CN201346511Y - Quartz crucible coating machine - Google Patents
Quartz crucible coating machine Download PDFInfo
- Publication number
- CN201346511Y CN201346511Y CNU2009200144356U CN200920014435U CN201346511Y CN 201346511 Y CN201346511 Y CN 201346511Y CN U2009200144356 U CNU2009200144356 U CN U2009200144356U CN 200920014435 U CN200920014435 U CN 200920014435U CN 201346511 Y CN201346511 Y CN 201346511Y
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- China
- Prior art keywords
- stainless steel
- main shaft
- tank body
- steel tank
- coating machine
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
A quartz crucible coating machine has a stainless steel pot body. A quartz heater is arranged in the stainless steel pot body. A hollow main shaft is arranged on the bottom of the stainless steel pot body. The upper end of the main shaft is inserted into the stainless steel pot body. A turnplate is connected with the upper end of the main shaft. Locating detents are uniformly distributed on the upper end surface of the turnplate. A motor is fixed on the bottom of the stainless steel pot body. The lower portion of the main shaft is in an axial connection with the motor. A sprayer is inserted in the main shaft. A storage tank is disposed at the lower end of the sprayer. An air inlet and an air outlet are arranged on the storage tank. The discharge port of the storage tank is communicated with the sprayer. The utility model has the advantages that the quartz crucible inner surface is coated with a good coating effect and high production efficiency so that a layer of barium carbonate film is formed on the crucible inner surface and the quality and yield of the quartz crucible is improved; the film can isolate the corrosion on the inner surface of the monocrystal silicon and the crucible when drawing the monocrystal silicon, avoids recrystallization and leakage on the inner surface of the crucible, prevents the breaking and dislocation in drawing the monocrystal silicon and enhances the quality and yield of the drawn monocrystal silicon.
Description
Technical field
The utility model is particularly related to a kind of silica crucible coating machine.
Background technology
At present, silica crucible is made the back without any processing, and directly putting into production is the common practice of domestic and international crucible manufacturer.There is following technological deficiency in this way: crucible is in the process of fusion, because various factors causes the crucible inwall to produce a little impure point, make this a part of crucible between finished product and waste product, as directly causing waste, influence end product quality easily and directly put into production as waste disposal.
Summary of the invention
The purpose of this utility model is to solve the problems referred to above that prior art exists, a kind of silica crucible coating machine is provided, can carry out coating to quartz crucible inner surface, improve the quality and the yield rate of silica crucible, finally can improve the quality and the qualification rate that draw polysilicon.
The utility model is achieved in that it has a closed stainless steel tank body, in stainless steel tank body, be provided with quartz heater, be provided with rotatable hollow spindle in the bottom of stainless steel tank body, insert in the stainless steel tank body described main shaft upper end, be connected with rotating disk in the main shaft upper end, be evenly equipped with a plurality of locating detents in the rotating disk upper surface, be fixed with motor in the stainless steel tank body bottom, described motor is positioned at outside the stainless steel tank body, the main shaft bottom is connected by belt transmission with motor shaft, is inserted with spray thrower in main shaft, and the spray thrower lower end is provided with a storage tank, storage tank is provided with air inlet and discharging opening, and the discharging opening of described storage tank is communicated with spray thrower.
Above-mentioned silica crucible coating machine is provided with bearing in the bottom of stainless steel tank body, is fixed with crossbeam in the bearing bottom, and described storage tank is installed on the crossbeam.
Above-mentioned silica crucible coating machine, described motor is fixed on the stainless steel tank body by suspension bracket.
Above-mentioned silica crucible coating machine is connected with a ring flange in the main shaft upper end, and described rotating disk is connected with main shaft by ring flange.
Above-mentioned silica crucible coating machine, described spray thrower are to be made of the guide cover and the shower nozzle that are inserted in the conduit in the main shaft and are installed in conduit upper end.
The utility model has the advantages that: can carry out coating to quartz crucible inner surface by this silica crucible coating machine, coating result is good, and the production efficiency height can make quartz crucible inner surface form one deck brium carbonate film, improves the quality and the yield rate of silica crucible; This film can be isolated the corrosion of monocrystalline silicon and inner surface of crucible when pulling monocrystal silicon simultaneously, avoids inner surface of crucible generation crystallization and seepage phenomenon, disconnected bud and dislocation when preventing pulling monocrystal silicon, thus can improve the quality and the qualification rate of pulling monocrystal silicon greatly.
Description of drawings
Fig. 1 is a structural representation of the present utility model;
Fig. 2 is the I portion enlarged drawing of Fig. 1.
Among the figure: bearing 1, main shaft 2, big belt wheel 3, bearing block 4, ring flange 5, stainless steel tank body 6, rotating disk 7, locating detent 8, spray thrower 9, silica crucible 10, quartz heater 11, hermatic door 12, base plate 13, suspension bracket 14, motor 15, storage tank 16, discharging opening 16a, air inlet 16b, crossbeam 17, conduit 18, guide cover 19, shower nozzle 20.
The specific embodiment
As shown in the figure, the utility model has a bearing 1, in bearing 1 upper support a closed stainless steel tank body 6 is arranged, and is provided with quartz heater 11 in stainless steel tank body 6, is provided with the crucible inlet and hermatic door 12 is installed on the sidewall of stainless steel tank body 6.By bolting bearing block 4 is arranged on the base plate 13 in stainless steel tank body 6, bearing block 4 lower ends are drawn by base plate 13, on bearing block 4, rotatable hollow spindle 2 is arranged by bearing fixing, insert in the stainless steel tank body 6 described main shaft 2 upper ends, be welded with a ring flange 5 in main shaft 2 upper ends, be connected with a rotating disk 7 by bolt on ring flange 5, be fixed with a plurality of stepped locating detents 8 in rotating disk 7 upper surfaces near outer rim is along the circumferential direction uniform, present embodiment is an example with four.Base plate 13 at stainless steel tank body 6 has motor 15 below by a suspension bracket 14 and bolting, and big belt wheel 3 and spacing by the nut that is located at main shaft 2 lower ends is installed in main shaft 2 bottoms, and described main shaft 2 is connected by belt transmission with motor shaft.In main shaft 2, be inserted with spray thrower 9, spray thrower 9 is to be made of the guide cover 19 and the cup-shaped shower nozzle 20 that are inserted in the conduit 18 in the main shaft 2 and are located at conduit 18 upper ends, wherein guide cover 19 is fixed on the upper port of conduit 18 and in its radial symmetric of guide cover 19 upper edges and is provided with pilot hole, shower nozzle 20 is fixed on the outer rim top of conduit 18 and guide cover 19 is covered on wherein, and its arc outer rim is distributed with a plurality of spray-holes in shower nozzle 20 upper edges.Be provided with the storage tank 16 of a liquid brium carbonate of splendid attire when using in spray thrower 9 lower ends, storage tank 16 is provided with air inlet 16b and discharging opening 16a, and the conduit of described discharging opening 16a and spray thrower 9 18 is communicated with by joint.Be fixed with crossbeam 17 in bearing 1 bottom, described storage tank 16 is installed on the crossbeam 17.
During use, silica crucible 10 is put into stainless steel tank body 6 by crucible inlet and mouth down is inverted on the ladder of locating detent 8 correspondences, by quartz heater 11 temperature in the stainless steel tank body 6 is heated to 200 ℃~300 ℃, the air inlet 16b with storage tank 16 connects CO by airduct again
2Source of the gas; Starter motor 15 drives main shaft 2, rotating disk 7 and silica crucible 10 low speed rotation, CO by belt transmission
2Gases at high pressure enter storage tank 16 by airduct, the brium carbonate solution that stores evenly is sprayed on silica crucible 10 inwalls by spray thrower 9, liquid brium carbonate can be solidified into thin film at inner surface of crucible rapidly in 200 ℃~300 ℃ environment, form coating.
Claims (5)
1, a kind of silica crucible coating machine, it is characterized in that: it has a closed stainless steel tank body, in stainless steel tank body, be provided with quartz heater, be provided with rotatable hollow spindle in the bottom of stainless steel tank body, insert in the stainless steel tank body described main shaft upper end, be connected with rotating disk in the main shaft upper end, be evenly equipped with a plurality of locating detents in the rotating disk upper surface, be fixed with motor in the stainless steel tank body bottom, described motor is positioned at outside the stainless steel tank body, and the main shaft bottom is connected by belt transmission with motor shaft, in main shaft, be inserted with spray thrower, the spray thrower lower end is provided with a storage tank, and storage tank is provided with air inlet and discharging opening, and the discharging opening of described storage tank is communicated with spray thrower.
2, silica crucible coating machine according to claim 1, it is characterized in that: the bottom at stainless steel tank body is provided with bearing, is fixed with crossbeam in the bearing bottom, and described storage tank is installed on the crossbeam.
3, silica crucible coating machine according to claim 1, it is characterized in that: described motor is fixed on the stainless steel tank body by suspension bracket.
4, silica crucible coating machine according to claim 1 is characterized in that: be connected with a ring flange in the main shaft upper end, described rotating disk is connected with main shaft by ring flange.
5, silica crucible coating machine according to claim 1 is characterized in that: described spray thrower is to be made of the guide cover and the shower nozzle that are inserted in the conduit in the main shaft and are installed in conduit upper end.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNU2009200144356U CN201346511Y (en) | 2009-06-05 | 2009-06-05 | Quartz crucible coating machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNU2009200144356U CN201346511Y (en) | 2009-06-05 | 2009-06-05 | Quartz crucible coating machine |
Publications (1)
Publication Number | Publication Date |
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CN201346511Y true CN201346511Y (en) | 2009-11-18 |
Family
ID=41365990
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNU2009200144356U Expired - Fee Related CN201346511Y (en) | 2009-06-05 | 2009-06-05 | Quartz crucible coating machine |
Country Status (1)
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CN (1) | CN201346511Y (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102423743A (en) * | 2011-10-24 | 2012-04-25 | 曹新闻 | Crucible coating machine for polysilicon ingot casting and crucible coating method thereof |
CN102432189A (en) * | 2011-09-20 | 2012-05-02 | 沈福茂 | Spraying equipment of barium coating on quartz crucible |
CN103736621A (en) * | 2013-12-25 | 2014-04-23 | 天津市松正电动汽车技术股份有限公司 | Heat conduction silicon grease coating fixture and heat conduction silicon grease coating method |
CN109608052A (en) * | 2018-12-25 | 2019-04-12 | 宁波宝斯达坩埚保温制品有限公司 | A kind of quartz crucible surface coating unit |
CN112225585A (en) * | 2020-09-30 | 2021-01-15 | 中钢集团新型材料(浙江)有限公司 | Process for depositing silicon carbide coating on surface of graphite piece |
-
2009
- 2009-06-05 CN CNU2009200144356U patent/CN201346511Y/en not_active Expired - Fee Related
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102432189A (en) * | 2011-09-20 | 2012-05-02 | 沈福茂 | Spraying equipment of barium coating on quartz crucible |
CN102432189B (en) * | 2011-09-20 | 2016-06-01 | 沈福茂 | The spraying equipment of barium coating on quartz crucible |
CN102423743A (en) * | 2011-10-24 | 2012-04-25 | 曹新闻 | Crucible coating machine for polysilicon ingot casting and crucible coating method thereof |
CN103736621A (en) * | 2013-12-25 | 2014-04-23 | 天津市松正电动汽车技术股份有限公司 | Heat conduction silicon grease coating fixture and heat conduction silicon grease coating method |
CN103736621B (en) * | 2013-12-25 | 2016-11-09 | 天津市松正电动汽车技术股份有限公司 | A kind of heat-conducting silicone grease coating tool and method |
CN109608052A (en) * | 2018-12-25 | 2019-04-12 | 宁波宝斯达坩埚保温制品有限公司 | A kind of quartz crucible surface coating unit |
CN109608052B (en) * | 2018-12-25 | 2021-12-03 | 宁波宝斯达坩埚保温制品有限公司 | Quartz crucible surface coating device |
CN112225585A (en) * | 2020-09-30 | 2021-01-15 | 中钢集团新型材料(浙江)有限公司 | Process for depositing silicon carbide coating on surface of graphite piece |
CN112225585B (en) * | 2020-09-30 | 2022-05-20 | 中钢新型材料股份有限公司 | Process for depositing silicon carbide coating on surface of graphite piece |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091118 Termination date: 20120605 |