CN201357371Y - Finisher - Google Patents

Abstract

The utility model discloses a finisher, which is applied to a chemical mechanical grinding machine. The finisher comprises a base, the upper half portion of the base is provided with a groove which is formed by a plurality of retaining walls and a bottom surface of the base, the lower half portion of the base comprises a downward convex portion, two lateral wing portions and a finishing portion, wherein the two lateral wing portions are arranged on two sides of the downward convex portion and the finishing portion is fixed on the downward convex portion of the lower half portion of the base. The finisher is provided with structures such as the groove, the downward convex portion and the like, and then greatly improves problems that grinding slurry is crystallized on the finisher and drops on a grinding pad to cause scratching.

Description

Trimmer

Technical field

The utility model relates to a kind of trimmer, particularly relates to a kind of trimmer that is applied to work-table of chemicomechanical grinding mill and has special base construction.

Background technology

In the semiconductor fabrication process, along with live width is more and more thin, flatness for thin film deposition in the wafer fabrication technology requires also more and more high, and the manufacture craft of inlaying of metal interconnecting is used also increasingly extensive, therefore cmp (Chemical Mechanical Polish is hereinafter to be referred as CMP) also becomes in recent years crucial day by day manufacturing step in the semiconductor fabrication process.

The CMP technology can be used to remove equably the irregular topology face (topography) of aimed thin film layer in the wafer, makes wafer can have smooth and regular surface after handling through CMP.General CMP manufacture craft is handled with conventional wafer planarization mode and is compared, exposure and etch effect and yield with better quality, and phenomenon such as issuable circuit broken string of institute or short circuit can overcome metal deposition with etching process the time, and then make the metal interconnecting number of plies from before 2 to 3 layers raise to 6 to 9 layers.

See also Fig. 1, Fig. 1 is an existing CMP board structural representation.CMP board 1 comprises a platform 11, a grinding pad 12, a lapping device 13, a trimmer 14, a maincenter arm 141, a lapping liquid feeder 15 and a wafer 16.Grinding pad 12 is arranged on the platform 11, and its surface is made and have the structure of porous by polyurethane (polyurethane) usually, and the better grinding environment can be provided.Lapping device 13 has a device for clamping wafer 131 and a rotating shaft 132.Its shaft 132 connects a motor apparatus (not shown), and 131 fixed wafers 16 of device for clamping wafer are in its bottom, and therefore the rotation by rotating shaft 132 makes wafer 16 to grind in the surface of being fixed in grinding pad 12.Lapping liquid 151 by being provided by lapping liquid feeder 15 can make wafer 16 carry out a uniform planarisation step on grinding pad 12 in addition.But owing to carry out the cmp planarization step for a long time, polishing particles that drops on its wafer 16 or grinding chip enter in the loose structure of grinding pad 12 easily, and the grinding pad 12 that therefore loses loose structure will make grinding efficiency reduce, even can scratch wafer 16.Therefore, existing C MP board also comprises a trimmer 14, can rebuild grinding pad 12 behind CMP and make its regeneration.

As shown in Figure 1, existing trimmer 14 includes a pedestal 142 and a finishing portion 143.Maincenter arm 141 links a power set (not shown), can control the position of trimmer 14, and determines its finishing path.Maincenter arm 141 belows are linked to pedestal 142, and pedestal 142 inside have the conduit pipe (not shown), can link outside water system, provide deionized water (DI water) so that clean polishing particles with water or grind chip during finishing.Pedestal 142 belows have finishing portion 143, usually finishing portion 143 surfaces have diamond grains 1431, when finishing, can contact grinding pad 12 and remove chip and particle on it, make grinding pad 12 can keep its loose structure, be continued to keep the stable and grinding efficiency of grinding pad 12.

But the CMP manufacture craft of existing metallic copper, often need to use a kind of slurry (Slurry) of special composition, the very easy crystallization of this slurry, this crystal can remain in the inside and outside of grinding pad 12 and trimmer 14 itself, cause the grinding rate to reduce or problem of unstable.More seriously, if crystallization is not removed on the grinding pad 12, or remain on the trimmer 14 crystal and drop on the grinding pad 12 and fail and remove in good time, the lapping device 13 that is loaded with wafer 16 subsequently grinds again herein, then this crystallization just can form the scratch source, and scratch is caused on wafer 16 surfaces.Yet because existing pedestal 142 and reckon without crystallization and the problem in scratch source, therefore design is gone up and is produced many dead angles, accumulates slurry crystallization or grinding chip easily and causes scratch.

Please refer to Fig. 2 to Fig. 4, Fig. 2 to Fig. 4 is in the existing trimmer, and pedestal is easily accumulated the schematic diagram at crystallization and chip position.In Fig. 2, has a slotting device 144 of fastening between maincenter arm 141 and the pedestal 142, in order to link maincenter arm 141 and pedestal 142.Insert and to fasten device 144 and include two and insert and fasten holder 1446, and a rotating shaft is inserted and fastened 1444.Because maincenter arm 141 is when running, need to insert and fasten 1444 and fasten holder 1446 and carry out activity with inserting by rotating shaft, therefore rotating shaft is inserted and is fastened 1444 frictions and produce the friction chip easily when rotating, if the friction chip falls on the grinding pad 12, then may become the scratch source.

In addition, fasten device 144 and be fixed on the pedestal 142, to insert and fasten device 144 and also comprise an assembly seat 1441 in order to assist to insert.Please refer to Fig. 2 and Fig. 3, Fig. 3 fastens assembly seat generalized section in the device for existing inserting.Assembly seat 1441 is arranged on the pedestal 142, includes a plurality of screw holes 1445 on it with corresponding to a plurality of screw fixing holes 1442 in pedestal 142, inserts and fastens device 144 can be fixed in pedestal 142 by a plurality of screws 1443 screw fixing hole 1442.But because existing screw fixing hole 1442 is adopted the design that runs through pedestal 142, screw 1443 there is no Vinculum iuris to the bottom, and the A position in screw fixing hole 1442 produces crystallization easily, and this is again another scratch source.Moreover it is scratch source the 3rd origin cause of formation that screw fixing hole 1442 also can be piled up crystal.Please refer to Fig. 4 in addition, Fig. 4 is the schematic diagram of pedestal 142 bottoms.As shown in the figure, when finishing portion 143 is assembled in pedestal 142 bottoms, take the clad type design, that is finishing portion 143 inwardly is embedded in the groove of pedestal 142.But this will impel the seam crossing B of finishing portion 143 and this groove and block crystallization and increase the probability of scratch easilier all around, and make slurry be penetrated into the A positions generation crystallization in the screw fixing hole 1442 and form the scratch source along the seam crossing of this groove and finishing portion 143.

The origin cause of formation that can produce the scratch source in addition then is present in the facing hole 1421 and screw hole 1422 on the pedestal 142, please refer to Fig. 2.Include a facing hole 1421 and two screw holes 1422 on the existing pedestal 142, former design is the usefulness of the gateway obstruction of conduit pipe (not shown)s in ease of assembly finishing portion 143 and the pedestal 142, but since these two designs increase pedestal 142 surfaces can residual slurry part, therefore also increased the probability that crystallization produces.

In addition, pedestal 142 designs of prior art are easy to generate crystallization and the chip except above-mentioned, also have the problem that device 144 easily gets loose of fastening of inserting.Please refer to Fig. 2, because maincenter arm 141 is to insert by slotting rotating shaft of fastening device 144 to fasten 1444 runnings, but along with increase service time, its rotating shaft is inserted and to be fastened 1444 and slide easily and produce from its left and right outlet and to come off, and then cause pedestal 142 and finishing portion 143 whole connecing to be dropped on grinding pad 12, problem such as cause that serious fragmentation is scrapped.

Therefore, also need the good trimmer of a design, can overcome the formation in above-mentioned crystallization scratch source, and have the firm plug in hookup mechanism of fastening.

The utility model content

Main purpose of the present utility model is to provide a kind of trimmer, easily produces the position in crystallization scratch source to solve many places in the above-mentioned prior art, to keep good finishing quality.

The purpose of this utility model is achieved in that and promptly discloses a kind of trimmer with special base construction.This trimmer comprises a pedestal, its first half has a groove, and this groove is made of a plurality of barricades and a bottom surface of this pedestal, and its Lower Half comprises the both sides that protuberance and two flank section are divided into this time protuberance, and a finishing portion, be fixed in this time protuberance of this pedestal Lower Half.

Advantage of the present utility model is, because trimmer of the present utility model has particular design such as groove or following protuberance, and be easy to generate the structure of crystallization parts in the improvement prior art, so can effectively avoid drop situation on grinding pad of the crystallization of slurry or friction chip, therefore can significantly improve the problem that prior art easily produces crystallization, and can reduce the probability of chip scratch, and thoroughly solve the plug problem that comes off.

Description of drawings

Fig. 1 is existing CMP board structural representation;

Fig. 2 to Fig. 4 is in the existing trimmer, and pedestal is easily accumulated the schematic diagram at crystallization position;

Fig. 5 is the schematic diagram of the utility model trimmer;

Fig. 6 and Fig. 7 insert the assembly seat schematic diagram of fastening device for the utility model trimmer;

Fig. 8 is the following view of the utility model trimmer.

The main element symbol description

1444,344 rotating shafts of 1 CMP board are inserted and are fastened

11 platforms, 1445,345 screw holes

12 grinding pads 1446,346 are inserted and are fastened holder

13 lapping devices, 15 lapping liquid feeders

131 wafer clamping apparatus, 151 lapping liquids

132 rotating shafts, 16 wafers

14,3 grinding mat trimmers, 321 grooves

141,31 maincenter arms, 3211 bottom surfaces

142,32 pedestals, 3212 barricades

1421 facing holes, 3213 discharge outlet

1422 screw holes, 3214 face of slope

143,33 finishing portions, 3215 wall extensions

322 times protuberances of 1431 diamond grains

144,34 slotting device 323 flank section of fastening

1441,341 assembly seats, 324 conduit pipes

1442,342 screw fixing holes, 325 shower nozzles

1443,343 screws, 326 blockings

The specific embodiment

Please refer to Fig. 5, Fig. 5 is the schematic diagram of the utility model trimmer.Trimmer 3 of the present utility model comprises a pedestal 32 and a finishing portion 33.Pedestal 32 is an elongate body, or other is as ring-type, discoid etc., and half one has a groove 321 structures thereon, and Lower Half has protuberance 322, about the detail structure of pedestal 32, will be described in detail following.The maincenter arm 31 that can outwards link a CMP board on the pedestal 32.Maincenter arm 31 1 ends link the power set (not shown) can transmit power, and the other end then is connected to pedestal 32, and the binding by power set drives trimmer 3, and determines its finishing path.Finishing portion 33 is generally a diamond piece, the surface has diamond grains, the time can contact the grinding pad (not shown) of at least one CMP board and remove chip and particle on it in finishing, make grinding pad can keep its loose structure, to continue to keep the stable grinding efficiency of grinding pad.

The first half of pedestal 32 has a groove 321, and groove 321 is made of a plurality of barricades 3212 on the pedestal 32 and a bottom surface 3211.A plurality of barricades 3212 extend upward and are arranged on the border of bottom surface 3211 along the lateral wall of pedestal 32, and pedestal 32 has the outlet that a discharge outlet 3213 is positioned among two barricades 3212 and form groove 321 in addition.Because groove 321 structures of trimmer 3 of the present utility model can make the crystallization of slurry or rub chip when producing, directly drop on the bottom surface 3211 of groove 321, do not become the scratch source and can not drop on the groove 321 grinding pad (not shown) outward, so can significantly reduce the generation of scratch on the grinding pad.In addition, barricade 3212 of the present utility model all can have an introversion sidewall, tilt to bottom surface 3211 from top to bottom, and the opening amplitude that makes groove 321 is along with towards the bottom surface 3211 of below and diminish gradually, to assist to strengthen the area that groove 321 is collected crystallization or friction chip, therefore more can effectively lower the probability that produces the scratch source.

In addition, wall extension 3215 rear sides below discharge outlet 3213 also have a face of slope 3214, its line of slope is the opposite side of discharge outlet 3213 opening directions, make face of slope 3214 and wall extension 3215 angle of cut θ that produces, this angle of cut θ be preferably less than 90 degree, as shown in Figure 5.The design of face of slope 3214 can assist the ponding of bottom surface 3211 or scratch source can be along face of slope 3214 and landing to the outside of discharge outlet 3213, avoid occurring in the crystallization of following time of vertical stratification situation and easily produce the phenomenon of piling up or even refluxing with the friction chip.And, the position at face of slope 3214 discharging edges exceeds the position that trimmer 3 acts on the grinding pad (not shown), the preferably need protrude in beyond the grinding pad (not shown) edge for clinoplain 3214, therefore, be formed on the crystallization of groove 321 tops and rub chip when discharge outlet 3213 derives, just can not drop on the grinding pad (not shown), therefore can't become the scratch source.

In addition, grinding mat trimmer 3 of the present utility model also comprises one to be inserted and to fasten device 34, in order to link and fixedly maincenter arm 31 and pedestal 32.Insert and fasten 1444 and use the situation that gets loose that frequently is easy to generate for solving the prior art shaft, of the present utility model inserting fastened device 34 and is arranged in the groove 321, and it also includes an assembly seat 341, and insert and fasten holder 346 and fasten 344 with a rotating shaft is slotting.Wherein, assembly seat 341 is arranged on the bottom surface 3211, is provided with the plug in holder 346 of fastening above it and fastens 344 with rotating shaft is slotting.Rotating shaft is inserted and fastened 344 is to be located to insert in mobilizable mode to fasten in the holder 346, in order to link maincenter arm 31 and the slotting device 34 of fastening.Specifically, fasten device 34 when being installed in the groove 321 when inserting, rotating shaft is inserted and to be fastened 344 and vertically be connected to barricade 3212, rotating shaft is inserted fasten 344 left and right outlets and all blocked by barricade 3212: so, insert 344 the mode of fastening by groove 321 respective outer side edges fixed rotating shafts, make to insert and fasten device 34 and can firmly operate among the groove 321 and can not produce the phenomenon that gets loose, can strengthen the steadiness of integral grinding dresser 3 and maincenter arm 31.

Please refer to Fig. 6 and Fig. 7, Fig. 6 and Fig. 7 are in the utility model, and trimmer is inserted the assembly seat schematic diagram of fastening device.Please refer to Fig. 6, a plurality of screw holes 345 are arranged on the assembly seat 341, and the corresponding screw fixing hole 342 that is arranged on the pedestal 32.Inserting the assembly seat 341 of fastening device 34 is fixed on the bottom surface 3211 of pedestal 32 by a plurality of screws 343.Please refer to the cutaway view of Fig. 7, insert and to fasten device 34 and have screw 343 and be secured on the screw fixing hole 342, with fixation assembly seat 341 on pedestal 32.Specifically, the screw fixing hole 342 of the utility model pedestal 32 is adopted the blind hole design, that is whole pedestal 32 is not run through in the bottom of screw fixing hole 342, therefore can't easily permeate the situation that produces the crystallization obstruction and drop as slurry among prior art Fig. 3, can reduce the generation in scratch source along seam crossing in the screw fixing hole 1442 and A position.

Please refer to Fig. 8, Fig. 8 is the following protuberance schematic diagram of the utility model trimmer.For improving the situation that the clad type design that has pedestal 142 and finishing portion 143 now is easy to generate crystallization, pedestal 32 Lower Halves of the present utility model have protuberance 322, and disymmetrical flank section 323, lay respectively at down the both sides of protuberance 322.Finishing portion 33 takes open by design to be fixed on the following protuberance 322, just can avoid clad type design in the past to make the situation of the seam crossing B card crystallization of finishing portion 143 and pedestal 142 bottom grooves easily thus.

In addition, the inside of each flank section 323 respectively has a conduit pipe 324, and conduit pipe 324 is communicated in a plurality of shower nozzles 325 in addition in flank section 323 downwards.When grinding mat trimmer 3 is repaired, conduit pipe 324 can outwards be connected cleaning fluid (as DI water), cleaning liquid can be via conduit pipe 324 to each shower nozzle 325, spray cleaning fluid downwards, outwards wash away with the chip that will grind or crystallization and to leave the grinding pad (not shown), assist finishing portion 33 trimming grinding pads.Specifically, shower nozzle 325 of the present utility model sprays for the fan-shaped formula, can outwards spray fan-shaped cleaning fluid, therefore can clean in a plurality of directions, and can rotate whole shower nozzle 325 and adjust the spary direction on its fan-shaped plane, significantly increase the area of spary and the effect of cleaning.In addition, because pedestal 32 Lower Halves of the present utility model have protuberance 322, therefore each shower nozzle 325 is positioned at the flank section 323 with respect to the grinding pad higher position, that is to say, contrast the structure that is embedded in the pedestal 142 in prior art finishing portion 143, its shower nozzle is located at pedestal 142 both sides, and the position is lower, and fan-shaped formula shower nozzle 325 of the present utility model then makes the wider effect of area of spary that shower nozzle 325 is contained more remarkable because of the design event of protuberance 322 under 32 times tools of pedestal.

Refer again to Fig. 8, be positioned at the conduit pipe 324 of pedestal 32 inside, with machining pedestal 32 inside are hugged directly that to vacate a cylindrical-shaped structure (can certainly be other shapes, as triangular prism, rectangular post etc.) form, therefore the material of the wall of its formation passage is identical with pedestal 32, need not insert extra metal joint etc. again, so can avoid causing the generation in scratch source.In addition, conduit pipe 324 also connects flank section 323 and forms opening in both sides, pedestal 32 front and back except that being communicated in a plurality of shower nozzles 325 downwards, and an end opening is used to import the cleaning fluid of DI water, and other end opening seals up with a blocking 326, as shown in Figure 8.The material of blocking 326 is identical with pedestal 32, and the outward appearance of blocking 326 and pedestal 32 adopt the plane formula design, and meaning does not promptly have significantly concavo-convex, has screw hole 1422 in prior art, and the coplanar design of the utility model more can be avoided the accumulation of crystallization.In addition, pedestal 32 of the present utility model there is no the design in (as Fig. 2) facing hole 1421 in the prior art, has therefore more reduced the generation in another crystallization source.

Because trimmer 3 of the present utility model, have special designs such as groove 321 or following protuberance 322, and will be easy to generate the in addition utility model improvement again of parts of crystallization, when making running, the crystallization of lapping liquid is difficult for remaining in trimmer 3 of the present utility model and drops on grinding pad, so can significantly reduce the probability of chip scratch, effectively prolong the service life of grinding pad and the grinding efficiency of CMP board.

Claims (26)

1. a trimmer is characterized in that, comprises: pedestal, and its first half has a groove, and this groove is made of a plurality of barricades and a bottom surface of this pedestal; And finishing portion, be arranged at the Lower Half of this pedestal.

2. trimmer as claimed in claim 1 is characterized in that, at least one this barricade has an introversion sidewall, and the opening amplitude of this groove is down diminished gradually towards this bottom surface direction.

3. trimmer as claimed in claim 1 is characterized in that this groove comprises a discharge outlet, between these a plurality of barricades.

4. trimmer as claimed in claim 3, it is characterized in that this pedestal comprises a wall extension and a face of slope, wherein this wall extension is positioned at the below of this discharge outlet, and this face of slope is positioned at the rear side of this wall extension, makes to have an angle of cut between this face of slope and this wall extension.

5. trimmer as claimed in claim 4 is characterized in that, this angle of cut is less than 90 degree.

6. trimmer as claimed in claim 1 is characterized in that, this conditioner applications is in a work-table of chemicomechanical grinding mill, and this work-table of chemicomechanical grinding mill comprises: platform; Grinding pad is arranged on this platform; Device for clamping wafer is used for fixing a wafer on this grinding pad; The maincenter arm is used for controlling this trimmer to rebuild this grinding pad; And lapping liquid feeder.

7. trimmer as claimed in claim 6 is characterized in that, this bottom surface has a plurality of screw fixing holes in addition to be goed deep in this pedestal, and these a plurality of screw fixing holes are blind hole.

8. trimmer as claimed in claim 7 is characterized in that, this trimmer comprises one in addition to be inserted and to fasten device, is located on this bottom surface in this groove, in order to linking and to fix this maincenter arm and this pedestal, and should slotting fasten device and comprises: the assembly seat; At least one inserting fastened holder, is located on this assembly seat; Rotating shaft is inserted and is fastened, and is located at this slotting fastening in the holder in mobilizable mode, in order to link this maincenter arm and should slotting fasten device; A plurality of screw holes are located in this assembly seat and respectively to the respectively position of this screw fixing hole that should the bottom surface; And a plurality of screws, lock respectively this screw hole and corresponding respectively this screw fixing hole respectively, be used for this assembly seat is fixed in this pedestal.

9. trimmer as claimed in claim 8 is characterized in that, the slotting forward and backward outlet of fastening of this rotating shaft that is positioned at this groove is blocked by these a plurality of barricades.

10. trimmer as claimed in claim 1 is characterized in that, the Lower Half of this pedestal comprises that protuberance and two flank section are divided into the both sides of this time protuberance, and should finishing portion be fixed on this time protuberance.

11. trimmer as claimed in claim 10 is characterized in that, this trimmer comprises a plurality of shower nozzles in addition, is located at respectively respectively on this flank section.

12. trimmer as claimed in claim 11 is characterized in that, respectively this shower nozzle is the injection of fan-shaped formula.

13. trimmer as claimed in claim 11 is characterized in that, comprises a plurality of conduit pipes in this pedestal in addition and is communicated with this a plurality of shower nozzles, and connect respectively this flank section respectively and in the forward and backward side formation of this pedestal opening.

14. trimmer as claimed in claim 13 is characterized in that, this trimmer comprises a plurality of blockings in addition, blocks respectively wherein this opening of a side of this conduit pipe, and the respectively surface of this blocking and the side surface copline of this pedestal.

15. a trimmer is characterized in that, this trimmer comprises: pedestal, its Lower Half comprise the both sides that protuberance and two flank section are divided into this time protuberance; And finishing portion, be fixed in this time protuberance.

16. trimmer as claimed in claim 15 is characterized in that, this trimmer comprises a plurality of heads of disputing in addition, is located at respectively respectively on this flank section.

17. trimmer as claimed in claim 16 is characterized in that, respectively this shower nozzle is the injection of fan-shaped formula.

18. trimmer as claimed in claim 16 is characterized in that, comprises a plurality of conduit pipes in this pedestal in addition and is communicated with this a plurality of shower nozzles, and connect respectively this flank section respectively and in the forward and backward side formation of this pedestal opening.

19. trimmer as claimed in claim 18 is characterized in that, this trimmer comprises a plurality of blockings in addition, blocks respectively wherein this opening of a side of this conduit pipe, and the respectively surface of this blocking and the side surface copline of this pedestal.

20. trimmer as claimed in claim 15 is characterized in that, the first half of this pedestal has a groove, and this groove is made of a plurality of barricades and a bottom surface of this pedestal.

21. trimmer as claimed in claim 20 is characterized in that, these a plurality of barricades all have an introversion sidewall, and the opening amplitude of this groove is down diminished gradually towards this bottom surface direction.

22. trimmer as claimed in claim 20, it is characterized in that, this groove comprises a discharge outlet, between these a plurality of barricades, and this pedestal comprises a face of slope and a wall extension in addition, wherein this wall extension is positioned at the below of this discharge outlet, and this face of slope is positioned at the rear side of this wall extension, makes to have an angle of cut between this face of slope and this wall extension.

23. trimmer as claimed in claim 22 is characterized in that, this angle of cut is less than 90 degree.

24. trimmer as claimed in claim 15 is characterized in that, this conditioner applications is in a work-table of chemicomechanical grinding mill, and this work-table of chemicomechanical grinding mill comprises: platform; Grinding pad is arranged on this platform; Device for clamping wafer is used for fixing a wafer on this grinding pad; The maincenter arm is used for controlling this trimmer to rebuild this grinding pad; And lapping liquid feeder.

25. trimmer as claimed in claim 24 is characterized in that, this pedestal has a plurality of screw fixing holes in addition, and these a plurality of screw fixing holes are blind hole.

26. trimmer as claimed in claim 25 is characterized in that, this trimmer comprises one in addition to be inserted and to fasten device, is located on this pedestal, in order to linking and to fix this maincenter arm and this pedestal, and should slotting fasten device and comprises: the assembly seat; At least one inserting fastened holder, is located on this assembly seat; One rotating shaft is inserted and is fastened, and is located at this slotting fastening in the holder in mobilizable mode, in order to link this maincenter arm and should slotting fasten device; A plurality of screw holes are located in this assembly seat and the corresponding respectively respectively position of this screw fixing hole; And a plurality of screws, lock respectively this screw hole and corresponding respectively this screw fixing hole respectively, be used for this assembly seat is fixed in this pedestal.

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