer of dividing plate, the periphery of described fixed part is higher than described baffle surface.

Optionally, the periphery height of fixed part is smaller or equal to 3mm.

Optionally, have wheel on the described base, have rigid spring between wheel and the base.

Optionally, described trammer handle is the center pulling according to the junction of itself and vehicle body, and wheel has brake facing and is connected in trammer handle by connecting rod, when downward pulling trammer handle, drives the brake facing brake wheel.

The semiconductor technology hand barrow that the utility model proposes is provided with movable pin and can prevents product landing from the side around vehicle body, can not hinder to pick and place product convenient, safety simultaneously; Trammer handle can connect the brake facing on the control wheel, and deceleration and stopping performance is superior; Rigid spring is adopted in the wheel top, can play good shockproof effect; Slideway adopts fixed length to fix, and saves the material spending.

Description of drawings

Figure 1 shows that the semiconductor technology trolley structure scheme drawing of the utility model preferred embodiment.

Scheme drawing when the hand barrow that Figure 2 shows that the utility model preferred embodiment picks and places product.

Scheme drawing when Figure 3 shows that the transported in hand truck fashion of the utility model preferred embodiment.

The scheme drawing that the pin of Fig. 4～Figure 6 shows that the utility model preferred embodiment moves in slideway.

The specific embodiment

In order more to understand technology contents of the present utility model, especially exemplified by specific embodiment and cooperate institute's accompanying drawing to be described as follows.

Please refer to Fig. 1, Figure 1 shows that the semiconductor technology trolley structure scheme drawing of the utility model preferred embodiment.The utility model proposes a kind of semiconductor technology hand barrow, comprise base 110, vehicle body 100, multilayer insulating panel 200 and trammer handle 170, described vehicle body 100 is made up of the vehicle body bridge, described multilayer insulating panel 200 is divided into multistage (being divided into first section vehicle body bridge 120 and second section vehicle body bridge 130 in the present embodiment) with the vehicle body bridge, each section vehicle body bridge 120 wherein, 130 epimere has slideway 300, hand barrow first side and second side (being the left and right sides face of hand barrow working direction shown in the figure) have many pins 400 (pin and the slideway that have only shown a side among the figure) respectively, be arranged between two sections vehicle body bridges between the adjacent two layers dividing plate 200, for example be between two first section vehicle body bridges 120 or two second section vehicle body bridges 130 between, the two ends of described each root pin 400 are separately positioned in the slideway 300 of same side, wherein said pin 400 be positioned at slideway 300 tops and spacing by bolt of rear end plate, this moment, each layer dividing plate 200 reserved maximum space in the hand barrow side, convenient working person picks and places product (please refer to Fig. 2), pick and place and finish after unclamping bolt of rear end plate, pin 400 slides into slideway 300 lowermost ends, since the position of slideway 300 lowermost ends up and down between two adjacent separator 200 approximately in the middle of the place, so product is stopped by pin 400 and can not skid off from the hand barrow left and right sides to fall and cause damage (please refer to Fig. 3).

According to the utility model preferred embodiment, described hand barrow the 3rd side and the 4th side (being two sides before and after the hand barrow working direction shown in the figure) have many arc countercheck rods 180 respectively, be arranged between two sections vehicle body bridges between the adjacent two layers dividing plate 200, for example be between two first section vehicle body bridges 120 or two second section vehicle body bridges 130 between, thereby guaranteeing that hand barrow product in transportation can not skid off from the both sides, front and back to fall causes damage.

Further, have a plurality of fixed parts 210 on described every layer of dividing plate 200, the periphery of described fixed part 210 is higher than the surface of described dividing plate 200, in the utility model preferred embodiment, the periphery height of fixed part 210 is smaller or equal to 3mm, so guaranteeing that product for example is that mould or brilliant box are positioned in the fixed part 210 and can slide in transportation, for example is the scratch or the pollution of wafer thereby avoid damage of product.

Have wheel 140 on the described base 110, have rigid spring 150 between wheel 140 and the base 110, but actv. plays antihunt action, guarantee that product is not damaged.Described trammer handle 170 is the center pulling according to the junction of itself and vehicle body 100, wheel 140 has brake facing 160 and is connected in trammer handle 170 by connecting rod, when downward pulling trammer handle 170, drive brake facing 160 brake wheels 140, thereby make hand barrow have good braking ability, avoid hand barrow to topple, cause damage of product because of the braking ability difference.

Please refer to Fig. 4～Fig. 6 again, the scheme drawing that the pin of Fig. 4～Figure 6 shows that the utility model preferred embodiment moves in slideway.Slideway 300 sides are inserted with bolt 500 and enter slideway 300, and bolt 500 is arranged in slideway 300 during initial position, and pin 400 ends are positioned at bolt 500 tops, are stopped the downslide of pin 400 by bolt 500.Figure 4 shows that pin 400 is fixed on the scheme drawing on slideway 300 tops in slideway 300, Figure 5 shows that and unclamp the scheme drawing that bolt 500 back pins 400 slide, Figure 6 shows that pin slides into the scheme drawing of the lowermost end of slideway 300 for 400 times.

In sum, the semiconductor technology hand barrow that the utility model proposes is provided with movable pin and can prevents product landing from the side around vehicle body, can not hinder to pick and place product convenient, safety simultaneously; Trammer handle can connect the brake facing on the control wheel, and deceleration and stopping performance is superior; Rigid spring is adopted in the wheel top, can play good shockproof effect; Slideway adopts fixed length to fix, and saves the material spending.

Though the utility model discloses as above with preferred embodiment, so it is not in order to limit the utility model.Have in the technical field under the utility model and know the knowledgeable usually, in not breaking away from spirit and scope of the present utility model, when being used for a variety of modifications and variations.Therefore, protection domain of the present utility model is as the criterion when looking claims person of defining.

Claims

1. semiconductor technology hand barrow, comprise base, vehicle body, dividing plate and trammer handle, it is characterized in that, described vehicle body is made up of the vehicle body bridge, described dividing plate is with the segmentation of vehicle body bridge, wherein the epimere of each section vehicle body bridge has slideway, hand barrow first side and second side have pin respectively, be arranged between the adjacent two layers dividing plate, the two ends of the described pin of each root are separately positioned in two slideways of same side, spacing by bolt of rear end plate when wherein said pin is positioned at the slideway top, after unclamping bolt of rear end plate, pin slides into the slideway lowermost end.

2. semiconductor technology hand barrow according to claim 1 is characterized in that, described hand barrow the 3rd side and the 4th side have the arc countercheck rod respectively, is arranged between two sections vehicle body bridges between the adjacent two layers dividing plate.

3. semiconductor technology hand barrow according to claim 1 is characterized in that, has a plurality of fixed parts on described every layer of dividing plate, and the periphery of described fixed part is higher than described baffle surface.

4. semiconductor technology hand barrow according to claim 3 is characterized in that, the periphery height of fixed part is smaller or equal to 3mm.

5. semiconductor technology hand barrow according to claim 1 is characterized in that, has wheel on the described base, has rigid spring between wheel and the base.

6. semiconductor technology hand barrow according to claim 5, it is characterized in that described trammer handle is the center pulling according to the junction of itself and vehicle body, wheel has brake facing and is connected in trammer handle by connecting rod, when downward pulling trammer handle, drive the brake facing brake wheel.