CN201466012U - Working platform travel mechanism - Google Patents
Working platform travel mechanism Download PDFInfo
- Publication number
- CN201466012U CN201466012U CN200920067494XU CN200920067494U CN201466012U CN 201466012 U CN201466012 U CN 201466012U CN 200920067494X U CN200920067494X U CN 200920067494XU CN 200920067494 U CN200920067494 U CN 200920067494U CN 201466012 U CN201466012 U CN 201466012U
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- CN
- China
- Prior art keywords
- bolt
- workbench
- travel mechanism
- pull bar
- passes
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model relates to a working platform travel mechanism, which belongs to the semiconductor manufacturing industry. The travel mechanism comprises a basic framework, a plurality of fixed trays, an air float, a guide rail, a bracket, a working platform, a plurality of pull rods, a supporting plate, a fixed bolt, a supporting rack assembly, a shaft sleeve, an air cylinder assembly, a fixed tray and a roller wheel assembly. The air cylinder assembly of the travel mechanism can perform rotary and stretching movements around a positioning bolt; a first pull rod can rotate around a permanent seat, namely the first pull rod can rotate around the permanent seat under the drive of the air cylinder assembly; a second pull rod can rotate around the fixed bolt, namely the second pull rod can rotate around the fixed bolt under the drive of the first pull rod; and the second pull rod can drive the working platform to perform horizontal movements. The working platform can be used on an occasion which has a large length of travel but requires that the mounting distance is far less than the distance of the length of travel, and simultaneously the working platform can meet the requirement on repairing the working platform under the conditions of power failure and gas interruption.
Description
Technical field
The utility model relates to the workbench in machinery and the semiconductor manufacturing, relates in particular to a kind of travel mechanism of workbench.
Background technology
At present, in machinery and semicon industry, in order to realize moving of workbench, the most frequently used technological means employing motor screw mandrel transmission is also adopted the transmission of motor screw mandrel as the workbench of lathe.The transmission of motor screw mandrel can realize comparatively accurate position transmission, and positioning accuracy and repetitive positioning accuracy are higher, and error is little.Workbench moves steadily.In the certain space scope, can realize bigger stroke.
But, just be difficult to realize with the transmission of motor screw mandrel for following situation.When the space of installing very little, to such an extent as to little to motor can't be installed.When requiring bigger stroke, but require the distance of installing distance much smaller than stroke.Perhaps ought require workbench to keep in repair under the be everlasting outage and the situation of dying, above situation is if just can more easily realize with this workbench travel mechanism.
The utility model content
The technical problem that the utility model solves is in the narrow and small installing space of workbench, a kind of travel mechanism of new structure is provided for workbench, can bigger stroke arranged, but the distance of require installing is used much smaller than the occasion of the distance of stroke, can be implemented in outage simultaneously and the situation of dying under to the maintenance requirements of workbench.
A kind of workbench travel mechanism is characterized in that, comprising: basic framework 1, several fixed disks, air supporting 3, guide rail 4, several supports, workbench 6, several pull bars, supporting bracket 8, set bolt 9, bracket assembly 11, several axle sleeves, cylinder assembly 14, holder 16, roll wheel assembly 21, wherein
Air supporting 3 is installed on the basic framework 1 by bolt and guide rail 4;
Another first bolt 13 passes cylinder assembly 14 successively and first pull bar, 15 backs are fixed with nut;
Holder 16 is installed on the basic framework 1 and uses bolt, and first fixed disk 19 is with after first axle sleeve 20 is connected by bolt, and it is fixing with holder 16 that bolt passes first pull bar 15 once more;
Set bolt 9 passes second pull bar 7 after putting two first axle sleeves 20 successively, and is with two nuts that set bolt 9 is fixing, after bolt puts successively and passes first fixed disk 19 behind two first axle sleeves 20, passes second pull bar 7 once more and second fixed disk, 2 backs are fixing;
The 3rd support 5 is installed on the basic framework 1 by bolt, and it is fixing that bolt passes the 3rd support 5, supporting bracket and workbench 8;
Described a kind of workbench travel mechanism, it is characterized in that: described cylinder assembly 14 can rotate around first bolt 13.Described first pull bar 15 can be around holder 16 rotations.Described first pull bar 15 can be around holder 16 rotations under cylinder assembly 14 promotes.Described second pull bar 7 can be around set bolt 9 rotations.Described second pull bar 7 can be around set bolt 9 rotations under first pull bar 15 promotes.Described second pull bar 7 platform 6 that can push the work forward moves horizontally.
Described a kind of workbench travel mechanism, it is characterized in that: described roll wheel assembly 21 comprises, wheel 22, lining 23, right wheel limit 24, locating shim 25, base 26, bearing 27, bolt 28, revolver limit 29;
Described cylinder assembly 14 can promote first pull bar 15 and rotate around holder 16.Described first pull bar 15 promotes second pull bar 7 around set bolt 9 rotations.Described second pull bar 7 platform 6 that can push the work forward moves horizontally.Roll wheel assembly 21 can move horizontally along guide rail.When described workbench moved, air supporting 3 can be floated workbench.
The beneficial effects of the utility model are whole travel mechanism apparatus structure compactnesses, and volume is little, and is in light weight, still the travel mechanism that the utility model provides can be installed when the space is little to can't motor be installed the time.This mechanism's positioning accuracy height, there is bigger stroke in this mechanism, and the distance of installation has the easy advantage of maintenance much smaller than the distance of stroke under the situation of cutting off the power supply and dying.
Description of drawings
Fig. 1 is that the master of workbench travel mechanism looks schematic diagram;
Fig. 2 is a workbench travel mechanism schematic top plan view;
Fig. 3 is that schematic diagram is looked on the workbench travel mechanism right side;
Fig. 4 is that the roll wheel assembly master of workbench travel mechanism looks schematic diagram;
Fig. 5 is a workbench travel mechanism roll wheel assembly schematic top plan view.
Label declaration
1. basic framework 2. second fixed disks 3. air supportings 4. guide rails
5. the 3rd support 6. workbenches 7. second pull bars 8. supporting brackets
9. set bolt 10. first supports 11. bracket assemblies 12. second axle sleeves
13. first bolt, 14. cylinder assemblies, 15. first pull bars, 16. holders
17. second support, 18. second bolts, 19. first fixed disks, 20. first axle sleeves
21. roll wheel assembly 22. is taken turns 23. linings, 24. right wheel limits
25. locating shim 26. bases 27. bearings 28. roller bolts
29. revolver limit 1001. marble flat boards
Embodiment
Below in conjunction with the drawings and specific embodiments the utility model is elaborated.
In conjunction with Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5, the utility model comprises: whole adjusting device comprises: basic framework 1, the second fixed disk 2, air supporting 3, guide rail 4, the three supports 5, workbench 6, second pull bar 7, supporting bracket 8, set bolt 9, first support 10, bracket assembly 11, the second axle sleeves 12, first bolt 13, cylinder assembly 14, the first pull bars 15, holder 16, the second supports 17, the second bolts 18, first fixed disk, 19, the first axle sleeves 20, roll wheel assembly 21, wheel 22, lining 23, right wheel limit 24, locating shim 25,, base 26, bearing 27, bolt 28, revolver limit 29.
The concrete structure of the workbench travel mechanism in the present embodiment is: air supporting 3 is installed on the basic framework 1 by bolt, guide rail 4 is installed on the basic framework 1 by bolt, first bolt 13 is installed on the basic framework 1 after passing the cylinder assembly 14 and second axle sleeve 12 successively.After passing the cylinder assembly 14 and first pull bar 15 successively, fix by second first bolt 13 with nut.Holder 16 usefulness bolt are installed on the basic framework 1, behind screw bolt passes first fixed disk 19 and first axle sleeve 20,
It is fixing to pass the 3rd support 5 and holder 16 once more.Set bolt 9 passes second pull bar 7 after putting two first axle sleeves 20 successively, and is with two nuts that set bolt 9 is fixing.After bolt puts successively and passes first fixed disk 19 behind two first axle sleeves 20, pass second pull bar 7 once more and fixed disk 2 backs are fixing.Roll wheel assembly 21 is installed on the workbench 6, uses bolt.Workbench 6 assemblies are installed in the air supporting 3, use bolt.It is fixing that bolt passes second fixed disk, 2 backs.The 3rd support 5 is installed on the basic framework 1, uses bolt.Bolt passes the 3rd support 5 and supporting bracket 8 usefulness nuts are fixed.Bolt passes supporting bracket 8 and workbench 6 backs are fixing.Second support 17 is installed on the basic framework 1, uses bolt.Second bolt 18 passes second support 17 and supporting bracket 8 usefulness nuts are fixed.Bolt passes supporting bracket 8 and workbench 6 backs are fixing, and first support 10 is installed on the basic framework 1, uses bolt.Bracket assembly 11 is installed on first support 10, uses bolt.The installation method of this routine roll wheel assembly 21 is: bolt 28 passes revolver limit 29, wheel 22, bearing 27 and lining 23 successively and right wheel limit 24 usefulness slotted countersunk flat head screws 28 are fixing.Hexagon socket cap head screw passes that to pass bolt 28 behind locating shim 25 and the base 26 once more fixing.
The wheel limit 24, the right side and the revolver limit 29 of roll wheel assembly 21 play the role of positioning.Cylinder assembly 14 can rotate around first bolt 13.Cylinder assembly 14 can promote first pull bar 15 and rotate around holder 16.
First pull bar 15 promotes second pull bar 7 around set bolt 9 rotations.Second pull bar 7 platform 6 that can push the work forward moves horizontally.Roll wheel assembly 21 can move horizontally along guide rail.When workbench moved, air supporting 3 can be floated workbench 6.
The workbench 6 of roll wheel assembly 21 is placed on the marble flat board 1001 of standard, with the depth of parallelism of dial gauge measurement marble flat board, if the depth of parallelism is bad, at base 26 pad Copper Foils, continues to adjust the depth of parallelism, till meeting the demands.The distance H 1 of surveying work platform assembly two roller inner side edges.Measure the distance H 2 of two guide rails, 4 inner side edges, measure each limit two wheel inner side edges depth of parallelism with dial gauge simultaneously,, finally adjust parallel if not parallel at base 26 side pad Copper Foils.Relatively whether H1 equates with H2, if unequal, the distance of adjusting guide rail equates it.To the cylinder assembly ventilation, workbench will be made easy motion along guide rail.
On the basis of above-mentioned workbench travel mechanism, can increase facilities such as electromagnetically operated valve, transducer, software and hardware.Come the stroke of control cylinder by controller.Can realize automatic control like this.
In mask aligner complete machine integrating process, some workpiece movement just need workbench travel mechanism, require workbench travel mechanism compact conformation, volume is little, in light weight, can in narrow space, install, (space is little of motor can't be installed). the positioning accuracy height, there is bigger stroke in this travel mechanism, but the distance of installing is much smaller than the distance of stroke. easy-maintaining under the outage and the situation of dying. and the workbench travel mechanism satisfactory device that comes to this. according to demand, designed a workbench travel mechanism.
The above is preferred embodiment of the present invention only, is not limited to the present invention.Within the spirit and principles in the present invention all, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (12)
1. a workbench travel mechanism is characterized in that, comprising: basic framework (1), several fixed disks, air supporting (3), guide rail (4), several supports, workbench (6), several pull bars, supporting bracket (8), set bolt (9), bracket assembly (11), several axle sleeves, cylinder assembly (14), holder (16), roll wheel assembly (21) wherein, air supporting (3) is installed on the basic framework (1) by bolt and guide rail (4);
After first bolt (13) passes cylinder assembly (14) and second axle sleeve (12) successively, be installed on the basic framework (1);
Another first bolt (13) passes cylinder assembly (14) successively and first pull bar (15) back is fixed with nut;
Holder (16) is installed in basic framework (1) and goes up and use bolt, first fixed disk (19) and after first axle sleeve (20) is connected by bolt, and bolt passes first pull bar (15) once more and holder (16) is fixed;
Set bolt (9) passes second pull bar (7) after putting two first axle sleeves (20) successively, with two nuts that set bolt (9) is fixing, after bolt put successively and passes first fixed disk (19) behind two first axle sleeves (20), it was fixing to pass second pull bar (7) and second fixed disk (2) back once more;
Roll wheel assembly (21) is installed on the workbench (6) by bolt, and workbench (6) assembly is installed in the air supporting (3), passes behind second fixed disk fixing by bolt;
The 3rd support (5) is installed on the basic framework (1) by bolt, and it is fixing that bolt passes the 3rd support (5), supporting bracket and workbench (8);
Second support (17) is installed on the basic framework (1) by bolt, and second bolt (18) passes second support (17), supporting bracket (8) is fixing with workbench (6);
First support (10) is installed on the basic framework (1) by bolt, and bracket assembly (11) is installed on first support (10) by bolt.
2. a kind of workbench as claimed in claim 1 travel mechanism, it is characterized in that: described cylinder assembly (14) can rotate around first bolt (13).
3. a kind of workbench as claimed in claim 1 travel mechanism, it is characterized in that: described first pull bar (15) can rotate around holder (16).
4. a kind of workbench as claimed in claim 3 travel mechanism, it is characterized in that: described first pull bar (15) can rotate around holder (16) under cylinder assembly (14) promotes.
5. a kind of workbench as claimed in claim 1 travel mechanism, it is characterized in that: described second pull bar (7) can rotate around set bolt (9).
6. a kind of workbench as claimed in claim 5 travel mechanism, it is characterized in that: described second pull bar (7) can rotate around set bolt (9) under first pull bar (15) promotes.
7. a kind of workbench as claimed in claim 5 travel mechanism is characterized in that: described second pull bar (7) platform (6) that can push the work forward moves horizontally.
8. a kind of workbench as claimed in claim 1 travel mechanism, it is characterized in that: described roll wheel assembly (21) comprises, wheel (22), lining (23), right wheel limit (24), locating shim (25), base (26), bearing (27), bolt (28), revolver limit (29);
Roller bolt (28) passes revolver limit (29), wheel (22), bearing (27) and lining (23) successively and right wheel limit (24) is fixed with slotted countersunk flat head screw (28).Hexagon socket cap head screw passes that to pass bolt (28) behind locating shim (25) and the base (26) once more fixing.
9. a kind of workbench as claimed in claim 1 travel mechanism is characterized in that:
Described cylinder assembly (14) can rotate around first bolt (13).
10. according to claim 1, a kind of workbench travel mechanism is characterized in that:
Described cylinder assembly (14) can promote first pull bar (15) and rotate around holder (16).
11. a kind of workbench as claimed in claim 10 travel mechanism is characterized in that:
Described first pull bar (15) promotes second pull bar (7) and rotates around set bolt (9).
12. a kind of workbench as claimed in claim 11 travel mechanism is characterized in that:
Described second pull bar (7) platform (6) that can push the work forward moves horizontally.Roll wheel assembly (21) can move horizontally along guide rail.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920067494XU CN201466012U (en) | 2009-02-04 | 2009-02-04 | Working platform travel mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920067494XU CN201466012U (en) | 2009-02-04 | 2009-02-04 | Working platform travel mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201466012U true CN201466012U (en) | 2010-05-12 |
Family
ID=42393360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200920067494XU Expired - Lifetime CN201466012U (en) | 2009-02-04 | 2009-02-04 | Working platform travel mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201466012U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103834892A (en) * | 2014-03-24 | 2014-06-04 | 常州神力热喷涂技术有限公司 | Large rotating platform car capable of homogenizing super thrust |
| CN113126451A (en) * | 2021-04-01 | 2021-07-16 | 三河建华高科有限责任公司 | Marble precision workbench air-flotation jacking mechanism |
-
2009
- 2009-02-04 CN CN200920067494XU patent/CN201466012U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103834892A (en) * | 2014-03-24 | 2014-06-04 | 常州神力热喷涂技术有限公司 | Large rotating platform car capable of homogenizing super thrust |
| CN113126451A (en) * | 2021-04-01 | 2021-07-16 | 三河建华高科有限责任公司 | Marble precision workbench air-flotation jacking mechanism |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CX01 | Expiry of patent term |
Granted publication date: 20100512 |
|
| CX01 | Expiry of patent term |