CN201429067Y - Multi-station electromagnetic steam overheating air supply adjusting system - Google Patents

Multi-station electromagnetic steam overheating air supply adjusting system Download PDF

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Publication number
CN201429067Y
CN201429067Y CN2009201076197U CN200920107619U CN201429067Y CN 201429067 Y CN201429067 Y CN 201429067Y CN 2009201076197 U CN2009201076197 U CN 2009201076197U CN 200920107619 U CN200920107619 U CN 200920107619U CN 201429067 Y CN201429067 Y CN 201429067Y
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China
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steam superheating
heat exchange
multistation
exchange body
regulating system
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Expired - Lifetime
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CN2009201076197U
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Inventor
周守航
陈克明
黄衍林
杨源满
张西鹏
王丹民
韩庆礼
王永涛
李永红
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Capital Engineering & Research Inc Ltd
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Capital Engineering & Research Inc Ltd
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Abstract

A multi-station electromagnetic steam overheating air supply adjusting system comprises more than two steam overheating devices connected in parallel through pipelines, and an opening and closing valve is arranged on each pipeline communicated with each steam overheating device. Preferably, each steam superheating device is an electromagnetic induction type steam superheating device including: the heat exchange body is made of metal materials with magnetic conductivity, electric conductivity and thermal conductivity, and is provided with a plurality of through holes which extend along the axial direction of the heat exchange body; the heat insulation layer is arranged on the periphery of the heat exchange body; the induction coil is wound on the periphery of the heat insulation layer; and an insulating layer disposed between the insulating layer and the induction coil. The utility model can solve the contradiction of unbalanced air consumption in time-sharing for intermittent air consumption, and the operation cost is lower and more reasonable; by utilizing the electromagnetic induction heating principle, the heat exchange body integrates magnetic conduction, electric conduction, heat conduction, heating and heat exchange, and superheated steam is directly prepared by the heat exchange body, thereby achieving the purposes of rapidness, high efficiency, high controllable degree, convenient use and low investment.

Description

Multistation electromagnetism steam superheating fuel regulating system
Technical field
The utility model is relevant for a kind of steam superheating system, particularly about a kind of multistation electromagnetism steam superheating fuel regulating system.
Background technology
Adopt steam to vacuumize in Ferrous Metallurgy, the machine industry to be used for vacuum refining, vacuum-casting occasion, occasion all needs superheated steam as power source to adopt that the occasion of the overheated generating of saturated vapor, tail steam superheating are utilized again etc.Particularly vacuum refining, the operation of vacuum pouring ingot casting, its production characteristics are a kind of discontinuous interruption operations, are extensive use of with the steam pumped vacuum systems of superheated steam as power source.
The traditional means of preparation superheated steam mainly comprises two kinds at present: the first, the packaged boiler that adopts fuel oil or combustion gas to do thermal source is produced superheated steam.The second, under the situation that the low-pressure saturated steam condition is arranged, utilize the combustion gas superheater to produce superheated steam by low-pressure saturated steam.
Existing two kinds of superheated steam production equipments can not be regulated production capacity according to the difference of use occasion gas consumption, have the contradiction of being interrupted the unbalanced gas consumption of usefulness gas timesharing, the operating cost height, and comprehensive economic index is low.
Traditional in addition fuel oil or combustion gas packaged boiler, investment is high, equipment is huge, and start-up time is long, the tempus intercalare thermal waste is serious, and the thermal efficiency is low relatively.And use fuel gas buring to heat the combustion gas superheater of low-pressure saturated steam, also there are deficiencies such as the thermal efficiency is low, combustor material is fragile, adjusting sensitivity difference.
The utility model content
Technical problem to be solved in the utility model provides a kind of multistation electromagnetism steam superheating fuel regulating system, can solve the contradiction of being interrupted the unbalanced gas consumption of usefulness gas timesharing, makes operating cost lower, more reasonable.
Technical problem to be solved in the utility model is that also traditional packaged boiler equipment is huge relatively, investment is high, the thermal efficiency is low, start-up time is long, the deficiency of waste heat waste in order to overcome; The shortcoming of the fragile and poor controllability of low, the interrupted production of combustion gas superheater thermal efficiency combustion chamber refractory material, a kind of multistation electromagnetism steam superheating fuel regulating system is provided, utilize electromagnetic inductive heating principle, make the heat exchange body integrate magnetic conduction, conduction, heat conduction, heating, heat exchange, directly produce superheated steam by the heat exchange body, thus reach fast, efficient, controllable degree is high, easy to use, the purpose of reduced investment.
The utility model provides a kind of multistation electromagnetism steam superheating fuel regulating system, described multistation electromagnetism steam superheating fuel regulating system comprises more than two the steam superheating device by the pipeline parallel connection, is respectively equipped with opening/shutting valve on the pipeline that each steam superheating device is communicated with.
Preferred each steam superheating device is the electromagnetic induction type steam superheating device.Certainly, steam superheating device obviously is not limited to the electromagnetic induction type steam superheating device in the utility model, the quick superheated steam boiler that thermal source is done in employing fuel oil in the middle of the prior art or combustion gas and combustion gas superheater or the like, can pass through the multiple arrangement parallel connection, solve the contradiction of being interrupted the unbalanced gas consumption of usefulness gas timesharing.For example can adopt a plurality of quick superheated steam boiler parallel connections according to on-the-spot actual demand; The parallel connection of perhaps a plurality of combustion gas superheater; Even can also be mixed in parallel by different types of steam superheating device, for example constitute a kind of steam superheating system of mixing type by a quick superheated steam boiler, a combustion gas superheater, electromagnetic induction type steam superheating device three parallel connection, the contradiction of being interrupted the unbalanced gas consumption of usefulness gas timesharing can be solved, the intrinsic advantage of various different steam superheating devices can also be given full play to.Be not described in detail in this.
Preferred electromagnetic induction type steam superheating device comprises: the heat exchange body, make by metal material with magnetic conduction, conduction, thermal conductivity, described heat exchange body is provided with a plurality of open-works, described a plurality of open-works along the heat exchange axon to extension; Heat insulation layer is located at heat exchange body periphery; Induction coil is set around the heat insulation layer periphery; And insulating barrier, be located between described heat insulation layer and the described induction coil.In the utility model, the electromagnetic induction type steam superheating device is not limited to described structure, and the electromagnetic induction type steam superheating device of other structure also can adopt in the middle of the prior art, can solve equally to be interrupted the unbalanced problem of usefulness gas timesharing.
According to such scheme, the utility model is significant with respect to the effect of existing structure:
One, the multistation electromagnetism steam superheating fuel regulating system that provides of the utility model, comprise steam superheating device in parallel more than two, each steam superheating device is respectively equipped with opening/shutting valve, each steam superheating device can be as a separate unit like this, can be according to the difference of use occasion gas consumption, open one of them, two or more steam superheating device, solved the contradiction of being interrupted the unbalanced gas consumption of usefulness gas timesharing, can make the operating cost lower, more reasonable.
Two, the multistation electromagnetism steam superheating fuel regulating system that provides of the utility model, can adopt the parallel connection of a plurality of electromagnetic induction type steam superheating device, the alternating magnetic field that produces in induction coil energising back acts directly on the heat exchange body, make and produce eddy current in the heat exchange body, thereby, realize that electric energy is to heat energy conversion, the heat exchange body is the heater of electromagnetic induction, realizing electric energy when heat energy changes, steam and open-work inwall through flowing heat exchange body open-work carry out heat exchange, and it is overheated that steam is produced.The electromagnetic induction type steam superheating device utilizes electromagnetic inductive heating principle, make the heat exchange body integrate magnetic conduction, conduction, heat conduction, heating, heat exchange, can directly produce superheated steam by heater and steam heat-exchanging, energising realizes steam superheating to induction coil at any time to need superheated steam, startup fast, heat exchange efficiency is high, controllable degree good, easy to use, reduced investment, the electric heating conversion efficiency height, cleanliness without any pollution.
Description of drawings
Fig. 1 is the schematic diagram of the utility model multistation electromagnetism steam superheating fuel regulating system.
Fig. 2 is the cutaway view of a kind of electromagnetic induction type steam superheating device in the utility model.
Fig. 3 is that the A-A of Fig. 2 is to view.
The specific embodiment
Embodiment 1
As shown in Figure 1, the utility model provides a kind of multistation electromagnetism steam superheating fuel regulating system 9, this multistation electromagnetism steam superheating fuel regulating system 9 comprises more than two the steam superheating device by the pipeline parallel connection, each steam superheating device preferably adopts electromagnetic induction type steam superheating device 1, be respectively equipped with opening/shutting valve 98 on the pipeline that each steam superheating device is communicated with, each electromagnetic induction type steam superheating device 1 can be as a separate unit like this, can be according to the difference of use occasion gas consumption, open one of them, two or more, to solve the contradiction of being interrupted the unbalanced gas consumption of usefulness gas timesharing, can make operating cost lower, more reasonable.Illustrate that at this plural steam superheating device 1 parallel connection in the utility model is selected three or four in the practice and had better economic, but can select in theory to comprise more than five.
As shown in Figure 2, a kind of electromagnetic induction type steam superheating device 1 comprises:
Heat exchange body 11, by having magnetic conduction, conduction, the metal material of thermal conductivity is made, wherein magnetic conductivity is for can produce eddy current, electric conductivity can be generated heat in order to have certain resistance, conductivity of heat is for making heat exchange good, preferred ferritic stainless steel, this material has corrosion resistance and high-voltage resistance capability preferably, be specially adapted to industry and vacuumize the superheated steam condition, under non-corrosive environment, heat exchange body 11 also can adopt cast iron, material such as carbon steel and low-alloy steel is made, and can also adopt inwall is stainless-steel pipe frame and outside cast iron, carbon steel or low alloy steel casting all-in-one-piece structure; Be provided with a plurality ofly along heat exchange body 11 axially extended open-works 110 on heat exchange body 11, these open-works 110 evenly distribute in the radial section of heat exchange body 11, and these open-work 110 diameters can be designed to 10~30mm;
Heat insulation layer 15 is located at heat exchange body 11 peripheries, and the heat that heat insulation layer 15 can be avoided heat exchange body 11 outwards scatters and disappears, and improves electric heating conversion efficiency, can adopt to swathe between heat insulation layer 15 and the heat exchange body 11 to be connected;
Induction coil 13 swathes and is set around insulating barrier 12 peripheries, induction coil 13 preferred water cold type induction coils, and good heat dissipation effect can be applicable to powerful industrial circle, is connected and mutually insulated by supporter supports between the induction coil 13;
Insulating barrier 12, be located between heat insulation layer 15 and the induction coil 13, so that induction coil 13 insulation of energising, insulating barrier 12 is swathed be coated on heat insulation layer 15 peripheries, be connected for swathing between insulating barrier 12 and the heat insulation layer 15, and induction coil 13 is set around insulating barrier 12 peripheral preferred employings and swathes connection; In addition, insulating barrier is around the 12 lead line external body that also can be located at induction coil 13, and the induction coil 13 that is provided with insulating barrier 12 is set around heat insulation layer 15 peripheries again;
Magnetic conductor 16, magnetic conductor 16 comprises a plurality of magnetic conduction subassemblies 160, for example 5~20, scheme shown in Fig. 2,3 is 8, in induction coil 13 peripheries along circumference evenly arrange and and 16 of magnetic conductors by the insulant mutually insulated, each magnetic conduction subassembly 160 by the multi-disc two ends have head 162, centre have groove 161 " [" type silicon steel sheet builds up, the head 162 at two ends is towards the direction of heat exchange body 11, and induction coil 13 and insulating barrier 12 are positioned at groove 161, thereby can prevent that magnetic from loosing outward, avoid electromagnetic pollution, but magnetic conductor 16 element not necessarily;
Shell body 14; preferably make by non-magnetic metal material; austenitic stainless steel material for example; to avoid being subjected to the adverse effect in magnetic field; shell body 14 be coated on induction coil 13 outside and and induction coil 13 between contactless insulation, shell body 14 not necessarily can also customize the outer protective cover that can envelope induction coil separately according to concrete space, scene certainly; can protect internals, induction coil 13 is avoided and extraneous short circuit electric leakage.
Induction coil 13 energisings produce alternating magnetic field, act directly on and make it produce eddy current on the heat exchange body 11, realize that electric energy is to heat energy conversion, heat exchange body 11 is again the pyrotoxin of electromagnetic induction, when saturated vapor feeds heat exchange body 11, make the saturated vapor and open-work 110 inwalls of heat exchange body 11 open-works 110 of flowing through carry out heat exchange, according to the state equation P of perfect gas 0V 0/ T 0=P 1V 1/ T 1, heat exchange body 11 adopts a large amount of long and narrow open-works 110 with steam inlet and outlet UNICOM, utilizes the open-work 110 hole wall contact surfaces of sufficient saturated vapor and heat exchange body 11 to realize heat exchange, belongs to isobaric heat-exchange method, P 0With P 1Can be similar to and think that equating is P 0=P 1, therefore when being heated vapor (steam) temperature T 0When improving n times, the homogenous quantities vapour volume will improve the multiple of same n, and its producing steam amount (volume) is equivalent to the producing steam amount (volume) of n steam boiler, thereby can produce superheated steam practical, easily.
This heat exchange body 11 integrates magnetic conduction, conduction, heat conduction, heating, heat exchange, anti-corrosion, utilize electromagnetic inductive heating principle, directly produce superheated steam by heat exchange body 11 and saturated vapor heat exchange, at any time give induction coil 13 energisings, at any time can realize that to steam superheating startup fast, heat exchange efficiency is high, controllable degree good, easy to use, reduced investment; The body of heat exchange simultaneously 11 integrates magnetic and heat transfer space is provided, and need not to carry out the welding of magnetic and heat exchange box, and heat exchange body structure intensity is big, and use occasion is wider; As heat-transfer surface, this heat-transfer surface is the fixed surface of non-free state with open-work 110 inner wall surface in the heat exchange body 11, and is shockproof when feeding steam, noise is low.
Shown in Fig. 2,3, the two ends of this electromagnetic induction type steam superheating device 1 can also be respectively equipped with suction flange 2 and outlet(discharge) flange 3, suction flange 2 and outlet(discharge) flange 3 are set help electromagnetic induction type steam superheating device 1 and be connected with steam pipe line and be built into alternate path, also be convenient to electromagnetic induction type steam superheating device 1 is connected in the steam transmission net.Induction coil 13 is connected by the insulant supports insulative with importing and exporting between the flange 2,3, and magnetic conductor 16 adopts the screw insulation to be connected closing with importing and exporting between the flange 2,3, and the employing key screw closes and is connected or rivets between shell body 14 and the import and export flange 2,3.Wherein import and export flange 2,3 is preferably made by non-magnetic metal material, and for example austenitic stainless steel material can avoid import and export flange 2,3 to be subjected to the adverse effect in magnetic field.Wherein 11 employings of suction flange 2 and heat exchange body are welded to connect, and have guaranteed the integral rigidity and the sealing of structure; Outlet(discharge) flange 3 adopts the metal packing washer 32 of screw thread 31 and high temperature high voltage resistant to be tightly connected with heat exchange body 11, guaranteed the dismantled and assembled property of whole electromagnetic induction type steam superheating device 1, when carrying out the inside maintenance, this outlet(discharge) flange 3 can be disassembled, unload internals more successively; Can certainly make suction flange 2 adopt the metal washer 32 of screw thread 31 and high temperature high voltage resistant to be tightly connected, outlet(discharge) flange 3 and 11 welding of heat exchange body, effect is identical, dismounting suction flange 2 when just keeping in repair in inside.Import and export the two ends that flange 2,3 also can be welded on heat exchange body 11 simultaneously in addition, intensity is higher; Also can be all be tightly connected by screw thread and metal washer and heat exchange body 11.By importing and exporting flange 2,3 and shell body 14, can make whole electromagnetic induction type steam superheating device 1 constitute a dismountable modular member relatively independent in the steam transmission net, volume is little, simple in structure relatively, easy disassembly, be beneficial to very much the installation and removal of whole electromagnetic induction type steam superheating device 1 in the steam transmission net, can be adapted to transform existing steam superheating system in the various existing steam transmission nets.
Shown in Fig. 2,3, can be provided with temperature monitoring element 21 (for example temperature thermocouple), flowmeter 22 and pressure gauge 23 at suction flange 2 places, to be used to measure the signal of gathering the temperature, flow and the pressure that feed saturated vapor; Be provided with superheat steam temperature monitoring element 33 (for example temperature thermocouple) at outlet(discharge) flange 3 places, on heat exchange body 11, connect temperature monitoring element 111, to be used to monitor the temperature signal of gathering the heat exchange body.
Again as shown in Figure 1, with steel mill's vacuum refining shop applications is example, certain vacuum refining workshop has two of vacuum refining equipment to be respectively 50 tons, 100 tons, use the steam source to produce low-pressure saturated steam for the steel-making waste heat boiler, minimum treat molten steel amount is 50 tons, maximum 150 tons of the amounts of molten steel (two vacuum refining equipment are opened simultaneously) of handling.Present embodiment adopts identical electromagnetic induction type steam superheating device 1 parallel connection of three power as shown in Figure 9 to produce superheated steam.Three electromagnetic induction type steam superheating devices 1 are installed in the pipeline, pipeline comprise the main branch that advances flange 90, main inlet pipe 91, three branch inlet pipes 92, is connected with three branch inlet pipes 92 advance flange 93, three and branch advance flange 93 corresponding tell flange 94, tell corresponding the telling pipe 95, mainly go out pipe 96 and mainly go out flange 97 of flange 94 with three, divide inlet pipe 92 and tell on the pipe 95 at each to be respectively equipped with valve 98.Wherein leading flange 90 links to each other with the saturated vapor outlet(discharge) flange, the suction flange 2 of each electromagnetic induction type steam superheating device 1 advances flange 93 with corresponding branch and links to each other, the outlet(discharge) flange 3 of each electromagnetic induction type steam superheating device links to each other with the corresponding flange 94 of telling, the master goes out flange 97 and is connected with superheated steam output channel flange, and induction coil 13 power interfaces of each electromagnetic induction type steam superheating device 1 and the short net of water-cooled of corresponding main current supply circuit 5 are connected.
When producing, as when carrying out 50 tons of molten steel applications of vacuum, just can close any two valves 98 (for example two of the figure right side groups) on three branch inlet pipes 92 earlier, two electromagnetic induction type steam superheating devices 1 and the distribution system with correspondence is in resting state simultaneously.Hardware condition all ready after; at first external power switch is in on-state; at control panel input initial parameter and control parameter (import saturated vapour pressure; flow; temperature; set the outlet superheat steam temperature; the heat exchanger normal working temperature); start-up control panel starting switch; main current supply circuit 5 gives for the induction coil 13 of remaining one group of electromagnetic induction thermic devices 1; when heat exchange body 11 temperature reach normal heat exchange operating temperature; automatically the saturated vapor of opening this group electromagnetic induction thermic devices 1 divides the valve 98 on the inlet pipe 92; saturated vapor according to arrow A 1 through main inlet pipe 91; divide inlet pipe 92 and the one group of heat exchange body 11 in left side, the pipe 95 of telling of one group through the left side of superheated steam goes out pipe 96 and sends and be transported to the superheated steam main line according to arrow A 2 with main.When carrying out 100 tons of molten steel applications of vacuum, as mentioned above, open any two groups of work, one group is in resting state; When carrying out 150 tons of molten steel applications of vacuum, all open co-operation with three groups.Thereby can be according to the difference of use occasion gas consumption, open one of them, two or more electromagnetic induction type steam superheating device 1, solved the contradiction of being interrupted the unbalanced gas consumption of usefulness gas timesharing, can make operating cost lower, more reasonable.
Embodiment 2
The principle and the effect of this embodiment and embodiment 1 are basic identical, different is the superheated steam equipment that steam superheating device has wherein adopted central employing fuel oil of prior art or combustion gas to do thermal source, be that multistation electromagnetism steam superheating fuel regulating system 9 comprises three fast steam boilers, can solve the contradiction of being interrupted the unbalanced gas consumption of usefulness gas timesharing equally, accompanying drawing and detailed description no longer are provided.
Embodiment 3
The principle and the effect of this embodiment and embodiment 1 are basic identical, combustion gas superheater in the middle of wherein steam superheating device the adopted prior art that different is, be that multistation electromagnetism steam superheating fuel regulating system 9 comprises three combustion gas superheaters, can solve the contradiction of being interrupted the unbalanced gas consumption of usefulness gas timesharing equally, accompanying drawing and detailed description no longer are provided.
Embodiment 4
The principle and the effect of this embodiment and embodiment 1 are basic identical, different is, and multistation electromagnetism steam superheating fuel regulating system 9 comprises a quick superheated steam boiler, combustion gas superheater, an electromagnetic induction type steam superheating device three and be unified into a kind of steam superheating system of mixing type, the contradiction of being interrupted the unbalanced gas consumption of usefulness gas timesharing can be solved, the intrinsic advantage of various steam superheating device can also be given full play to.Be not described in detail in this.
But the above; only be the specific embodiment of the present utility model, can not limit the scope that the utility model is implemented with this, any other people with a plurality of steam superheating device parallel connections; and all be provided with opening/shutting valve on the pipeline of each parallel branch, all should belong to protection domain of the present utility model.

Claims (10)

1. multistation electromagnetism steam superheating fuel regulating system, it is characterized in that, described multistation electromagnetism steam superheating fuel regulating system comprises more than two the steam superheating device by the pipeline parallel connection, is respectively equipped with opening/shutting valve on the pipeline that each steam superheating device is communicated with.
2. multistation electromagnetism steam superheating fuel regulating system as claimed in claim 1 is characterized in that described each steam superheating device is the electromagnetic induction type steam superheating device.
3. multistation electromagnetism steam superheating fuel regulating system as claimed in claim 2 is characterized in that, described each electromagnetic induction type steam superheating device comprises:
The heat exchange body is made by the metal material with magnetic conduction, conduction, thermal conductivity, and described heat exchange body is provided with a plurality of open-works, described a plurality of open-works along the heat exchange axon to extension;
Heat insulation layer is located at heat exchange body periphery;
Induction coil is set around the heat insulation layer periphery; And
Insulating barrier is located between described heat insulation layer and the described induction coil.
4. multistation electromagnetism steam superheating fuel regulating system as claimed in claim 3 is characterized in that described metal material with magnetic conduction, conduction, thermal conductivity is ferritic stainless steel, cast iron, carbon steel or steel alloy.
5. multistation electromagnetism steam superheating fuel regulating system as claimed in claim 3 is characterized in that, described a plurality of open-works evenly distribute in heat exchange body radial section, and diameter is 10~30mm.
6. multistation electromagnetism steam superheating fuel regulating system as claimed in claim 3 is characterized in that described electromagnetic induction type steam superheating device also comprises magnetic conductor, and described magnetic conductor circumference is in the induction coil periphery.
7. multistation electromagnetism steam superheating fuel regulating system as claimed in claim 6, it is characterized in that, described magnetic conductor comprises 5~20 magnetic conduction subassemblies, in the peripheral evenly layout of induction coil, each magnetic conduction subassembly by the multi-disc two ends have head, centre have groove " [" type silicon steel sheet builds up, the head at two ends is towards heat exchange body direction, and induction coil and insulating barrier are positioned at groove.
8. multistation electromagnetism steam superheating fuel regulating system as claimed in claim 3 is characterized in that be equipped with shell body in described magnetic conductor outer periphery, the two ends of electromagnetic induction type steam superheating device are respectively equipped with suction flange and outlet(discharge) flange.
9. multistation electromagnetism steam superheating fuel regulating system as claimed in claim 8 is characterized in that described import and export flange and shell body adopt non-magnetic metal material to make; Be welded to connect between one and heat exchange body in the middle of described suction flange and the outlet(discharge) flange, another person is tightly connected by screw thread and metal washer and heat exchange body; Perhaps the two all is welded to connect with the heat exchange body; Perhaps the two all is tightly connected by screw thread and metal washer and heat exchange body.
10. multistation electromagnetism steam superheating fuel regulating system as claimed in claim 1, it is characterized in that, described multistation electromagnetism steam superheating fuel regulating system comprises the electromagnetic induction type steam superheating device of three parallel connections, and perhaps described multistation electromagnetism steam superheating fuel regulating system comprises electromagnetic induction type steam superheating device, superheated steam boiler and the gas type steam superheating device of parallel connection.
CN2009201076197U 2009-04-29 2009-04-29 Multi-station electromagnetic steam overheating air supply adjusting system Expired - Lifetime CN201429067Y (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104713063A (en) * 2015-02-16 2015-06-17 宁波格林美孚新材料科技有限公司 Unit combined type steam generating device
CN107475691A (en) * 2017-08-24 2017-12-15 中国科学院半导体研究所 A kind of heater based on electromagnetic induction

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104713063A (en) * 2015-02-16 2015-06-17 宁波格林美孚新材料科技有限公司 Unit combined type steam generating device
CN107475691A (en) * 2017-08-24 2017-12-15 中国科学院半导体研究所 A kind of heater based on electromagnetic induction
CN107475691B (en) * 2017-08-24 2020-07-07 中国科学院半导体研究所 Heating device based on electromagnetic induction

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