CN201436554U - Evolution verticality detecting rule - Google Patents
Evolution verticality detecting rule Download PDFInfo
- Publication number
- CN201436554U CN201436554U CN2009200477138U CN200920047713U CN201436554U CN 201436554 U CN201436554 U CN 201436554U CN 2009200477138 U CN2009200477138 U CN 2009200477138U CN 200920047713 U CN200920047713 U CN 200920047713U CN 201436554 U CN201436554 U CN 201436554U
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- CN
- China
- Prior art keywords
- evolution
- angle
- silicon wafer
- detecting rule
- verticality detecting
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The utility model relates to an evolution verticality detecting rule, wherein a right-angle break is arranged on the ruler, the two right-angle sides of the right-angle break are smooth, detection points are respectively arranged on the two right-angle sides, and the vertical distance of a detection point to the opposite right-angle side is equal to that of the other detection point to the opposite right-angle side. The evolution verticality detecting rule of the utility model provides an evolution verticality detecting rule capable of measuring whether the upper and the lower of the silicon crystal octagonal square column are perpendicular.
Description
Technical field
The utility model relates to a kind of evolution verticality detection ruler, belongs to area of solar cell.
Background technology
The silicon chip cutting is the key component in the solar-energy photo-voltaic cell manufacturing process, generally adopt silicon crystal bar evolution machine with the silicon wafer pole directly cut into the cross section be square, four jiaos be the anistree square cylinder of identical 45 ° of chamferings, and then should cut into solar energy-level silicon wafer by the anise square cylinder.Out of plumb at present, behind evolution machine cutting silicon crystal circle rod, do not have the anistree square cylinder of silicon wafer after the cutting of the corresponding working procedures and the inspection of tools whether vertical up and down, if will have a strong impact on the yield of solar energy-level silicon wafer so.
The utility model content
Whether vertical the technical problems to be solved in the utility model is: provide the anistree square cylinder of a kind of energy measurement silicon wafer up and down evolution verticality detection ruler.
In order to overcome the defective that exists in the background technology, the technical scheme that its technical matters that solves the utility model adopts is: a kind of evolution verticality detection ruler, individual right angle breach is arranged on this chi, two right-angle sides of described right angle breach are smooth, and be respectively equipped with check point on two right-angle sides, described two check points equate and overlap with the adjacent chamfering point of standard-sized silicon wafer anise square cylinder when measuring to the vertical range of the right-angle side relative with it.
The utility model has solved the defective that exists in the background technology, whether can detect the evolution machine cutting back anistree square cylinder of formed silicon wafer vertical up and down, thereby effectively prevented from the anistree square cylinder of underproof silicon wafer cut once more and generated underproof solar energy-level silicon wafer, effectively improved the yield of product, reduce unnecessary loss, the yield-power of enterprise can also have been reached maximization.
Description of drawings
Below in conjunction with drawings and Examples the utility model is further specified.
Fig. 1 is the structural representation of evolution verticality detection ruler;
Fig. 2 is the main TV structure synoptic diagram of evolution verticality detection ruler when measuring silicon wafer anise square cylinder;
Fig. 3 is the perspective view of the anistree square cylinder of silicon wafer.
Wherein: 1, evolution verticality detection ruler body, 2,3, right-angle side, 4,5, check point, 6,7, the chamfering point, 8, the anistree square cylinder of silicon wafer.
Embodiment
As shown in Figure 1, one right angle breach is arranged on the body 1 of evolution verticality detection ruler, two right- angle sides 2,3 of this right angle breach are smooth, and on two right- angle sides 2,3, be respectively equipped with check point 4,5, and check point 4,5 equates and overlaps with the adjacent chamfering point of standard-sized silicon wafer anise square cylinder when measuring to the vertical range of the right- angle side 3,2 relative with it.
As shown in Figure 2, during detection, remove to aim at the chamfering point 6 of the anistree square cylinder 8 of silicon wafer with check point 4,5,7, on their perpendicular line, measure repeatedly, measure 3 parts in upper, middle and lower of cylinder at least, if the chamfering point on the cylinder all overlaps with check point 4,5, the anistree square cylinder 8 of this silicon wafer is vertical up and down so, can guarantee that each silicon chip specification is all consistent after cutting into solar energy-level silicon wafer.
Claims (1)
1. evolution verticality detection ruler, it is characterized in that: individual right angle breach is arranged on this chi, two right-angle sides (2,3) of described right angle breach are smooth, and be respectively equipped with check point (4,5) on two right-angle sides (2,3), described check point (4,5) equates and overlaps with the adjacent chamfering point of standard-sized silicon wafer anise square cylinder when measuring to the vertical range of the right-angle side (3,2) relative with it.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009200477138U CN201436554U (en) | 2009-07-09 | 2009-07-09 | Evolution verticality detecting rule |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009200477138U CN201436554U (en) | 2009-07-09 | 2009-07-09 | Evolution verticality detecting rule |
Publications (1)
Publication Number | Publication Date |
---|---|
CN201436554U true CN201436554U (en) | 2010-04-07 |
Family
ID=42373006
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009200477138U Expired - Fee Related CN201436554U (en) | 2009-07-09 | 2009-07-09 | Evolution verticality detecting rule |
Country Status (1)
Country | Link |
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CN (1) | CN201436554U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105108922A (en) * | 2015-08-10 | 2015-12-02 | 中国兵器工业集团第二一四研究所苏州研发中心 | Ceramic body crude porcelain chamfering die and chamfering method |
CN109141159A (en) * | 2017-06-16 | 2019-01-04 | 蒂森克虏伯发动机零部件(中国)有限公司 | A method of detection crankshaft induction hardening layer range |
-
2009
- 2009-07-09 CN CN2009200477138U patent/CN201436554U/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105108922A (en) * | 2015-08-10 | 2015-12-02 | 中国兵器工业集团第二一四研究所苏州研发中心 | Ceramic body crude porcelain chamfering die and chamfering method |
CN109141159A (en) * | 2017-06-16 | 2019-01-04 | 蒂森克虏伯发动机零部件(中国)有限公司 | A method of detection crankshaft induction hardening layer range |
CN109141159B (en) * | 2017-06-16 | 2021-06-15 | 蒂森克虏伯发动机零部件(中国)有限公司 | Method for detecting induction hardening layer range of crankshaft |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C53 | Correction of patent for invention or patent application | ||
CB03 | Change of inventor or designer information |
Inventor after: Chen Liuhua Inventor before: Xu Yunbo |
|
COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: XU YUNBO TO: CHEN LIUHUA |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100407 Termination date: 20130709 |