CN201443487U - Automatic pumping system for vacuum testing instrument - Google Patents
Automatic pumping system for vacuum testing instrument Download PDFInfo
- Publication number
- CN201443487U CN201443487U CN2009200161898U CN200920016189U CN201443487U CN 201443487 U CN201443487 U CN 201443487U CN 2009200161898 U CN2009200161898 U CN 2009200161898U CN 200920016189 U CN200920016189 U CN 200920016189U CN 201443487 U CN201443487 U CN 201443487U
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- vacuum
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- pump
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Abstract
The utility model relates to an automatic pumping system for a vacuum testing instrument, which comprises a PLC, wherein the input end of the PLC receives signals of an on-site sensor and conducts communicating connection with an industrial personal computer; and output signals are sent to on-site equipment through a driving circuit; the industrial personal computer is an upper computer of the PLC and conducts programming on control programs in the PLC, and the on-site equipment is controlled by the PLC; the on-site equipment comprises a mechanical pump, a molecular pump, a vacuum plate valve, a bypass pumping valve, an inlet valve and a solenoid valve; and the sensor comprises self-provided feedback components of valve bodies, which are respectively used for detecting whether various valves are switched on or off in position. The automatic pumping system can effectively prevent human misoperation from occurring, avoid unnecessary loss such as damage of vacuum components, and facilitate maintenance and expansion.
Description
Technical field
The utility model relate to use in a kind of material and the physics field vacuum instrument point control system, specifically a kind of vacuum test instrument automatic pump is taken out system.
Background technique
The vacuum instrument is widely used experiment and an apparatus for preparation in materials science, physics field, its function is exactly to allow the experimenter carry out scientific experimentation under its vacuum condition that provides, and the process need that whole vacuum condition obtains expends certain hour, usually our instrument all is manually-operated by tester, to take quite a few energy and time of experimenter like this, and also, bring massive losses often because there is not clear and definite control law to cause the people to damage vacuum component for misoperation.Inconvenience is installed, and relay logic is adopted in manual operation in the past more, and the use of a large amount of relays all brings very big inconvenience for the mounting box wiring; Expansivity is poor, and when a laboratory apparatus comprises a plurality of vacuum systems, and each vacuum system is when work, and relatively independent, design in the past all will increase the workload of design assembling from a large amount of relay circuit of new adding when being again and during logotype.
The model utility content
At above shortcomings part in the prior art, the technical problems to be solved in the utility model provides a kind of vacuum test instrument automatic pump of misoperation of avoiding and takes out system.
For solving the problems of the technologies described above, the technical solution adopted in the utility model is:
A kind of vacuum test instrument of the utility model automatic pump system of taking out comprises PLC and process control machine, wherein:
PLC is main control unit, and its input end receives the spot sensor signal, carries out communication with process control machine and is connected, and output signal is delivered to field apparatus through drive circuit;
Process control machine is the upper-position unit of PLC, realizes man-machine interaction, and the control program among the PLC is programmed, and by PLC field apparatus is implemented control.
Described field apparatus comprises that mechanical pump, molecular pump, vacuum plate valve, side take out valve, suction valve and solenoid valve; Whether described sensor comprises the feedback element that valve body carries, and its signaling line is connected to the input end of PLC, be respectively applied for the detection valve switch and put in place.
Model utility adopts following controlling method operation:
Device power, program initialization;
The pick-up transducers data are judged the degree of vacuum of each equipment state and current device;
Equipment adopts still interlock control automatically of independent control;
If adopt independent control operation, then after obtaining the action command of concrete equipment, judge whether the condition of its action is set up, set up then and carry out, otherwise do not carry out;
If adopt interlock control automatically, then start the vacuum control program that links automatically.
Described automatic interlock control program may further comprise the steps:
Open mechanical pump;
Whether the degree of vacuum of judging vacuum chamber is less than 20Pa;
If less than 20Pa, then open solenoid valve successively, open molecular pump, open the vacuum valve plate;
Do you judge that vacuum chamber arrives the specified vacuum degree?
If reach the specified vacuum degree, then finish this vacuumizing.
If do not reach the specified vacuum degree, then return and judge whether vacuum chamber arrives specified vacuum degree step.
If the degree of vacuum of vacuum chamber is higher than 20Pa, then slightly take out control, go to then judge vacuum chamber degree of vacuum whether less than the 20Pa step.
Described step of slightly taking out control is:
Start mechanical pump;
Open the other valve of taking out;
Whether the degree of vacuum of judging vacuum chamber is less than 20Pa;
If less than 20Pa, then finishing, the degree of vacuum of vacuum chamber this time slightly takes out operation.
If select independent control, then each equipment is pressed following regular interlocking:
Open before the vacuum plate valve, the other state of taking out valve of detection should be opens (closing), and degree of vacuum can not be higher than 20Pa;
Open other taking out before the valve, the state that detects mechanical pump should be unlatching, and the state of vacuum plate valve and suction valve should be closes;
Open the state that detects mechanical pump before the molecular pump and should be unlatching, the state of solenoid valve should be to be opened, and the state of vacuum plate valve should be closes, and the state of suction valve should be closes, and the state that valve is taken out on the side should be closes;
Open before the suction valve, vacuum plate valve and the other state of taking out valve should be closes.
The utlity model has following beneficial effect and advantage:
1. effectively avoided misoperation.The utility model is no matter in interlock control automatically still in the independent control procedure, and each parts is according to certain regular interlocking, and can effectively avoid the people is the generation of misoperation, can not bring unnecessary loss such as damaging vacuum component in experimentation.
2. easy-to-operat.In the utility model, multi-part can and be looked field condition according to the experiment needs, i.e. linkage control also can independently be controlled.
3. maintain easily and expand.The utility model adopts programmable controller as main control unit, has made things convenient for maintenance and expansion, is convenient to realize the communication with PC, process control machine, notebook computer etc. simultaneously.
Description of drawings
Fig. 1 is the utility model system block diagram;
The method general flow chart that Fig. 2 adopts for the utility model;
Fig. 3 is that the utility model is independently controlled the control flow chart of opening the vacuum plate valve down;
Fig. 4 independently controls for the utility model and opens the other control flow chart of taking out valve down;
Fig. 5 is that the utility model is independently controlled the control flow chart of startup molecular pump down;
Fig. 6 is that the utility model is independently controlled the control flow chart of opening suction valve down;
Fig. 7 is that the utility model " is slightly taken out " automatic control flow chart figure;
Fig. 8 obtains the automatic control flow chart figure of " background " vacuum for the utility model;
Fig. 9 obtains the automatic control flow chart figure of " limit " vacuum for the utility model.
Embodiment
As shown in Figure 1, the utility model vacuum test instrument automatic pump system of taking out comprises PLC and process control machine, and wherein PLC is a main control unit, and its input end receives the spot sensor signal, carry out communication with process control machine and be connected, output signal is delivered to field apparatus through drive circuit; Process control machine is the upper-position unit of PLC, realizes man-machine interaction, to the programming of control program among the PLC, by PLC field apparatus is implemented control.
Field apparatus comprises that mechanical pump, molecular pump, vacuum plate valve, side take out valve, suction valve and solenoid valve, wherein otherly takes out pump and is installed on the vacuum cavity sidewall, is connected to mechanical pump with bellows, uses when being used for slightly taking out; The vacuum plate valve is between vacuum chamber and molecular pump, and molecular pump is connected on the mechanical pump by solenoid valve, bellows; Suction valve is installed on the vacuum chamber sidewall, is used to feed the used reaction gas of test; Solenoid valve is the valve between molecular pump and the mechanical pump, and when molecular pump was opened, this valve will be opened, and guarantees between molecular pump and the mechanical pump it is UNICOM.
Sensor comprise valve body with magnetic sensor, be installed in the valve body, its signaling line is connected to the input end of PLC, is respectively applied for to detect all kinds of valves whether switch puts in place.In addition, also comprise some vacuum gauges, be installed in respectively on the vacuum chamber that its signal feed back is given vacuum measuring instrument, is used to measure current degree of vacuum.Degree of vacuum is read in upper-position unit and vacuum measuring instrument communication, passes to PLC by upper-position unit again.
As shown in Figure 2, the utility model is realized its control procedure by the following method:
Device power, program initialization;
The pick-up transducers data are judged the degree of vacuum of each equipment state and current device;
Equipment adopts still interlock control automatically of independent control;
If adopt independent control operation, then after obtaining the action command of concrete equipment, judge whether the condition of its action is set up, set up then and carry out, otherwise do not carry out;
If adopt interlock control automatically, then start the vacuum control program that links automatically.
May further comprise the steps as automatic interlock control program as described in Fig. 8,9:
Open mechanical pump;
Whether the degree of vacuum of judging vacuum chamber is less than 20Pa;
If less than 20Pa, then open solenoid valve successively, open molecular pump, open the vacuum valve plate;
Judge whether vacuum chamber arrives the specified vacuum degree;
If reach the specified vacuum degree, then finish this vacuumizing.
If do not reach the specified vacuum degree, then return and judge whether vacuum chamber arrives specified vacuum degree step;
If the degree of vacuum of vacuum chamber greater than 20Pa, is then slightly taken out control, go to then judge vacuum chamber degree of vacuum whether less than the 20Pa step.
Described specified vacuum degree comprises " background " vacuum (promptly testing the vacuum of needs at ordinary times) and " limit " vacuum (be the performance index of equipment, need third pary certification).
As shown in Figure 7, described slightly take out control may further comprise the steps:
Start mechanical pump;
Open the other valve of taking out;
Whether the degree of vacuum of judging vacuum chamber is less than 20Pa;
If less than 20Pa, then finishing, the degree of vacuum of vacuum chamber this time slightly takes out operation;
Otherwise continue judge vacuum chamber degree of vacuum whether less than 20Pa.
When selecting independent control, each equipment is pressed following regular interlocking:
As shown in Figure 3, open before the vacuum plate valve, the other state of taking out valve of detection should be closes, and degree of vacuum can not be higher than in 20Pa, otherwise can damage molecular pump;
As shown in Figure 4, open other taking out before the valve, the state that detects mechanical pump should be unlatching, and the state of vacuum plate valve and suction valve should be closes;
As shown in Figure 5, open before the molecular pump, the state that detects mechanical pump should be unlatching, and the state of solenoid valve should be to be opened, and the state of vacuum plate valve should be closes, and the state of suction valve should be closes, and the state that valve is taken out on the side should be closes;
As shown in Figure 6, open before the suction valve, detect vacuum plate valve and the other state of taking out valve and should be and closes, when molecular pump and mechanical pump were worked simultaneously, mechanical pump can not be closed prior to molecular pump.
Slightly take out exactly with mechanical pump rough take out vacuum one time, beat next basis for obtaining the next stage vacuum.Slightly smoke by mechanical pump and other take out valve and finish, when slightly taking out, system opens mechanical pump and valve is taken out on the side, and at this moment, vacuum plate valve and solenoid valve are closed, and when degree of vacuum during less than 20Pa, slightly exhausts.
Base vacuum is to reach a higher degree of vacuum on the basis of slightly taking out again, so that test, when degree of vacuum during less than 20Pa, the other opening of valves solenoid valve of taking out of system closing, molecular pump, the vacuum plate valve, (base vacuum is generally defined by the user when arriving base vacuum, but be lower than limiting vacuum), promptly finish the base vacuum pumping process.
Limiting vacuum is the main performance index of system, it is the maximum vacuum that system can reach, when degree of vacuum during less than 20Pa, system's opens solenoid valve, molecular pump, plate valve, (index of different instrument limiting vacuums is also different when reaching the limit of vacuum, defined by the user), promptly finish the limiting vacuum pumping process.
In the present embodiment, PLC (programmable controller) adopts Emerson EC10 series of PLC, be a miniature PLC that Emerson company releases, structure is small and exquisite, high configuration, big capacity, speed is fast, integrated analog amount input output, and the program capacity reaches 12K, elementary instruction only needs 0.3 μ S, can expand 4 modules; Have powerful location and high speed processing ability, positioning instruction is realized the positioning control to machinery equipment, variable speed pulse output, the envelope pulse output function, realization is to the multistage speed Control of servo or stepper motor, the input of 6 road high-speed pulses, peak frequency 50KHz, 2 road 100KHz tell pulse output.
The EC10 series of PLC is supported the communication middle-end, pulse-break, and pilot is interrupted, and can set interrupt priority level, realizes Advanced Control; Support the ECBusN:N network communication protocol, support the OPC service, Profibus-DP slave station communication module is provided; Support the MODBUS network, palm PC, three kinds of programming modes of remote dial maintain easily and debug; The special functional module configuration is provided, and the inverter communication instruction is that complicated program is oversimplified, and the system layout verification tool is provided, and makes things convenient for user's expanded configuration; The super wide voltage design, three anti-processing, input filtering and power-down protection guarantee that PLC is more reliable and more stable.
Process control machine is that the upper-position unit working software is write with VC, and upper computer software can be realized the independent operation to parts, also can formulate technological process according to arts demand, realizes control automatically; Manufacturing process there is record, and alarm, and can preserve and be written into technical papers.
Claims (3)
1. a vacuum test instrument automatic pump is taken out system, it is characterized in that: comprise PLC and process control machine, wherein:
PLC is main control unit, and its input end receives the spot sensor signal, carries out communication with process control machine and is connected, and output signal is delivered to field apparatus through drive circuit;
Process control machine is the upper-position unit of PLC, realizes man-machine interaction, and the control program among the PLC is programmed, and by PLC field apparatus is implemented control.
2. take out system by the described vacuum test instrument of claim 1 automatic pump, it is characterized in that: described field apparatus comprises that mechanical pump, molecular pump, vacuum plate valve, side take out valve, suction valve and solenoid valve.
3. whether take out system by the described vacuum test instrument of claim 1 automatic pump, it is characterized in that: described sensor comprises the feedback element that valve body carries, and its signaling line is connected to the input end of PLC, be respectively applied for all kinds of valve switchs of detection and put in place.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200161898U CN201443487U (en) | 2009-08-07 | 2009-08-07 | Automatic pumping system for vacuum testing instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200161898U CN201443487U (en) | 2009-08-07 | 2009-08-07 | Automatic pumping system for vacuum testing instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201443487U true CN201443487U (en) | 2010-04-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009200161898U Expired - Fee Related CN201443487U (en) | 2009-08-07 | 2009-08-07 | Automatic pumping system for vacuum testing instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201443487U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103135509A (en) * | 2011-11-30 | 2013-06-05 | 中国科学院微电子研究所 | Injection machine control system based on virtual instrument |
-
2009
- 2009-08-07 CN CN2009200161898U patent/CN201443487U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103135509A (en) * | 2011-11-30 | 2013-06-05 | 中国科学院微电子研究所 | Injection machine control system based on virtual instrument |
| CN103135509B (en) * | 2011-11-30 | 2015-09-09 | 中国科学院微电子研究所 | Based on the implanter control system of virtual instrument |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: CAS SHENYANG SCIENTIFIC INSTRUMENTS CO., LTD. Free format text: FORMER NAME: SHENYANG SCIENTIFIC INSTRUMENT RESEARCH + MFG. CENTER CO., LTD., C.A.S |
|
| CP03 | Change of name, title or address |
Address after: Hunnan Shenyang 110197 Liaoning province Xinyuan street, No. 1 Patentee after: Shenyang Scientific Apparatus Co., Ltd. of Chinese Academy of Sciences Address before: Hunnan Shenyang 110171 Liaoning province Xinyuan street, No. 1 Patentee before: Shenyang Scientific Instrument Research & Mfg. Center Co., Ltd., C.A.S |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100428 Termination date: 20140807 |
|
| EXPY | Termination of patent right or utility model |