CN201463826U - Magnetic array position sensing device - Google Patents
Magnetic array position sensing device Download PDFInfo
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- CN201463826U CN201463826U CN2009200844230U CN200920084423U CN201463826U CN 201463826 U CN201463826 U CN 201463826U CN 2009200844230 U CN2009200844230 U CN 2009200844230U CN 200920084423 U CN200920084423 U CN 200920084423U CN 201463826 U CN201463826 U CN 201463826U
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Abstract
The utility model relates to a sensing device, in particular to a magnetic array position sensing device. The magnetic array position sensing device comprises a permanent magnet device 1 containing a permanent magnet array 101 and a magnetic sensitive element device 2 which is matched with the permanent magnet device 1 and contains a magnetic sensitive element array 201, wherein the magnetic sensitive element device 2 is fixed on a main circuit board 7 containing a distance test device, and the magnetic sensitive element array 201 is fixed on the magnetic sensitive element device 2 through a fixing device. The utility model has the following advantages: 1. an independent positioning plate is adopted for welding the magnetic sensitive element so as to reduce the position error of the magnetic sensitive element; and 2. the relationship between the unit width of the magnet array and the interval of magnetic sensitive elements is designed again so as to increase the interval of the magnetic sensitive elements under the condition of keeping the system accuracy, reduce the usage amount of the magnetic sensitive elements and reduce the cost of equipment.
Description
Technical field
The utility model relates to a kind of sensing device, especially relates to a kind of magnetic array position sensing device.
Background technology
On an object, install and have permanent magnet array, on another object, install and have magneto sensor array and circuit, thus the periodic magnetic field of magneto sensor array received permanent magnet array and carry out signal Processing and measure the technology of two articles relative displacement and use very extensive.This class device has advantages such as no wearing and tearing, anti-adverse environment, response speed are fast, and measuring accuracy height, and special-purpose integrated circuit such as HLA32 have been made, circuit has 32 road Hall element arrays, and adopt single-chip microcomputer that the output signal of Hall element is scanned, example with position of judging 8 permanent magnets of row is gone up the position that permanent magnet is judged in electric scanning long successively apart from carrying out segmentation under the situation.Patent of invention " position coded magnetic displacement sensor " CN1309282A has introduced coding, each cell width changes between ± 1/7～± 1/9 in the permanent magnet array, spacing in the magneto sensor array between each element changes between ± 1/11～± 1/13, when permanent magnet array is positioned at magneto sensor array diverse location, the differential signal sequence difference of taking out between the magnet-sensitive element, its number is by the permutation and combination decision of permanent magnet array unit and magneto sensor array element.Among utility model patent " digitizing proximity transducer " CN2615636Y, also adopt permanent magnet array and magneto sensor array, in order to carry out long range measurements, this patent has also adopted segmentation to go up electric scanning successively, judge the position of permanent magnet, and have corresponding position coder product.
Patent of invention " magnetic position sensing device and localization method thereof " application number 200810047448.3 has adopted parallel port transmission data to keep the data high-speed transmission, carry out the magneto sensor array extension with cascade system, development adopts the I2C mode to increase the magneto sensor quantity of governor circuit control; Adopt the single-chip microcomputer cascade selected magneto sensor group of a step to have improved sweep velocity; Adopt a kind of quadrature localization method that the analogue type magneto sensor is improved measuring accuracy, the switching mode magneto sensor is improved arithmetic speed.But the magnetic field homogeneity of magnet is poor in this device; There is error in the magneto sensor location; In localization method, when magneto sensor increases at interval, can cause measuring accuracy to descend; On the other hand, spacing is little between the magneto sensor, causes the magneto sensor use amount many, and cost increases; At last, because the pilot process that exists decimal to determine causes locating speed slow excessively.
The utility model content
It is poor that the utility model mainly solves the magnetic field homogeneity of existing in prior technology magnet, and there is error in the magneto sensor location; In localization method, when magneto sensor increases at interval, the technical matters that can cause degradation under the measuring accuracy, provide a kind of magnetic field homogeneity good, there is not error substantially in the magneto sensor location, when magneto sensor increases at interval, the magnetic array position sensing device and the localization method thereof that can not cause measuring accuracy to descend.
It is that spacing is little between the solution existing in prior technology magneto sensor that the utility model has a purpose again, cause the magneto sensor use amount many, the technical matters of cost increase etc., provide between a kind of magneto sensor spacing big, the magneto sensor use amount is little, magnetic array position sensing device that cost is little and localization method thereof.
It is to solve existing in prior technology because the pilot process that exists decimal to determine that the utility model also has a purpose, cause locating speed to cross the technical matters that waits slowly, provide a kind of pilot process that does not exist decimal to determine, magnetic array position sensing device that locating speed is higher and localization method thereof.
Above-mentioned technical matters of the present utility model is mainly solved by following technical proposals:
Magnetic array position sensing device, comprise the permanent magnet device that includes permanent magnet array, and match with permanent magnet device and include the magneto sensor device of magneto sensor array, this magneto sensor device is fixed on the main circuit board that includes the distance test device, it is characterized in that described magneto sensor array is fixed on the above magneto sensor array of this magneto sensor device by stationary installation and is fixed on the main circuit board by stationary installation.
At above-mentioned magnetic array position sensing device, described permanent magnet array is made of some permanent magnet units that are arranged in parallel, and described magneto sensor array is made of some magneto sensors that are arranged in parallel.
At above-mentioned magnetic array position sensing device, described stationary installation comprises fixed head, and the contact pin of above-mentioned plurality of magnetic photosensitive elements passes fixed head and links to each other with above-mentioned main circuit board.
At above-mentioned magnetic array position sensing device, also be provided with some through holes in the described fixed head, the contact pin of above-mentioned magneto sensor passes through hole and links to each other with above-mentioned main circuit board.
At above-mentioned magnetic array position sensing device, described permanent magnet unit width is
The contained permanent magnet unit number of described permanent magnet array greater than
The magneto sensor number is greater than or equal in the magneto sensor array
At the permanent magnet array two ends, receive on line and the receive direction in the magnetic field of magneto sensor array, greater than the expanded range of the magnetic-field component of magneto sensor action threshold value greater than the space D between the magneto sensor, wherein, D is the spacing between the magneto sensor, δ is a sensing resolution, and n is a magneto sensor spacing enlargement factor.
At above-mentioned magnetic array position sensing device, described permanent magnet unit is by N utmost point permanent magnets and packing material is formed or be made up of staggered permanent magnets of polarity and packing material, and described magneto sensor is analogue type or switching mode.
At above-mentioned magnetic array position sensing device, described distance test device comprises the impact damper that is connected with the DSP digital signal processor, DSP digital signal processor inside has the distance calculator distance calculator, impact damper connects single-chip microcomputer, single-chip microcomputer connects above-mentioned magneto sensor array, and this magneto sensor array also is connected with the DSP digital signal processor.
Therefore, the utlity model has following advantage: 1. magnetic adopts independently location-plate, and magneto sensor is welded on the location-plate, reduces the magneto sensor site error; 2. adopt lenticular permanent magnet array, magneto sensor array mounting structure, the mode that two row's magnet are arranged has relatively strengthened magnetic field intensity and homogeneity, improves system accuracy; 3. the relation between redesign magnet array cell width and the magneto sensor interval keeping having enlarged the spacing between the magneto sensor under the constant condition of system accuracy, reduces the magneto sensor use amount, reduces installation cost.
Description of drawings
Fig. 1 is a kind of stereographic map of the present utility model;
Fig. 2 is permanent magnet distribution plan and the circuit theory diagrams among Fig. 1;
Fig. 3 is the through hole synoptic diagram of the fixed head among Fig. 1;
Fig. 4 is that the fixed head among Fig. 1 connects and magneto sensor array junctions composition;
Fig. 5 is a connection diagram between the main circuit board among Fig. 1;
Embodiment
Below by embodiment, and in conjunction with the accompanying drawings, the technical solution of the utility model is described in further detail. among the figure, permanent magnet device 1, permanent magnet array 101, permanent magnet unit 102, Baltimore groove 103, permanent magnet device body 104, magneto sensor device 2, magneto sensor array 201, magneto sensor 202, distance test device 3, DSP digital signal processor 301, impact damper 302, distance calculator 303, single-chip microcomputer 304, output port 305, stationary installation 4, fixed head 5, through hole 6, main circuit board 7, resistance 701, PNP triode 702, contact pin circuit board 8.
Embodiment:
Magnetic array position sensing device, comprise the permanent magnet device 1 that includes permanent magnet array 101, and match with permanent magnet device 1 and include the magneto sensor device 2 of magneto sensor array 201, this magneto sensor device 2 is fixed on the main circuit board 7 that includes distance test device 3, and magneto sensor array 201 is fixed on this magneto sensor device 2 by stationary installation 4.Magneto sensor array 201 is fixed on the main circuit board 7 by stationary installation 4.Stationary installation 4 comprises fixed head 5, and the contact pin of above-mentioned plurality of magnetic photosensitive elements 202 passes fixed head 5 and links to each other with above-mentioned main circuit board 7.Also be provided with some through holes 6 in the fixed head 5, the contact pin of above-mentioned magneto sensor 202 passes through hole 6 and links to each other with above-mentioned main circuit board 7.In the present embodiment, fixed head 5 is made up of two row pcb boards of dislocation arrangement.But also can form by a row pcb board.When fixed head 5 is made up of a row pcb board, fixed head 5 and main circuit board 7 arranged in dislocation, the effect of serving as another row pcb board by main circuit board 7.Increasing independently, location-plate is in order to improve the precision of magneto sensor installation site, further improve the precision of magneto sensor installation site as need, can also adopt integrated circuit technology and MEMS technology that magneto sensor directly is produced on the substrate with high precision, this way is considered as consistent with thinking of the present utility model.
When permanent magnet array, the curved structure of magneto sensor array, the utility model is equally applicable to measurement of angle.Permanent magnet array 101 is made of some permanent magnet units that are arranged in parallel 102.Magneto sensor array 201 is made of some magneto sensors that are arranged in parallel 202.Distance test device 3 comprises the impact damper 302 that is connected with DSP digital signal processor 301, DSP digital signal processor inside has distance calculator 303 distance calculators 303, impact damper 302 connects single-chip microcomputer 304, single-chip microcomputer 304 connects above-mentioned magneto sensor array 201, and this magneto sensor array 201 also is connected with DSP digital signal processor 301.Permanent magnet unit 102 is by N utmost point permanent magnets and packing material is formed or be made up of staggered permanent magnets of polarity and packing material, and magneto sensor 202 is analogue type or switching mode.Packing material can be a ferromagnetic material, also can be nonferromagnetic material, also can be the space.
In the present embodiment, permanent magnet unit 102 width are
Contained permanent magnet units 102 numbers of described permanent magnet array 101 greater than
Magneto sensor 202 numbers are greater than or equal in the magneto sensor array 201
At permanent magnet array 101 two ends, receive on line and the receive direction in the magnetic field of magneto sensor array 201, greater than the expanded range of the magnetic-field component of magneto sensor 202 action threshold values greater than the space D between the magneto sensor 202, wherein, D is the spacing between the magneto sensor 202, δ is a sensing resolution, and n is a magneto sensor spacing enlargement factor.
In the present embodiment, permanent magnet device 1 adopts the permanent magnet device body 104 with Baltimore groove 103 that prior art adopted, permanent magnet array is arranged in the Baltimore groove 103 of permanent magnet device body 104 and be arranged in parallel up and down, magneto sensor array 201 on the magneto sensor device 2 and main circuit board 7 vertical settings, form strip, magneto sensor array 201 is in Baltimore groove 103 internal induction magnetic fields, the magneto sensor array 201 of strip carries out gapped the cooperation with Baltimore groove 103, and can in Baltimore groove 103, laterally move back and forth, magneto sensor array 201 is converted to voltage signal with permanent magnet array 101 magnetic fields that receive, this voltage signal is by DSP digital signal processor 301 samplings of main circuit board 7, then, carry out the information that signal Processing draws permanent magnet array 101 and magneto sensor array 201 relative positions.
When adopting the switching mode magneto sensor, what 301 samplings of DSP digital signal processor obtained is the bit sequence signal, this signal is corresponding with the magnetic field of permanent magnet array 101, the two ends of bit sequence signal are corresponding to the part at permanent magnet array 101 two ends, be used for determining the integral part of permanent magnet array 101 and magneto sensor array 201 relative positions, remove the fraction part that resulting bit sequence signal behind the two ends is used for determining permanent magnet array 101 and magneto sensor array 201 relative positions, any little number average of permanent magnet array 101 and magneto sensor array 201 relative positions can be obtained the fractional value of permanent magnet array 101 and magneto sensor array 201 relative positions corresponding to a unique bit sequence by the judgement of bit sequence; When adopting the analogue type magneto sensor, adopt orthogonal function method ask permanent magnet array 101 and magneto sensor array 201 relative positions fraction part.
After magneto sensor array 201 is expanded, can carry out Absolute position measurement, at this moment, magneto sensor array 201 is called quiet chi, and permanent magnet array 101 is called moving chi; After permanent magnet array 101 expanded, can carry out incremental counter and measure, at this moment, magneto sensor array 201 is called moving chi, and permanent magnet array 101 is called quiet chi, when desired magneto sensor 202 numbers
More more need not impact damper 302 and single-chip microcomputer 304.
What the utility model was different with patent of invention " position coded magnetic displacement sensor " CN1309282A is: change between the spacing of each magnet ± 1/7～± 1/9 in latter's magnet array, spacing in the magneto sensor array between each element changes between ± 1/11～± 1/13, each spacing is all unequal, with C
m 2M is that the mode of magneto sensor number permutation and combination generates coding, in the utility model patent in the magneto sensor array spacing between each element equate that remove outside the two ends, the width and the spacing of magnet array are
What this caused the employing of the utility model patent is diverse localization method and thinking.What the utility model was different with utility model patent " digitizing proximity transducer " CN2615636Y is: aspect physical construction, the utility model adopts two row's permanent magnet units 102 to constitute permanent magnet array 101 and adopt fixed head 5, has improved bearing accuracy; Aspect circuit, adopt serial port and displacement mode, and adopt band contact pin fixed head 5, make directly cascade when extended length, avoided adopting the problem of a plurality of permanent magnet arrays 101 and the generation of control casing; Can't compare because of the latter is undeclared aspect permanent magnet unit 102 spacings and magneto sensor 202 spacings and the localization method.What the utility model and patent of invention " magnetic position sensing device and localization method thereof " application number 200810196879.6 were different is: the utility model adopts two row's permanent magnets to constitute permanent magnet arrays, and adopts fixed head 5 to improve bearing accuracy; Introduce magneto sensor 202 spacing enlargement factor n, make localization method include the theoretical system of discrete Fourier analysis and Array Signal Processing fully in, radar obtains high precision because of using antenna basic matrix sonar because of using the acoustic transducer basic matrix, similarly array structure and signal processing technology also make position measurement precision of the present utility model obtain greatly to improve, also can under the constant condition of precision, reduce the number of magneto sensor significantly, reduce cost.
During installation, as shown in Figure 1.Permanent magnet array 101 is installed in the last lower plane in the concave groove 103 of permanent magnet device body 104 respectively, the two ends magnet of permanent magnet array 101 by width less and polarity is identical two or form with upper magnet, at magneto sensor 202 places, receive on line and the receive direction in the magnetic field of magneto sensor array 201, greater than the expanded range of the magnetic-field component of magneto sensor action threshold value greater than the space D between the magneto sensor, to guarantee having magnetic field value that a magneto sensor 202 receives at least for just and greater than magneto sensor 202 threshold values at initiating terminal.Adjacent permanent magnet unit 102 polarity opposed alignment increase the horizontal homogeneity that magnetic field intensity improves magnetic field with this.
As Fig. 4, distance test device 3 is welded on the main circuit board 7, and the pin of magneto sensor 202 passes through hole 6, and its pin that passes is welded on the main circuit board 7.Fixed head 5 can guarantee that the Hall element location is consistent among Fig. 5.Fixed head 5 can guarantee the accuracy of magneto sensor 202 location on the adjacent main circuit board 7 among Fig. 5.Contact pin circuit board 8 welding by having contact pin between the main circuit board 7 among Fig. 5.
The SCK of DSP digital signal processor 301, SDI, RC.1, RC.2 connect first impact damper 302, M impact damper 302 is connected with M-1 impact damper 302 successively, RX, CK, each single-chip microcomputer of RA.0, RA.1. of M single-chip microcomputer 304 of M impact damper 302 connections all connect four groups of magneto sensors 202, and the output pin of respectively organizing magneto sensor 202 of correspondence position is connected and is connected with the corresponding input pin of DSP digital signal processor 301.
Concrete localization method of the present utility model is described below:
As Fig. 5, a plurality of main circuit boards 7 are by the welding of band contact pin circuit board, welding DSP digital signal processor 301 on first main circuit board, be welded with single-chip microcomputer 304 on the follow-up main circuit board, each single-chip microcomputer 304 has four output lines, every output line by resistance 701 and PNP triode 702 drive one group totally ten six magneto sensors 202 power on, many group magneto sensors 202 are formed magneto sensor array 201, when using the magneto sensor 202 of analogue type, each output terminal of organizing corresponding magneto sensor 202 connect and respectively with 16 analog channels of single-chip microcomputer 304.When using switching mode magneto sensor 202, these 16 analog channels are substituted by 16 digital input pins.DSP digital signal processor 301 sends the address of 202 groups of the magneto sensors that need power on to single-chip microcomputer 304 by synchronous serial interface SPI, after relatively confirming by the address, single-chip microcomputer 304 powers on this group magneto sensor of appointment, the output signal of current group of magneto sensor of DSP digital signal processor 301 samplings; Subsequently, the level that DSP digital signal processor 301 changes RC.1 makes the output level generation cascade displacement of single-chip microcomputer 304, thereby next group magneto sensor is powered on, and the direction of level cascade displacement is determined by the RC.2 of DSP digital signal processor 301; So, the magneto sensor group is powered on successively.When sensing permanent magnet array 101 magnetic fields, DSP digital signal processor 301 is finished the scanning to magneto sensor array 201 from output and address that single-chip microcomputer 304 reads the magneto sensor group of current scanning.When a plurality of single-chip microcomputer 304 of cascade, application buffer reduces long line transmission to be disturbed, and improves reliability.
DSP digital signal processor 301 makes by impact damper 302 and single-chip microcomputer 304 and respectively organizes magneto sensor 202 and power on successively, simultaneously, gather the output signal of the current magneto sensor that powers on 202 and carry out signal Processing, when finding effective permanent magnet array 101 signals, by the relative position information of the above-mentioned two articles of distance calculator 303 outputs
In the present embodiment, when using the switching mode magneto sensor, each burst is all corresponding to the fractional value of a unique position to be measured, can set up " position burst---the position to be measured fractional value table of comparisons " by K-theoretic operation K, utility model patent " magnetic position sensing device and localization method thereof " application number 200810196879.6 and calculate corresponding " position burst---the position to be measured fractional value table of comparisons ", distance calculator 303 of the present utility model stores accordingly " position burst---the position to be measured fractional value table of comparisons ", its major function is the operation look-up routine, after distance calculator 303 is determined the position burst among the above-mentioned steps c, promptly moving look-up routine accesses and the corresponding fractional value of this burst, save the pilot process that calculates fractional value, improved locating speed.
Specific embodiment described herein only is that the utility model spirit is illustrated.The utility model person of ordinary skill in the field can make various modifications or replenishes or adopt similar mode to substitute described specific embodiment, but can't depart from spirit of the present utility model or surmount the defined scope of appended claims.
Although this paper has used terms such as permanent magnet device 1, permanent magnet array 101, permanent magnet unit 102, Baltimore groove 103, permanent magnet device body 104, magneto sensor device 2, magneto sensor array 201, magneto sensor 202, distance test device 3, DSP digital signal processor 301, impact damper 302, distance calculator 303, single-chip microcomputer 304, output port 305, stationary installation 4, fixed head 5, through hole 6, main circuit board 7, resistance 701, PNP triode 702, contact pin circuit board 8 morely, do not get rid of the possibility of using other term.Using these terms only is in order to describe and explain essence of the present utility model more easily; They are construed to any additional restriction all is contrary with the utility model spirit.
Claims (7)
1. magnetic array position sensing device, comprise the permanent magnet device (1) that includes permanent magnet array (101), and match with permanent magnet device (1) and include the magneto sensor device (2) of magneto sensor array (201), this magneto sensor device (2) is fixed on the main circuit board (7) that includes distance test device (3), it is characterized in that, described magneto sensor array (201) is fixed on this magneto sensor device (2) by stationary installation (4), and described magneto sensor array (201) is fixed on the main circuit board (7) by stationary installation (4).
2. magnetic array position sensing device according to claim 1, it is characterized in that, described permanent magnet array (101) is made of some permanent magnet units that are arranged in parallel (102), and described magneto sensor array (201) is made of some magneto sensors that are arranged in parallel (202).
3. magnetic array position sensing device according to claim 2 is characterized in that, described stationary installation (4) comprises fixed head (5), and the contact pin of above-mentioned plurality of magnetic photosensitive elements (202) passes fixed head (5) and links to each other with above-mentioned main circuit board (7).
4. according to claim 2 or 3 described magnetic array position sensing devices, it is characterized in that, also be provided with some through holes (6) in the described fixed head (5), the contact pin of above-mentioned magneto sensor (202) passes through hole (6) and links to each other with above-mentioned main circuit board (7).
5. magnetic array position sensing device according to claim 4 is characterized in that, described permanent magnet unit (102) width is
Contained permanent magnet unit (102) number of described permanent magnet array (101) greater than
Magneto sensor (202) number is greater than or equal in the magneto sensor array (201)
At permanent magnet array (101) two ends, receive on line and the receive direction in the magnetic field of magneto sensor array (201), greater than the expanded range of the magnetic-field component of magneto sensor (202) action threshold value greater than the space D between the magneto sensor, wherein, D is the spacing between the magneto sensor (202), δ is a sensing resolution, and n is a magneto sensor spacing enlargement factor.
6. magnetic array position sensing device according to claim 5, it is characterized in that, described permanent magnet unit (102) is by N utmost point permanent magnets and packing material is formed or be made up of staggered permanent magnets of polarity and packing material, and described magneto sensor (202) is analogue type or switching mode.
7. magnetic array position sensing device according to claim 5, it is characterized in that, described distance test device (3) comprises the impact damper (302) that is connected with DSP digital signal processor (301), described DSP digital signal processor inside has distance calculator (303), impact damper (302) connects single-chip microcomputer (304), single-chip microcomputer (304) connects above-mentioned magneto sensor array (201), and this magneto sensor array (201) also is connected with DSP digital signal processor (301).
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| CN2009200844230U CN201463826U (en) | 2009-03-26 | 2009-03-26 | Magnetic array position sensing device |
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| CN2009200844230U CN201463826U (en) | 2009-03-26 | 2009-03-26 | Magnetic array position sensing device |
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| CN201463826U true CN201463826U (en) | 2010-05-12 |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102518110A (en) * | 2011-12-23 | 2012-06-27 | 基康仪器(北京)有限公司 | Device and method for measuring soil body displacement |
| CN102519349A (en) * | 2011-12-23 | 2012-06-27 | 基康仪器(北京)有限公司 | Magnet displacement sensor |
| CN102679859A (en) * | 2012-05-28 | 2012-09-19 | 广州日滨科技发展有限公司 | Displacement sensor and method for measuring displacement by using same |
| CN104697428A (en) * | 2015-03-11 | 2015-06-10 | 武汉静磁栅机电制造有限公司 | Linear displacement detection device with high precision based on magnetic induction sensor |
| CN105928451B (en) * | 2016-05-30 | 2018-11-20 | 环境保护部核与辐射安全中心 | A kind of multiple rows of combination probe moving displacement test macro |
| CN109916287A (en) * | 2019-01-30 | 2019-06-21 | 西安维控自动化科技有限公司 | A kind of in-plane displancement sensor, displacement detecting method and system based on magnetic induction |
| CN110622020A (en) * | 2017-05-16 | 2019-12-27 | Tdk株式会社 | Magnetic sensor |
-
2009
- 2009-03-26 CN CN2009200844230U patent/CN201463826U/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102518110A (en) * | 2011-12-23 | 2012-06-27 | 基康仪器(北京)有限公司 | Device and method for measuring soil body displacement |
| CN102519349A (en) * | 2011-12-23 | 2012-06-27 | 基康仪器(北京)有限公司 | Magnet displacement sensor |
| CN102679859A (en) * | 2012-05-28 | 2012-09-19 | 广州日滨科技发展有限公司 | Displacement sensor and method for measuring displacement by using same |
| CN102679859B (en) * | 2012-05-28 | 2014-11-26 | 广州日滨科技发展有限公司 | Displacement sensor and method for measuring displacement by using same |
| CN104697428A (en) * | 2015-03-11 | 2015-06-10 | 武汉静磁栅机电制造有限公司 | Linear displacement detection device with high precision based on magnetic induction sensor |
| CN104697428B (en) * | 2015-03-11 | 2017-05-17 | 武汉静磁栅机电制造有限公司 | Linear displacement detection device with high precision based on magnetic induction sensor |
| CN105928451B (en) * | 2016-05-30 | 2018-11-20 | 环境保护部核与辐射安全中心 | A kind of multiple rows of combination probe moving displacement test macro |
| CN110622020A (en) * | 2017-05-16 | 2019-12-27 | Tdk株式会社 | Magnetic sensor |
| CN110622020B (en) * | 2017-05-16 | 2022-03-01 | Tdk株式会社 | Magnetic sensor |
| CN109916287A (en) * | 2019-01-30 | 2019-06-21 | 西安维控自动化科技有限公司 | A kind of in-plane displancement sensor, displacement detecting method and system based on magnetic induction |
| CN109916287B (en) * | 2019-01-30 | 2020-11-27 | 西安维控自动化科技有限公司 | Planar displacement sensor based on magnetic induction, displacement detection method and system |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100512 Termination date: 20120326 |