CN103302070B - Cleaning equipment - Google Patents
Cleaning equipment Download PDFInfo
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- CN103302070B CN103302070B CN201310209212.6A CN201310209212A CN103302070B CN 103302070 B CN103302070 B CN 103302070B CN 201310209212 A CN201310209212 A CN 201310209212A CN 103302070 B CN103302070 B CN 103302070B
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- Prior art keywords
- rotary shaft
- hairbrush
- cleaning
- equipment
- solution
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Abstract
The present invention proposes cleaning equipment, and this cleaning equipment includes: rotary shaft, spray equipment, hairbrush, driver and for holding the solution container of cleaning solution.Wherein, spray equipment sets on the rotating shaft and connects with solution container；Hairbrush sets on the rotating shaft；Driver is connected with rotary shaft to drive rotary shaft to rotate.This cleaning equipment is utilized effectively the bell jar inwall of polysilicon hydrogenation furnace, reduction furnace to be carried out, in order to improve the quality of polysilicon product.
Description
Technical field
The present invention relates to chemical field.Specifically, the present invention relates to cleaning equipment.
Background technology
Polysilicon is main photovoltaic material, and the production method of polysilicon is a lot, and photovoltaic enterprise the most both at home and abroad uses improvement
Siemens Method produces polysilicon, and uses bell-jar consersion unit more.Improve polysilicon product quality, reduce production of polysilicon
Cost is the important capital that polysilicon enterprise is developed and survives, but polysilicon hydrogenation furnace, reduction furnace reaction bell jar is clean
Cleanliness directly affects unit power consumption and the quality of polysilicon product.
1, in production process, bell jar cooling water takes away amount of heat, clean bell jar inner surface generation mirrored effect, reflection heat
Low-energy loss, drops in amount, also can reduce the time that silicon core punctures simultaneously；
2, in polysilicon production process, generating the by-product such as silica flour, silicone oil and be attached to bell jar inner surface, this by-product is at sky
Gas has water absorption, if do not cleaned up, at high temperature moisture evaporation, easily form oxidation interlayer, reduce polysilicon and produce
Quality.
Therefore, the equipment being suitable to be carried out polysilicon hydrogenation furnace, reduction furnace reaction bell jar is further improved.
Summary of the invention
It is contemplated that solve one of above-mentioned technical problem the most to a certain extent or provide at a kind of useful business choosing
Select.To this end, it is an object of the present invention to propose a kind of cleaning equipment, this equipment can be to polysilicon hydrogenation furnace, reduction
The inwall of stove cleans quickly and accurately.
To this end, in one aspect of the invention, it is proposed that a kind of cleaning equipment.According to one embodiment of present invention, this cleaning
Equipment includes: rotary shaft；For holding the solution container of cleaning solution；Spray equipment, described spray equipment is located at described turning
Connect on moving axis and with described solution container；Hairbrush, described hairbrush is located in described rotary shaft；Driver, described driver
It is connected with described rotary shaft to drive described rotary shaft to rotate.
Thus, this cleaning equipment is utilized effectively the inwall of hydrogenation furnace, reduction furnace quickly to be cleaned, this cleaning
Device structure is simple, easy to use, goes for the cleaning of the polycrystalline-silicon furnace inwall of any structure, and cleaning performance is bright
Aobvious.Thus can improve the quality producing polysilicon product, the power consumption producing polysilicon can be reduced simultaneously.
It addition, cleaning equipment according to the above embodiment of the present invention can also have a following additional technical characteristic:
According to embodiments of the invention, described spray equipment includes: shower, and one end of described shower is connected to described turning
On moving axis；Spray head, described spray head is located on the free end of described shower.Thus so that cleaning solution can lead to
Cross shower and spray head is sprayed onto on the inwall of polysilicon hydrogenation furnace, reduction furnace exactly, thus can improve cleaning further
Degree of purity after efficiency and cleaning.
According to embodiments of the invention, described shower extends radially out along described rotary shaft.Thus can avoid hindering rotating
The rotation of axle, in order to cleaning efficiency can be improved further.
According to embodiments of the invention, described rotary shaft hollow, and described shower connects with described rotary shaft.
According to embodiments of the invention, connected by solution conduit between described spray equipment and described solution container.The most permissible
Guarantee the supply of cleaning solution.
According to embodiments of the invention, described spray equipment includes many groups, and described many group spray equipments are at the axle of described rotary shaft
Upwards be spaced apart from each other setting.Thus so that cleaning solution spray is all over whole hydrogenation furnace, the inwall of reduction furnace, in order to improve
Cleaning efficiency and cleaning degree of purity.
According to embodiments of the invention, often organize described spray equipment and include two, and said two spray equipment is relative to described
Rotary shaft is symmetrical.Thus so that cleaning solution spray is all over whole hydrogenation furnace, the inwall of reduction furnace, in order to improve and clean
Efficiency and cleaning degree of purity.
According to embodiments of the invention, described hairbrush includes many groups, described many group hairbrush in the axial direction of described rotary shaft each other
Spaced apart setting.Thus so that hairbrush brushes the inwall of whole hydrogenation furnace, reduction furnace, in order to improve cleaning efficiency and
Clean degree of purity.
According to embodiments of the invention, often organize described hairbrush and include two, and said two hairbrush is relative to described rotary shaft pair
Claim distribution.Thus so that hairbrush brushes the inwall of whole hydrogenation furnace, reduction furnace, in order to improve cleaning efficiency and cleaning
Degree of purity.
According to embodiments of the invention, described many group hairbrush and described many group spray equipment one_to_one corresponding.Thus can utilize clear
Under the dual function of washing liquid and hairbrush, the inwall to hydrogenation furnace, reduction furnace is carried out, and thus can improve cleaning effect further
Rate and cleaning degree of purity.
According to embodiments of the invention, described driver is motor.Thus can further by start and stop motor and
The rotating speed of regulation motor controls the rotating speed of hairbrush, in order to improves cleaning efficiency further and cleans degree of purity.
According to embodiments of the invention, limit the first chamber and the second chamber in described solution container, in described first chamber
Hold sodium hydroxide solution, in described second chamber, hold desalted water.According to embodiments of the invention, described sodium hydroxide is molten
The concentration of liquid is 5～15 weight %.Thus can improve cleaning efficiency further and clean degree of purity.
The additional aspect of the present invention and advantage will part be given in the following description, and part will become bright from the following description
Aobvious, or recognized by the practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or the additional aspect of the present invention and advantage the accompanying drawings below description to embodiment will be apparent from from combining and
Easy to understand, wherein:
Fig. 1 shows the sectional view of the cleaning equipment of one embodiment of the invention；
Fig. 2 shows the top view of hairbrush in cleaning equipment according to an embodiment of the invention.
Detailed description of the invention
Embodiments of the invention are described below in detail, and the example of described embodiment is shown in the drawings, the most identical
Or similar label represents same or similar element or has the element of same or like function.Retouch below with reference to accompanying drawing
The embodiment stated is exemplary, it is intended to is used for explaining the present invention, and is not considered as limiting the invention.
In describing the invention, it is to be understood that term " " center ", " longitudinally ", " laterally ", " length ", " width ",
" thickness ", " on ", D score, "front", "rear", "left", "right", " vertically ", " level ", " top ", " end " " interior ", " outward ",
" clockwise ", " counterclockwise " etc. instruction orientation or position relationship be based on orientation shown in the drawings or position relationship, be only for
Be easy to describe the present invention and simplifying describe rather than instruction or the device of hint indication or element must have specific orientation,
With specific azimuth configuration and operation, therefore it is not considered as limiting the invention.
Additionally, term " first ", " second " are only used for describing purpose, and it is not intended that instruction or hint relative importance or
The implicit quantity indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can be expressed or hidden
One or more this feature are included containing ground.In describing the invention, " multiple " are meant that two or more,
Unless otherwise expressly limited specifically.
According to embodiments of the invention, unless otherwise clearly defined and limited, term " install ", " being connected ", " connection ", " Gu
Fixed " etc. term should be interpreted broadly, connect for example, it may be fixing, it is also possible to be to removably connect, or be integrally connected；
Can be to be mechanically connected, it is also possible to be electrical connection；Can be to be joined directly together, it is also possible to be indirectly connected to by intermediary, can
To be the connection of two element internals.For the ordinary skill in the art, can understand as the case may be above-mentioned
Term concrete meaning according to an embodiment of the invention.
Below with reference to Fig. 1-2, the cleaning equipment of the present invention is described in detail:
According to one embodiment of present invention, cleaning equipment 100 specifically includes that rotary shaft 10, solution container 20, spray
Device 30, hairbrush 40 and driver 50.
Wherein, solution container 20 is used for holding cleaning solution, and spray equipment 30 is located in rotary shaft 10 and and solution container
20 connections；Hairbrush 40 is located in rotary shaft 10；Driver 50 is connected with rotary shaft 10 to drive rotary shaft 10 to rotate.
According to one embodiment of present invention, spray equipment 30 farther includes: shower 31 and spray head 32, wherein,
One end of shower 31 connects rotary shaft 10, and the other end is free end, connects spray head 32.Spray equipment 30 holds with solution
Being connected by solution conduit between device 20, solution conduit can be arranged in the rotary shaft 10 of hollow structure, along the radial direction of rotary shaft
Stretch out, and with rotary shaft 10 UNICOM, thus avoid solution conduit hinder rotary shaft 10 rotation.Can to improve further
Cleaning efficiency.
According to one embodiment of present invention, spray equipment 30 includes many groups, axial in rotary shaft of many group spray equipments 30
On be spaced apart from each other setting.Thus so that cleaning solution spray is all over whole hydrogenation furnace, the inwall of reduction furnace, in order to improve clear
Wash efficiency and clean degree of purity.According to a particular embodiment of the invention, often group spray equipment 30 includes two, and two sprays
Shower device 30 is symmetrical relative to rotary shaft 10.Thus can improve the regularity of cleaning equipment, and set in like fashion
Put the spray equipment 30 center of gravity when rotating and guarantee the axle center in rotary shaft, thus so that power when rotating is balance,
It is possible not only to save power consumption, it is also possible to save the loss of cleaning equipment.
According to one embodiment of present invention, same hairbrush 40 also includes many groups, many group hairbrush in the axial direction of rotary shaft each other
Spaced apart setting.Thus so that hairbrush can brush the inwall of whole hydrogenation furnace, reduction furnace, in order to improve cleaning efficiency
And cleaning degree of purity.According to a particular embodiment of the invention, often organize described hairbrush and include two, and said two spray dress
Put symmetrical relative to described rotary shaft.
According to one embodiment of present invention, many group hairbrush and many group spray equipment one_to_one corresponding.And the tool according to the present invention
Body embodiment, the distribution of multipair hairbrush thus can improve cleaning efficiency in Fig. 2 structure and clean degree of purity further.
According to a particular embodiment of the invention, the length often organizing hairbrush is equal to or slightly greater than the internal diameter of hydrogenation furnace, reduction furnace,
It may thereby be ensured that the inwall of hydrogenation furnace, reduction furnace can effectively be cleaned by hairbrush, in order to cleaning can be improved further
Efficiency and cleaning degree of purity.
According to one embodiment of present invention, driver 50 can be motor, thus can be further by starting and stopping electricity
The rotating speed of machine and regulation motor controls the rotating speed of hairbrush, in order to improves cleaning efficiency further and cleans degree of purity.Root
According to the specific embodiment of the present invention, driver 50 can also include controlling device, carries out driver 50 by controlling device
Control.Thus can improve the card operability of cleaning equipment further.
According to one embodiment of present invention, solution container 20 is used for holding cleaning solution, and according to the concrete reality of the present invention
Execute example, multiple chamber can be limited in solution container 20, in order to hold different cleanout fluid, such as, according to the tool of the present invention
Body example, solution container 20 can include the first chamber and the second chamber, hold sodium hydroxide solution in the first chamber, second
Desalted water is held in chamber, and, according to the concrete example of the present invention, the concentration of sodium hydroxide solution can be 5～15 weights
Amount %.Thus first with sodium hydroxide solution, the inwall of hydrogenation furnace, reduction furnace can be carried out, sodium hydroxide solution
Effectively silica flour and the silicone oil of attachment on hydrogenation furnace, reduction furnace inwall can be carried out, thus can improve cleaning efficiency,
Then use the desalted water inwall again to hydrogenation furnace, reduction furnace to carry out secondary cleaning, thus can wash away the hydroxide of residual
Sodium solution, can improve cleaning degree of purity further.According to a particular embodiment of the invention, can also use after cleaning
The inwall of hydrogenation furnace, reduction furnace is dried up by nitrogen, and hydrogenation furnace, reduction furnace inwall thus can be avoided to be corroded.
According to one embodiment of present invention, above-mentioned solution container 20 can also include pressue device and valve, and valve can set
Put the junction at solution container Yu solution conduit, the supply of solution can be controlled by the switch of valve.Pressue device can enter
One step controls spray head 32 so that the cleaning solution at spray head is spurting, thus can be sprayed by cleaning solution more accurately
It is mapped on the inwall of hydrogenation furnace, reduction furnace, in order to improve the cleaning efficiency of cleaning equipment further.
According to a particular embodiment of the invention, above-mentioned can also have waste fluid container, for holding the cleaning waste liquid of use.Useless
Liquid container can be arranged on outside hydrogenation furnace, reduction furnace, by by the pipeline stretched out bottom hydrogenation furnace, reduction furnace and waste fluid container
Connect, clean waste liquid and thus can avoid the environmental pollution of cleanout fluid by discharging after purifying.
Cleaning equipment simple in construction according to the present invention, powerful, can be effectively to polysilicon hydrogenation furnace, reduction furnace
Inwall is carried out, and cleans purity higher.Utilize this cleaning equipment the inwall of hydrogenation furnace, reduction furnace is carried out can between
Connect the quality improving polysilicon product.
In the description of this specification, reference term " embodiment ", " some embodiments ", " example ", " concrete example ",
Or specific features, structure, material or the feature bag that the description of " some examples " etc. means to combine this embodiment or example describes
It is contained at least one embodiment or the example of the present invention.In this manual, to the schematic representation of above-mentioned term not necessarily
Refer to identical embodiment or example.And, the specific features of description, structure, material or feature can be any
One or more embodiments or example combine in an appropriate manner.
Although above it has been shown and described that embodiments of the invention, it is to be understood that above-described embodiment is exemplary,
Being not considered as limiting the invention, those of ordinary skill in the art is without departing from the principle of the present invention and the situation of objective
Under above-described embodiment can be changed within the scope of the invention, revise, replace and modification.
Claims (6)
1. a cleaning equipment, it is characterised in that including:
Rotary shaft；
For holding the solution container of cleaning solution；
Spray equipment, described spray equipment is located in described rotary shaft and connects with described solution container；
Hairbrush, described hairbrush is located in described rotary shaft；
Driver, described driver is connected with described rotary shaft to drive described rotary shaft to rotate；
Wherein, described spray equipment includes many groups, and described many group spray equipments are spaced apart from each other in the axial direction of described rotary shaft
Arrange, often organize described spray equipment and include two, and said two spray equipment is symmetrical relative to described rotary shaft；
Described hairbrush includes many groups, and described many group hairbrush are spaced apart from each other settings in the axial direction of described rotary shaft, often described in group
Hairbrush includes two, and said two hairbrush is symmetrical relative to described rotary shaft；
Described many group hairbrush and described many group spray equipment one_to_one corresponding,
Limit the first chamber and the second chamber in described solution container, hold sodium hydroxide solution in described first chamber, institute
Holding desalted water in stating the second chamber, the concentration of described sodium hydroxide solution is 5～15 weight %.
Cleaning equipment the most according to claim 1, it is characterised in that described spray equipment includes:
Shower, one end of described shower is connected in described rotary shaft；
Spray head, described spray head is located on the free end of described shower.
Cleaning equipment the most according to claim 2, it is characterised in that described shower is stretched along the radial direction of described rotary shaft
Go out.
Cleaning equipment the most according to claim 2, it is characterised in that described rotary shaft hollow, and described shower with
Described rotary shaft connects.
Cleaning equipment the most according to claim 1, it is characterised in that between described spray equipment and described solution container
Connected by solution conduit.
Cleaning equipment the most according to claim 1, it is characterised in that described driver is motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310209212.6A CN103302070B (en) | 2013-05-30 | 2013-05-30 | Cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310209212.6A CN103302070B (en) | 2013-05-30 | 2013-05-30 | Cleaning equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103302070A CN103302070A (en) | 2013-09-18 |
| CN103302070B true CN103302070B (en) | 2016-08-10 |
Family
ID=49128039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310209212.6A Expired - Fee Related CN103302070B (en) | 2013-05-30 | 2013-05-30 | Cleaning equipment |
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| CN (1) | CN103302070B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104805900B (en) * | 2015-04-29 | 2017-04-19 | 中铁工程设计咨询集团有限公司 | Device and method for cleaning drainage blind pipe of tunnel |
| CN107142671B (en) * | 2017-07-06 | 2019-02-22 | 安徽金帅洗衣机有限公司 | A kind of clean bucket system of semi-automatic rotary drum washing machine |
| CN107988638B (en) * | 2017-12-05 | 2019-02-22 | 盐城市盛丰机械有限公司 | A kind of cleaning oven with automatic flushing device |
| CN114164486A (en) * | 2021-12-17 | 2022-03-11 | 新疆大全新能源股份有限公司 | Method for controlling product quality in production process of czochralski or zone-melting single crystal material |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5108512A (en) * | 1991-09-16 | 1992-04-28 | Hemlock Semiconductor Corporation | Cleaning of CVD reactor used in the production of polycrystalline silicon by impacting with carbon dioxide pellets |
| CN101352714B (en) * | 2007-12-11 | 2010-11-03 | 苏青茂 | Combined bell glass washer and operation method thereof |
| DE602009001114D1 (en) * | 2008-01-25 | 2011-06-09 | Mitsubishi Materials Corp | Reactor cleaning device |
| CN202061847U (en) * | 2011-03-24 | 2011-12-07 | 四川瑞能硅材料有限公司 | Reduction furnace cylinder cleaning device |
| US20130000672A1 (en) * | 2011-06-29 | 2013-01-03 | Memc Electronic Materials, Spa | Cleaning tool for polysilicon reactor |
| CN202447334U (en) * | 2011-11-21 | 2012-09-26 | 常州市万阳光伏有限公司 | Cleaning device for polysilicon reacting furnace |
| CN203380151U (en) * | 2013-05-30 | 2014-01-08 | 昆明冶研新材料股份有限公司 | Cleaning equipment |
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2013
- 2013-05-30 CN CN201310209212.6A patent/CN103302070B/en not_active Expired - Fee Related
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| CN103302070A (en) | 2013-09-18 |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 655011 No. 9, Sanjiang Avenue, Qujing economic and Technological Development Zone, Kunming, Yunnan Patentee after: YUNNAN METALLURGICAL YUNXIN SILICON MATERIAL CO.,LTD. Address before: 655011 No. 9, Sanjiang Avenue, Qujing economic and Technological Development Zone, Kunming, Yunnan Patentee before: KUNMING YEYAN NEW-MATERIAL Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160810 |
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| CF01 | Termination of patent right due to non-payment of annual fee |