CN201344978Y

CN201344978Y - Silver-coated reflector

Info

Publication number: CN201344978Y
Application number: CNU2009200675730U
Authority: CN
Inventors: 范滨; 唐健
Original assignee: Optorun Shanghai Co Ltd
Current assignee: Optorun Shanghai Co Ltd
Priority date: 2009-02-10
Filing date: 2009-02-10
Publication date: 2009-11-11
Anticipated expiration: 2019-02-10

Abstract

The utility model discloses a silver-coated reflector, which belongs to the technical field of optical mirrors and solves the technical problem that the adhesive attraction of an Ag film is bad and diffusion and fogging are caused between Ag mirror coatings. The silver-coated reflector comprises a base plate, a lower buffer layer deposited on the base plate, an Ni-Cr alloy layer (a metal film layer) deposited on the lower buffer layer, an Ag film layer deposited on the Ni-Cr alloy layer, an Al2O3 film layer deposited on the Ag film layer, an SiO2 film layer deposited on the Al2O3 film layer and a TiO2 film layer (a reflection enhancing coating layer) deposited on the SiO2 film layer. The silver-coated reflector has the characteristic of environment corrosion resisting properties, can enhance the adhesive attraction of the Ag film, and can also prevent the diffusion and fogging between the Al2O3 film layer and the TiO2 film layer.

Description

Silvered mirror

Technical field

The utility model relates to optical technology, particularly relate to a kind of in projector, camera, microscope, telescope, duplicating machine, the catoptron technology of using on the photoelectricity machines such as light-focusing type solar cell is said so more specifically and is reflected the improving technology of the environmental resistance of silver mirror at the height that silver layer is arranged.

Background technology

The Ag film is as a kind of catoptron of high reflectance, at camera, and duplicating machine, microscope, printer, projector is widely used in the various optical apparatus such as light-focusing type solar cell.Yet, being used for the silver-colored catoptron on projector, the concentrating solar battery, must under mal-conditions such as high temperature, use for a long time; At plum rain season, then must be exposed to for a long time under the state of high humility.Therefore, widespread demand is a kind of has high-temp resisting high-humidity resisting, the Ag catoptron product that anti-environmental characteristics is outstanding.

As concrete example, for example, under hot and humid environment, use for a long time, the Ag rete in reflection horizon and its can not be peeled off between rete up and down, float, or the defective of breaking etc.; And the Ag rete can not cause that reflectivity reduces because of the oxidation etc. of self.In order to obtain the outstanding silver mirror of such permanance, people have proposed various solutions.For example, the name that Japanese kokai publication hei 2003-4919 communique is announced is called: the name that the patent documentation 1 of high reflection mirror and Japanese kokai publication hei 07-281013 communique are announced is called: the patent documentation 2 of catoptron has proposed following silver-colored catoptron:

Patent documentation 1 has proposed by substrate, Al ₂O ₃Rete, Ag rete, Al ₂O ₃And TiO ₂The Ag mirror coating architecture that rete constitutes.The silver mirror structure of patent documentation 1 mainly is the adhesion that improves between substrate and Ag rete, also improves the corrosion resistance of silver mirror.

Patent documentation 2 is at the SiO as cushion ₂Rete or Al ₂O ₃Between rete and the Ag rete, increased the cushion that constitutes by Cr or Ni metallic diaphragm again, to improve the adhesion between substrate and the Ag rete.

But the silver mirror in the patent documentation 1, the adhesion of Ag rete is also insufficient, resembles the device of the catoptron of catoptron that projector uses, concentrating solar battery, owing to use under hot and humid environment for a long time, Ag rete oxidation is gradually sent out mist, causes reflectivity to reduce.

In addition at Al ₂O ₃Rete and TiO ₂Between the rete, can spread crystallization gradually, occur sending out the mist phenomenon, thereby cause the reflectivity of silver-colored catoptron to reduce.

For solving the problem in the above-mentioned patent documentation 1, patent documentation 2 is for improving the adhesion between substrate and Ag rete, at cushion SiO ₂Rete or Al ₂O ₃Increased again between rete and the Ag rete by Cr and Ni metallic diaphragm as tack coat.But this following problem can occur again:

With the Cr rete during as tack coat, the adhesion of Ag rete and substrate is improved, but at high temperature, as use more than 100 ℃ the time, the reflecting surface of Ag rete can turn black gradually, anti-environmental characteristics is poorer than making tack coat with the Ni rete.Conversely if make tack coat,, the adhesion of lower floor is compared with use Cr rete and poor though can improve anti-environmental characteristics with the Ni rete.

The utility model content

At the defective that exists in the above-mentioned prior art, technical problem to be solved in the utility model provides a kind of adhesion that can improve the Ag film, can prevent Al again ₂O ₃Rete and TiO ₂Mist is sent out in diffusion between the rete, has the silvered mirror of environmental corrosion resisting performance.

In order to solve the problems of the technologies described above, a kind of silvered mirror provided by the utility model, it is characterized in that, comprise substrate, at the bottom breaker that deposits on the described substrate, the Ni-Cr alloy-layer (metallic diaphragm) that is depositing on the described bottom breaker, at the Ag rete that deposits on the described Ni-Cr alloy-layer, the Al that on described Ag rete, deposits ₂O ₃Rete, at described Al ₂O ₃The SiO that rete deposits above ₂Rete is at described SiO ₂The TiO that deposits on the rete ₂Rete (reflection enhancing coating layer).

Further, described bottom breaker is Al ₂O ₃Rete.

Further, described bottom breaker is media coating and Al ₂O ₃Rete, wherein media coating is deposited on the substrate.

Further, described media coating is SiO ₂, TiO ₂Rete or SiO rete etc.

Further, in the described Ni-Cr alloy-layer ratio of Cr alloy between 1%～20%.

Further, the thickness of described bottom breaker is 20～60nm, and the thickness of described Ni-Cr alloy rete (metallic diaphragm) is 20～60nm, and the thickness of described Ag rete is 100～150nm, described Al ₂O ₃The thickness of rete is 20～30nm, described SiO ₂The thickness of rete is 20～40nm, described TiO ₂The thickness of rete (reflection enhancing coating layer) is 40～50nm.

The silvered mirror that the utility model provides is not the metallic diaphragm of single Cr and Ni between bottom breaker and Ag rete, be the metallic diaphragm of both alloy-layer formation, can be easy to arrange out the metallic diaphragm that has both superperformances so regulate both alloy ratios.And, Cr guarantees the good adhesion of lower floor of Ag rete, Ni can guarantee outstanding anti-environmental characteristics, under the Ag rete, can deposit such alloy-layer, can prevent the corrosion of metallic diaphragm, Ag rete, the adhesion of substrate and Ni-Cr alloy-layer can be improved again, and the flatness of Ag rete can also be improved.Increase the TiO in reflection horizon ₂With last cushion Al ₂O ₃Between deposited and the two-layer SiO that reacts of all being not easy ₂Rete prevents the TiO that reflectivity is high ₂Rete and last cushion Al ₂O ₃White mist appears in reaction between rete, can prevent that reflectivity from reducing, thereby prepares the silver-colored catoptron of excellent in te pins of durability.

So the utility model can improve the adhesion of Ag rete, prevents Al ₂O ₃Rete and TiO ₂Send out mist between rete, the silver mirror of outstanding anti-environmental characteristics can be provided.

Description of drawings

Fig. 1 is the rete sectional view of silver mirror of the present utility model;

Fig. 2 is the curve map of the reflectivity of each wavelength of silver mirror after every test.

Embodiment

Below in conjunction with description of drawings embodiment of the present utility model is described in further detail, but present embodiment is not limited to the utility model, every employing analog structure of the present utility model and similar variation thereof all should be listed protection domain of the present utility model in.

Fig. 1 is the rete sectional view of the utility model silvered mirror.Silver mirror 10 as shown in Figure 1, the substrate 1 that it is made up of glass, thereon the deposition by Al ₂O ₃The bottom breaker 2 that rete is formed, on the bottom breaker 2 by the metallic diaphragm 3 of Ni-Cr deposition of alloy layers, on the metallic diaphragm 3 that this alloy constitutes, deposit as the Ag rete 4 in reflection horizon and this deposit above Ag rete 4 on cushion 5 and increase reflection horizon 6 and form.Last cushion 5 is by the Al that joins with Ag rete 4 ₂O ₃Rete 5a and at Al ₂O ₃Rete 5a goes up the SiO that forms ₂Rete 5b forms.Silver mirror 10 surface depositions by TiO ₂6 in the reflection horizon that increases that rete is formed is arranged on above-mentioned SiO ₂Above the rete 5b.

One of feature of silvered mirror 10 of the present utility model is to have added the metallic diaphragm 3 that is formed by Ni-Cr alloy film stratotype between bottom breaker 2 and the Ag rete 4.Added the metallic diaphragm 3 that forms by Ni-Cr alloy film stratotype, less than 20%, in the time of particularly between 1%～20%, both had the good feature of tack of 4 of Cr and Ag retes, had the good anti-environmental characteristics of Ni again at Cr alloy ratio.And can also improve the flatness of Ag rete 4.

Second feature of the present utility model is by Al ₂O ₃The last cushion 5a and the TiO that form ₂Increasing between the reflection horizon 6 of forming added by SiO ₂The last cushion 5b that forms.

In the prior art, Al ₂O ₃Rete 5a and by TiO ₂The reflection horizon 6 that increases that rete forms directly contacts, and particularly over time at high temperature, two interlayers can react.The mist phenomenon occurs sending out, thereby reduce the reflectivity of silver mirror.

Yet, as the utility model silvered mirror, at Al ₂O ₃Rete 5a and increase between the reflection horizon 6 and add SiO ₂Rete 5b has prevented Al ₂O ₃Rete 5a and TiO ₂The direct contact that increases reflection horizon 6 that constitutes can prevent by TiO ₂Rete forms increases the white mist phenomenon that the reflection horizon takes place over time, and the resultful reflectivity that increases reflection horizon 6 that prevented reduces.

In addition, at the bottom breaker 2 (Al that substrate 1 and lower buffer layer 2 form ₂O ₃Between rete) also can use SiO ₂, TiO ₂Other media coating such as rete or SiO rete.

The utility model improves the adhesion of Ag rete, prevents Al ₂O ₃Rete and TiO ₂White mist between rete provides anti-environmental characteristics good silver mirror.

It below is the thicknesses of layers of each layer on the glass substrate 1.The Al of the bottom breaker 2 of substrate 1 at first ₂O ₃Rete is 20～60nm, Al ₂O ₃The thickness of the metallic diaphragm 3 that is formed by Ni-Cr alloy film stratotype above the rete is 20～60nm.The thickness of the Ag rete 4 on the metallic diaphragm 3 is 100～150nm.At Ag rete 4 cushion 5Al ₂O ₃The thickness of rete 5a is 20～30nm, SiO ₂The thickness of rete 5b is 20～40nm, SiO ₂Rete 5b goes up by TiO ₂The thickness that increases reflection horizon 6 that forms is 40～50nm.Metallic diaphragm 3 and Ag rete 4 are made with vacuum vapour deposition under the normal temperature state.Other rete uses the IAD method to be prepared under oxygen or argon gas ion auxiliary.Therefore, full rete 2～6 can be made under the normal temperature state.

Whole rete as implied above can be made under the normal temperature state, therefore can dispense the heating and cooling time that must have before this, and the preparation time of silver mirror shortens significantly.In addition, can prevent that also each rete of being caused by heating is with the temperature degradation phenomena.The silver mirror of above-mentioned noncrystalline deielectric-coating with the IAD manufactured has improved the long-term reliability of silver mirror greatly.

Further specify the beneficial effects of the utility model by the following test.

The silver-colored catoptron of this technology preparation has passed through following environmental test: scotch tape test, be bonded at the Ag reflectance coating with adhesive tape earlier, and draw back adhesive tape then rapidly, see the demoulding state of Ag reflectance coating; High and low temperature impact test is placed on silver mirror following 30 minutes of-45 ℃ of states, is placed on 85 ℃ following 30 minutes of state again, repeatedly 24 circulation impacts tests.200 ℃ of high temperature heat tests that high temperature is following 1512 hours have been carried out in addition; Humidity 85%, high temperature, high wet test that 85 ℃ of states of temperature are following 168 hours.After every test, the demoulding situation of Ag reflectance coating and the reflectance varies of silver mirror have been tested again.

Also tested the reflectance varies of the silver mirror after the salt-fog test (4.5% salt solution is in continual injection in 48 hours under 35 ℃ the condition) in addition.Every result does not find the phenomenon of Ag catoptron demoulding.

Reflectivity before and after the experiment sees the following form 1 and shown in Figure 2.Table 1 is the average reflectance of silver mirror between wavelength 420nm～680nm of the utility model preparation.

Table 1

Test condition	Behind the plated film	High/low-temperature impact circulation (45 ℃ ~ 85 ℃, 24 circulations)	High temperature is exposed to the sun and tests back (200 ℃, 1512 hours)	The hot and humid test back (85 ℃, 85%RH, 1 68 hours) of being exposed to the sun	After the salt-fog test (35 ℃, 4.5%NaC l, 48 hours)
Test condition	Behind the plated film				After the salt-fog test (35 ℃, 4.5%NaC l, 48 hours)	Average reflectance (%)	99.03	99.24	99.16	99.27	98.21

Table 1, the average reflectance of the silver mirror sample before the every test shown in Fig. 2 is implemented.

In Fig. 2, solid line is the silver mirror reflectivity before every test is carried out, and solid line is the reflectivity behind the plated film, the 0th, the reflectivity after the temperature characterisitic test (45 ℃～85 ℃ kept 24 circulations 30 minutes), △ is high temperature (200 ℃ of the tests of being exposed to the sun, 1512 hours) after reflectivity ,+be the hot and humid test of being exposed to the sun (85 ℃, 85% humidity, 168 hours) after reflectivity, * be the reflectivity after the salt-fog test (35 ℃, 4.5%NaCl, 48 hours).The transverse axis of Fig. 2 is wavelength (nm), and vertical pivot is reflectivity (%).

As table 1 and shown in Figure 2, the reflectivity of the silver mirror in each wavelength band territory does not have deterioration.

Above result shows silver mirror 10, has added the metallic diaphragm 3 that is formed by Ni-Cr alloy film stratotype between bottom breaker 2 and Ag layer 4, has improved the adhesion of 4 of bottom breaker and Ag retes.Last cushion 5 is by Al ₂O ₃Rete 5a and Al ₂O ₃Rete 5a goes up the SiO that forms ₂Rete 5b constitutes.Reflection horizon 6 and Al have been suppressed to increase ₂O ₃Reaction between the rete 5a.Prevent to send out the mist phenomenon.Make the reflectivity of silver-colored catoptron can long term maintenance a higher scope.The result of every environmental test shows that the utility model has improved the high temperature resistant of silver mirror, high humidity, and characteristics such as salt fog have good anti-environmental stability.

Claims

1, a kind of silvered mirror is characterized in that, comprises substrate and the bottom breaker, Ni-Cr alloy-layer, Ag rete, the Al that deposit successively at described substrate from bottom to top ₂O ₃Rete, SiO ₂Rete and TiO ₂Rete.

2, silvered mirror according to claim 1 is characterized in that, described bottom breaker is Al ₂O ₃Rete.

3, silvered mirror according to claim 1 is characterized in that, described bottom breaker is media coating and Al ₂O ₃Rete, wherein media coating is deposited on the substrate.

4, silvered mirror according to claim 3 is characterized in that, described media coating is SiO ₂, TiO ₂Rete or SiO rete.

5, silvered mirror according to claim 1 is characterized in that, the ratio of Cr alloy is between 1%～20% in the described Ni-Cr alloy-layer.

6, silvered mirror according to claim 1 is characterized in that, the thickness of described bottom breaker is 20～60nm, and the thickness of described Ni-Cr alloy rete is 20～60nm, and the thickness of described Ag rete is 100～150nm, described Al ₂O ₃The thickness of rete is 20～30nm, described SiO ₂The thickness of rete is 20～40nm, described TiO ₂The thickness of rete is 40～50nm.